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1. 发明申请

WO2004012308A3 CONTROL SYSTEM FOR A TWO CHAMBER GAS DISCHARGE LASER 审中-公开
标题翻译：两台气体放电激光器的控制系统
公开(公告)号：WO2004012308A3
公开(公告)日：2004-07-15
申请号：PCT/US0324146
申请日：2003-07-30
申请人： CYMER INC , FALLON JOHN P , RULE JOHN A , JACQUES ROBERT N , LIPCON JACOB P , SANDSTROM RICHARD L , PARTLO WILLIAM N , ERSHOV ALEXANDER I , ISHIHARA TOSHIHIKO , MEISNER JOHN , NESS RICHARD M , MELCHER PAUL C
发明人： FALLON JOHN P , RULE JOHN A , JACQUES ROBERT N , LIPCON JACOB P , SANDSTROM RICHARD L , PARTLO WILLIAM N , ERSHOV ALEXANDER I , ISHIHARA TOSHIHIKO , MEISNER JOHN , NESS RICHARD M , MELCHER PAUL C
IPC分类号： H01S20060101 , H01S3/036 , H01S3/134 , H01S3/22 , H01S3/225 , H01S3/23
CPC分类号： H01S3/2333 , H01S3/036 , H01S3/134 , H01S3/225 , H01S3/2366
摘要： The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet. In preferred embodiments, the laser is a production line machine with a master oscillator (10) producing a very narrow band seed beam which is amplified (12) in the second discharge chamber. Novel control features specially adapted for a two-chamber gas discharge laser system include (1) pulse energy controls, with nanosecond timing precision (2) precision pulse to pulse wavelength controls with high speed and extreme speed wavelength tuning (3) fast response gas temperature control and (4) F2 injection controls with novel learning algorithm.
摘要翻译：本发明提供了一种用于模块化高重复率两放电室紫外线的控制系统。在优选实施例中，激光器是具有主振荡器（10）的生产线机器，其产生非常窄的带子种子束，其在第二放电室中被放大（12）。特别适用于双室气体放电激光系统的新型控制特征包括（1）脉冲能量控制，具有纳秒定时精度（2）精确脉冲到脉冲波长控制，具有高速和极速波长调谐（3）快速响应气体温度控制和（4）F2注射控制与新的学习算法。

2. 发明申请

WO2005001853A3 METHOD AND APPARATUS FOR COOLING MAGNETIC CIRCUIT ELEMENTS 审中-公开
标题翻译：用于冷却磁电元件的方法和装置
公开(公告)号：WO2005001853A3
公开(公告)日：2005-11-24
申请号：PCT/US2004018941
申请日：2004-06-14
申请人： CYMER INC , NESS RICHARD M , PARTLO WILLIAM N , MELCHER PAUL C , FERGUSON GEORGE X , SAETHRE ROBERT B
发明人： NESS RICHARD M , PARTLO WILLIAM N , MELCHER PAUL C , FERGUSON GEORGE X , SAETHRE ROBERT B
IPC分类号： H01F3/00 , H01F27/10 , H01S3/097 , H01F27/08 , G21C7/00
CPC分类号： H01F27/266 , H01F27/025 , H01F27/10 , H01S3/097
摘要： An apparatus and method for providing cooling to a magnetic circuit element having a magnetic core disposed around a centrally located core support member (200) having at least one core support member wall (210) is disclosed which may comprise a core support coolant inlet (282); a core support coolant outlet (283); a plurality of interconnected coolant flow passages (270) contained within the core support member wall and inter connected an arranged to pass coolant from one coolant flow passage to the next within the core support member wall along a coolant flow path within at least a substantial portion of the core support member wall from the core support coolant inlet to the core support coolant outlet. The apparatus may also comprise each core support coolant flow passage is in fluid communication with a fluid communication plenum at each end of each respective core support coolant flow passage, with each respective fluid communication plenum forming an outlet plenum for at least a first one of the respective core support coolant flow passages and an inlet plenum for at least a second one of the respective core support coolant flow passages along the coolant flow path from the core support coolant inlet to the core support coolant outlet.
摘要翻译：公开了一种用于向具有设置在具有至少一个芯支撑构件壁（210）的中心定位的芯支撑构件（200）周围的磁芯的磁路元件提供冷却的装置和方法，其可以包括芯支撑冷却剂入口（282 ）; 芯支撑冷却剂出口（283）; 多个互连的冷却剂流动通道（270），其容纳在所述芯支撑构件壁内并且相互连接，所述多个相互连接的冷却剂流动通道（270）被布置成沿着至少大部分内的冷却剂流动路径将冷却剂从一个冷却剂流动通道传递到所述芯支撑构件壁的芯支撑构件壁从芯支撑冷却剂入口到芯支撑冷却剂出口。该装置还可以包括每个芯支撑冷却剂流动通道与每个相应的芯支撑冷却剂流动通道的每个端部处的流体连通通气室流体连通，每个相应的流体连通增压室形成出口压力室，用于至少第一个相应的芯支撑冷却剂流动通道和用于沿着从芯支撑冷却剂入口到芯支撑冷却剂出口的冷却剂流动路径的相应的芯支撑冷却剂流动通道中的至少第二个的入口气室。

