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1. 发明申请

WO2010106410A1 EVAPORATOR, COATING INSTALLATION, AND METHOD FOR USE THEREOF 审中-公开
标题翻译：蒸发器，涂装安装及其使用方法
公开(公告)号：WO2010106410A1
公开(公告)日：2010-09-23
申请号：PCT/IB2010/000493
申请日：2010-03-10
申请人： APPLIED MATERIALS, INC. , MARTINI, Marcel , GEBELE, Thomas , HOFFMANN, Uwe , BANGERT, Stefan , KOENIG, Michael
发明人： MARTINI, Marcel , GEBELE, Thomas , HOFFMANN, Uwe , BANGERT, Stefan , KOENIG, Michael
IPC分类号： C23C14/24 , H01L21/20 , H05B33/10
CPC分类号： C23C14/243 , C23C14/12 , C23C14/246
摘要： An evaporator for applying vapor to a substrate at a coating rate, the evaporator comprising an evaporator tube (300, 310, 100) having a distribution pipe (100) with at least one nozzle outlet (110), and wherein the evaporator tube includes a pressure measurement device (10, 12), the pressure measurement device comprising an optical diaphragm gauge (10).
摘要翻译：一种用于以涂覆速率将蒸汽施加到基底的蒸发器，所述蒸发器包括具有至少一个喷嘴出口（110）的分配管（100）的蒸发器管（300,310,100），并且其中所述蒸发器管包括压力测量装置（10,12），所述压力测量装置包括光学膜片（10）。

2. 发明申请

WO2011056403A2 SHADOW MASK ALIGNMENT AND MANAGEMENT SYSTEM 审中-公开
标题翻译： SHADOW面罩对齐与管理系统
公开(公告)号：WO2011056403A2
公开(公告)日：2011-05-12
申请号：PCT/US2010/053067
申请日：2010-10-18
申请人： APPLIED MATERIALS, INC. , KWAK, Byung-Sung, Leo , BANGERT, Stefan , HOFMANN, Ralf , KOENIG, Michael
发明人： KWAK, Byung-Sung, Leo , BANGERT, Stefan , HOFMANN, Ralf , KOENIG, Michael
IPC分类号： H01M10/04 , H01M10/0562 , H01M6/18 , H01G9/025
CPC分类号： H01M6/40 , C23C14/042 , H01M4/02 , H01M4/13 , H01M4/139 , H01M4/5825 , H01M4/621 , H01M4/623 , H01M4/663 , H01M2004/028 , Y02E60/122 , Y10T29/49002 , Y10T29/5313
摘要： A magnetic handling assembly for thin-film processing of a substrate, a system and method for assembling and disassembling a shadow mask to cover a top of a workpiece for exposure to a processing condition. The assembly may include a magnetic handling carrier and a shadow mask disposed over, and magnetically coupled to, the magnetic handling carrier to cover a top of a workpiece that is to be disposed between the shadow mask and the magnetic handling carrier when exposed to a processing condition. A system includes a first chamber with a first support to hold the shadow mask, a second support to hold a handling carrier, and an alignment system to align the shadow mask a workpiece to be disposed between the carrier and shadow mask. The first and second supports are moveable relative to each other.
摘要翻译：用于基板薄膜处理的磁性处理组件，用于组装和拆卸荫罩以覆盖工件顶部以暴露于加工状态的系统和方法。组件可以包括磁性处理载体和荫罩，其设置在磁性处理载体上并且磁耦合到磁性处理载体以覆盖待暴露于加工过程中待设置在荫罩和磁性处理载体之间的工件的顶部条件。系统包括具有用于保持荫罩的第一支撑件的第一室，用于保持处理托架的第二支撑件以及将荫罩对准待设置在承载器和荫罩之间的工件的对准系统。第一和第二支撑件可相对于彼此移动。

3. 发明申请

WO2009109464A1 COATING APPARATUS WITH ROTATION MODULE 审中-公开
标题翻译：涂装装置与旋转模块
公开(公告)号：WO2009109464A1
公开(公告)日：2009-09-11
申请号：PCT/EP2009/051898
申请日：2009-02-18
申请人： APPLIED MATERIALS INC. , BANGERT, Stefan , KOENIG, Michael , SCHUESSLER, Uwe , GERTMANN, Reiner
发明人： BANGERT, Stefan , KOENIG, Michael , SCHUESSLER, Uwe , GERTMANN, Reiner
IPC分类号： C23C14/04 , C23C14/56 , C23C16/04 , C23C16/54 , H01L21/68 , H01L21/00
CPC分类号： C23C14/568 , C23C14/042 , C23C16/042 , C23C16/54 , H01L21/67173 , H01L21/682
摘要： The present invention refers to a method for coating a substrate, a coating apparatus for carrying out the method and a handling module for coating apparatuses. The handling module comprises a moveable support (13) for a substrate to be coated the support being movable between at least two positions. Further, a mask arranging device (415) for at least one of attaching and detaching a mask to the substrate, and a mask alignment device (415) for aligning the mask with respect to the substrate are provided for, wherein the mask alignment device (415) is attached to the movable support (13) so as to be movable together with the support. Alternatively, the handling module comprises a vacuum chamber, a moveable support (13) for a substrate to be coated, the support being arranged in the vacuum chamber and being rotatable between at least two positions, wherein a mask arranging device (415) for at least one of attaching and detaching a mask to the substrate is arranged within the vacuum chamber of the handling module.
摘要翻译：本发明涉及一种基材的涂布方法，实施该方法的涂布装置和涂布装置的处理模块。处理模块包括用于待涂覆的基底的可移动支撑件（13），所述支撑件可在至少两个位置之间移动。此外，提供了一种用于将掩模附着和分离至基板的掩模布置装置（415）和用于使掩模相对于基板对准的掩模对准装置（415），其中，掩模对准装置 415）附接到可动支撑件（13），以便与支撑件一起移动。替代地，处理模块包括真空室，用于待涂覆的基底的可移动支撑件（13），所述支撑件布置在真空室中并且可在至少两个位置之间旋转，其中，在处理模块的真空室内布置有至少一个将掩模附着和分离到基板上。

