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1. 发明申请

WO2009099660A2 ADJUSTABLE GAP CAPACITIVELY COUPLED RF PLASMA REACTOR INCLUDING LATERAL BELLOWS AND NON-CONTACT PARTICLE SEAL 审中-公开
标题翻译：可调节差动电容耦合RF等离子体反应器，其中包括侧向电荷和非接触性颗粒密封
公开(公告)号：WO2009099660A2
公开(公告)日：2009-08-13
申请号：PCT/US2009/000784
申请日：2009-02-06
申请人： LAM RESEARCH CORPORATION , TAPPAN, James E. , STEVENOT, Scott Jeffery
发明人： TAPPAN, James E. , STEVENOT, Scott Jeffery
IPC分类号： H01L21/3065 , H05H1/34
CPC分类号： H01J37/32715 , H01J37/32091 , H01J37/32568 , H01L21/67069 , H01L21/6719
摘要： A plasma processing chamber includes a cantilever assembly and at least one vacuum isolation member configured to neutralize atmospheric load. The chamber includes a wall surrounding an interior region and having an opening formed therein. A cantilever assembly includes a substrate support for supporting a substrate within the chamber. The cantilever assembly extends through the opening such that a portion is located outside the chamber. The chamber includes an actuation mechanism operative to move the cantilever assembly relative to the wall.
摘要翻译：等离子体处理室包括悬臂组件和构造成中和大气负荷的至少一个真空隔离构件。该室包括围绕内部区域并具有形成在其中的开口的壁。悬臂组件包括用于支撑腔室内的衬底的衬底支撑件。悬臂组件延伸穿过开口，使得一部分位于室外。所述腔室包括致动机构，其可操作以相对于所述壁移动所述悬臂组件。

2. 发明申请

WO2005081988A2 MULTIPLE ELECTROSPRAY PROBE INTERFACE FOR MASS SPECTROMETRY 审中-公开
标题翻译：用于大量光谱的多电极探针接口
公开(公告)号：WO2005081988A2
公开(公告)日：2005-09-09
申请号：PCT/US2005/005803
申请日：2005-02-23
申请人： METARA INC. , BAILEY, Thomas, H. , TAPPAN, James, E.
发明人： BAILEY, Thomas, H. , TAPPAN, James, E.
IPC分类号： H01J49/04 , H01J49/10
CPC分类号： H01J49/165 , H01J49/0431
摘要： In one embodiment, an analytical apparatus is provided that includes a carriage; and a plurality of electrospray probes pivotably mounted on the carriage, wherein movement of the carriage engages a feature with a selected one of the electrospray probes whereby movement of the feature pivots the selected one of the electrospray probes with respect to the carriage.
摘要翻译：在一个实施例中，提供一种包括滑架的分析装置; 以及可枢转地安装在滑架上的多个电喷雾探针，其中滑架的运动与所选择的电喷雾探针中的一个特征接合，由此该特征的运动相对于滑架枢转所选择的一个电喷雾探针。

3. 发明申请

WO2009100288A2 ELECTRODE ORIENTATION AND PARALLELISM ADJUSTMENT MECHANISM FOR PLASMA PROCESSING SYSTEMS 审中-公开
标题翻译：用于等离子体处理系统的电极定向和平行调整机制
公开(公告)号：WO2009100288A2
公开(公告)日：2009-08-13
申请号：PCT/US2009/033318
申请日：2009-02-06
申请人： LAM RESEARCH CORPORATION , TAPPAN, James E.
发明人： TAPPAN, James E.
IPC分类号： H05H1/34 , H01L21/30
CPC分类号： H01J37/32568 , H01J37/32091
摘要： A mechanism for adjusting an orientation of an electrode in a plasma processing chamber is disclosed. The plasma processing chamber may be utilized to process at least a substrate, which may be inserted into the plasma processing chamber in an insertion direction. The mechanism may include a support plate disposed outside a chamber wall of the plasma processing chamber and pivoted relative to the chamber wall. The support plate may have a first thread. The mechanism may also include an adjustment screw having a second thread that engages the first thread. Turning the adjustment screw may cause translation of a portion of the support plate relative to the adjustment screw. The translation of the portion of the support plate may cause rotation of the support plate relative to the chamber wall, thereby rotating the electrode with respect to an axis that is orthogonal to the insertion direction.
摘要翻译：公开了一种用于调整等离子体处理室中的电极取向的机构。等离子体处理室可以用于处理至少一个可以在插入方向上插入到等离子体处理室中的衬底。该机构可以包括设置在等离子体处理室的室壁外部并相对于室壁枢转的支撑板。支撑板可以具有第一螺纹。该机构还可以包括具有接合第一螺纹的第二螺纹的调节螺钉。转动调节螺钉可能导致支撑板的一部分相对于调节螺丝的平移。支撑板的部分的平移可能导致支撑板相对于室壁的旋转，从而相对于与插入方向正交的轴线旋转电极。

