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    • 1. 发明申请
    • MECHANICAL OSCILLATOR SYSTEM
    • 机械振荡器系统
    • WO2004008259A8
    • 2004-04-08
    • PCT/GB0303000
    • 2003-07-10
    • LEVINGSTON GIDEON
    • LEVINGSTON GIDEON
    • C04B35/80C04B35/83F16F1/06F16F1/10F16F1/366G04B17/06G04B17/22
    • G04B17/066F16F1/3665G04B17/063G04B17/227Y10T74/10
    • A mechanical oscillator system comprising a balance wheel and a spiral or helicoidal balance spring for use in horological mechanisms or other precision instruments. The balance spring is made of a non-magnetic composite, polymer, carbon or ceramic material, preferably a composite material of carbon fibres in a polymer, carbon or ceramic matrix, and the balance wheel is made from a non-magnetic ceramic. The values of the thermal expansion coefficients for the balance spring and balance wheel are similar, very small and stable over a wide temperature range. The expansion coefficients in the axial sense of the spring and of the balance wheel are of opposite sign and they compensate one another. The density of these materials is smaller than that of the currently used metals. Through this combination of materials it is possible to obtain significant advantages and a higher level of accuracy and stability compared with metal oscillator systems.
    • 一种机械振荡器系统,包括摆轮和用于钟表机构或其他精密仪器的螺旋或螺旋平衡弹簧。 平衡弹簧由非磁性复合材料,聚合物,碳或陶瓷材料制成,优选在聚合物,碳或陶瓷基体中的碳纤维的复合材料,并且所述摆轮由非磁性陶瓷制成。 平衡弹簧和摆轮的热膨胀系数值在很宽的温度范围内非常小,稳定。 弹簧和摆轮轴向的膨胀系数是相反的,它们相互补偿。 这些材料的密度小于目前使用的金属的密度。 通过这种材料的组合,与金属振荡器系统相比,可以获得显着的优点和更高的精度和稳定性。
    • 3. 发明申请
    • OSCILLATOR AND METHOD OF MAKING FOR ATOMIC FORCE MICROSCOPE AND OTHER APPLICATIONS
    • 振荡器和原子力显微镜及其他应用的制作方法
    • WO2007024711A3
    • 2009-04-23
    • PCT/US2006032386
    • 2006-08-18
    • BEYDER ARTHURSACHS FREDERICK
    • BEYDER ARTHURSACHS FREDERICK
    • G02B26/02G01Q10/00G01Q60/24G01Q60/38
    • G01Q10/045G01Q60/38Y10T29/49Y10T29/49007Y10T74/10
    • A device having an oscillator such as a sensor for use in an atomic force microscope. A pair of co-axial members interconnect support structure and the oscillator for torsionally suspending the oscillator. The co-axial members are portions of a layer of silicon nitride or other material that is connected to the oscillator and support structure, which are composed of silicon or other material. A process for making a device which includes an oscillator, which includes depositing on silicon or other first material a layer of silicon nitride or other second material, forming in the first material a support structure and the oscillator, including applying an etchant which is selective for the first material to etch all the way through the first material and leave the second material substantially unetched to thereby form the at least one flexible hinge of the second material.
    • 具有诸如用于原子力显微镜的传感器的振荡器的装置。 一对同轴构件互连支撑结构和振荡器,用于扭转振荡器的悬挂。 共轴构件是连接到由硅或其它材料构成的振荡器和支撑结构的氮化硅或其它材料层的部分。 一种制造包括振荡器的方法,该振荡器包括在硅或其它第一材料上沉积氮化硅或其它第二材料层,在第一材料中形成支撑结构和振荡器,包括施加选择性的蚀刻剂 所述第一材料一直蚀刻通过所述第一材料并且使所述第二材料基本上未被蚀刻,从而形成所述第二材料的所述至少一个柔性铰链。
    • 5. 发明申请
    • CONTROLLABLE VIBRATION GENERATOR
    • 可调式激振器
    • WO02011906A1
    • 2002-02-14
    • PCT/EP2001/009014
    • 2001-08-03
    • B06B1/04B06B1/16
    • B06B1/166B06B1/162Y10T74/10Y10T74/18344Y10T74/18552
    • A vibration generator comprises two unbalance shafts (2, 3), which are positively coupled in a contra-rotative manner and whose relative phase position can be shifted by a phase shifting device (7). Each of the unbalance shafts (2, 3) supports a main unbalance mass (15) and a partial unbalance mass (16) that can move in relation thereto. The position of the partial unbalance masses (16) on the respective unbalance shafts (2, 3) can be actively altered within a large range by adjusting devices (17, 18). The resulting vibration vector generated by the vibration generator can be set in a diverse manner with regard to direction and magnitude.
