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1. 发明申请

WO2005047117A2 FRONT OPENING SUBSTRATE CONTAINER WITH BOTTOM PLATE 审中-公开
标题翻译：带底板的前开式底板容器
公开(公告)号：WO2005047117A2
公开(公告)日：2005-05-26
申请号：PCT/US2004037017
申请日：2004-11-08
申请人： ENTEGRIS INC , BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
发明人： BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
IPC分类号： B65D20060101 , B65D85/30 , H01L21/673 , B65D
CPC分类号： H01L21/67369 , H01L21/67379 , H01L21/67393 , Y10S206/832
摘要： A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.
摘要翻译：衬底容器和底板通过例如连接器机构的两个构件之间的螺纹连接的方式与用于调节容器和底板之间的距离的机构连接。还提供了用于排放容器的鸭嘴阀和用于使由冲击引起的损坏最小化的阻尼器。

2. 发明申请

WO2009114798A2 WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS 审中-公开
标题翻译：带管状环境控制组件的晶圆容器
公开(公告)号：WO2009114798A2
公开(公告)日：2009-09-17
申请号：PCT/US2009037143
申请日：2009-03-13
申请人： ENTEGRIS INC , WATSON JAMES A , BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , SMITH MARK V
发明人： WATSON JAMES A , BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , SMITH MARK V
IPC分类号： H01L21/673 , B65D81/18 , B65D85/38 , B65D85/86
CPC分类号： H01L21/67393
摘要： A wafer container utilizes a rigid polymer tubular tower with slots and a "getter" therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion.
摘要翻译：晶片容器利用具有狭缝和其中的“吸气剂”的刚性聚合物管状塔，用于吸收和过滤晶片容器内的水分和蒸气。该塔优选地在容器底部使用吹扫垫圈并且可以在其中具有止回阀以控制气体（包括空气）进出容器和相对于塔的流动方向。塔与密封圈密封连接。塔可具有以细长圆形方式卷绕的吸气剂介质片，其形成或成形为管并设置在塔内并可具有轴向延伸。媒体可以提供主动式和/或被动式过滤功能，并且可以进行充电。用于300mm大小的晶片的前开式晶片容器通常在容器部分的内后部的左侧和右侧的每一侧上具有一对凹部。这些凹部优选用于细长塔，这些塔基本上从底部晶片位置延伸至顶部晶片位置。在另一个实施例中，吸气材料的管状形状暴露在前开口容器内，而不包含端部以外的吸气剂。管状吸气剂形式优选支撑在离散的位置以最大限度地暴露于内部容器环境。阻挡构件可以选择性地关闭孔。弹性帽可以便于将管状部件固定在容器部分中。

3. 发明申请

WO2005047726A2 WAFER CONTAINER AND DOOR WITH VIBRATION DAMPENING LATCHING MECHANISM 审中-公开
标题翻译：具有振动阻尼锁定机构的冷凝器和门
公开(公告)号：WO2005047726A2
公开(公告)日：2005-05-26
申请号：PCT/US2004037162
申请日：2004-11-08
申请人： ENTEGRIS INC , BURNS JOHN , FULLER MATTHEW A , KING JEFFREY J , FORBES MARTIN L , SMITH MARK V
发明人： BURNS JOHN , FULLER MATTHEW A , KING JEFFREY J , FORBES MARTIN L , SMITH MARK V
IPC分类号： B65D85/00 , E05B15/04 , E05B17/00 , E05B65/00 , E05C9/04 , F16F20060101 , H01L21/673 , F16F
CPC分类号： H01L21/67373 , E05B17/0041 , E05B65/006 , E05B2015/0468 , E05B2015/0479 , E05C9/042
摘要： A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front. At least one wafer support is provided in the enclosure along with a kinematic coupling on the bottom of the enclosure. The container has a door for sealingly closing the open front which includes a chassis and an operable latching mechanism on the chassis. The latching mechanism includes a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position and at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions.
摘要翻译：用于将多个晶片保持在轴向对准的大致平行间隔开的布置中的容器包括具有顶部，底部，一对相对侧面，后部和敞开前部的外壳部分。在外壳中提供至少一个晶片支撑件以及在外壳底部的运动耦合。容器具有用于密封地封闭敞开的前部的门，该门包括底盘和在底盘上的可操作的闩锁机构。闩锁机构包括可选择地旋转的凸轮，以在第一有利位置和第二偏好位置之间移动闩锁机构，以及至少一个振动阻尼器，用于抑制当锁定机构在第一和第二有利位置之间移动时产生的振动。

