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    • 1. 发明申请
    • OSCILLATOR AND METHOD OF MAKING FOR ATOMIC FORCE MICROSCOPE AND OTHER APPLICATIONS
    • 振荡器和原子力显微镜及其他应用的制造方法
    • WO2007024711A9
    • 2007-11-22
    • PCT/US2006032386
    • 2006-08-18
    • BEYDER ARTHURSACHS FREDERICK
    • BEYDER ARTHURSACHS FREDERICK
    • G01Q10/00G01Q60/24G01Q60/38
    • G01Q10/045G01Q60/38Y10T29/49Y10T29/49007Y10T74/10
    • A device having an oscillator such as a sensor for use in an atomic force microscope. A pair of co-axial members interconnect support structure and the oscillator for torsionally suspending the oscillator. The co-axial members are portions of a layer of silicon nitride or other material that is connected to the oscillator and support structure, which are composed of silicon or other material. A process for making a device which includes an oscillator, which includes depositing on silicon or other first material a layer of silicon nitride or other second material, forming in the first material a support structure and the oscillator, including applying an etchant which is selective for the first material to etch all the way through the first material and leave the second material substantially unetched to thereby form the at least one flexible hinge of the second material. A device such as a sensor for use in an atomic force microscope. The device comprises a first oscillator, a second oscillator, a pair of first co-axial members interconnecting the first and second oscillators for torsionally suspending the first oscillator, a support structure, and a pair of second co-axial members whose axis is orthogonal to an axis of the first co-axial members and which interconnect the second oscillator and the support structure for torsionally suspending the second oscillator.
    • 具有振荡器的装置,例如用于原子力显微镜的传感器。 一对同轴部件将支撑结构和用于扭转悬挂振荡器的振荡器互连。 同轴元件是连接到振荡器和支撑结构的氮化硅或其他材料层的部分,其由硅或其他材料构成。 一种制造包括振荡器的器件的方法,该器件包括在硅或其它第一材料上沉积氮化硅或其它第二材料层,在第一材料中形成支撑结构和振荡器,包括施加选择性蚀刻剂 所述第一材料一路蚀刻穿过所述第一材料并且使所述第二材料基本未被蚀刻从而形成所述第二材料的所述至少一个柔性铰链。 用于原子力显微镜的装置,如传感器。 该装置包括第一振荡器,第二振荡器,互连第一和第二振荡器用于扭转悬挂第一振荡器的一对第一同轴部件,支撑结构和一对第二同轴部件,其轴线正交于 所述第一同轴部件的轴线并且将所述第二振荡器和所述支撑结构互连以用于扭转地悬挂所述第二振荡器。
    • 2. 发明申请
    • OSCILLATOR AND METHOD OF MAKING FOR ATOMIC FORCE MICROSCOPE AND OTHER APPLICATIONS
    • 振荡器和原子力显微镜及其他应用的制作方法
    • WO2007024711A3
    • 2009-04-23
    • PCT/US2006032386
    • 2006-08-18
    • BEYDER ARTHURSACHS FREDERICK
    • BEYDER ARTHURSACHS FREDERICK
    • G02B26/02G01Q10/00G01Q60/24G01Q60/38
    • G01Q10/045G01Q60/38Y10T29/49Y10T29/49007Y10T74/10
    • A device having an oscillator such as a sensor for use in an atomic force microscope. A pair of co-axial members interconnect support structure and the oscillator for torsionally suspending the oscillator. The co-axial members are portions of a layer of silicon nitride or other material that is connected to the oscillator and support structure, which are composed of silicon or other material. A process for making a device which includes an oscillator, which includes depositing on silicon or other first material a layer of silicon nitride or other second material, forming in the first material a support structure and the oscillator, including applying an etchant which is selective for the first material to etch all the way through the first material and leave the second material substantially unetched to thereby form the at least one flexible hinge of the second material.
    • 具有诸如用于原子力显微镜的传感器的振荡器的装置。 一对同轴构件互连支撑结构和振荡器,用于扭转振荡器的悬挂。 共轴构件是连接到由硅或其它材料构成的振荡器和支撑结构的氮化硅或其它材料层的部分。 一种制造包括振荡器的方法,该振荡器包括在硅或其它第一材料上沉积氮化硅或其它第二材料层,在第一材料中形成支撑结构和振荡器,包括施加选择性的蚀刻剂 所述第一材料一直蚀刻通过所述第一材料并且使所述第二材料基本上未被蚀刻,从而形成所述第二材料的所述至少一个柔性铰链。