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1. 发明申请

WO2018063851A1 MULTIPLE DIAMETER IN-VACUUM WAFER HANDLING 审中-公开
标题翻译：多个直径的真空晶片处理
公开(公告)号：WO2018063851A1
公开(公告)日：2018-04-05
申请号：PCT/US2017/052155
申请日：2017-09-19
申请人： AXCELIS TECHNOLOGIES, INC.
发明人： WEED, Allan
IPC分类号： H01L21/67 , H01L21/677 , H01L21/687
CPC分类号： H01L21/67742 , H01J37/185 , H01J37/20 , H01J37/3171 , H01L21/265 , H01L21/67069 , H01L21/67213 , H01L21/67718 , H01L21/67745 , H01L21/67754 , H01L21/67757 , H01L21/6833 , H01L21/68707 , H01L21/68728
摘要： An electrostatic chuck and gripping system are configured for clamping and processing workpieces having differing diameters. An ion implantation apparatus selectively provides ions to a first workpiece and a second workpiece in a process chamber, where a diameter of the first workpiece is greater the second workpiece. A chuck supports the respective first or second workpiece within the process chamber during exposure to the ions. A load lock chamber isolates a process environment from an external environment and has a workpiece support for the respective first or second workpiece during a transfer of the first or second workpiece between the process chamber and the external environment. A vacuum robot transfers the first or second workpiece between the chuck and workpiece support, and has a gripper mechanism configured to selectively grip the first or second workpiece between a plurality of stepped guides.
摘要翻译：静电卡盘和夹紧系统被构造用于夹紧和加工具有不同直径的工件。离子注入装置选择性地将离子提供给处理室中的第一工件和第二工件，其中第一工件的直径大于第二工件的直径。在暴露于离子期间，卡盘支撑处理室内的各个第一或第二工件。负载锁定腔室将工艺环境与外部环境隔离，并且在第一或第二工件在处理腔室和外部环境之间的传输期间具有用于相应第一或第二工件的工件支撑件。真空机器人在卡盘和工件支架之间传送第一或第二工件，并具有夹持机构，该夹持机构构造成选择性地夹持多个阶梯式导向器之间的第一或第二工件。

2. 发明申请

WO2018064302A1 ADJUSTABLE CIRCUMFERENCE ELECTROSTATIC CLAMP 审中-公开
标题翻译：可调节的周期静电钳位
公开(公告)号：WO2018064302A1
公开(公告)日：2018-04-05
申请号：PCT/US2017/053959
申请日：2017-09-28
申请人： AXCELIS TECHNOLOGIES, INC.
发明人： WEED, Allan
IPC分类号： H01L21/683 , H01L21/687 , H01L21/673 , H01L21/67
摘要： An electrostatic chuck for clamping workpieces having differing diameters is provided. A central electrostatic chuck member associated with a first workpiece and a first peripheral electrostatic chuck member associated with a second workpiece are provided. An elevator translates the first peripheral electrostatic chuck member with respect to central electrostatic chuck member between a retracted position and an extended position. In the retracted position, the first workpiece contacts only the first surface. In the extended position, the second workpiece contacts the first surface and the second surface. A first peripheral shield generally shields the second surface when the first peripheral electrostatic chuck member is in the retracted position. Additional peripheral electrostatic chuck members and peripheral shields can be added to accommodate additional workpiece diameters.
摘要翻译：提供了一种用于夹紧具有不同直径的工件的静电卡盘。提供了与第一工件相关联的中央静电卡盘构件和与第二工件相关联的第一外周静电卡盘构件。升降机将第一外围静电卡盘构件相对于中央静电卡盘构件在缩回位置和延伸位置之间平移。在缩回位置，第一个工件仅接触第一个表面。在延伸位置，第二工件接触第一表面和第二表面。当第一外围静电吸盘构件处于缩回位置时，第一外围屏蔽件通常屏蔽第二表面。可以添加附加的外围静电吸盘部件和外围护罩，以适应额外的工件直径。

3. 发明申请

WO2004107412A2 WORK-PIECE TREATMENT SYSTEM HAVING LOAD LOCK AND BUFFER 审中-公开
标题翻译：具有负载锁定和缓冲器的波浪处理系统
公开(公告)号：WO2004107412A2
公开(公告)日：2004-12-09
申请号：PCT/US2004/016074
申请日：2004-05-21
申请人： AXCELIS TECHNOLOGIES INC. , MITCHELL, Robert , WEED, Allan , GUELER, Richard
发明人： MITCHELL, Robert , WEED, Allan , GUELER, Richard
IPC分类号： H01L21/00
CPC分类号： H01L21/67763 , H01L21/67213 , H01L21/67745 , Y10S414/139 , Y10S414/141
摘要： A transfer system for use with a tool for treating a work-piece at sub-atmospheric pressure such as an ion implanter for implanting silicon wafers. An enclosure defines a low pressure region for treatment of work-pieces placed at a work-piece treatment station within the low pressure region. Multiple work-piece isolation load locks transfer work-pieces, one or two at a time, from a higher pressure region to the lower pressure for treatment and back to said higher pressure subsequent to said treatment. A first robot transfers work-pieces within the low pressure region from the load locks to a treatment station within the low pressure region. Multiple other robots positioned outside the low pressure region transfers work-pieces to and from the multiple work-piece isolation load locks from a source of said work-pieces prior to treatment and to a destination of said work-pieces after said treatment.
摘要翻译：一种用于处理亚大气压下的工件的工具的转移系统，例如用于植入硅晶片的离子注入机。外壳限定了用于处理放置在低压区域内的工件处理站的工件的低压区域。多个工件隔离负载锁将工件一次一个或两个从较高压力区域传递到较低压力以进行处理，并在所述处理之后返回到所述较高压力。第一机器人将低压区域内的工件从负载锁转移到低压区域内的处理站。定位在低压区域之外的多个其它机器人在处理之前将工件从多个工件隔离负载锁转移到所述工件的源并在所述处理之后传送到所述工件的目的地。

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