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1. 发明申请

WO1997037378A1 VISUAL INSPECTION DEVICE FOR WAFER BUMP AND HEIGHT MEASURING DEVICE 审中-公开
标题翻译：用于防水和高度测量装置的视觉检测装置
公开(公告)号：WO1997037378A1
公开(公告)日：1997-10-09
申请号：PCT/JP1997001078
申请日：1997-03-28
申请人： KOMATSU LTD. , TERADA, Keiji , TADA, Shigeyuki , MORIYA, Masato , TANAKA, Hiroshi , WAKAI, Hideyuki , OKAMOTO, Takeshi
发明人： KOMATSU LTD.
IPC分类号： H01L21/66
CPC分类号： G01N21/9501 , H01L22/12
摘要： A device corrects a positioning error of a wafer with accuracy in a short period of time and performs visual inspection of bumps with accuracy at high speed. In the device, a wafer is positioned in coordinate axes of a predetermined coordinate system. A coordinate position on the coordinate system, to which a measuring visual field should move, is set so that all the bumps on the wafer is imaged by visual means. When the wafer is positioned, a rotating dislocation of the wafer with an origin of coordinates of the coordinate system as the center of rotation is detected. Respective set coordinate positions of the measuring visual field are subjected to rotating conversion as much as the detected rotating dislocation in the coordinate system and are corrected. Further, relative positions and attitudes of the wafer and the visual means are changed so that the measuring visual field is successively moved to the respective corrected coordinate positions.
摘要翻译：设备在短时间内精确地校正晶片的定位误差，并以高速精确地进行凸块的目视检查。在该装置中，晶片位于预定坐标系的坐标轴上。设置测量视野应该移动的坐标系上的坐标位置，使得通过视觉方式对晶片上的所有凸块进行成像。当晶片定位时，检测到具有作为旋转中心的坐标系的坐标原点的晶片的旋转位错。对测量视野的各设定坐标位置进行与坐标系中所检测的旋转位错一样多的旋转变换并进行校正。此外，改变晶片和视觉装置的相对位置和态度，使得测量视野被连续地移动到相应的校正坐标位置。

2. 发明申请

WO1995009346A1 CONFOCAL OPTICAL APPARATUS 审中-公开
标题翻译：共焦光学装置
公开(公告)号：WO1995009346A1
公开(公告)日：1995-04-06
申请号：PCT/JP1994001633
申请日：1994-09-30
申请人： KABUSHIKI KAISHA KOMATSU SEISAKUSHO , WAKAI, Hideyuki , MIZOGUCHI, Kiyokazu , SUZUKI, Toru , TERADA, Keiji , MORIYA, Masato , ANDO, Manabu , SHIO, Koji
发明人： KABUSHIKI KAISHA KOMATSU SEISAKUSHO
IPC分类号： G01B11/24
CPC分类号： G01B11/24 , G01B11/026 , G02B5/32
摘要： A confocal optical apparatus includes a ligth source, a first aperture portion for passing light emitted from the light source and shaping it into a spot, an objective lens for converging the light passing through the first aperture portion on an object to be measured, a second aperture portion positioned on a plane conjugate with the surface of the object where the light falls, and an optical detector for detecting light passing through the second aperture portions. The first and second aperture portions are disposed at the same position so that the same aperture can be shared. The detection surface of the optical detector is disposed in substantially the same plane as the shared aperture. In this way, the size and the weight of the apparatus can be reduced, measurement of a three-dimensional shape can be made at a high speed and highly accurately, and positioning of each portion can be made easily.
摘要翻译：共焦光学装置包括：光源，用于使从光源发射的光并将其成形为点的第一开口部分，用于将通过第一开口部分的光聚焦在被测量物体上的物镜;第二位于与光入射物体的表面共轭的平面上的开口部，以及用于检测通过第二开口部的光的光检测器。第一和第二开口部分设置在相同的位置，使得能够共享相同的孔。光检测器的检测表面设置在与共享孔基本相同的平面上。以这种方式，可以减小装置的尺寸和重量，可以高速高精度地进行三维形状的测量，并且可以容易地进行各部分的定位。

