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    • 4. 发明申请
    • PROCESS FOR PRODUCING CRYSTALLINE THIN FILM
    • 生产结晶薄膜的方法
    • WO2004053962A1
    • 2004-06-24
    • PCT/JP2003/015717
    • 2003-12-09
    • CANON KABUSHIKI KAISHAKUMOMI, Hideya
    • KUMOMI, Hideya
    • H01L21/20
    • H01L21/02667C30B13/24C30B29/06H01L21/02691H01L21/2026
    • The invention provides a process for producing a crystalline thin film, characterized by including the steps of: (A) preparing a thin film having a specific region arranged at a predetermined position, the specific region continuing to a surrounding non-specific region and being different in melting or resolidification property from the surrounding non-specific region; (B) locally melting and resolidifying a partial area including the specific region in the thin film; and (C) locally melting and resolidifying another partial area including a non-specific region sharing a common boundary with an area crystallized by resolidification in a preceding step. The spatial position of the specific region can be accurately determined. The obtained crystalline thin film has crystal grains formed at predetermined positions, and therefore the fluctuation of formed elements are reduced.
    • 本发明提供了一种制备结晶薄膜的方法,其特征在于包括以下步骤:(A)制备具有排列在预定位置的特定区域的薄膜,该特定区域持续到周围的非特定区域并且是不同的 在来自周围非特定区域的熔化或再凝固性能; (B)局部熔融并重新固化包括薄膜中特定区域的局部区域; 和(C)在前述步骤中局部熔融并重新固化另一部分区域,其包括与通过再凝固结晶的区域共享共同边界的非特定区域。 可以准确地确定特定区域的空间位置。 所得结晶薄膜在预定位置上形成晶粒,因此形成的元件的波动减小。