4. 发明申请

WO2009114798A3 WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS 审中-公开
标题翻译：带有管状环境控制组件的集水器
公开(公告)号：WO2009114798A3
公开(公告)日：2009-12-23
申请号：PCT/US2009037143
申请日：2009-03-13
申请人： ENTEGRIS INC , WATSON JAMES A , BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , SMITH MARK V
发明人： WATSON JAMES A , BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , SMITH MARK V
IPC分类号： H01L21/673 , B65D81/18 , B65D85/38 , B65D85/86
CPC分类号： H01L21/67393
摘要： A wafer container utilizes a rigid polymer tubular tower with slots and a "getter" therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion.
摘要翻译：晶片容器利用具有槽的刚性聚合物管状塔和其中的“吸气剂”，用于吸收和过滤晶片容器内的水分和蒸气。塔优选在容器的底部使用吹扫索环，并且可以在其中具有止回阀以控制进入和离开容器的气体（包括空气）的流动方向并相对于塔。塔与护环密封连接。塔可以具有以细长的圆形方式卷绕的吸气剂介质片，其形成或成形为管，并且设置在塔内并且可以具有轴向延伸。介质可以提供主动和/或无源过滤以及具有再充电能力。用于300mm尺寸的晶片的前开口晶片容器通常在容器部分的内侧后部中的左侧和右侧的每一侧上具有一对凹部。这些凹槽优选地用于细长塔，这种塔基本上从底部晶片位置延伸到顶部晶片位置。在替代实施例中，吸气剂材料的管状形状暴露在前开口容器内，而不会吸收除了末端之外的吸气剂。管状吸气剂形式优选地在离散位置处被支撑以最大程度地暴露于内部容器环境。阻挡件可以选择性地封闭孔。弹性帽可有助于管状部件固定在容器部分中。

5. 发明申请

WO2008008270A3 WAFER CASSETTE 审中-公开
公开(公告)号：WO2008008270A3
公开(公告)日：2008-05-08
申请号：PCT/US2007015523
申请日：2007-07-06
申请人： ENTEGRIS INC , FULLER MATTHEW A , BURNS JOHN
发明人： FULLER MATTHEW A , BURNS JOHN
IPC分类号： A47G19/08
CPC分类号： H01L21/67383
摘要： A front opening wafer container including an enclosure portion and a door. A wafer support system is provided including a pair of spaced apart cantilever wafer shelves, each wafer shelf including a pair of opposing inclined ramp portions. The ramp portions are cooperatively positioned and configured so that when the wafer is received on the shelves, the wafer is supported on the ramps at a lower peripheral corner of the wafer, all other portions of the wafer being free from contact with the wafer support system. Each wafer shelf may have a generally concave upper surface and the incline of the ramps is continuous with the concave upper surfaces of the wafer shelves.
摘要翻译：包括外壳部分和门的前开式晶圆容器。提供晶片支撑系统，其包括一对间隔开的悬臂式晶片架，每个晶片架包括一对相对的倾斜斜坡部分。斜坡部分被协同定位和配置，使得当晶片被接收在架子上时，晶片被支撑在晶片的下部外围角处的斜坡上，晶片的所有其他部分不与晶片支撑系统接触。每个晶片架可以具有大致上凹的上表面，斜坡的倾斜与晶片架的凹上表面连续。

