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1. 发明申请

WO1997038341A1 CONFOCAL OPTICAL APPARATUS 审中-公开
标题翻译：共焦光学装置
公开(公告)号：WO1997038341A1
公开(公告)日：1997-10-16
申请号：PCT/JP1997001192
申请日：1997-04-08
申请人： KOMATSU LTD. , MATSUNO, Kiyonori , WAKAI, Hideyuki , SUZUKI, Toru , ANDO, Manabu , SUDA, Eri
发明人： KOMATSU LTD.
IPC分类号： G02B21/36
CPC分类号： G02B21/004 , G01B11/306
摘要： A confocal optical apparatus provided with a point light source array adapted to generate light from a plurality of arranged point light sources, an objective lens adapted to focus the light generated by this point light source array on an inspection surface, and a light-receiving element array in which a plurality of light-receiving parts for receiving light reflected from an object to be measured on the inspection surface via the objective lens are arranged. The sizes of the light-receiving parts are varied in accordance with the aberrations of the objective lens so that the aberrations and distortion may be absorbed reliably without improving the performance of the lenses used in the confocal optical system, and a correct and highly accurate measurement may be conducted.
摘要翻译：一种共焦光学装置，其具有适于从多个排列的点光源产生光的点光源阵列，适于将由该点光源阵列产生的光聚焦在检查面上的物镜，以及光接收元件阵列，其中布置有用于经由物镜在检查表面上接收从被测量对象反射的光的多个受光部。光接收部分的尺寸根据物镜的像差而变化，从而可以可靠地吸收像差和畸变，而不改进在共焦光学系统中使用的透镜的性能，以及正确和高精度的测量可以进行。

2. 发明申请

WO1992011114A1 WORK INSTRUCTION SYSTEM AND CONVEYANCE CONTROL SYSTEM IN PRODUCTION LINE 审中-公开
标题翻译：生产线工程指导系统和输送控制系统
公开(公告)号：WO1992011114A1
公开(公告)日：1992-07-09
申请号：PCT/JP1991001752
申请日：1991-12-24
申请人： KABUSHIKI KAISHA KOMATSU SEISAKUSHO , YAO, Yoshihiro , MIYAMOTO, Nobuo , WAKAI, Hideyuki
发明人： KABUSHIKI KAISHA KOMATSU SEISAKUSHO
IPC分类号： B23P21/00
CPC分类号： B23P21/004 , B23P2700/50 , B23Q41/08 , G05B19/41865 , Y02P90/12 , Y02P90/20 , Y02P90/28
摘要： An object of this invention is to provide efficient operations of a production line for producing finished products by performing working in which a variety of parts are selectively combined with one another during a plurality of processes. A semi-finished product produced in processes (1 and 2) is assigned a product number; parts serving as raw materials, a supplier of the semi-finished product, or a destination of the semi-finished product or part are specified; and these specified data are distributed and transmitted from a higher level system (4) to respective control systems (5, 6, 7 and 8) as planned data to be executed and planned data to be received. The respective systems display the contents of the data thus transmitted on display sections (52, 62, 72 and 82), issue work instructions on the basis of the contents of the data, and output request instructions to the systems (6, 7 and 8) of the supplier side on the basis of the displayed contents or output supply instructions to the destination systems (5, 6 and 7). The system which has received the request instruction outputs a conveyance instruction to the conveyance control system (9) to convey the raw materials to the system which has output the request instruction, while the system which has received the supply instruction outputs a conveyance instruction to the conveyance control system (9) to convey the raw material from the system which has output the supply instruction.
摘要翻译：本发明的一个目的是提供一种用于生产成品的生产线的有效操作，通过执行在多个工艺中各种部件彼此选择性地组合的工作。在方法（1和2）中生产的半成品被分配产品编号; 指定作为原材料的部件，半成品供应商或半成品或部件的目的地; 并且这些指定的数据被分配并从较高级系统（4）发送到相应的控制系统（5,6,7和8），作为待执行的计划数据和待接收的计划数据。相应的系统显示在显示部分（52,62,72和82）上发送的数据的内容，基于数据的内容发出工作指令，并向系统（6,7和8）输出请求指令）根据显示的内容或输出供给指示到目的地系统（5,6和7）。已经接收到请求指令的系统向输送控制系统（9）输出输送指令，以将原材料输送到输出请求指令的系统，而接收到供给指令的系统向输送控制系统（9）从输出供给指令的系统输送原料。

