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1. 发明申请

WO2007087284A3 KINEMATIC COUPLING WITH TEXTURED CONTACT SURFACES 审中-公开
标题翻译：与纹理接触表面的运动耦合
公开(公告)号：WO2007087284A3
公开(公告)日：2007-11-22
申请号：PCT/US2007001729
申请日：2007-01-23
申请人： ENTEGRIS INC , BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , KING JEFFREY J , SMITH MARK V
发明人： BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , KING JEFFREY J , SMITH MARK V
IPC分类号： B65D85/00
CPC分类号： H01L21/67379 , Y10S414/14
摘要： A substrate kinematic coupling or guide plate for a substrate carrier having textured or patterned surfaces at the points of contact to reduce frictional forces generated between automated processing equipment and the kinematic coupling. The textured surface reduces the contact area between the processing equipment and the contact portion of the kinematic coupling, thereby reducing the resultant frictional force. By reducing the frictional force, the substrate carrier more readily settles on the mounting pins of the processing equipment, thus avoiding intolerable height and angular deviations during automated access to the substrates. Textures include, but are not limited to, a knurl pattern, ridges running laterally along the contact portions, and ridges running longitudinally along the contact portions. The textures may be formed by a blow molding, injection molding or in an overmolding process, or by a machining or imprinting process.
摘要翻译：用于衬底载体的衬底运动耦合或导向板，其在接触点处具有纹理或图案化的表面，以减少自动处理设备和运动耦合器之间产生的摩擦力。纹理表面减少了处理设备和运动耦合器的接触部分之间的接触面积，由此减小了所产生的摩擦力。通过减小摩擦力，基板载体更容易安置在处理设备的安装销上，从而避免在自动进入基板期间难以忍受的高度和角度偏差。纹理包括但不限于滚花图案，沿接触部分横向延伸的脊和沿接触部分纵向延伸的脊。纹理可以通过吹塑，注塑或包覆成型工艺或通过机加工或压印工艺形成。

2. 发明申请

WO2005047726A2 WAFER CONTAINER AND DOOR WITH VIBRATION DAMPENING LATCHING MECHANISM 审中-公开
标题翻译：具有振动阻尼锁定机构的冷凝器和门
公开(公告)号：WO2005047726A2
公开(公告)日：2005-05-26
申请号：PCT/US2004037162
申请日：2004-11-08
申请人： ENTEGRIS INC , BURNS JOHN , FULLER MATTHEW A , KING JEFFREY J , FORBES MARTIN L , SMITH MARK V
发明人： BURNS JOHN , FULLER MATTHEW A , KING JEFFREY J , FORBES MARTIN L , SMITH MARK V
IPC分类号： B65D85/00 , E05B15/04 , E05B17/00 , E05B65/00 , E05C9/04 , F16F20060101 , H01L21/673 , F16F
CPC分类号： H01L21/67373 , E05B17/0041 , E05B65/006 , E05B2015/0468 , E05B2015/0479 , E05C9/042
摘要： A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front. At least one wafer support is provided in the enclosure along with a kinematic coupling on the bottom of the enclosure. The container has a door for sealingly closing the open front which includes a chassis and an operable latching mechanism on the chassis. The latching mechanism includes a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position and at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions.
摘要翻译：用于将多个晶片保持在轴向对准的大致平行间隔开的布置中的容器包括具有顶部，底部，一对相对侧面，后部和敞开前部的外壳部分。在外壳中提供至少一个晶片支撑件以及在外壳底部的运动耦合。容器具有用于密封地封闭敞开的前部的门，该门包括底盘和在底盘上的可操作的闩锁机构。闩锁机构包括可选择地旋转的凸轮，以在第一有利位置和第二偏好位置之间移动闩锁机构，以及至少一个振动阻尼器，用于抑制当锁定机构在第一和第二有利位置之间移动时产生的振动。

