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1. 发明申请

WO2009127275A3 ELECTRODE COMB, MICROMECHANICAL COMPONENT, AND METHODS FOR THE PRODUCTION OF AN ELECTRODE COMB AND A MICROMECHANICAL COMPONENT 审中-公开
标题翻译：电极的梳，微机械结构和方法的电极的梳和微机械部件
公开(公告)号：WO2009127275A3
公开(公告)日：2010-04-29
申请号：PCT/EP2008067690
申请日：2008-12-17
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
IPC分类号： B81B3/00
CPC分类号： B81B3/004 , B81B2201/033 , B81B2201/045 , B81B2203/0136 , G02B26/0841 , H02N1/008
摘要： The invention relates to an electrode comb (52, 54) for a micromechanical component. Said electrode comb (52, 54) is designed such that at least two electrode fingers (52a, 54a) are mounted on a first fastening part (52b, 54b) at a first end while being mounted on a second fastening part (52b, 54b) at a second end lying opposite the first end. The invention additionally relates to a micromechanical component comprising a stator electrode comb (54) and an actuator electrode comb (52) between which a voltage (U) can be applied such that the actuator electrode comb (54) can be rotated about an axis of rotation (56) of the actuator electrode comb (52). The axis of rotation (56) of the actuator electrode comb (52) vertically penetrates at least one surface of an electrode finger (54a) of the stator electrode comb (44, 54). The invention further relates to a method for producing an electrode comb (52, 54) and a method for producing a micromechanical component.
摘要翻译：本发明涉及一种如此形成，使得至少两个电极指（52A，54A）在其第一端的第一附接部（52B，54B）被固定且相对的第一端部用于微机械部件的电极梳（52,54）第二端连接到第二附接部分（52B，54B）附连。此外，本发明涉及一种具有定子电极的梳（54）和致动器的电极的梳（52），在它们之间的电压（U）可应用于微机械部件，其特征在于，由（定子电极的梳54之间施加的电压（U））和致动器的电极的梳（52），致动器的电极的梳（52）（围绕致动器的电极的梳（52的旋转轴线56））是可旋转的，并且其中所述致动器的电极的梳（52）的至少一个表面的旋转（56）的轴线定子电极的梳（44,54）的电极指（54A）垂直地刺穿。此外，本发明涉及一种用于电极的梳（52,54）和用于微机械部件的制造方法的制造方法。

2. 发明申请

WO2009127273A3 METHOD FOR THE PRODUCTION OF A MICROMECHANICAL COMPONENT HAVING ELECTRODE UNITS ON TWO PLANES, AND MICROMECHANICAL COMPONENT 审中-公开
标题翻译：用于微机械结构与电极单元两个级别和微机械结构
公开(公告)号：WO2009127273A3
公开(公告)日：2010-05-06
申请号：PCT/EP2008066715
申请日：2008-12-03
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08
CPC分类号： B81C1/00007 , B81B2201/032 , B81B2201/033 , B81B2201/045 , B81B2203/019 , B81C1/00142 , B81C2201/017
摘要： The invention relates to a method for producing a micromechanical component (10), encompassing the following steps: a first electrode unit (14) is formed in a first position relative to a bottom substrate (16); a supporting element (22) is formed which comprises a first subunit (23, 28, 30) having a first internal stress and a second subunit (23, 28, 30) having a second internal stress that differs from the first internal stress, said supporting element (22) being fastened to the first electrode unit (14) at a first end while being fastened to the bottom substrate (16) at a second end; and the supporting element (22) is bent as a result of the difference between the first internal stress and the second internal stress, the bending action causing the first electrode unit (14) to be moved from the first position relative to the bottom substrate (16) into a second position relative to the bottom substrate (16). The invention further relates to a micromechanical component (10).
摘要翻译：本发明涉及一种用于微机械部件（10）的制造方法，包括以下步骤：在一个第一位置到一个基底（16）形成第一电极单元（14）; 形成具有具有与方向上从所述第一内部应力第二残余应力偏离，第一本征电压和第二子单元（23,28,30）的第一子单元（23,28,30）的支撑部件（22），其中在所述支撑构件（22）第一端连接到所述第一电极部（14）和在第二端处与基底基板（16）被安装; 和支撑部件（22）弯曲，由于第一内部应力和第二特征电压之间的差，由于从所述第一位置到所述基底（16），所述支撑构件（22），所述第一电极单元（14）的相对于所述的第二位置的弯曲基底基板（16）被调整。此外，本发明提供了一种微机械部件（10）涉及。