6. 发明申请

WO2007087284A3 KINEMATIC COUPLING WITH TEXTURED CONTACT SURFACES 审中-公开
标题翻译：与纹理接触表面的运动耦合
公开(公告)号：WO2007087284A3
公开(公告)日：2007-11-22
申请号：PCT/US2007001729
申请日：2007-01-23
申请人： ENTEGRIS INC , BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , KING JEFFREY J , SMITH MARK V
发明人： BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , KING JEFFREY J , SMITH MARK V
IPC分类号： B65D85/00
CPC分类号： H01L21/67379 , Y10S414/14
摘要： A substrate kinematic coupling or guide plate for a substrate carrier having textured or patterned surfaces at the points of contact to reduce frictional forces generated between automated processing equipment and the kinematic coupling. The textured surface reduces the contact area between the processing equipment and the contact portion of the kinematic coupling, thereby reducing the resultant frictional force. By reducing the frictional force, the substrate carrier more readily settles on the mounting pins of the processing equipment, thus avoiding intolerable height and angular deviations during automated access to the substrates. Textures include, but are not limited to, a knurl pattern, ridges running laterally along the contact portions, and ridges running longitudinally along the contact portions. The textures may be formed by a blow molding, injection molding or in an overmolding process, or by a machining or imprinting process.
摘要翻译：用于衬底载体的衬底运动耦合或导向板，其在接触点处具有纹理或图案化的表面，以减少自动处理设备和运动耦合器之间产生的摩擦力。纹理表面减少了处理设备和运动耦合器的接触部分之间的接触面积，由此减小了所产生的摩擦力。通过减小摩擦力，基板载体更容易安置在处理设备的安装销上，从而避免在自动进入基板期间难以忍受的高度和角度偏差。纹理包括但不限于滚花图案，沿接触部分横向延伸的脊和沿接触部分纵向延伸的脊。纹理可以通过吹塑，注塑或包覆成型工艺或通过机加工或压印工艺形成。

7. 发明申请

WO2005048305A3 SUBSTRATE CONTAINER 审中-公开
标题翻译：基板容器
公开(公告)号：WO2005048305A3
公开(公告)日：2005-11-17
申请号：PCT/US2004037006
申请日：2004-11-08
申请人： ENTEGRIS INC , BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
发明人： BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
IPC分类号： A47G19/08 , B65D85/00 , H01L20060101 , H01L21/673
CPC分类号： H01L21/67396
摘要： A substrate carrier to dissipate electrostatic charge has a conductive grid or network overmolded in a substantially integral container. The grid is electrically connected to an underlying and grounded saddle. The carrier may further include substantially transparent side walls and electrically conductive shelves to retain stored substrates in a generally axial alignment.
摘要翻译：用于耗散静电电荷的衬底载体具有包覆模制在基本上整体的容器中的导电栅格或网络。电网电连接到底层并接地的鞍座。载体可以进一步包括基本上透明的侧壁和导电架以保持存储的基底大致轴向对齐。

