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1. 发明申请

WO2008011296A2 PROCESS AND SYSTEM FOR QUALITY MANAGEMENT AND ANALYSIS OF VIA DRILLING 审中-公开
标题翻译：威盛钻井质量管理与分析流程与系统
公开(公告)号：WO2008011296A2
公开(公告)日：2008-01-24
申请号：PCT/US2007/073103
申请日：2007-07-10
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , MATSUMOTO, Hisashi , SINGER, Mark , BALDWIN, Leo , HOWERTON, Jeffrey, E. , CHILDERS, David, V.
发明人： MATSUMOTO, Hisashi , SINGER, Mark , BALDWIN, Leo , HOWERTON, Jeffrey, E. , CHILDERS, David, V.
IPC分类号： G01L21/30 , B44C1/22
CPC分类号： H05K3/0035 , B23K26/03 , B23K26/06 , B23K26/389 , B23K2201/42 , H05K1/0269 , H05K2201/09454 , H05K2203/163
摘要： A process for laser forming a blind via in at least one layer of a circuit substrate having a plurality of capture pads of varying geometry can include, for at least one blind via to be formed in at least one layer of a circuit substrate, evaluating a capture pad geometry value (such as area and/or volume) within a predetermined distance from a drilling location with respect to a blind via geometry value (such as area and/or volume) to be formed at the drilling location. The process can include setting at least one laser operating parameter based on the evaluation in order to obtain a desired capture pad appearance after blind via formation. The process can include imaging a capture pad area defined as an area within a predetermined distance from a blind via drilling location in at least one layer of a circuit substrate, quantifying at least one appearance value for the imaged capture pad area, and determining an acceptability of the imaged capture pad areas based on the quantified appearance value.
摘要翻译：在具有多个不同几何形状的捕捉垫的电路基板的至少一层中激光形成盲通孔的过程可以包括，对于至少一个盲通孔形成至少一个盲孔（例如面积和/或体积）相对于钻孔位置在预定距离内的捕捉垫几何值（例如面积和/或体积）进行评估钻孔位置。该过程可以包括基于评估设置至少一个激光器工作参数，以便在盲通孔形成之后获得期望的捕获焊盘外观。该过程可以包括：将捕获垫区域成像，该捕获垫区域被定义为在距电路基板的至少一层中的盲孔过孔位置预定距离内的区域;定量成像的捕获垫区域的至少一个外观值;以及确定可接受性基于量化的外观值，成像的捕捉板区域的数量。

2. 发明申请

WO2010030575A3 ADAPTIVE OPTIC BEAMSHAPING IN LASER PROCESSING SYSTEMS 审中-公开
公开(公告)号：WO2010030575A3
公开(公告)日：2010-03-18
申请号：PCT/US2009/056045
申请日：2009-09-04
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , UNRATH, Mark A. , PIROGOVSKY, Peter , BALDWIN, Leo
发明人： UNRATH, Mark A. , PIROGOVSKY, Peter , BALDWIN, Leo
IPC分类号： G02B27/09
摘要： A laser processing system quickly and flexibly modifies a processing beam to determine and implement an improved or optimum beam profile for a particular application (or a subset of the application). The system reduces the sensitivity of beam shaping subsystems to variations in the laser processing system, including those due to manufacturing tolerances, thermal drift, variations in component performance, and other sources of system variation. Certain embodiments also manipulate lower quality laser beams (higher M 2 values) to provide acceptable shaped beam profiles.