3. 发明申请

WO2009095108A2 FIXED BODY JOINT AND MICROMECHANICAL COMPONENT 审中-公开
标题翻译： SOLID STATE关节和微机械部件
公开(公告)号：WO2009095108A2
公开(公告)日：2009-08-06
申请号：PCT/EP2008065532
申请日：2008-11-14
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81B7/00
CPC分类号： G02B26/0841 , B81B7/0006 , B81B2201/042 , B81B2203/058
摘要： The invention relates to a fixed body joint (16) for suspending a micromechanical device (2), comprising a support beam (17) and a thin layer (22) applied to the support beam (17). The thin layer extends laterally beyond the support beam (17). One or more conductor tracks (18) are embedded in said thin layer (22).
摘要翻译：根据本发明（16），用于悬挂的微机械装置（2）包括在所述轴承的光束（17）的支撑梁（17）和一个所述的固体关节淀积的薄层（22）。薄层横向延伸出经轴承梁（17）。在薄层（22）的一个或多个导体轨迹（18）嵌入。

4. 发明申请

WO2010046155A3 ELECTROSTATIC DRIVE, MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING AN ELECTROSTATIC DRIVE AND A MICROMECHANICAL COMPONENT 审中-公开
标题翻译：静电驱动，微机械结构和方法用于静电驱动器和微机械部件
公开(公告)号：WO2010046155A3
公开(公告)日：2010-12-16
申请号：PCT/EP2009060881
申请日：2009-08-24
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , KRUEGER MICHAEL , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
IPC分类号： H02N1/00
CPC分类号： H02N1/006 , Y10T29/49002
摘要： The invention relates to an electrostatic drive having an interior frame (16), at least one intermediate frame (14) surrounding the interior frame, and an exterior frame (12) surrounding the interior frame (12) and the at least one intermediate frame (14), wherein two adjacent frames (12, 14, 16) of the interior, intermediate, and exterior frames (12, 14, 16) are connected to each other via a spring element (22, 24, 26), wherein the spring elements (22, 24, 26) through which two adjacent frames (12, 14, 16) of the interior, intermediate, and exterior frames (12, 14,16) are connected to each other are disposed such that the longitudinal directions of the spring elements (22, 24, 26) are positioned on a mutual spring longitudinal axis (28), and wherein electrode fingers are disposed on frame joists (12a,14a,16a) of the interior frame (16), of the at least one intermediate frame (14), and of the exterior frame (12), said joists being aligned directly parallel to the spring longitudinal axis (28). The invention further relates to a method for producing an electrostatic drive. The invention also relates to a micromechanical component (10) and to a method for producing a micromechanical component (10).
摘要翻译：本发明涉及一种具有内框架（16），至少一个围绕所述内框架中间框架（14）和所述内框架（12）和所述至少一个中间框架（14）围绕所述外框架（12），每两个相邻的帧（的静电驱动 12，14，16）（通过至少一个弹簧元件（22，24，26）内，中间和外框架12，14，16）被连接到彼此，其中所述弹簧元件（22，24,26），通过该内层，中间和外框架（12，14,16）中的每两个相邻的帧（12，14，16）连接在一起，被布置成使得所述弹簧元件（22，24，26）的一个共同的弹簧轴线的纵向方向（28）位于和直接平行于所述弹簧纵向轴线的内框架（16）的（28）框架梁（12A，14A，16A），所述至少一个中间框架（14）和所述外框架（12）的电极指排列。本发明还涉及一种静电驱动器的制造方法。此外，本发明提供了一种微机械部件（10）和用于微机械部件的制造方法（10）涉及。