3. 发明申请

WO1997043678A1 TELECENTRIC OPTICAL DEVICE 审中-公开
标题翻译：电光设备
公开(公告)号：WO1997043678A1
公开(公告)日：1997-11-20
申请号：PCT/JP1997001560
申请日：1997-05-09
申请人： KOMATSU LTD. , WAKAI, Hideyuki , TERADA, Keiji , MORIYA, Masato
发明人： KOMATSU LTD.
IPC分类号： G02B21/00
CPC分类号： G01B11/2441 , G02B13/22
摘要： A telecentric optical device comprising an object provided on a predetermined test face, a telecentric optical means in which a first lens and a second lens are spaced from each other at a distance equal to the sum of the focal lengths of the first and second lenses and the focal point of the second lens is on the test face, a hologram reference light source, a hologram which is placed in a predetermined position between the first and second lenses and apart from the first lens by the focal length of the first lens and which is exposed so as to diffract the light from the reference light source and reproduce light equivalent to the light which is produced by one or a plurality of point source, emitted from the focal point of the first lens and passes through the predetermined position, a photodetector which is placed near the focal point of the first lens and detects the hologram reproducing light which is reflected by the object and made to pass through the telecentric optical means. Exposure of the hologram resulting in reproduction of the hologram reproducing light from a part of the hologram is performed to restrict a light passing region in the telecentric optical system without lowering the light utilization efficiency and the numerical aperture of the photodetecting system.
摘要翻译：一种远心光学装置，包括设置在预定测试面上的物体，远心光学装置，其中第一透镜和第二透镜彼此间隔开等于第一透镜和第二透镜的焦距之和的距离;以及第二透镜的焦点位于测试面上，全息参考光源，全息图被放置在第一透镜和第二透镜之间的预定位置，并且与第一透镜分离第一透镜的焦距，并且其中被曝光以衍射来自参考光源的光，并且再现与从第一透镜的焦点发射并通过预定位置的一个或多个点光源产生的光相当的光，光电检测器其放置在第一透镜的焦点附近，并且检测被物体反射并使其通过远心光学装置的全息图再现光。执行导致从全息图的一部分再现全息图的全息图的曝光，以限制远心光学系统中的光通过区域，而不降低光利用效率和光电检测系统的数值孔径。

4. 发明申请

WO1989003094A1 METHOD OF RECOGNIZING LINEAR PATTERN 审中-公开
标题翻译：识别线性图案的方法
公开(公告)号：WO1989003094A1
公开(公告)日：1989-04-06
申请号：PCT/JP1987000735
申请日：1987-10-02
申请人： KABUSHIKI KAISHA KOMATSU SEISAKUSHO , NAGAO, Makoto , TERADA, Keiji
发明人： KABUSHIKI KAISHA KOMATSU SEISAKUSHO
IPC分类号： G06F15/70
CPC分类号： G06K9/4647 , G06T7/181 , G06T7/60 , G06T2207/10016 , G06T2207/20021 , G06T2207/20068 , G06T2207/30256
摘要： A method of recognizing linear pattern contained in the video data stored in an original video memory. A memory region of the original video memory is divided into a plurality of regions, projective waveforms at a plurality of different projection angles are found out for each of the regions from the video data of the divisions, the projection waveforms are analyzed to determine the presence or absence of any linear pattern, direction () of line, line width (W) and line length (L) in each of the divisions, and a line segment corresponding to the linear pattern is picked up for each of the divisions based upon the results of determination.
摘要翻译：识别包含在存储在原始视频存储器中的视频数据中的线性模式的方法。原始视频存储器的存储区域被划分为多个区域，从分区的视频数据中找出每个区域的多个不同投影角度的投影波形，分析投影波形以确定存在或不存在任何线性图案，每个分割线中的线的方向（θ），线宽（W）和线长度（L），并且对于每个分割线，对应于线性图案的线段基于结果确定。

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