4. 发明申请

WO2009100286A2 A FLOATING COLLAR CLAMPING DEVICE FOR AUTO-ALIGNING NUT AND SCREW IN LINEAR MOTION LEADSCREW AND NUT ASSEMBLY 审中-公开
标题翻译：用于直线运动导螺杆和螺母组件的自动对齐螺母和螺钉的浮动夹紧夹紧装置
公开(公告)号：WO2009100286A2
公开(公告)日：2009-08-13
申请号：PCT/US2009/033316
申请日：2009-02-06
申请人： LAM RESEARCH CORPORATION , TAPPAN, James E.
发明人： TAPPAN, James E.
IPC分类号： F16H25/20 , H01L21/30
CPC分类号： F16H25/12 , F16H25/24 , F16H2025/2445 , Y10T29/49826 , Y10T29/53843 , Y10T29/53848 , Y10T29/53861 , Y10T29/53913 , Y10T74/18576 , Y10T74/18648
摘要： An auto-aligning linear motion apparatus is provided. The apparatus includes a leadscrew. The apparatus also includes a nut arrangement configured to surround the leadscrew, wherein the nut arrangement includes at least a nut, a nut bracket, and a floating collar. A shoulder screw is inserted through a nut bracket slot of the nut bracket and a nut slot of the nut to rest at least partially within the floating collar. One dimension of the nut bracket slot is larger than a dimension through a cross-section area of the shoulder screw to enable the shoulder screw to move within the nut bracket slot to adjust the nut arrangement as the leadscrew is rotated to maintain a concentric relationship between the nut arrangement and the leadscrew.
摘要翻译：提供了一种自动对准线性运动装置。该设备包括一个导螺杆。该设备还包括构造成围绕导螺杆的螺母装置，其中螺母装置至少包括螺母，螺母支架和浮动轴环。通过螺母支架的螺母支架槽和螺母的螺母槽插入带肩螺钉，以至少部分地将其置于浮动轴环内。螺母支架槽的一个尺寸大于通过肩部螺钉的横截面区域的尺寸，以使得肩部螺钉能够在螺母支架槽内移动，以在丝杠旋转时调节螺母布置以保持螺母安排和丝杠。

5. 发明申请

WO2005081988A3 MULTIPLE ELECTROSPRAY PROBE INTERFACE FOR MASS SPECTROMETRY 审中-公开
标题翻译：用于大量光谱的多电极探针接口
公开(公告)号：WO2005081988A3
公开(公告)日：2005-12-15
申请号：PCT/US2005005803
申请日：2005-02-23
申请人： METARA INC , BAILEY THOMAS H , TAPPAN JAMES E
发明人： BAILEY THOMAS H , TAPPAN JAMES E
IPC分类号： H01J49/04 , H01J49/10
CPC分类号： H01J49/165 , H01J49/0431
摘要： An analytical apparatus is provided that includes a carriage (110) and a plurality of electrospray probes (100) pivotably mounted on the carriage (110).Movement of the carriage (110) engages a feature with a selected one of the electrospray probes (100a) whereby movement of the feature pivots the selected one of the electrospray probes (100a) with respect to the carriage (100).
摘要翻译：提供一种分析装置，其包括滑架（110）和可枢转地安装在滑架（110）上的多个电喷雾探针（100）。滑架（110）的运动与所选择的一个电喷雾探针（100a）），由此所述特征的运动相对于所述滑架（100）枢转所选择的所述电喷雾探针（100a）。

