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1. 发明申请

WO2008140982A1 SUBSTRATE CLEANING CHAMBER AND CLEANING AND CONDITIONING METHODS 审中-公开
标题翻译：基板清洗室和清洁和调节方法
公开(公告)号：WO2008140982A1
公开(公告)日：2008-11-20
申请号：PCT/US2008/062541
申请日：2008-05-02
申请人： APPLIED MATERIALS, INC. , MEHTA, Vineet H. , BROWN, Karl M. , PIPITONE, John A. , HOFFMAN, Daniel J. , SHANNON, Steven C. , MILLER, Keith A. , PARKHE, Vijay D.
发明人： MEHTA, Vineet H. , BROWN, Karl M. , PIPITONE, John A. , HOFFMAN, Daniel J. , SHANNON, Steven C. , MILLER, Keith A. , PARKHE, Vijay D.
IPC分类号： C25F1/00
CPC分类号： B08B7/0035 , C25F7/00 , H01J37/32009 , H01J37/32541 , H01L21/02046 , H01L21/0206
摘要： A substrate cleaning chamber includes a contoured ceiling electrode having an arcuate surface that faces a substrate support and has a variable cross-sectional thickness to vary the gap size between the arcuate surface and the substrate support to provide a varying plasma density across the substrate support. A dielectric ring for the cleaning chamber comprises a base, a ridge, and a radially inward ledge that covers the peripheral lip of the substrate support. A base shield comprises a circular disc having at least one perimeter wall. Cleaning and conditioning processes for the cleaning chamber are also described.
摘要翻译：衬底清洁室包括具有面向衬底支撑件并且具有可变横截面厚度的弓形表面的轮廓天花板电极，以改变弧形表面和衬底支撑件之间的间隙尺寸，以在衬底支撑件上提供变化的等离子体密度。用于清洁室的介电环包括覆盖基板支撑件的周缘的基部，脊和径向向内的凸缘。基座屏蔽件包括具有至少一个周边壁的圆盘。还描述了清洁室的清洁和调节过程。

2. 发明申请

WO2012116067A3 LITHIUM ION CELL DESIGN APPARATUS AND METHOD 审中-公开
公开(公告)号：WO2012116067A3
公开(公告)日：2012-08-30
申请号：PCT/US2012/026124
申请日：2012-02-22
申请人： APPLIED MATERIALS, INC. , BOLANDI, Hooman , ORILALL, Mahendra C. , PEBENITO, Victor , BROWN, Karl M. , KUTNEY, Michael C. , WANG, Connie P. , BACHRACH, Robert Z.
发明人： BOLANDI, Hooman , ORILALL, Mahendra C. , PEBENITO, Victor , BROWN, Karl M. , KUTNEY, Michael C. , WANG, Connie P. , BACHRACH, Robert Z.
IPC分类号： H01M4/139 , H01M2/16 , H01M10/0525 , B05D1/02 , H01M10/058
摘要： A spray module for depositing an electro-active material over a flexible conductive substrate is provided. The spray module comprises a first heated roller for heating and transferring the flexible conductive substrate, a second heated roller for heating and transferring the flexible conductive substrate, a first spray dispenser positioned adjacent to the first heated roller for depositing electro-active material onto the flexible conductive substrate as the flexible conductive substrate is heated by the first heated roller, and a second spray dispenser positioned adjacent to the second heated roller for depositing electro-active material over the flexible conductive substrate as the flexible conductive substrate is heated by the second heated roller.

3. 发明申请

WO2011028529A2 IN-SITU DEPOSITION OF BATTERY ACTIVE LITHIUM MATERIALS BY THERMAL SPRAYING 审中-公开
标题翻译：热喷涂原位沉积电池活性锂材料
公开(公告)号：WO2011028529A2
公开(公告)日：2011-03-10
申请号：PCT/US2010/046501
申请日：2010-08-24
申请人： APPLIED MATERIALS, INC. , SHANG, Quanyuan , YANG, Lu , BROWN, Karl M. , OLGADO, Donald J. K. , PEBENITO, Victor , BOLANDI, Hooman , ISHIKAWA, Tetsuya , BACHRACH, Robert Z. , CHEN, Liang-Yuh
发明人： SHANG, Quanyuan , YANG, Lu , BROWN, Karl M. , OLGADO, Donald J. K. , PEBENITO, Victor , BOLANDI, Hooman , ISHIKAWA, Tetsuya , BACHRACH, Robert Z. , CHEN, Liang-Yuh
IPC分类号： C23C4/12 , C23C4/04 , C23C4/18 , B05D1/08 , B05D3/00 , B05D7/14
CPC分类号： H01M4/0419 , H01M4/1391
摘要： A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising electrochemically active precursor particles dispersed in a carrying medium is provided to a processing chamber and thermally treated using a combustible gas mixture also provided to the chamber. The precursor is converted to nanocrystals by the thermal energy, and the nanocrystals are deposited on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity.
摘要翻译：提供了一种用于形成薄膜电池的电化学层的方法和设备。将包含分散于载运介质中的电化学活性前体颗粒的前体混合物提供至处理室并使用也提供至该室的可燃气体混合物进行热处理。前体通过热能转化成纳米晶体，并且纳米晶体沉积在基底上。第二种前体可以与纳米晶体混合，因为它们沉积在表面上以增强附着力和导电性。

