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    • 2. 发明申请
    • METHOD AND ARRANGEMENT FOR REDUNDANT ANODE SPUTTERING HAVING A DUAL ANODE ARRANGEMENT
    • 方法和设备,用于冗余阳极溅射,双阳极结构
    • WO2009040406A3
    • 2009-06-04
    • PCT/EP2008062881
    • 2008-09-25
    • ARDENNE ANLAGENTECH GMBHTESCHNER GOETZMIRRING ENNOSTRUEMPFEL JOHANNESHEISIG ANDREAS
    • TESCHNER GOETZMIRRING ENNOSTRUEMPFEL JOHANNESHEISIG ANDREAS
    • H01J37/34C23C14/56
    • H01J37/34C23C14/3407C23C14/564H01J37/3438H01J37/3444
    • The invention relates to a method in which two anodes are operated alternately opposite each other as plasma discharge anodes and as cathodes for self-cleaning, and the cathodes of the plasma discharge are recurrently briefly reversed in polarity, and an arrangement comprising a cathode (3) and a first (1) and a second (2) anode supplied with voltage by means of an H-bridge circuit, with the object of increasing the efficiency of redundant anode sputtering having dual anodes, and increasing component reliability. The aim is achieved in that the DC current supply is designed as a pulse current supply (6), in that the pole reversal of the cathode voltage is effected by the pulse current supply, at least one anode being at positive potential at all times and the other anode being intermittently at negative potential during an etching time, and the H-bridge circuit being operationally connected to the pulse current supply, such that at least one anode is at positive potential at all times.
    • 本发明,其操作彼此交替作为等离子体放电的阳极,并作为自清洁,其中两个阳极对置的方法和等离子体放电的阴极反向重复短时间的阴极和包括阴极(3)的布置和第一(1) 和第二阳极(2),这是由H桥电路的方式与电压涉及,其目的是改进所述冗余Anodensputterns的双阳极的影响,并增加了安全装置提供。 这得以实现,所述直流电源形成为阴极电压的极反转从脉冲电源在蚀刻时间实现,在任何时间至少一个阳极在正电位,并在时间和其它阳极处于负电位的脉冲电源(6) 位于和H桥电路,以便与操作连接脉冲电源即在任何时候在正电位的至少一个阳极连通。