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1. 发明申请

WO2022192437A1 HIGH CONTRAST SPATIAL LIGHT MODULATOR 审中-公开
公开(公告)号：WO2022192437A1
公开(公告)日：2022-09-15
申请号：PCT/US2022/019605
申请日：2022-03-09
申请人： SILICON LIGHT MACHINES CORPORATION
发明人： SOLGAARD, Olav , PAYNE, Alexander , HUNTER, James , HAMANN, Stephen
IPC分类号： B81B7/00 , G02B26/00 , G02B26/08 , G02B27/42 , G03B27/52 , G03B27/72 , G02B5/18 , G02F1/01
摘要： Microelectromechanical systems based spatial light modulators (SLMs), and display systems and methods for operating the same are described. Generally, the SLM includes a linear array of electrostatically deflectable ribbons suspended over a surface of a substrate. Each ribbon includes a split-ribbon portion with a plurality of diffractors, each diffractor including a first light reflective surface on a linear portion of the split-ribbon portion and an opening through which a second light reflective surface affixed to the substrate is exposed. The first light reflective surface and the second light reflective surface have equal areas, and when one or more of the ribbons is deflected towards the surface of the substrate a coherent light reflected from the first light reflective surface is brought into constructive or destructive interference with light reflected from the second light reflective surface. The display system can include a projector or a head mounted unit.

2. 发明申请

WO2020092444A1 COMPENSATION METHOD FOR A SCANNING SYSTEM WITH SPATIAL LIGHT MODULATOR 审中-公开
公开(公告)号：WO2020092444A1
公开(公告)日：2020-05-07
申请号：PCT/US2019/058669
申请日：2019-10-29
申请人： SILICON LIGHT MACHINES CORPORATION
发明人： HASHIMOTO, Yoshimi
IPC分类号： H04N9/31 , G02B26/10 , G02B26/08 , G02B13/00 , G02B27/00
摘要： A multi-beam scanning system and methods of operating the same to compensate for distortion are provided. The method involves illuminating a spatial light modulator including SLM pixels arranged in parallel, each pixel including a multiple address pixels. Drive signals including image data are provided to the pixels to generate beams of modulated light reflected therefrom, which is scanned to a linear swath of a two-dimensional imaging plane using a collimate lens, a scan mirror moved about a first axis, and an imaging lens. The swath is scanned across the imaging plane in a direction orthogonal to a long axis of the swath by moving the scan mirror about a second axis. To compensate for distortion along the long axis of the swath compensated image data is provided to at least some address pixels generating beams of modulated light distal from an optical axis of the imaging lens.

3. 发明申请

WO2007126660A3 EYE-SAFE LASER NAVIGATION SENSOR 审中-公开
公开(公告)号：WO2007126660A3
公开(公告)日：2007-11-08
申请号：PCT/US2007/007062
申请日：2007-03-21
申请人： SILICON LIGHT MACHINES CORPORATION , SANDERS, Steven , GIBBS, Gary , PANCHOLY, Ashish , ROHILLA, Gajender , SHAH, Pulkit
发明人： SANDERS, Steven , GIBBS, Gary , PANCHOLY, Ashish , ROHILLA, Gajender , SHAH, Pulkit
IPC分类号： H01S3/00
摘要： One embodiment relates to an optical navigation apparatus which provides fault-tolerant limitation of laser output power. The apparatus includes a diode laser (104) and a current source (108 or 208) interconnected with the diode laser. Two independent circuits in the current source (108 or 208) are configured to limit current flowing through the diode laser (104). Another embodiment relates to a method of providing fault-tolerant limitation of laser output power in an optical navigation apparatus. A first digital current limit value is converted to a first analog signal, and the first analog signal is used to limit an electrical current from a power supply connection to an anode (105) of a diode laser (104). A second digital current limit value is converted to a second analog signal, and the second analog signal is used to limit an electrical current from a cathode (106) of the diode laser (104) to a ground connection. Other embodiments are also disclosed.