3. 发明申请

WO2005048306A3 WAFER CARRIER DOOR 审中-公开
标题翻译： WAFER CARRIER门
公开(公告)号：WO2005048306A3
公开(公告)日：2007-04-19
申请号：PCT/US2004037163
申请日：2004-11-08
申请人： ENTEGRIS INC , BURNS JOHN , FULLER MATTHEW A , KING JEFFREY J , FORBES MARTIN L , SMITH MARK V
发明人： BURNS JOHN , FULLER MATTHEW A , KING JEFFREY J , FORBES MARTIN L , SMITH MARK V
IPC分类号： B65D85/90 , A47G19/08 , B08B3/00 , B08B3/02 , B08B9/00 , B08B9/093 , H01L20060101
CPC分类号： H01L21/67373 , H01L21/67386
摘要： A wafer carrier door having an inner door portion and an outer door portion. The inner door portion has a substantially continuous inner surface. The outer door portion extends over at least a portion of the inner door portion. The outer door portion has a plurality of apertures formed therein. The outer door portion is attached to the inner door portion.
摘要翻译：具有内门部分和外门部分的晶片承载门。内门部分具有基本连续的内表面。外门部分在内门部分的至少一部分上延伸。外门部分具有形成在其中的多个孔。外门部分附接到内门部分。

4. 发明申请

WO2005040011B1 PHOTOCHROMIC SUBSTRATE CONTAINER 审中-公开
标题翻译：光电基板容器
公开(公告)号：WO2005040011B1
公开(公告)日：2005-06-30
申请号：PCT/US2004035217
申请日：2004-10-25
申请人： ENTEGRIS INC , BURNS JOHN , FULLER MATTHEW A , KING JEFFREY J , FORBES MARTIN L , SMITH MARK V
发明人： BURNS JOHN , FULLER MATTHEW A , KING JEFFREY J , FORBES MARTIN L , SMITH MARK V
IPC分类号： B65D79/02 , H01L21/673 , B65D85/00 , B65D85/30 , B65D85/57
CPC分类号： H01L21/67288 , B65D79/02 , G03F1/66 , H01L21/67366
摘要： A semiconductor wafer, substrate, or reticle storage or shipping container (10, 24) that includes a photochromic indicator of exposure to undesired electromagnetic radiation. A photochromic material is incorporated into the plastic used to fabricate at least a portion of the container. The photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.
摘要翻译：包括暴露于不期望的电磁辐射的光致变色指示剂的半导体晶片，衬底或掩模版存储或运输容器（10,24）。将光致变色材料结合到用于制造容器的至少一部分的塑料中。响应于暴露于所选择的光波长范围，光致变色材料可以改变颜色或黑暗。

5. 发明申请

WO2009114798A3 WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS 审中-公开
标题翻译：带有管状环境控制组件的集水器
公开(公告)号：WO2009114798A3
公开(公告)日：2009-12-23
申请号：PCT/US2009037143
申请日：2009-03-13
申请人： ENTEGRIS INC , WATSON JAMES A , BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , SMITH MARK V
发明人： WATSON JAMES A , BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , SMITH MARK V
IPC分类号： H01L21/673 , B65D81/18 , B65D85/38 , B65D85/86
CPC分类号： H01L21/67393
摘要： A wafer container utilizes a rigid polymer tubular tower with slots and a "getter" therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion.
摘要翻译：晶片容器利用具有槽的刚性聚合物管状塔和其中的“吸气剂”，用于吸收和过滤晶片容器内的水分和蒸气。塔优选在容器的底部使用吹扫索环，并且可以在其中具有止回阀以控制进入和离开容器的气体（包括空气）的流动方向并相对于塔。塔与护环密封连接。塔可以具有以细长的圆形方式卷绕的吸气剂介质片，其形成或成形为管，并且设置在塔内并且可以具有轴向延伸。介质可以提供主动和/或无源过滤以及具有再充电能力。用于300mm尺寸的晶片的前开口晶片容器通常在容器部分的内侧后部中的左侧和右侧的每一侧上具有一对凹部。这些凹槽优选地用于细长塔，这种塔基本上从底部晶片位置延伸到顶部晶片位置。在替代实施例中，吸气剂材料的管状形状暴露在前开口容器内，而不会吸收除了末端之外的吸气剂。管状吸气剂形式优选地在离散位置处被支撑以最大程度地暴露于内部容器环境。阻挡件可以选择性地封闭孔。弹性帽可有助于管状部件固定在容器部分中。

