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    • 2. 发明申请
    • CONFOCAL OPTICAL APPARATUS
    • 共焦光学装置
    • WO1995009346A1
    • 1995-04-06
    • PCT/JP1994001633
    • 1994-09-30
    • KABUSHIKI KAISHA KOMATSU SEISAKUSHOWAKAI, HideyukiMIZOGUCHI, KiyokazuSUZUKI, ToruTERADA, KeijiMORIYA, MasatoANDO, ManabuSHIO, Koji
    • KABUSHIKI KAISHA KOMATSU SEISAKUSHO
    • G01B11/24
    • G01B11/24G01B11/026G02B5/32
    • A confocal optical apparatus includes a ligth source, a first aperture portion for passing light emitted from the light source and shaping it into a spot, an objective lens for converging the light passing through the first aperture portion on an object to be measured, a second aperture portion positioned on a plane conjugate with the surface of the object where the light falls, and an optical detector for detecting light passing through the second aperture portions. The first and second aperture portions are disposed at the same position so that the same aperture can be shared. The detection surface of the optical detector is disposed in substantially the same plane as the shared aperture. In this way, the size and the weight of the apparatus can be reduced, measurement of a three-dimensional shape can be made at a high speed and highly accurately, and positioning of each portion can be made easily.
    • 共焦光学装置包括:光源,用于使从光源发射的光并将其成形为点的第一开口部分,用于将通过第一开口部分的光聚焦在被测量物体上的物镜;第二 位于与光入射物体的表面共轭的平面上的开口部,以及用于检测通过第二开口部的光的光检测器。 第一和第二开口部分设置在相同的位置,使得能够共享相同的孔。 光检测器的检测表面设置在与共享孔基本相同的平面上。 以这种方式,可以减小装置的尺寸和重量,可以高速高精度地进行三维形状的测量,并且可以容易地进行各部分的定位。
    • 3. 发明申请
    • OPTICAL THREE-DIMENSIONAL MEASURING INSTRUMENT, AND HOLOGRAM EXPOSURE METHOD AND OPTICAL AXIS ADJUSTMENT METHOD IN THE MEASURING INSTRUMENT
    • 光学三维测量仪器和测量仪器中的霍尔姆森曝光方法和光轴调整方法
    • WO1997043597A1
    • 1997-11-20
    • PCT/JP1997001644
    • 1997-05-15
    • KOMATSU LTD.WAKAI, HideyukiNARA, HisashiANDO, ManabuNAKAIKE, TakanoriABE, ShinichiSEKI, MasanobuMORIYA, Masato
    • KOMATSU LTD.
    • G01B11/24
    • G01B11/24
    • An optical three-dimensional measuring instrument in which confocal optical system comprising a hologram (3), a pinhole array (4) and a photodetector array (8) is provided two dimensionally and a light source (1) having coherence, comprising an inspection stage for supporting an object to be measured, a projection unit (22) for supporting an objective lens (5a) and the hologram to an optical axis portion and having a reference light incidence optical system (A) for causing reference light to be incident on the hologram, a pinhole array unit (22) for supporting the objective lens and the pinhole array to the optical axis portion, a measuring unit (24) for supporting relay lenses (7a, 7b) and the photodetector array to the optical axis portion, an object light incidence optical system (B) for causing object light to be incident on the hologram, and an exposure unit (34) having a reference light incidence optical system at the time of exposure, for causing reference light at the time of exposure, which branches from the object light incidence optical system, to be incident on the hologram. The projection unit, the pinhole array unit and the measuring unit are stacked from below in this order named on the inspection stage. The measuring unit and the exposure unit are exchangeable.