5. 发明申请

WO2009124605A2 MICROMECHANICAL COMPONENT HAVING A SLANTED STRUCTURE AND CORRESPONDING PRODUCTION METHOD 审中-公开
标题翻译：与斜面结构及相应方法微机械结构
公开(公告)号：WO2009124605A2
公开(公告)日：2009-10-15
申请号：PCT/EP2008066388
申请日：2008-11-28
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , NJIKAM NJIMONZIE FREDERIC , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81C1/00
CPC分类号： B81C1/00103 , B81B2203/0118 , B81B2203/0307
摘要： The invention relates to a micromechanical component having a slanted structure and to a corresponding production method. Said component comprises a substrate (1) having a surface (O); a first anchor (3e; 3e') that is provided on the surface (O) of the substrate (1) and which extends away from the substrate (1); and at least one arm (3c, 3d; 3c; 3c') that is oriented away from the anchor (3e; 3e') and that is provided on one lateral surface (S1, S2; S1'; S1'') of the anchor (3e; 3e').
摘要翻译：本发明提供了螺旋结构和相应的制造方法的微机械部件。该组件包括具有表面（O）的基板（1）; 在基板（1）的表面上的第一锚（3E，3E“），该（O）被设置，并且从衬底（1）延伸离开; 指向离开和在侧面的至少一个; '（其被从电枢倾斜臂3c和3d，3c和3c）中所提供的电枢的（S1，S2 S1”，S1' '）（3E，3E） '（图3e' 3E）是。

6. 发明申请

WO2009086976A2 MICROMECHANICAL COMPONENT AND PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT 审中-公开
标题翻译：微机械部件及方法微机械部件
公开(公告)号：WO2009086976A2
公开(公告)日：2009-07-16
申请号：PCT/EP2008065524
申请日：2008-11-14
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , FRITZ JOACHIM , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , FRITZ JOACHIM , FRIESE CHRISTOPH
IPC分类号： B81B3/00
CPC分类号： B81C1/00182 , B81B2201/033 , B81B2201/042 , B81C2201/0132
摘要： The invention relates to a micromechanical component, comprising at least one stator electrode (21) with at least one lateral surface, divided into at least two electrically conducting sections (26, 27, 29, 30) which are electrically insulated from each other and which are subjected to differing voltages. The micromechanical component further comprises at least one moving actuator electrode (22), which has a lateral surface divided into at least two electrically conducting sections (32, 34; 80, 82) which are electrically insulated from each other and which are subjected to differing voltages. The lateral surface of the actuator electrode (22) is arranged to face the lateral surface of the stator electrode (21; 71a, 71b; 103, 104).
摘要翻译：本发明涉及一种微机械部件。这包括具有侧表面，其被划分成其在与不同的电位起作用的至少两个彼此电隔离的导电部分（26，27，29，30）的至少一个定子电极（21）。此外，该微机械装置包括至少两个彼此电隔离的导电部分具有侧表面的至少一个可动致动器电极（22）（32，34; 80，82）被划分，这是在与不同的电势作用。所述致动器电极（22）的侧表面是定子电极的侧表面（21; 71A，71B; 103，104），其布置zuweisend。