3. 发明申请

WO0111733A9 HIGH PULSE RATE PULSE POWER SYSTEM WITH FAST RISE TIME AND LOW LEAKAGE CURRENT 审中-公开
标题翻译：具有快速上升时间和低漏电流的高脉冲速率脉冲电源系统
公开(公告)号：WO0111733A9
公开(公告)日：2002-09-06
申请号：PCT/US0020266
申请日：2000-07-25
申请人： CYMER INC , PARTLO WILLIAM N , NESS RICHARD M , ROTHWEIL DANIEL A , MELCHER PAUL C , SMITH BRETT D , BIRX DEBORAH L EM
发明人： PARTLO WILLIAM N , BIRX DANIEL L DI , NESS RICHARD M , ROTHWEIL DANIEL A , MELCHER PAUL C , SMITH BRETT D
IPC分类号： G03F7/20 , H01S3/097 , H01S3/225 , H02M3/00 , H02M9/04 , H03K3/57 , H03K17/80 , H01S3/00
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70483 , G03F7/70575 , H01S3/097 , H01S3/225 , H03K3/57 , H03K17/80
摘要： A high pulse rate pulse power source (20) for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source (20) includes a pulse generating circuit (50) including a charging capacitor (42), a solid state switch (46) and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer (56) increases peak voltage to at least 12,000 volts. A very fast regulated power supply (20) is provided for charging the charging capacitor (42) in less than 400 microseconds and a pulse control system including a programmed processor (102) controls the charging of the charging capacitor (42) to an accuracy of less than about one percent at a rate of at least 2000 charges per second.
摘要翻译：用于以2000Hz或更高的速率提供受控高能电脉冲的高脉冲脉冲电源（20）。源极（20）包括包括充电电容器（42），固态开关（46）和限流电感器的脉冲发生电路（50）。在脉冲发生电路中产生的脉冲在至少两个脉冲压缩电路中被压缩，并且升压脉冲变压器（56）将峰值电压增加到至少12000伏特。提供了一种非常快速的调节电源（20），用于在小于400微秒内为充电电容器（42）充电，以及包括编程处理器（102）的脉冲控制系统，其将充电电容器（42）的充电控制到不到百分之一，每秒至少要2000次。

4. 发明申请

WO2007041232A2 6K PULSE REPETITION RATE AND ABOVE GAS DISCHARGE LASER SYSTEM SOLID STATE PULSE POWER SYSTEM IMPROVEMENTS 审中-公开
标题翻译： 6K脉冲重复率和上述气体放电激光系统固态脉冲电源系统改进
公开(公告)号：WO2007041232A2
公开(公告)日：2007-04-12
申请号：PCT/US2006037884
申请日：2006-09-27
申请人： CYMER INC , HUANG CHAOFENG , MELCHER PAUL C , NESS RICHARD M
发明人： HUANG CHAOFENG , MELCHER PAUL C , NESS RICHARD M
IPC分类号： H01S3/22 , H01S3/03 , H01S3/097 , H01S3/223
CPC分类号： H01S3/097 , H01S3/04 , H01S3/09702 , H01S3/0975 , H01S3/225 , H03K3/57 , H03K17/127 , H03K17/567 , H03K17/6872 , H03K17/785
摘要： A method and apparatus for operating a very high repetition gas discharge laser system magnetic switch pulsed power system is disclosed, which may comprise a solid state switch, a charging power supply electrically connected to one side of the solid state switch; a charging inductor electrically connected to the other side of the solid state switch; a deque circuit electrically in parallel with the solid state switch comprising a deque switch; a peaking capacitor electrically connected to the charging inductor, a peaking capacitor charging control system operative to charge the peaking capacitor by opening the deque switch and leaving the solid state switch open and then shutting the solid state switch. The solid state switch may comprise a plurality of solid state switches electrically in parallel.
摘要翻译：公开了用于操作非常高的重复气体放电激光系统磁开关脉冲功率系统的方法和装置，其可以包括固态开关，电连接到固态开关的一侧的充电电源; 充电电感器电连接到固态开关的另一侧; 与固态开关并联电路的德克电路，其包括德克式开关; 与充电电感器电连接的峰化电容器，峰值电容器充电控制系统，其操作用于通过打开除电开关并使固态开关断开并且然后关断固态开关来对峰值电容器充电。固态开关可以并联电连接多个固态开关。