3. 发明申请

WO2009120541A2 LASER MICROMACHINING THROUGH A SACRIFICIAL PROTECTIVE MEMBER 审中-公开
标题翻译：通过牺牲保护部件实现激光微机器人
公开(公告)号：WO2009120541A2
公开(公告)日：2009-10-01
申请号：PCT/US2009/037411
申请日：2009-03-17
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , BALDWIN, Leo
发明人： BALDWIN, Leo
IPC分类号： B23K26/04 , B23K26/42 , B23K26/36
CPC分类号： B23K26/0624 , B23K26/082 , B23K26/0861 , B23K26/361 , B23K26/364 , B23K26/40 , B23K26/60 , B23K37/06 , B23K2203/50
摘要： A small feature at a target location (106) on a working surface (108) of a workpiece (110) is laser machined. A laser beam (104) propagating along a beam path is directed for incidence at the target location (106) on the working surface (108) to machine the small feature. A focusing lens (112) sized to converge the laser beam (104) on the working surface (108) is set in the beam path at a short working distance (x1) from the working surface (108) to laser machine the small feature and thereby eject target material from the workpiece back toward the focusing lens (112). A sacrificial protective member (114) positioned between the focusing lens (112) and the working surface (108) transmits without appreciable distortion or adsorption the laser beam (104) focused by the focusing lens (112) and incident on the working surface (108). The sacrificial protective member (114) intercepts the ejected target material to prevent a sufficient amount of it from reaching and thereby appreciably contaminating the focusing lens (112).
摘要翻译：激光加工工件（110）的工作表面（108）上的目标位置（106）处的小特征。沿着光束路径传播的激光束（104）被引导入射到工作表面（108）上的目标位置（106）以加工小特征。定尺寸为将激光束（104）会聚在工作表面（108）上的聚焦透镜（112）以距工作表面（108）较短的工作距离（x1）设置在光束路径中以激光加工小特征并且从而将来自工件的目标材料朝着聚焦透镜（112）回射。位于聚焦透镜（112）和工作表面（108）之间的牺牲保护构件（114）透射没有明显的变形或吸收由聚焦透镜（112）聚焦并入射到工作表面（108）上的激光束）。牺牲保护构件（114）拦截喷出的目标材料以防止其足够量到达并由此明显地污染聚焦透镜（112）。

4. 发明申请

WO2008150959A1 VARIO-ASTIGMATIC BEAM EXPANDER 审中-公开
公开(公告)号：WO2008150959A1
公开(公告)日：2008-12-11
申请号：PCT/US2008/065226
申请日：2008-05-30
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , BALDWIN, Leo
发明人： BALDWIN, Leo
IPC分类号： G02B26/02 , G02B26/00 , G02B27/00
CPC分类号： G02B27/0068 , G02B27/0911 , G02B27/0966 , H01S3/005
摘要： A vario-astigmatic beam expander (200) is capable of collimating an astigmatic light beam, or inducing astigmatism in a well-collimated beam, by passing the light beam through a combination of spherical (202) and cylindrical (206, 208) lenses, whereby both the degree of astigmatism and the axis of astigmatism induced are continuously adjustable. The beam expander has applications in industrial laser processing systems.
摘要翻译：通过使光束通过球形（202）和圆柱形（206,208）透镜的组合，偏光散光扩束器（200）能够准直像散光束或引导准直光束中的像散，由此散光程度和散光轴均可连续调节。扩束器适用于工业激光加工系统。

5. 发明申请

WO2007008742A1 OPTIMIZING USE AND PERFORMANCE OF OPTICAL SYSTEMS IMPLEMENTED WITH TELECENTRIC ON-AXIS DARK FIELD ILLUMINATION 审中-公开
标题翻译：光电系统的优化使用和性能实现与电场在线场景照明
公开(公告)号：WO2007008742A1
公开(公告)日：2007-01-18
申请号：PCT/US2006/026649
申请日：2006-07-07
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , BALDWIN, Leo , EMERY, Joseph, J.
发明人： BALDWIN, Leo , EMERY, Joseph, J.
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/47 , G01N2021/8822 , G02B13/22
摘要： Systems and methods are provided for imaging a planar specular object (102) such as a semiconductor wafer. In one embodiment, an imaging system (100) for imaging a defect on a planar specular object (102) includes a telecentric lens (110) having a sufficiently aspherical surface such that the telecentric lens (110) is substantially corrected for an optical aberration. The imaging system (100) also includes a telecentric stop (116) including an aperture therein to block light reflected from the planar specular object (102) while allowing light reflected from the defect to pass through the aperture. The imaging system (100) further includes a lens group (108) having a system stop positioned between the telecentric stop (116) and the lens group (108). The lens group (108) is substantially corrected for the optical aberration independent of the telecentric lens (110).
摘要翻译：提供了用于对诸如半导体晶片的平面镜面物体（102）进行成像的系统和方法。在一个实施例中，用于对平面镜面物体（102）上的缺陷成像的成像系统（100）包括具有足够非球面的远心透镜（110），使得远心透镜（110）被基本上校正为光学像差。成像系统（100）还包括远心止动件（116），其包括其中的孔，以阻挡从平面镜面物体（102）反射的光，同时允许从缺陷反射的光穿过孔。成像系统（100）还包括具有定位在远心止动件（116）和透镜组（108）之间的系统止动件的透镜组（108）。对于与远心透镜（110）无关的光学像差，基本上校正了透镜组（108）。