7. 发明申请

WO2010057703A3 METHOD FOR OPERATING AN ELECTROSTATIC DRIVE AND ELECTROSTATIC DRIVES 审中-公开
标题翻译：一种用于操作静电驱动和静态DRIVES
公开(公告)号：WO2010057703A3
公开(公告)日：2011-08-18
申请号：PCT/EP2009062352
申请日：2009-09-24
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , FRITZ JOACHIM , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , FRITZ JOACHIM , FRIESE CHRISTOPH
IPC分类号： H02N1/00 , G02B26/08
CPC分类号： H02N2/14 , G02B6/3512 , G02B26/0841 , H02N1/006
摘要： The invention relates to a method for operating an electrostatic drive having a stator electrode (50) and an actuator electrode (52), which are designed as multilayer electrodes, wherein the actuator electrode (52) in the de-energized starting position, without a voltage applied between a stator electrode subunit (50b, 50c) and an actuator electrode subunit (52b, 52c), is arranged with respect to the stator electrode (50) such that the first actuator electrode subunit (52b) has a smaller distance from the first stator electrode subunit (50b) than the second actuator electrode subunit (52c), comprising the steps of: predeflecting the actuator electrode (52) with respect to the stator electrode (50) out of the de-energized starting position and into a first end position by applying a first potential (p1) to the first stator electrode subunit (50b) and applying a second potential (p2) deviating from the first potential (p1) to the first actuator electrode subunit (52b); and applying a third potential (p3) to the second stator electrode subunit (50c) and to the second actuator electrode subunit (52c), which deviates from the first potential (p1) and the second potential (p2).
摘要翻译：本发明涉及一种方法，用于在其去激励的初始位置的定子电极（50）和形成为多层电极的致动器电极（52），其中，所述致动器电极（52）不具有一个定子之间操作的静电驱动 -Elektrodenuntereinheit（50B，50C）和一个Akior电极子单元（52B，52C）施加的电压被如此布置成相对于所述定子电极（50），该第一致动器电极子单元（52B）具有较小的Absland向第一定子 Eiektrodenuntereinheit（50B）AIS第二致动器电极子单元（52C），与所述步骤; 通过施加第一电势（P1）向第一定子Elektrodenuniereinheit前进相对于从在第一端部位置其spannursgsiosen初始位置定子电极（50）引导所述致动器电极（52）（50B）和第一的电位（P1）不同的第二电势（P2）到所述第一致动器电极子单元（52B）; 偏离并施加第三电位（P3）到第二定子电极子单元（50℃）和第二致动器电极子单元（52C），其从第一电位（P1）和所述第二电势（P2）。

8. 发明申请

WO2009086978A3 PRODUCTION METHOD FOR A MICROMECHANICAL ELECTROSTATIC ADJUSTER DEVICE AND MICROMECHANICAL ELECTROSTATIC ADJUSTER DEVICE 审中-公开
标题翻译： PROCESS微型机械静态修正及MICRO电荷调节
公开(公告)号：WO2009086978A3
公开(公告)日：2010-04-01
申请号：PCT/EP2008065575
申请日：2008-11-14
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , BENZEL HUBERT , WEBER HERIBERT , KRUEGER MICHAEL , SATTLER ROBERT , MUCHOW JOERG , FRITZ JOACHIM , SCHELLING CHRISTOPH , FRIESE CHRISTOPH
IPC分类号： B81C1/00
CPC分类号： B81C1/00666 , B81B2201/033 , B81B2201/042 , B81B2203/0136 , B81B2203/019 , B81C1/00166 , B81C2201/0167 , H02N1/002
摘要： The invention relates to a production method for a micromechanical electrostatic adjuster device (10), comprising the steps: application of a first conducting layer (12) to a substrate (28,30), etching the first conducting layer (12) to form at least one first electrode (16) in the material of the first conducting layer (12), application of a separation layer (32a) to the first conducting layer (12), application of a second conducting layer to the separation layer (32a), etching the second conducting layer to form at least one second electrode (22) in the material of the second conducting layer and application of a cover layer (40) to the second electrode (22) and bending the second electrode (22) by means of a mechanical compression load exerted on the second electrode (22) by means of the cover layer (40). The invention further relates to a corresponding micromechanical electrostatic adjuster device.
摘要翻译：本发明涉及一种用于微机械静电调节器（10）的制造方法，包括以下步骤：基部（28,30）上沉积第一导电层（12），蚀刻所述第一导电层（12），用于形成至少一个第一电极（ 16）从第一导电层（12）的材料，在施加第一导电层（12）上的脱模层（32a），其上沉积隔离层（32A）上的第二导电层，蚀刻第二导电层，以形成至少一个从第二导电层的材料，并施加于第二电极（22）的覆盖层（40）和由在第二电极上的覆盖层（40）中的一个的装置的第二电极（22）的弯曲的第二电极（22）（22）施加机械压应力。本发明还涉及一种相应的微机械静电调节器。