3. 发明申请

WO1997040412A1 CONFOCAL OPTICAL APPARATUS AND HOLOGRAM EXPOSURE APPARATUS 审中-公开
标题翻译：共焦光学装置和全息曝光装置
公开(公告)号：WO1997040412A1
公开(公告)日：1997-10-30
申请号：PCT/JP1997001408
申请日：1997-04-23
申请人： KOMATSU LTD. , MORIYA, Masato , MIZUKAMI, Hiroyuki , SUZUKI, Toru , WAKAI, Hideyuki , NAKAIKE, Takanori , SEKI, Masanobu
发明人： KOMATSU LTD.
IPC分类号： G02B21/00
CPC分类号： G03F7/70483 , G01B11/2441 , G02B21/004 , G02B21/0052 , G03H1/04
摘要： A confocal optical apparatus where reference light beam is directed diagonally to a hologram (3), the reference light is diffracted by the hologram (3), light beams equivalent to the light beams emitted from point light sources and outgoing from pinholes of a pinhole array (4) are produced, the light beams are projected onto an object, and object light, i.e., reflected light therefrom is focused at the pinholes. An incident light beam shaping means for shaping the cross section of the reference light beam into a generally circular shape is provided in the light path of the reference light beam.
摘要翻译：一种共焦光学装置，其中参考光束对角地对准全息图（3），参考光被全息图（3）衍射，等效于从点光源发射并从针孔阵列的针孔射出的光束（4），光束被投射到物体上，并且物体光，即其上的反射光聚焦在针孔处。在参考光束的光路中设置用于将参考光束的横截面成大致圆形的入射光束整形装置。

4. 发明申请

WO1996030807A1 THREE-DIMENSIONAL DISPLAY ARTICLE AND PRODUCTION METHOD THEREOF 审中-公开
标题翻译：三维显示文章及其制作方法
公开(公告)号：WO1996030807A1
公开(公告)日：1996-10-03
申请号：PCT/JP1996000745
申请日：1996-03-22
申请人： KOMATSU LTD. , SUZUKI, Toru , WAKAI, Hideyuki , ANDO, Manabu , MIZUKAMI, Hiroyuki
发明人： KOMATSU LTD.
IPC分类号： G03B35/08
CPC分类号： G02B27/22 , G02B27/2214 , G03B35/08 , G03B35/24 , G03H1/08
摘要： A method of producing a three-dimensional cubic display article by using a diffractive sheet material S corresponding to a small-lens array S, wherein parallel rays of light incident on the sheet material are converged at a plurality of points on its rear surface. The method comprises the first step of approximating the surface of an article P, which is desired to be displayed, by a set of profile points P1 to Pn, and calculating each diffraction position Q11 to Qnm on the rear surface of the sheet material while assuming a beam of light is emitted from each of these profile points to the sheet material; and the second step of directly recording the color gradation corresponding to each profile point to each position of the rear surface of the sheet material calculated by the first step. Beautiful three-dimensional display can be accomplished within a short time without using exposure equipment, development equipment and a light source for reproduction.
摘要翻译：通过使用与小透镜阵列S相对应的衍射片材S制造三维立体显示物品的方法，其中入射到片材上的平行光线在其后表面上的多个点处会聚。该方法包括通过一组轮廓点P1至Pn近似待期待显示的物品P的表面的第一步骤，并且在假设时计算片材的后表面上的每个衍射位置Q11至Qnm 这些轮廓点中的每一个都将光束发射到片材; 以及将与每个轮廓点对应的颜色等级直接记录到由第一步骤计算的片材的后表面的每个位置的第二步骤。美丽的三维显示可以在短时间内完成，而不需要使用曝光设备，开发设备和用于再现的光源。