6. 发明申请

WO2004077336A2 COAXIAL NARROW ANGLE DARK FIELD LIGHTING 审中-公开
标题翻译：同轴狭窄角度暗场照明
公开(公告)号：WO2004077336A2
公开(公告)日：2004-09-10
申请号：PCT/US2004/002284
申请日：2004-01-27
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , BALDWIN, Leo
发明人： BALDWIN, Leo
IPC分类号： G06K
CPC分类号： G01N21/8806 , G02B21/10
摘要： A coaxial narrow angle dark field imaging system is provided. The system utilizes a telecentric lens to illuminate objects with symmetric coaxial narrow angle dark field illumination. The illumination technique is particularly suited to highlight minor features or defects on planar specular objects. In particular, the coaxial light source directs light rays towards a telecentric lens which redirects the light rays towards the substantially planar specular object. The light rays are reflected back through the telecentric lens towards a camera. To the extent that the light rays are reflected from a planar specular portion of the object the light rays are blocked by a telecentric stop. Light rays reflected from a defect or feature in the planar specular object will pass through an aperture in the stop to a camera.
摘要翻译：提供了一种同轴窄角暗场成像系统。该系统利用远心透镜来照射具有对称同轴窄角暗场照明的物体。照明技术特别适用于突出平面镜面物体上的次要特征或缺陷。具体地说，同轴光源将光线引向远心透镜，该远心透镜将光线改向为朝向基本上平面的镜面物体。光线通过远心镜头反射回相机。就光线从物体的平面镜面反射部分反射而言，光线被远心光阑阻挡。从平面镜面物体中的缺陷或特征反射的光线将通过光阑上的光圈传送到相机。

7. 发明申请

WO2009076184A2 METHOD AND APPARATUS FOR ACHIEVING PANCHROMATIC RESPONSE FROM A COLOR-MOSAIC IMAGER 审中-公开
标题翻译：用于从彩色 - 彩色成像器实现全色响应的方法和设备
公开(公告)号：WO2009076184A2
公开(公告)日：2009-06-18
申请号：PCT/US2008/085629
申请日：2008-12-05
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , BALDWIN, Leo
发明人： BALDWIN, Leo
IPC分类号： H04N9/70 , H04N9/07
CPC分类号： H04N9/045 , G03B17/00 , H04N5/332
摘要： A method and apparatus for achieving monochromatic response from a low-cost color imager is presented. In this method and apparatus, the out-of-band response to infrared (IR) light is by solid state sensors exploited to produce a monochrome image. The monochrome image is produced by removing the IR blocking filter from the sensor and illuminating the scene to be imaged with IR radiation from an LED. The wavelength emitted from the LED is matched to the wavelength or wavelengths that correspond to a region where the sensor's response to IR light is relatively even, despite the color-mosaic filter permanently attached to the sensor.
摘要翻译：提出了一种用于从低成本彩色成像器获得单色响应的方法和设备。在该方法和装置中，红外（IR）光的带外响应是通过固态传感器利用来产生单色图像。通过从传感器中去除IR阻挡滤光片并用来自LED的IR辐射照亮待成像的场景来产生单色图像。尽管彩色马赛克过滤器永久连接到传感器，但从LED发出的波长与传感器对红外光响应相对均匀的区域对应的一个或多个波长相匹配。