6. 发明申请

WO2005048305A3 SUBSTRATE CONTAINER 审中-公开
标题翻译：基板容器
公开(公告)号：WO2005048305A3
公开(公告)日：2005-11-17
申请号：PCT/US2004037006
申请日：2004-11-08
申请人： ENTEGRIS INC , BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
发明人： BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
IPC分类号： A47G19/08 , B65D85/00 , H01L20060101 , H01L21/673
CPC分类号： H01L21/67396
摘要： A substrate carrier to dissipate electrostatic charge has a conductive grid or network overmolded in a substantially integral container. The grid is electrically connected to an underlying and grounded saddle. The carrier may further include substantially transparent side walls and electrically conductive shelves to retain stored substrates in a generally axial alignment.
摘要翻译：用于耗散静电电荷的衬底载体具有包覆模制在基本上整体的容器中的导电栅格或网络。电网电连接到底层并接地的鞍座。载体可以进一步包括基本上透明的侧壁和导电架以保持存储的基底大致轴向对齐。

7. 发明申请

WO2009114798A2 WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS 审中-公开
标题翻译：带管状环境控制组件的晶圆容器
公开(公告)号：WO2009114798A2
公开(公告)日：2009-09-17
申请号：PCT/US2009037143
申请日：2009-03-13
申请人： ENTEGRIS INC , WATSON JAMES A , BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , SMITH MARK V
发明人： WATSON JAMES A , BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , SMITH MARK V
IPC分类号： H01L21/673 , B65D81/18 , B65D85/38 , B65D85/86
CPC分类号： H01L21/67393
摘要： A wafer container utilizes a rigid polymer tubular tower with slots and a "getter" therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion.
摘要翻译：晶片容器利用具有狭缝和其中的“吸气剂”的刚性聚合物管状塔，用于吸收和过滤晶片容器内的水分和蒸气。该塔优选地在容器底部使用吹扫垫圈并且可以在其中具有止回阀以控制气体（包括空气）进出容器和相对于塔的流动方向。塔与密封圈密封连接。塔可具有以细长圆形方式卷绕的吸气剂介质片，其形成或成形为管并设置在塔内并可具有轴向延伸。媒体可以提供主动式和/或被动式过滤功能，并且可以进行充电。用于300mm大小的晶片的前开式晶片容器通常在容器部分的内后部的左侧和右侧的每一侧上具有一对凹部。这些凹部优选用于细长塔，这些塔基本上从底部晶片位置延伸至顶部晶片位置。在另一个实施例中，吸气材料的管状形状暴露在前开口容器内，而不包含端部以外的吸气剂。管状吸气剂形式优选支撑在离散的位置以最大限度地暴露于内部容器环境。阻挡构件可以选择性地关闭孔。弹性帽可以便于将管状部件固定在容器部分中。

8. 发明申请

WO2005047117A2 FRONT OPENING SUBSTRATE CONTAINER WITH BOTTOM PLATE 审中-公开
标题翻译：带底板的前开式底板容器
公开(公告)号：WO2005047117A2
公开(公告)日：2005-05-26
申请号：PCT/US2004037017
申请日：2004-11-08
申请人： ENTEGRIS INC , BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
发明人： BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
IPC分类号： B65D20060101 , B65D85/30 , H01L21/673 , B65D
CPC分类号： H01L21/67369 , H01L21/67379 , H01L21/67393 , Y10S206/832
摘要： A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.
摘要翻译：衬底容器和底板通过例如连接器机构的两个构件之间的螺纹连接的方式与用于调节容器和底板之间的距离的机构连接。还提供了用于排放容器的鸭嘴阀和用于使由冲击引起的损坏最小化的阻尼器。