5. 发明申请

WO1997037378A1 VISUAL INSPECTION DEVICE FOR WAFER BUMP AND HEIGHT MEASURING DEVICE 审中-公开
标题翻译：用于防水和高度测量装置的视觉检测装置
公开(公告)号：WO1997037378A1
公开(公告)日：1997-10-09
申请号：PCT/JP1997001078
申请日：1997-03-28
申请人： KOMATSU LTD. , TERADA, Keiji , TADA, Shigeyuki , MORIYA, Masato , TANAKA, Hiroshi , WAKAI, Hideyuki , OKAMOTO, Takeshi
发明人： KOMATSU LTD.
IPC分类号： H01L21/66
CPC分类号： G01N21/9501 , H01L22/12
摘要： A device corrects a positioning error of a wafer with accuracy in a short period of time and performs visual inspection of bumps with accuracy at high speed. In the device, a wafer is positioned in coordinate axes of a predetermined coordinate system. A coordinate position on the coordinate system, to which a measuring visual field should move, is set so that all the bumps on the wafer is imaged by visual means. When the wafer is positioned, a rotating dislocation of the wafer with an origin of coordinates of the coordinate system as the center of rotation is detected. Respective set coordinate positions of the measuring visual field are subjected to rotating conversion as much as the detected rotating dislocation in the coordinate system and are corrected. Further, relative positions and attitudes of the wafer and the visual means are changed so that the measuring visual field is successively moved to the respective corrected coordinate positions.
摘要翻译：设备在短时间内精确地校正晶片的定位误差，并以高速精确地进行凸块的目视检查。在该装置中，晶片位于预定坐标系的坐标轴上。设置测量视野应该移动的坐标系上的坐标位置，使得通过视觉方式对晶片上的所有凸块进行成像。当晶片定位时，检测到具有作为旋转中心的坐标系的坐标原点的晶片的旋转位错。对测量视野的各设定坐标位置进行与坐标系中所检测的旋转位错一样多的旋转变换并进行校正。此外，改变晶片和视觉装置的相对位置和态度，使得测量视野被连续地移动到相应的校正坐标位置。

6. 发明申请

WO1997017625A1 OPTICAL APERTURE DEVICE 审中-公开
标题翻译：光学光学器件
公开(公告)号：WO1997017625A1
公开(公告)日：1997-05-15
申请号：PCT/JP1996003306
申请日：1996-11-11
申请人： KOMATSU LTD. , MATSUNO, Kiyonori , WAKAI, Hideyuki
发明人： KOMATSU LTD.
IPC分类号： G02B05/00
CPC分类号： G02B5/005
摘要： An optical aperture device having a pinhole for providing a point light source, wherein the pinhole is formed in a plurality of layers spaced with gaps. This simple structure provides a unifocal point light source having a small spot diameter.
摘要翻译：一种具有用于提供点光源的针孔的光学孔装置，其中所述针孔形成为间隔开的多个层。这种简单的结构提供了具有小光点直径的单焦点光源。

7. 发明申请

WO1996010728A1 CONFOCUS OPTICAL APPARATUS 审中-公开
标题翻译：配镜光学装置
公开(公告)号：WO1996010728A1
公开(公告)日：1996-04-11
申请号：PCT/JP1995002006
申请日：1995-10-02
申请人： KOMATSU LTD. , WAKAI, Hideyuki , MORIYA, Masato
发明人： KOMATSU LTD.
IPC分类号： G01B11/24
CPC分类号： G01B11/2441
摘要： A confocus optical apparatus includes an aperture array having a plurality of apertures disposed two-dimensionally, an object of measurement disposed on a predetermined inspection surface, optical means for guiding light so that the aperture array position can b a first condensing position and the inspection surface position can be a second focusing position, a light source for reference light of a hologram, the hologram disposed at a predetermined position between the aperture array and the inspection surface, for reproducing light equivalent to light emitted from each spot light source through each aperture of the aperture array to this predetermined position, by using light from the light source as reference light, and an optical detector array having a plurality of optical detectors for detecting light passing through each aperture of the aperture array, disposed on the opposite side to the optical means while interposing the aperture array between them, wherein reproducing light of the hologram scattered by the measured article is allowed to be incident into each optical detector of the optical detector array through the hologram, the optical means and the aperture array. In this way, the size and weight of the apparatus can be reduced, three-dimensional shape measurement can be made highly accurately and at a high speed, positioning of each portion can be made easily, and utilization efficiency of light source light can be improved.
摘要翻译：焦点光学装置包括孔径阵列，其具有二维布置的多个孔，设置在预定检查表面上的测量对象，用于引导光的光学装置，使得孔径阵列位置可以第一聚光位置和检查表面位置可以是第二聚焦位置，用于全息图的参考光的光源，设置在孔径阵列和检查表面之间的预定位置处的全息图，用于再现与每个点光源发射的光通过孔径阵列通过使用来自光源的光作为参考光;以及光学检测器阵列，具有多个光学检测器，用于检测通过孔径阵列的每个孔的光，该光检测器阵列设置在与光学装置相反的一侧同时在它们之间插入孔径阵列，其中再现光o f所测量的物品散射的全息图被允许通过全息图，光学装置和孔径阵列入射到光学检测器阵列的每个光学检测器中。以这种方式，可以减小装置的尺寸和重量，可以高精度地，高速地进行三维形状的测量，能够容易地进行各部位的定位，能够提高光源光的利用效率。