8. 发明申请

WO2005076213A1 IMAGE SUBTRACTION OF ILLUMINATION ARTIFACTS 审中-公开
标题翻译：照明艺术的图像放置
公开(公告)号：WO2005076213A1
公开(公告)日：2005-08-18
申请号：PCT/US2004/027167
申请日：2004-12-06
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , BALDWIN, Leo
发明人： BALDWIN, Leo
IPC分类号： G06T5/00
CPC分类号： G06K9/2036
摘要： A method of removing an artifact resulting from an in-line illumination device of an imaging system from an object image. It includes obtaining a first image of the artifact using a first artifact illumination level and imaging the object using the imaging system wherein the illumination device is using an object illumination level. An artifact image is independent of the object and has pixel values related to the illumination level. Thus, the artifact can be removed by subtracting respective pixel values of an artifact image from respective values of the object image on a pixel address-by-pixel address basis. Various illumination levels can be used to create more than one artifact image. The artifact image for the subtraction can be one of the images taken or can be a scaled image where an artifact image is scaled to the object illumination level.
摘要翻译：一种从对象图像中去除由成像系统的在线照明装置产生的伪影的方法。它包括使用第一假象照明级别获得伪像的第一图像，并且使用其中照明装置正在使用对象照明级别的成像系统对对象进行成像。伪影图像与对象无关，具有与照明级别相关的像素值。因此，可以通过从像素地址逐像素地址的对象图像的各个值中减去伪影图像的各个像素值来去除伪像。可以使用各种照明级别来创建多个伪像。用于减法的伪影图像可以是所拍摄的图像之一，也可以是将伪像图像缩放到对象照明级别的缩放图像。

9. 发明申请

WO2010117683A2 IMPROVED METHOD AND APPARATUS FOR LASER MACHINING 审中-公开
标题翻译：改进的激光加工方法和装置
公开(公告)号：WO2010117683A2
公开(公告)日：2010-10-14
申请号：PCT/US2010/028884
申请日：2010-03-26
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , BALDWIN, Leo
发明人： BALDWIN, Leo
IPC分类号： B23K26/073 , B23K26/04 , B23K26/42 , B23K101/40
CPC分类号： B23K26/073 , B23K26/0622
摘要： A method and apparatus is presented for laser machining complex features (107) in workpieces (100) using programmable laser focal spot (104) shapes (101). A deformable mirror (92) is inserted into the laser beam path (74) of a laser machining system and programmed to alter the shape of the laser beam focal spot (104) in real time as the workpiece (100) is being laser machined in order to achieve improved control over the shape and size of laser machined features (107).
摘要翻译：提出了一种使用可编程激光焦点（104）形状（101）激光加工工件（100）中的复杂特征（107）的方法和装置。可变形反射镜（92）被插入到激光加工系统的激光束路径（74）中，并被编程为随着工件（100）被激光加工而实时地改变激光束焦点（104）的形状以实现对激光加工特征（107）的形状和尺寸的改进的控制。

10. 发明申请

WO2009120623A3 METHOD AND APPARATUS FOR DETECTING DEFECTS USING STRUCTURED LIGHT 审中-公开
公开(公告)号：WO2009120623A3
公开(公告)日：2009-10-01
申请号：PCT/US2009/037940
申请日：2009-03-23
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , BALDWIN, Leo , EMERY, Joseph, J.
发明人： BALDWIN, Leo , EMERY, Joseph, J.
IPC分类号： G01N21/88 , G01N21/956 , G01B11/30 , G06T7/00
摘要： Improved method and apparatus for detecting problems with fit and finish of manufactured articles (94) use structured light. Two or more structured light images (92, 98) acquired from opposing directions are used to measure the fit of mating surfaces, while avoiding false positives caused by small defects near the seam.

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