    • 的振动激励器具有两个主动锁止计数器旋转地联接的不平衡轴(2,3),其相对相位位置由相变装置改变(7)。 每个不平衡轴的(2,3)承载的主不平衡质量(15)和一可相对移动的局部不平衡质量(16)。 局部不平衡质量(16)相关联的不平衡轴的位置(2,3)是通过调整装置(17,18)在宽范围内主动地改变限定。 由振动发生器产生的所得矢量振动的特征可在于,在以各种方式来调整相对于方向和幅度。
    • 7. 发明申请
    • OSCILLATOR AND METHOD OF MAKING FOR ATOMIC FORCE MICROSCOPE AND OTHER APPLICATIONS
    • 振荡器和原子力显微镜及其他应用的制作方法
    • WO2007024711A2
    • 2007-03-01
    • PCT/US2006/032386
    • 2006-08-18
    • BEYDER, ArthurSACHS, Frederick
    • BEYDER, ArthurSACHS, Frederick
    • G12B21/00G12B21/08
    • G01Q10/045G01Q60/38Y10T29/49Y10T29/49007Y10T74/10
    • A device having an oscillator such as a sensor for use in an atomic force microscope. A pair of co-axial members interconnect support structure and the oscillator for torsionally suspending the oscillator. The co-axial members are portions of a layer of silicon nitride or other material that is connected to the oscillator and support structure, which are composed of silicon or other material. A process for making a device which includes an oscillator, which includes depositing on silicon or other first material a layer of silicon nitride or other second material, forming in the first material a support structure and the oscillator, including applying an etchant which is selective for the first material to etch all the way through the first material and leave the second material substantially unetched to thereby form the at least one flexible hinge of the second material. A device such as a sensor for use in an atomic force microscope. The device comprises a first oscillator, a second oscillator, a pair of first co-axial members interconnecting the first and second oscillators for torsionally suspending the first oscillator, a support structure, and a pair of second co-axial members whose axis is orthogonal to an axis of the first co-axial members and which interconnect the second oscillator and the support structure for torsionally suspending the second oscillator.
    • 具有诸如用于原子力显微镜的传感器的振荡器的装置。 一对同轴构件互连支撑结构和振荡器,用于扭转振荡器的悬挂。 共轴构件是连接到由硅或其它材料构成的振荡器和支撑结构的氮化硅或其它材料层的部分。 一种制造包括振荡器的方法,该振荡器包括在硅或其它第一材料上沉积氮化硅或其它第二材料层,在第一材料中形成支撑结构和振荡器,包括施加选择性的蚀刻剂 所述第一材料一直蚀刻通过所述第一材料并且使所述第二材料基本上未被蚀刻,从而形成所述第二材料的所述至少一个柔性铰链。 用于原子力显微镜的诸如传感器的装置。 该装置包括第一振荡器,第二振荡器,互连第一振荡器和第二振荡器的一对第一同轴构件,用于扭转地悬挂第一振荡器,支撑结构和一对第二同轴构件,其轴线正交于 第一同轴构件的轴线,并且连接第二振荡器和支撑结构,用于扭转地悬挂第二振荡器。
    • 8. 发明申请
    • OSCILLATOR AND METHOD OF MAKING FOR ATOMIC FORCE MICROSCOPE AND OTHER APPLICATIONS
    • 振荡器和原子力显微镜及其他应用的制造方法
    • WO2007024711A9
    • 2007-11-22
    • PCT/US2006032386
    • 2006-08-18
    • BEYDER ARTHURSACHS FREDERICK
    • BEYDER ARTHURSACHS FREDERICK
    • G01Q10/00G01Q60/24G01Q60/38
    • G01Q10/045G01Q60/38Y10T29/49Y10T29/49007Y10T74/10
    • A device having an oscillator such as a sensor for use in an atomic force microscope. A pair of co-axial members interconnect support structure and the oscillator for torsionally suspending the oscillator. The co-axial members are portions of a layer of silicon nitride or other material that is connected to the oscillator and support structure, which are composed of silicon or other material. A process for making a device which includes an oscillator, which includes depositing on silicon or other first material a layer of silicon nitride or other second material, forming in the first material a support structure and the oscillator, including applying an etchant which is selective for the first material to etch all the way through the first material and leave the second material substantially unetched to thereby form the at least one flexible hinge of the second material. A device such as a sensor for use in an atomic force microscope. The device comprises a first oscillator, a second oscillator, a pair of first co-axial members interconnecting the first and second oscillators for torsionally suspending the first oscillator, a support structure, and a pair of second co-axial members whose axis is orthogonal to an axis of the first co-axial members and which interconnect the second oscillator and the support structure for torsionally suspending the second oscillator.