8. 发明申请

WO1995009346A1 CONFOCAL OPTICAL APPARATUS 审中-公开
标题翻译：共焦光学装置
公开(公告)号：WO1995009346A1
公开(公告)日：1995-04-06
申请号：PCT/JP1994001633
申请日：1994-09-30
申请人： KABUSHIKI KAISHA KOMATSU SEISAKUSHO , WAKAI, Hideyuki , MIZOGUCHI, Kiyokazu , SUZUKI, Toru , TERADA, Keiji , MORIYA, Masato , ANDO, Manabu , SHIO, Koji
发明人： KABUSHIKI KAISHA KOMATSU SEISAKUSHO
IPC分类号： G01B11/24
CPC分类号： G01B11/24 , G01B11/026 , G02B5/32
摘要： A confocal optical apparatus includes a ligth source, a first aperture portion for passing light emitted from the light source and shaping it into a spot, an objective lens for converging the light passing through the first aperture portion on an object to be measured, a second aperture portion positioned on a plane conjugate with the surface of the object where the light falls, and an optical detector for detecting light passing through the second aperture portions. The first and second aperture portions are disposed at the same position so that the same aperture can be shared. The detection surface of the optical detector is disposed in substantially the same plane as the shared aperture. In this way, the size and the weight of the apparatus can be reduced, measurement of a three-dimensional shape can be made at a high speed and highly accurately, and positioning of each portion can be made easily.
摘要翻译：共焦光学装置包括：光源，用于使从光源发射的光并将其成形为点的第一开口部分，用于将通过第一开口部分的光聚焦在被测量物体上的物镜;第二位于与光入射物体的表面共轭的平面上的开口部，以及用于检测通过第二开口部的光的光检测器。第一和第二开口部分设置在相同的位置，使得能够共享相同的孔。光检测器的检测表面设置在与共享孔基本相同的平面上。以这种方式，可以减小装置的尺寸和重量，可以高速高精度地进行三维形状的测量，并且可以容易地进行各部分的定位。