4. 发明申请

WO2013009457A2 METHODS TO FABRICATE VARIATIONS IN POROSITY OF LITHIUM ION BATTERY ELECTRODE FILMS 审中-公开
标题翻译：制备锂离子电池电极薄膜孔隙度变化的方法
公开(公告)号：WO2013009457A2
公开(公告)日：2013-01-17
申请号：PCT/US2012/044022
申请日：2012-06-25
申请人： APPLIED MATERIALS, INC. , BROWN, Karl M. , BOLANDI, Hooman , PEBENITO, Victor , HOOG, Josef Thomas , WANG, Connie P.
发明人： BROWN, Karl M. , BOLANDI, Hooman , PEBENITO, Victor , HOOG, Josef Thomas , WANG, Connie P.
IPC分类号： H01M4/139 , H01M4/66 , H01M10/052 , H01M4/36 , B05D1/04
CPC分类号： H01M10/0525 , H01M4/0404 , H01M4/0419 , H01M4/0435 , H01M4/131 , H01M4/1391 , H01M4/485 , H01M4/505 , H01M4/525 , H01M4/5825 , Y02E60/122 , Y02P70/54
摘要： A method and apparatus for forming lithium-ion batteries and battery cell components, and more specifically, to a system and method for fabricating such batteries and battery cell components using deposition processes that form three-dimensional porous structures are provided. One method comprises texturing a conductive substrate by calendering the conductive substrate between opposing wire mesh structures, forming a first layer of cathodically active material having a first porosity on the surface of the textured conductive substrate, and forming a second layer of cathodically active material having a second porosity on the first layer, wherein the second porosity is greater than the first porosity.
摘要翻译：本发明涉及一种用于形成锂离子电池和电池单体部件的方法和设备，并且更具体地涉及使用沉积工艺来制造这种电池和电池单体部件的系统和方法，所述沉积工艺形成三维多孔结构被提供。一种方法包括通过在相对的金属丝网结构之间压延导电衬底来纹理化导电衬底，在纹理化导电衬底的表面上形成具有第一孔隙率的第一层阴极活性材料，以及形成第二层阴极活性材料，在第一层上的第二孔隙率，其中第二孔隙率大于第一孔隙率。

5. 发明申请

WO2010033904A2 SHUTTER DISK FOR PHYSICAL VAPOR DEPOSITION CHAMBER 审中-公开
标题翻译：用于物理蒸气沉积室的快门盘
公开(公告)号：WO2010033904A2
公开(公告)日：2010-03-25
申请号：PCT/US2009/057663
申请日：2009-09-21
申请人： APPLIED MATERIALS, INC. , BROWN, Karl M. , SCHALLER, Jason
发明人： BROWN, Karl M. , SCHALLER, Jason
IPC分类号： H01L21/203
CPC分类号： C23C14/564 , H01J37/3408 , H01J37/3447
摘要： A shutter disk suitable for shield a substrate support in a physical vapor deposition chamber is provided. In one embodiment, the shutter disk includes a disk-shaped body having an outer diameter disposed between a top surface and a bottom surface. The disk-shape body includes a double step connecting the bottom surface to the outer diameter.
摘要翻译：提供了一种适用于在物理气相沉积室中屏蔽衬底支撑件的光闸盘。在一个实施例中，遮盘包括具有设置在顶表面和底表面之间的外径的盘形主体。盘形主体包括连接底面和外径的双重台阶。