6. 发明申请

WO2009152259A2 PLASMA PROCESSING SYSTEMS WITH MECHANISMS FOR CONTROLLING TEMPERATURES OF COMPONENTS 审中-公开
标题翻译：具有控制组件温度的机构的等离子体处理系统
公开(公告)号：WO2009152259A2
公开(公告)日：2009-12-17
申请号：PCT/US2009/046931
申请日：2009-06-10
申请人： LAM RESEARCH CORPORATION , TAPPAN, James E.
发明人： TAPPAN, James E.
CPC分类号： H01J37/32568 , H01J37/32522 , H01J37/32623
摘要： A plasma processing system with improved component temperature control is disclosed. The system may include a plasma processing chamber having a chamber wall. The system may also include an electrode disposed inside the plasma processing chamber. The system may also include a support member disposed inside the plasma processing chamber for supporting the electrode. The system may also include a support plate disposed outside the chamber wall. The system may also include a cantilever disposed through the chamber wall for coupling the support member with the support plate. The system may also include a lift plate disposed between the chamber wall and the support plate. The system may also include thermally resistive coupling mechanisms for mechanically coupling the lift plate with the support plate.
摘要翻译：公开了一种具有改进的部件温度控制的等离子体处理系统。该系统可以包括具有室壁的等离子体处理室。该系统还可以包括设置在等离子体处理室内部的电极。该系统还可以包括设置在等离子体处理室内部用于支撑电极的支撑构件。该系统还可以包括设置在室壁外部的支撑板。该系统还可以包括通过室壁设置的用于将支撑构件与支撑板联接的悬臂。该系统还可以包括设置在室壁和支撑板之间的提升板。该系统还可以包括用于将升降板与支撑板机械联接的热阻耦合机构。

7. 发明申请

WO2009100288A3 ELECTRODE ORIENTATION AND PARALLELISM ADJUSTMENT MECHANISM FOR PLASMA PROCESSING SYSTEMS 审中-公开
标题翻译：等离子体处理系统的电极取向和平行调节机制
公开(公告)号：WO2009100288A3
公开(公告)日：2009-10-15
申请号：PCT/US2009033318
申请日：2009-02-06
申请人： LAM RES CORP , TAPPAN JAMES E
发明人： TAPPAN JAMES E
IPC分类号： H05H1/34 , H01L21/3065
CPC分类号： H01J37/32568 , H01J37/32091
摘要： A mechanism for adjusting an orientation of an electrode in a plasma processing chamber is disclosed. The plasma processing chamber may be utilized to process at least a substrate, which may be inserted into the plasma processing chamber in an insertion direction. The mechanism may include a support plate disposed outside a chamber wall of the plasma processing chamber and pivoted relative to the chamber wall. The support plate may have a first thread. The mechanism may also include an adjustment screw having a second thread that engages the first thread. Turning the adjustment screw may cause translation of a portion of the support plate relative to the adjustment screw. The translation of the portion of the support plate may cause rotation of the support plate relative to the chamber wall, thereby rotating the electrode with respect to an axis that is orthogonal to the insertion direction.
摘要翻译：公开了一种用于调整等离子体处理室中的电极的取向的机构。等离子体处理室可以用于处理至少一个基板，该基板可以沿插入方向插入等离子体处理室中。该机构可以包括设置在等离子体处理室的室壁外部并且相对于室壁枢转的支撑板。支撑板可以具有第一螺纹。该机构还可以包括具有接合第一螺纹的第二螺纹的调整螺钉。转动调节螺钉可以引起支撑板的一部分相对于调节螺钉的平移。支撑板的该部分的平移可以引起支撑板相对于腔室壁旋转，从而相对于与插入方向正交的轴旋转电极。

8. 发明申请

WO2009099660A3 ADJUSTABLE GAP CAPACITIVELY COUPLED RF PLASMA REACTOR INCLUDING LATERAL BELLOWS AND NON-CONTACT PARTICLE SEAL 审中-公开
标题翻译：可调间隙容量耦合射频等离子体反应器，包括横向波纹和非接触式粒子密封
公开(公告)号：WO2009099660A3
公开(公告)日：2009-10-01
申请号：PCT/US2009000784
申请日：2009-02-06
申请人： LAM RES CORP , TAPPAN JAMES E , STEVENOT SCOTT JEFFERY
发明人： TAPPAN JAMES E , STEVENOT SCOTT JEFFERY
IPC分类号： H01L21/3065 , H05H1/34
CPC分类号： H01J37/32715 , H01J37/32091 , H01J37/32568 , H01L21/67069 , H01L21/6719
摘要： A plasma processing chamber includes a cantilever assembly and at least one vacuum isolation member configured to neutralize atmospheric load. The chamber includes a wall surrounding an interior region and having an opening formed therein. A cantilever assembly includes a substrate support for supporting a substrate within the chamber. The cantilever assembly extends through the opening such that a portion is located outside the chamber. The chamber includes an actuation mechanism operative to move the cantilever assembly relative to the wall.
摘要翻译：等离子体处理室包括悬臂组件和构造成中和大气负载的至少一个真空隔离构件。腔室包括围绕内部区域并具有在其中形成的开口的壁。悬臂组件包括用于在腔室内支撑衬底的衬底支撑件。悬臂组件延伸穿过开口，使得一部分位于腔室外部。腔室包括致动机构，该致动机构可操作以相对于壁移动悬臂组件。