9. 发明申请

WO2005041267B1 Substrate carrrier 审中-公开
标题翻译：基材carrrier
公开(公告)号：WO2005041267B1
公开(公告)日：2006-06-15
申请号：PCT/US2004035313
申请日：2004-10-25
申请人： ENTEGRIS INC , BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V , ZABKA MICHAEL
发明人： BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V , ZABKA MICHAEL
IPC分类号： B65D85/00 , H01L20060101
CPC分类号： H01L21/67379 , H01L21/67383 , Y10S206/832 , Y10T16/469 , Y10T16/4707
摘要： A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the flange to the container so that the load on the flange is transferred to a part of the enclosure other than the top of the enclosure to prevent distortion of the enclosure to maintaining seal integrity between the enclosure and the door.
摘要翻译：一种用于在半导体晶片处理操作期间传输硅半导体晶片的载体，包括壳体，门和与机器接合的凸缘和凸缘，使得载体能够被机器提升。提升鞍座将法兰连接到容器，使得法兰上的负载被转移到外壳的除了外壳的顶部之外的一部分，以防止外壳变形，以保持外壳和门之间的密封完整性。

10. 发明申请

WO2005055280A9 WAFER CONTAINER AND DOOR WITH CAM LATCHING MECHANISM 审中-公开
标题翻译：晶圆容器和带凸轮锁紧机构的门
公开(公告)号：WO2005055280A9
公开(公告)日：2005-07-28
申请号：PCT/US2004038453
申请日：2004-11-16
申请人： ENTEGRIS INC , BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
发明人： BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
IPC分类号： E05C3/04 , H01L20060101 , H01L21/673 , H01L
CPC分类号： H01L21/67353 , H01L21/67373 , Y10T292/1049
摘要： A container for holding a single wafer includes a door with a latching mechanism having a cam with a pair of opposing wings extending laterally therefrom. The cam is selectively rotatably shiftable between a first favored position wherein the wings are completely within the door enclosure to enable the door to be engaged and disengaged from the door frame, and a second favored position wherein the wings extend laterally outward from the door enclosure so as to engage in the latch recesses in the door frame when the door is engaged in the door frame. The cam wings may include a ramped portion thereon for drawing the door into closer engagement in the door frame when the cam is rotated from the first favored position to the second favored position. Also, the latching mechanism may further include a spring disposed to provide a biasing force for urging the latching mechanism toward each of the first and second favored positions, and soft-stop dampening springs for decelerating the cam in a controlled fashion at the first and second favored positions and for absorbing vibrations resulting from the collision of the cam with a fixed stop on the door chassis.
摘要翻译：用于保持单个晶片的容器包括具有锁定机构的门，该锁定机构具有凸轮，该凸轮具有从其横向延伸的一对相对的翼。凸轮可选择性地在第一有利位置和第二有利位置之间移动，在第一有利位置中，这些翼完全位于门外壳内以使得门能够与门框接合和脱离，在第二偏好位置中，这些翼从门外壳横向向外延伸，以便当门接合在门框中时接合门框中的闩锁凹槽。当凸轮从第一有利位置旋转到第二有利位置时，凸轮翼可以包括在其上的倾斜部分，用于将门拉入更紧密地接合在门框内。而且，锁定机构还可以包括弹簧，该弹簧设置成提供用于将锁定机构推向第一和第二有利位置中的每一个的偏置力，以及用于以受控方式在第一和第二锁定位置使凸轮减速的软停止减震弹簧有利位置和吸收由于凸轮与门底盘上的固定止动件碰撞而产生的振动。

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