8. 发明申请

WO2012088172A3 FRONT OPENING LARGE SUBSTRATE CONTAINER 审中-公开
标题翻译：前开式大型底板容器
公开(公告)号：WO2012088172A3
公开(公告)日：2012-10-26
申请号：PCT/US2011066282
申请日：2011-12-20
申请人： ENTEGRIS INC , FORBES MARTIN L , FULLER MATTHEW A , BURNS JOHN
发明人： FORBES MARTIN L , FULLER MATTHEW A , BURNS JOHN
IPC分类号： H01L21/673 , B65D85/38 , B65D85/48 , B65D85/86 , G02F1/13
CPC分类号： H01L21/67373 , H01L21/67386
摘要： A flat panel substrate container provides a microenvironment for safely storing and allowing horizontal removal through a front door. In an embodiment of the invention, a robust shelf system has a plurality of stacked shelves that have a cantilevered state with the door open and a non-cantilevered state with the door closed. The container may be generally rectilinear in shape and conforming to the shape of the substrate panels. The container has an open front with a closed top wall, closed bottom wall, closed left side wall, closed right side wall, and closed back side wall. A plurality of shelves are secured to the back side wall and extend forwardly in a cantilevered fashion. In an embodiment of the invention, the shelves may be generally elongate slender shelf members formed of aluminum extrusions or assemblies that are arranged in two columns with a pair of such members provided for each substrate and defining a slot. Also inwardly extending edge supports are provided at the left side wall and right side wall for edge support of the substrates. In an embodiment of the invention, the elongate shelf members each have one of a pair of male and female portion that join as the door is closed to effectively "uncantilever" the elongate shelf members as the door closes the open front. All of the shelf members and the substrates thereon may be fixed into position at the end opposite the cantilevered connection to the container portion. The container may have a feature for overhead transport, such as lifting brackets, static dissipation features, and latching features.
摘要翻译：平板基板容器提供用于安全存储并允许通过前门的水平移除的微环境。在本发明的一个实施例中，坚固的搁架系统具有多个堆叠的架子，其具有门打开的悬臂状态和门关闭的非悬臂状态。容器的形状通常可以是直线形，并且与基板的形状一致。容器具有敞开的前部，其具有封闭的顶壁，封闭的底壁，封闭的左侧壁，封闭的右侧壁和封闭的后侧壁。多个搁架被固定到后侧壁并以悬臂方式向前延伸。在本发明的一个实施例中，搁架可以是大致细长的由铝挤压件或组件形成的细长的搁架部件，铝挤压件或组件布置成两列，其中一对这样的部件设置用于每个基板并且限定槽。在左侧壁和右侧壁上设置向内延伸的边缘支撑件，用于基板的边缘支撑。在本发明的一个实施例中，细长的搁架部件各自具有一对公部分和阴部分中的一个，当门关闭时，当门关闭开放的前部时，细长的搁架部件有效地“不吸引”箱体。所有搁板构件和其上的基板可以在与容器部分的悬臂连接相对的端部处固定到位。容器可以具有用于架空输送的特征，例如提升支架，静电耗散特征和锁定特征。

9. 发明申请

WO2008008270A9 WAFER CASSETTE 审中-公开
公开(公告)号：WO2008008270A9
公开(公告)日：2008-08-14
申请号：PCT/US2007015523
申请日：2007-07-06
申请人： ENTEGRIS INC , FULLER MATTHEW A , BURNS JOHN
发明人： FULLER MATTHEW A , BURNS JOHN
IPC分类号： A47G19/08
CPC分类号： H01L21/67383
摘要： A front opening wafer container including an enclosure portion and a door. A wafer support system is provided including a pair of spaced apart cantilever wafer shelves, each wafer shelf including a pair of opposing inclined ramp portions. The ramp portions are cooperatively positioned and configured so that when the wafer is received on the shelves, the wafer is supported on the ramps at a lower peripheral corner of the wafer, all other portions of the wafer being free from contact with the wafer support system. Each wafer shelf may have a generally concave upper surface and the incline of the ramps is continuous with the concave upper surfaces of the wafer shelves.

10. 发明申请

WO2005048306A3 WAFER CARRIER DOOR 审中-公开
标题翻译： WAFER CARRIER门
公开(公告)号：WO2005048306A3
公开(公告)日：2007-04-19
申请号：PCT/US2004037163
申请日：2004-11-08
申请人： ENTEGRIS INC , BURNS JOHN , FULLER MATTHEW A , KING JEFFREY J , FORBES MARTIN L , SMITH MARK V
发明人： BURNS JOHN , FULLER MATTHEW A , KING JEFFREY J , FORBES MARTIN L , SMITH MARK V
IPC分类号： B65D85/90 , A47G19/08 , B08B3/00 , B08B3/02 , B08B9/00 , B08B9/093 , H01L20060101
CPC分类号： H01L21/67373 , H01L21/67386
摘要： A wafer carrier door having an inner door portion and an outer door portion. The inner door portion has a substantially continuous inner surface. The outer door portion extends over at least a portion of the inner door portion. The outer door portion has a plurality of apertures formed therein. The outer door portion is attached to the inner door portion.
摘要翻译：具有内门部分和外门部分的晶片承载门。内门部分具有基本连续的内表面。外门部分在内门部分的至少一部分上延伸。外门部分具有形成在其中的多个孔。外门部分附接到内门部分。

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