    • 具有振荡器的装置,例如用于原子力显微镜的传感器。 一对同轴部件将支撑结构和用于扭转悬挂振荡器的振荡器互连。 同轴元件是连接到振荡器和支撑结构的氮化硅或其他材料层的部分,其由硅或其他材料构成。 一种制造包括振荡器的器件的方法,该器件包括在硅或其它第一材料上沉积氮化硅或其它第二材料层,在第一材料中形成支撑结构和振荡器,包括施加选择性蚀刻剂 所述第一材料一路蚀刻穿过所述第一材料并且使所述第二材料基本未被蚀刻从而形成所述第二材料的所述至少一个柔性铰链。 用于原子力显微镜的装置,如传感器。 该装置包括第一振荡器,第二振荡器,互连第一和第二振荡器用于扭转悬挂第一振荡器的一对第一同轴部件,支撑结构和一对第二同轴部件,其轴线正交于 所述第一同轴部件的轴线并且将所述第二振荡器和所述支撑结构互连以用于扭转地悬挂所述第二振荡器。
    • 9. 发明申请
    • MECHANICAL OSCILLATOR SYSTEM
    • 机械振荡器系统
    • WO2004008259A1
    • 2004-01-22
    • PCT/GB2003/003000
    • 2003-07-10
    • LEVINGSTON, Gideon
    • LEVINGSTON, Gideon
    • G04B17/06
    • G04B17/066F16F1/3665G04B17/063G04B17/227Y10T74/10
    • A mechanical oscillator system comprising a balance wheel and a spiral or helicoidal balance spring for use in horological mechanisms or other precision instruments. The balance spring is made of a non-magnetic composite, polymer, carbon or ceramic material, preferably a composite material of carbon fibres in a polymer, carbon or ceramic matrix, and the balance wheel is made from a non-magnetic ceramic. The values of the thermal expansion coefficients for the balance spring and balance wheel are similar, very small and stable over a wide temperature range. The expansion coefficients in the axial sense of the spring and of the balance wheel are of opposite sign and they compensate one another. The density of these materials is smaller than that of the currently used metals. Through this combination of materials it is possible to obtain significant advantages and a higher level of accuracy and stability compared with metal oscillator systems.
    • 一种机械振荡器系统,包括用于钟表机构或其他精密仪器的摆轮和螺旋或螺旋摆轮游丝。 游丝由非磁性复合材料,聚合物,碳或陶瓷材料制成,优选为聚合物,碳或陶瓷基体中的碳纤维复合材料,并且摆轮由非磁性陶瓷制成。 游丝和摆轮的热膨胀系数值相似,在很宽的温度范围内非常小且稳定。 弹簧和摆轮的轴向膨胀系数具有相反的符号,并且它们相互补偿。 这些材料的密度比目前使用的金属的密度小。 通过这种材料组合,与金属振荡器系统相比,可以获得显着的优势和更高的准确性和稳定性。