9. 发明申请

WO2009152259A3 PLASMA PROCESSING SYSTEMS WITH MECHANISMS FOR CONTROLLING TEMPERATURES OF COMPONENTS 审中-公开
标题翻译：具有控制组件温度的机构的等离子体处理系统
公开(公告)号：WO2009152259A3
公开(公告)日：2010-04-15
申请号：PCT/US2009046931
申请日：2009-06-10
申请人： LAM RES CORP , TAPPAN JAMES E
发明人： TAPPAN JAMES E
IPC分类号： H01L21/3065
CPC分类号： H01J37/32568 , H01J37/32522 , H01J37/32623
摘要： A plasma processing system with improved component temperature control is disclosed. The system may include a plasma processing chamber having a chamber wall. The system may also include an electrode disposed inside the plasma processing chamber. The system may also include a support member disposed inside the plasma processing chamber for supporting the electrode. The system may also include a support plate disposed outside the chamber wall. The system may also include a cantilever disposed through the chamber wall for coupling the support member with the support plate. The system may also include a lift plate disposed between the chamber wall and the support plate. The system may also include thermally resistive coupling mechanisms for mechanically coupling the lift plate with the support plate.
摘要翻译：公开了一种具有改进的部件温度控制的等离子体处理系统。该系统可以包括具有室壁的等离子体处理室。该系统还可以包括设置在等离子体处理室内部的电极。该系统还可以包括设置在等离子体处理室内部用于支撑电极的支撑构件。该系统还可以包括设置在室壁外部的支撑板。该系统还可以包括通过室壁设置的用于将支撑构件与支撑板联接的悬臂。该系统还可以包括设置在室壁和支撑板之间的提升板。该系统还可以包括用于将升降板与支撑板机械联接的热阻耦合机构。

10. 发明申请

WO2009100286A3 A FLOATING COLLAR CLAMPING DEVICE FOR AUTO-ALIGNING NUT AND SCREW IN LINEAR MOTION LEADSCREW AND NUT ASSEMBLY 审中-公开
标题翻译：用于自动对准螺纹和螺旋的浮动夹紧装置，用于线性运动引线和螺母组件
公开(公告)号：WO2009100286A3
公开(公告)日：2009-10-08
申请号：PCT/US2009033316
申请日：2009-02-06
申请人： LAM RES CORP , TAPPAN JAMES E
发明人： TAPPAN JAMES E
IPC分类号： F16H25/20 , H01L21/3065
CPC分类号： F16H25/12 , F16H25/24 , F16H2025/2445 , Y10T29/49826 , Y10T29/53843 , Y10T29/53848 , Y10T29/53861 , Y10T29/53913 , Y10T74/18576 , Y10T74/18648
摘要： An auto-aligning linear motion apparatus is provided. The apparatus includes a leadscrew. The apparatus also includes a nut arrangement configured to surround the leadscrew, wherein the nut arrangement includes at least a nut, a nut bracket, and a floating collar. A shoulder screw is inserted through a nut bracket slot of the nut bracket and a nut slot of the nut to rest at least partially within the floating collar. One dimension of the nut bracket slot is larger than a dimension through a cross-section area of the shoulder screw to enable the shoulder screw to move within the nut bracket slot to adjust the nut arrangement as the leadscrew is rotated to maintain a concentric relationship between the nut arrangement and the leadscrew.
摘要翻译：提供了一种自动调整线性运动装置。该装置包括一个丝杠。所述设备还包括构造成围绕所述丝杠的螺母装置，其中所述螺母装置至少包括螺母，螺母支架和浮动套环。肩螺钉通过螺母支架的螺母支架槽和螺母的螺母槽插入，至少部分地悬浮在浮动套环内。螺母支架槽的一个尺寸大于通过肩部螺钉的横截面面积的尺寸，以使得肩部螺钉在螺母托架槽内移动，以在丝杠旋转时调节螺母装置，以保持在螺母装置和丝杠。

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