6. 发明申请

WO2015060999A1 METHOD FOR FORMING AN ELECTROSTATIC CHUCK USING FILM PRINTING TECHNOLOGY 审中-公开
标题翻译：使用电影印刷技术形成静电卡盘的方法
公开(公告)号：WO2015060999A1
公开(公告)日：2015-04-30
申请号：PCT/US2014/058167
申请日：2014-09-30
申请人： APPLIED MATERIALS, INC.
发明人： BROWN, Karl M.
IPC分类号： H01L21/683 , H02N13/00 , B23Q3/08
CPC分类号： C23C28/32 , C23C28/34 , H01L21/6831 , H02N13/00
摘要： In one embodiment, a method for forming an electrostatic chuck includes forming vias in a ceramic plate and printing a metal paste in the vias and curing the ceramic plate. The method includes printing the metal paste on a front surface of the ceramic plate and curing the ceramic plate, and printing the metal paste on a bottom surface of the ceramic plate and curing the ceramic plate to form one or more contact pads. The method also includes printing a dielectric film on the front surface of the ceramic plate and curing the ceramic plate. The method may further include printing one or more heating elements on a bottom surface of the ceramic plate and curing the ceramic plate, printing the dielectric film on the bottom, and bonding the ceramic plate to a backing plate.
摘要翻译：在一个实施例中，用于形成静电卡盘的方法包括在陶瓷板中形成通孔并在通孔中印刷金属膏并固化陶瓷板。该方法包括将金属膏印刷在陶瓷板的前表面上并固化陶瓷板，并将金属膏印刷在陶瓷板的底表面上并固化陶瓷板以形成一个或多个接触垫。该方法还包括在陶瓷板的前表面上印刷电介质膜并固化陶瓷板。该方法还可以包括在陶瓷板的底表面上印刷一个或多个加热元件并固化陶瓷板，将电介质膜印刷在底部上，并将陶瓷板粘合到背板上。

7. 发明申请

WO2011028527A3 IN-SITU DEPOSITION OF BATTERY ACTIVE LITHIUM MATERIALS BY PLASMA SPRAYING 审中-公开
公开(公告)号：WO2011028527A3
公开(公告)日：2011-03-10
申请号：PCT/US2010/046498
申请日：2010-08-24
申请人： APPLIED MATERIALS, INC. , SHANG, Quanyuan , YANG, Lu , BROWN, Karl M. , OLGADO, Donald J., K. , PEBENITO, Victor , BOLANDI, Hooman , ISHIKAWA, Tetsuya , BACHRACH, Robert Z. , CHEN, Liang-Yuh
发明人： SHANG, Quanyuan , YANG, Lu , BROWN, Karl M. , OLGADO, Donald J., K. , PEBENITO, Victor , BOLANDI, Hooman , ISHIKAWA, Tetsuya , BACHRACH, Robert Z. , CHEN, Liang-Yuh
IPC分类号： C23C4/12 , C23C4/04 , C23C4/18 , B05D1/04 , B05D3/00 , B05D7/14
摘要： A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising precursor particles dispersed in a carrying medium is activated in an activation chamber by application of an electric field to ionize at least a portion of the precursor mixture. The activated precursor mixture is then mixed with a combustible gas mixture to add thermal energy to the precursor particles, converting them to nanocrystals, which deposit on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity

8. 发明申请

WO2009114184A2 PHYSICAL VAPOR DEPOSITION METHOD WITH A SOURCE OF ISOTROPIC ION VELOCITY DISTRIBUTION AT THE WAFER SURFACE 审中-公开
标题翻译：具有等离子体速度分布在水面上的物理蒸气沉积方法
公开(公告)号：WO2009114184A2
公开(公告)日：2009-09-17
申请号：PCT/US2009/001611
申请日：2009-03-12
申请人： APPLIED MATERIALS, INC.
发明人： HOFFMAN, Daniel J. , BROWN, Karl M. , RUI, Ying , PIPITONE, John
IPC分类号： H01L21/203
CPC分类号： C23C14/35 , C23C14/3471 , C23C14/50 , C23C14/542 , H01J37/32091 , H01J37/32174 , H01J37/32577 , H01J37/3266 , H01J37/32706 , H01J37/32715 , H01J37/34 , H01J37/3444
摘要： In a plasma enhanced physical vapor deposition of a material onto workpiece, a metal target faces the workpiece across a target-to-workpiece gap less than a diameter of the workpiece. A carrier gas is introduced into the chamber and gas pressure in the chamber is maintained above a threshold pressure at which mean free path is less than 5% of the gap. RF plasma source power from a VHF generator is applied to the target to generate a capacitively coupled plasma at the target, the VHF generator having a frequency exceeding 30 MHz. The plasma is extended across the gap to the workpiece by providing through the workpiece a first VHF ground return path at the frequency of the VHF generator.
摘要翻译：在等离子体中将材料物理气相沉积到工件上时，金属靶在工件间距小于工件直径的工件间距对象。将载气引入室中，并且室中的气体压力保持在平均自由程小于间隙的5％的阈值压力以上。来自VHF发生器的RF等离子体源功率被施加到目标以在目标处产生电容耦合等离子体，VHF发生器具有超过30MHz的频率。通过在VHF发生器的频率处提供穿过工件的第一VHF接地返回路径，等离子体跨越间隙延伸到工件。

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