4. 发明申请

WO2009053290A1 METHOD FOR COATING AND APPARATUS 审中-公开
标题翻译：涂料和装置的方法
公开(公告)号：WO2009053290A1
公开(公告)日：2009-04-30
申请号：PCT/EP2008/063903
申请日：2008-10-15
申请人： APPLIED MATERIALS, INC. , KOENIG, Michael
发明人： KOENIG, Michael
IPC分类号： C23C14/18 , C23C14/24 , H01L51/56
CPC分类号： H01L51/0021 , C23C14/18 , C23C14/243 , H01L51/56
摘要： The invention relates to thin-film generating. A method is provided for coating a substrate with an evaporation material, the evaporation material comprising one or more metals chosen from the group consisting of light metals; noble metals; poor metals; alkaline earth metals; transition metals from the VI subgroup or VIII subgroup; and lanthanides, with the steps of providing the evaporation material, a portion of the evaporation material being oxidized; providing a reducing agent different from the evaporation material; heating the evaporation material and the reducing agent; wherein the evaporation material and the reducing agent are chosen such that due to the presence of the reducing agent the portion of the oxidized evaporation material is reduced and/or that the evaporation temperature of the oxide of the reducing agent is lower than or equal to the evaporation temperature of the evaporation material.
摘要翻译：本发明涉及薄膜生成。提供了一种用蒸发材料涂覆基材的方法，所述蒸发材料包含一种或多种选自轻金属的金属; 贵金属; 贫金属碱土金属; 来自VI亚组或VIII亚组的过渡金属; 和镧系元素，其中提供蒸发材料的步骤，蒸发材料的一部分被氧化; 提供不同于蒸发材料的还原剂; 加热蒸发材料和还原剂; 其中选择蒸发材料和还原剂，使得由于还原剂的存在，氧化蒸发材料的部分被还原和/或还原剂的氧化物的蒸发温度低于或等于蒸发材料的蒸发温度。

5. 发明申请

WO2008073426A1 PAPER SIZING COMPOSITION, SIZED PAPER, AND METHOD FOR SIZING PAPER 审中-公开
标题翻译：纸张尺寸组合物，尺寸纸和尺寸纸的方法
公开(公告)号：WO2008073426A1
公开(公告)日：2008-06-19
申请号：PCT/US2007/025324
申请日：2007-12-11
申请人： INTERNATIONAL PAPER COMPANY , SONG, Jay, Chen , YANG, Sen , HOLLMAIER, Larry , KOENIG, Michael , HONG, Yaoliang , PAMIDIMUKKALS, Krishna, M. , RENFRO, Michael , LIGUZINSKI, Benjamin, T.
发明人： SONG, Jay, Chen , YANG, Sen , HOLLMAIER, Larry , KOENIG, Michael , HONG, Yaoliang , PAMIDIMUKKALS, Krishna, M. , RENFRO, Michael , LIGUZINSKI, Benjamin, T.
IPC分类号： D21H19/38 , D21H21/52 , C08L3/02 , D21H17/28
CPC分类号： D21H19/385 , C08L3/02 , C08L3/10 , D21H17/28 , D21H21/52 , Y10T428/277 , C08L2666/06 , C08L2666/02
摘要： Embodiments of the present invention provide a paper surface sizing composition, a paper web coated on one or more sides or surfaces with a paper surface sizing composition, and a method for treating one or more sides of the paper web with a paper surface sizing composition to impart benefits relating to one or more of the following properties: (1) brightness; (2) opacity; (3) paper smoothness; (4) print quality; (5) optionally ink dry time ( e.g. , for ink jet printing where the sizing composition has option); and (6) optionally minimizing or eliminating edge welding ( e.g. , for paper webs used in, for example, form printing).
摘要翻译：本发明的实施方案提供一种纸表面施胶组合物，用纸表面施胶组合物涂布在一个或多个侧面或表面上的纸幅，以及用纸表面施胶组合物处理纸幅的一侧或多侧的方法，赋予与以下一个或多个性质有关的好处：（1）亮度; （2）不透明度; （3）纸张光滑度; （4）打印质量; （5）任选的油墨干燥时间（例如，用于喷墨印刷，其中施胶组合物具有选择性）; 和（6）可选地最小化或消除边缘焊接（例如，用于例如形成印刷的纸幅）。

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