9. 发明申请

WO2009127274A2 MICROMECHANICAL COMPONENT, METHOD FOR THE OPERATION OF A MICROMECHANICAL COMPONENT, AND METHOD FOR THE PRODUCTION OF A MICROMECHANICAL COMPONENT 审中-公开
标题翻译：微机械结构，用于操作机械的科技组件和方法微机械结构
公开(公告)号：WO2009127274A2
公开(公告)日：2009-10-22
申请号：PCT/EP2008066721
申请日：2008-12-03
申请人： BOSCH GMBH ROBERT , PIRK TJALF , PINTER STEFAN , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
发明人： PIRK TJALF , PINTER STEFAN , MUCHOW JOERG , FRITZ JOACHIM , FRIESE CHRISTOPH
IPC分类号： B81B3/00
CPC分类号： B81B3/004 , B81B3/0037 , B81B2201/033 , B81B2201/037 , B81B2203/0181 , B81B2203/058 , G02B26/0841 , G02B26/085
摘要： The invention relates to a micromechanical component comprising a spring (20a, 20b), a lever element (22a, 22b) mounted on a first end of the spring (20a, 20b), a driving device that is designed to rotate the lever element (22a, 22b) about a first axis of rotation extending perpendicular to a longitudinal axis of the lever element (22a, 22b), and an adjusting element (10) which is mounted on a second end of the spring (20a, 20b) and is coupled to the level element (22a, 22b) by means of the spring (20a, 20b) in such a way that the adjusting element (10) is rotated about a second axis of rotation (18) when the lever element (22a, 22b) is rotated about the first axis of rotation by means of the driving the device. The invention additionally relates to a method for operating a micromechanical component as well as a method for producing a micromechanical component.
摘要翻译：本发明涉及一种微机械部件附接的弹簧（20A，20B）一个在所述弹簧的第一端部（20A，20B）杆构件（22A，22B），的驱动装置。其适于将所述杆部件（22A，22B）关于垂直于所述杆部件的纵向轴线的轴（22A，22B）旋转对准第一旋转轴线，并且在弹簧的第二端部（20A，20B）致动元件安装（10）通过弹簧，然后（20A，20B）到所述杆构件（22A，22B）被耦合，使得在杆部件（22A，22B）关于由驱动装置旋转的第一轴，所述致动元件（10）的旋转（围绕旋转18的第二轴）旋转。另外，本发明涉及一种用于操作的微机械部件的方法。此外，本发明涉及一种用于微机械部件的制造方法。

10. 发明申请

WO2009097924A3 MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING THE SAME 审中-公开
标题翻译：微机械结构和方法生产同样
公开(公告)号：WO2009097924A3
公开(公告)日：2010-01-21
申请号：PCT/EP2008065998
申请日：2008-11-21
申请人： BOSCH GMBH ROBERT , PINTER STEFAN , FRITZ JOACHIM
发明人： PINTER STEFAN , FRITZ JOACHIM
IPC分类号： B81B7/00
CPC分类号： B81B7/0006 , B81B2201/042 , B81B2203/0109
摘要： The invention relates to a micromechanical component comprising a base, a swiveled part having an electroconductive material, and an insulation for the swiveled part, said insulation electrically insulating a first and a second section of the swiveled part. A first flexible, electroconductive connecting element connects the base to the first swiveled part section, and a second flexible, electroconductive connecting element connects the base to the second swiveled part section. The invention also relates to a method for producing a micromechanical component, comprising the following steps: making available a substrate wafer having a conductive cover layer, etching a trench isolation structure into the cover layer, which structure insulates a first and a second section of the cover layer from each other, and forming a base and a swiveled part comprising the first and second section of the cover layer on the substrate wafer while leaving a first flexible, electroconductive connecting element which connects the base to the first swiveled part section, and a second flexible, electroconductive connecting element which connects the base to the second swiveled part section.
摘要翻译：本发明提供具有基体，具有导电材料的枢转构件，并且枢转部分绝缘，枢转部的相互电绝缘的第一和第二部分中的微机械部件。第一柔性的，导电的连接部件连接所述基部与所述第一枢轴部部分和第二挠性的，导电的连接部件的基体部件连接到所述第二枢转部件部分。提供基底晶片具有导电外层，在顶层中，其彼此绝缘覆盖层的第一和第二部分中蚀刻形成隔离沟槽，并形成一个基本部分以及第一和：用于制造微机械部件，包括以下步骤的另一创建的流程包括在所述衬底晶片的枢转部分的覆盖层的第二部分，留下的第一柔性的，导电的连接，该连接基部与所述第一枢轴部部分和所述基座构件连接到所述第二枢转部分截面的第二柔性导电连接构件连接元件。

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