9. 发明申请

WO1997043678A1 TELECENTRIC OPTICAL DEVICE 审中-公开
标题翻译：电光设备
公开(公告)号：WO1997043678A1
公开(公告)日：1997-11-20
申请号：PCT/JP1997001560
申请日：1997-05-09
申请人： KOMATSU LTD. , WAKAI, Hideyuki , TERADA, Keiji , MORIYA, Masato
发明人： KOMATSU LTD.
IPC分类号： G02B21/00
CPC分类号： G01B11/2441 , G02B13/22
摘要： A telecentric optical device comprising an object provided on a predetermined test face, a telecentric optical means in which a first lens and a second lens are spaced from each other at a distance equal to the sum of the focal lengths of the first and second lenses and the focal point of the second lens is on the test face, a hologram reference light source, a hologram which is placed in a predetermined position between the first and second lenses and apart from the first lens by the focal length of the first lens and which is exposed so as to diffract the light from the reference light source and reproduce light equivalent to the light which is produced by one or a plurality of point source, emitted from the focal point of the first lens and passes through the predetermined position, a photodetector which is placed near the focal point of the first lens and detects the hologram reproducing light which is reflected by the object and made to pass through the telecentric optical means. Exposure of the hologram resulting in reproduction of the hologram reproducing light from a part of the hologram is performed to restrict a light passing region in the telecentric optical system without lowering the light utilization efficiency and the numerical aperture of the photodetecting system.
摘要翻译：一种远心光学装置，包括设置在预定测试面上的物体，远心光学装置，其中第一透镜和第二透镜彼此间隔开等于第一透镜和第二透镜的焦距之和的距离;以及第二透镜的焦点位于测试面上，全息参考光源，全息图被放置在第一透镜和第二透镜之间的预定位置，并且与第一透镜分离第一透镜的焦距，并且其中被曝光以衍射来自参考光源的光，并且再现与从第一透镜的焦点发射并通过预定位置的一个或多个点光源产生的光相当的光，光电检测器其放置在第一透镜的焦点附近，并且检测被物体反射并使其通过远心光学装置的全息图再现光。执行导致从全息图的一部分再现全息图的全息图的曝光，以限制远心光学系统中的光通过区域，而不降低光利用效率和光电检测系统的数值孔径。

10. 发明申请

WO1997043597A1 OPTICAL THREE-DIMENSIONAL MEASURING INSTRUMENT, AND HOLOGRAM EXPOSURE METHOD AND OPTICAL AXIS ADJUSTMENT METHOD IN THE MEASURING INSTRUMENT 审中-公开
标题翻译：光学三维测量仪器和测量仪器中的霍尔姆森曝光方法和光轴调整方法
公开(公告)号：WO1997043597A1
公开(公告)日：1997-11-20
申请号：PCT/JP1997001644
申请日：1997-05-15
申请人： KOMATSU LTD. , WAKAI, Hideyuki , NARA, Hisashi , ANDO, Manabu , NAKAIKE, Takanori , ABE, Shinichi , SEKI, Masanobu , MORIYA, Masato
发明人： KOMATSU LTD.
IPC分类号： G01B11/24
CPC分类号： G01B11/24
摘要： An optical three-dimensional measuring instrument in which confocal optical system comprising a hologram (3), a pinhole array (4) and a photodetector array (8) is provided two dimensionally and a light source (1) having coherence, comprising an inspection stage for supporting an object to be measured, a projection unit (22) for supporting an objective lens (5a) and the hologram to an optical axis portion and having a reference light incidence optical system (A) for causing reference light to be incident on the hologram, a pinhole array unit (22) for supporting the objective lens and the pinhole array to the optical axis portion, a measuring unit (24) for supporting relay lenses (7a, 7b) and the photodetector array to the optical axis portion, an object light incidence optical system (B) for causing object light to be incident on the hologram, and an exposure unit (34) having a reference light incidence optical system at the time of exposure, for causing reference light at the time of exposure, which branches from the object light incidence optical system, to be incident on the hologram. The projection unit, the pinhole array unit and the measuring unit are stacked from below in this order named on the inspection stage. The measuring unit and the exposure unit are exchangeable.
摘要翻译：一种光学三维测量仪器，其中包括全息图（3），针孔阵列（4）和光电检测器阵列（8）的共焦光学系统二维地提供并具有相干性的光源（1），包括检查台用于支撑待测物体的投影单元（22），用于将物镜（5a）和所述全息图支撑到光轴部分，并具有参考光入射光学系统（A），用于使参考光入射到所述光轴上全息图，用于将物镜支撑并将针孔阵列支撑到光轴部分的针孔阵列单元（22），用于将中继透镜（7a，7b）和光电检测器阵列支撑到光轴部分的测量单元（24），对象光入射光学系统（B），用于使物体光入射到全息图上;以及曝光单元，其在曝光时具有参考光入射光学系统，用于在e时引起参考光从物体光入射光学系统分支的曝光将入射到全息图上。投影单元，针孔阵列单元和测量单元从下方按照在检查台上命名的顺序堆叠。测量单元和曝光单元是可更换的。

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