5. 发明申请

WO2005001995A3 METHOD AND APPARATUS FOR ELECTRICALLY INTERCONNECTING HIGH VOLTAGE MODULES POSITIONED IN RELATIVELY CLOSE PROXIMITY 审中-公开
标题翻译：用于电相互连接高电压模块的方法和装置
公开(公告)号：WO2005001995A3
公开(公告)日：2005-10-06
申请号：PCT/US2004018943
申请日：2004-06-14
申请人： CYMER INC , SAETHRE ROBERT B , MELCHER PAUL C , FERGUSON GEORGE X
发明人： SAETHRE ROBERT B , MELCHER PAUL C , FERGUSON GEORGE X
IPC分类号： H01R13/53 , H01R13/62
CPC分类号： H01R13/53
摘要： An apparatus and method for electrically connecting two closely positioned high voltage modules with little or no bend and without any loops in an electrical interconnecting coaxial cable, is disclosed, which may comprise a high voltage connector attached to at least a portion of the cable on at least one end of the cable; a push through high voltage connector receptor within one module; and a disconnection mechanism within the one module adapted to move the high voltage connector and the at least a portion of cable to which the high voltage connector is attached through the connector receptor from a contact position to a housed position in a direction away from the other module to which high voltage connection is to be made. The high voltage connector receptor may comprise an open cylindrical connector with a contacting surface contained on the interior wall of the cylindrical connector. The apparatus may further comprise an interlock mechanism in operative connection with the disconnection mechanism and adapted to provide an indication of the high voltage connector being in a position other than in the contact position relative to the connector receptor, and an engaging mechanism engaging the cable and holding the cable in a fixed position relative to the disconnection mechanism as the high voltage connector moves between the contact position and the housed position. The apparatus may further comprise a clamping mechanism in cooperative connection with the disconnection mechanism when the high voltage connector is in the contact position and cooperative with the clamping mechanism to prevent the high voltage connector from moving from the contact position. The invention may also include a retractable connector within a second module moveable toward the first module from a retracted position into an extended position, in which extended position electrical contact is made with the second hih voltage connector.
摘要翻译：公开了一种用于电连接两个紧密定位的具有很少或没有弯曲的高压模块并且在电互连同轴电缆中没有任何环路的装置和方法，其可以包括连接到电缆的至少一部分上的高压连接器电缆的最小一端; 在一个模块内通过高压连接器接头; 以及所述一个模块内的断开机构，其适于将所述高压连接器和所述高压连接器的所述至少一部分电缆通过所述连接器接头从接触位置移动到远离另一个的方向的容纳位置要进行高压连接的模块。高压连接器接收器可以包括敞开的圆柱形连接器，其具有容纳在圆柱形连接器的内壁上的接触表面。该装置还可以包括与断开机构可操作地连接的互锁机构，并且适于提供高压连接器相对于连接器接头处于接触位置以外的位置的指示，以及接合电缆和当高压连接器在接触位置和收纳位置之间移动时，将电缆相对于断开机构保持在固定位置。该装置还可包括当高压连接器处于接触位置并与夹紧机构协调以防止高压连接器从接触位置移动时与断开机构协同连接的夹紧机构。本发明还可以包括在第二模块内的可伸缩连接器，其可从缩回位置朝向第一模块移动到延伸位置，在该延伸位置中，延伸位置与第二高电压连接器进行电接触。

6. 发明申请

WO2005094205A3 VERY HIGH ENERGY, HIGH STABILITY GAS DISCHARGE LASER SURFACE TREATMENT SYSTEM 审中-公开
标题翻译：高能量，高稳定性气体放电激光表面处理系统
公开(公告)号：WO2005094205A3
公开(公告)日：2007-08-09
申请号：PCT/US2004024160
申请日：2004-07-26
申请人： TCZ GMBH , DAS PALASH P , BOLLIGER BRUCE E , PATEL PARTHIV , KLENE BRIAN C , MELCHER PAUL C , SAETHRE ROBERT B
发明人： DAS PALASH P , BOLLIGER BRUCE E , PATEL PARTHIV , KLENE BRIAN C , MELCHER PAUL C , SAETHRE ROBERT B
IPC分类号： H01S3/22 , B23K26/00 , B23K26/06 , B23K26/40 , H01S3/00 , H01S3/097 , H01S3/225 , H01S3/23
CPC分类号： B23K26/0604 , B23K26/0624 , B23K2201/40 , C30B29/06 , C30B33/02 , C30B35/00 , H01S3/0057 , H01S3/097 , H01S3/225 , H01S3/2253 , H01S3/2333 , H01S3/2366
摘要： A gas discharge laser crystallization apparatus and method for performing a transformation of a crystal makeup or orientation in the substrate of a workpiece is disclosed with may comprise, a multichambers laser system comprising, a first laser unit, and laser timing and control module, the timing and control module operates to create a gas discharge transiting the second discharge region, within plus or minus 3 ns and as a POPO, combining optics combine the out beams, and time creates pulse separation in the combined output a preselected time plus or minus 3 ns.
摘要翻译：公开了一种气体放电激光结晶装置和用于在工件的基板中进行晶体化妆或取向的变换的方法，其可以包括：多室激光系统，包括第一激光单元和激光定时和控制模块，定时并且控制模块操作以在正或负3ns内产生经过第二放电区域的气体放电，并且作为POPO，组合光学器件组合出射束，并且时间在组合输出中产生预选时间加或减3ns 。

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