    • 一种光学三维测量仪器,其中包括全息图(3),针孔阵列(4)和光电检测器阵列(8)的共焦光学系统二维地提供并具有相干性的光源(1),包括检查台 用于支撑待测物体的投影单元(22),用于将物镜(5a)和所述全息图支撑到光轴部分,并具有参考光入射光学系统(A),用于使参考光入射到所述光轴上 全息图,用于将物镜支撑并将针孔阵列支撑到光轴部分的针孔阵列单元(22),用于将中继透镜(7a,7b)和光电检测器阵列支撑到光轴部分的测量单元(24), 对象光入射光学系统(B),用于使物体光入射到全息图上;以及曝光单元,其在曝光时具有参考光入射光学系统,用于在e时引起参考光 从物体光入射光学系统分支的曝光将入射到全息图上。 投影单元,针孔阵列单元和测量单元从下方按照在检查台上命名的顺序堆叠。 测量单元和曝光单元是可更换的。
    • 4. 发明申请
    • THREE-DIMENSIONAL DISPLAY ARTICLE AND PRODUCTION METHOD THEREOF
    • 三维显示文章及其制作方法
    • WO1996030807A1
    • 1996-10-03
    • PCT/JP1996000745
    • 1996-03-22
    • KOMATSU LTD.SUZUKI, ToruWAKAI, HideyukiANDO, ManabuMIZUKAMI, Hiroyuki
    • KOMATSU LTD.
    • G03B35/08
    • G02B27/22G02B27/2214G03B35/08G03B35/24G03H1/08
    • A method of producing a three-dimensional cubic display article by using a diffractive sheet material S corresponding to a small-lens array S, wherein parallel rays of light incident on the sheet material are converged at a plurality of points on its rear surface. The method comprises the first step of approximating the surface of an article P, which is desired to be displayed, by a set of profile points P1 to Pn, and calculating each diffraction position Q11 to Qnm on the rear surface of the sheet material while assuming a beam of light is emitted from each of these profile points to the sheet material; and the second step of directly recording the color gradation corresponding to each profile point to each position of the rear surface of the sheet material calculated by the first step. Beautiful three-dimensional display can be accomplished within a short time without using exposure equipment, development equipment and a light source for reproduction.
    • 通过使用与小透镜阵列S相对应的衍射片材S制造三维立体显示物品的方法,其中入射到片材上的平行光线在其后表面上的多个点处会聚。 该方法包括通过一组轮廓点P1至Pn近似待期待显示的物品P的表面的第一步骤,并且在假设时计算片材的后表面上的每个衍射位置Q11至Qnm 这些轮廓点中的每一个都将光束发射到片材; 以及将与每个轮廓点对应的颜色等级直接记录到由第一步骤计算的片材的后表面的每个位置的第二步骤。 美丽的三维显示可以在短时间内完成,而不需要使用曝光设备,开发设备和用于再现的光源。
    • 5. 发明申请
    • CONFOCAL OPTICAL APPARATUS
    • 共焦光学装置
    • WO1997038341A1
    • 1997-10-16
    • PCT/JP1997001192
    • 1997-04-08
    • KOMATSU LTD.MATSUNO, KiyonoriWAKAI, HideyukiSUZUKI, ToruANDO, ManabuSUDA, Eri
    • KOMATSU LTD.
    • G02B21/36
    • G02B21/004G01B11/306
    • A confocal optical apparatus provided with a point light source array adapted to generate light from a plurality of arranged point light sources, an objective lens adapted to focus the light generated by this point light source array on an inspection surface, and a light-receiving element array in which a plurality of light-receiving parts for receiving light reflected from an object to be measured on the inspection surface via the objective lens are arranged. The sizes of the light-receiving parts are varied in accordance with the aberrations of the objective lens so that the aberrations and distortion may be absorbed reliably without improving the performance of the lenses used in the confocal optical system, and a correct and highly accurate measurement may be conducted.
    • 一种共焦光学装置,其具有适于从多个排列的点光源产生光的点光源阵列,适于将由该点光源阵列产生的光聚焦在检查面上的物镜,以及光接收元件 阵列,其中布置有用于经由物镜在检查表面上接收从被测量对象反射的光的多个受光部。 光接收部分的尺寸根据物镜的像差而变化,从而可以可靠地吸收像差和畸变,而不改进在共焦光学系统中使用的透镜的性能,以及正确和高精度的测量 可以进行。