4. 发明申请

WO2007078834A2 AN OPTICAL NAVIGATION SYSTEM HAVING A FILTER-WINDOW TO SEAL AN ENCLOSURE THEREOF 审中-公开
标题翻译：具有过滤器窗口的光学导航系统密封其附件
公开(公告)号：WO2007078834A2
公开(公告)日：2007-07-12
申请号：PCT/US2006/047723
申请日：2006-12-15
申请人： SILICON LIGHT MACHINES CORPORATION , ZAREM, Harold
发明人： ZAREM, Harold
IPC分类号： G06M7/00
CPC分类号： G06F3/0317
摘要： An optical navigation system is provided to sense relative movement between the system and a surface. Generally, the system includes: (i) an illuminator having a light source to illuminate a portion of the surface; (ii) a detector to receive light reflected from the portion of the surface; and (iii) an enclosure enclosing the illuminator and the detector, the enclosure having a window covering the detector and through which light reflected from the portion of the surface is transmitted to the detector, the window being substantially transparent to at least one wavelength of light emitted by the light source. In certain embodiments, the window is a filter-window that is substantially non-transparent to light from other sources, such as ambient light, having shorter or longer wavelengths. Other embodiments are also described.
摘要翻译：提供光学导航系统以感测系统和表面之间的相对运动。通常，该系统包括：（i）具有用于照射表面的一部分的光源的照明器; （ii）接收从表面部分反射的光的检测器; 以及（iii）围绕照明器和检测器的外壳，所述外壳具有覆盖所述检测器的窗口，并且从所述表面部分反射的光透过所述检测器，所述窗对于至少一个波长的光线基本上是透明的由光源发射。在某些实施例中，窗口是对具有较短或较长波长的其他源（例如环境光）的光基本上不透明的滤光镜窗口。还描述了其它实施例。

5. 发明申请

WO2004113228A2 PROCESS BOAT AND SHELL FOR WAFER PROCESSING 审中-公开
标题翻译：过程船和外壳进行加工
公开(公告)号：WO2004113228A2
公开(公告)日：2004-12-29
申请号：PCT/US2004/018621
申请日：2004-06-10
申请人： SILICON LIGHT MACHINES CORPORATION , MILES, Ronald, O. , GALAMBOS, Ludwig, L. , LAZAR, Janos, J.
发明人： MILES, Ronald, O. , GALAMBOS, Ludwig, L. , LAZAR, Janos, J.
IPC分类号： C01D
CPC分类号： H01L21/67109 , C01G33/00 , C01G35/00 , C01P2006/42 , H01L21/67313 , H01L21/67326
摘要： In one embodiment, an apparatus for wafer processing comprises a boat (510) and a shell. The shell (521, 522) may be configured to receive and enclose the boat (510), which in turn may be configured to receive a plurality of wafers. The shell (521, 522) may include a plurality of slots (523) to allow vapor to escape out of the shell (521, 522) and away from the wafers during a temperature ramp down. The apparatus may be employed in a variety of wafer processing applications including in processes for increasing the bulk conductivity of ferroelectric materials, for example.
摘要翻译：在一个实施例中，用于晶片处理的装置包括船（510）和壳。外壳（521,522）可以被构造成容纳和封闭船（510），船（510）又可被配置成容纳多个晶片。外壳（521,522）可以包括多个狭槽（523），以允许蒸气在温度下降期间从壳体（521,522）中逸出并远离晶片。该装置可以用于各种晶片处理应用，例如包括用于增加铁电材料的体电导率的工艺。

6. 发明申请

WO2007075367A3 SPECKLE NAVIGATION SYSTEM 审中-公开
公开(公告)号：WO2007075367A3
公开(公告)日：2007-07-05
申请号：PCT/US2006/047802
申请日：2006-12-14
申请人： SILICON LIGHT MACHINES CORPORATION , SPURLOCK, Brett, A , TRISNADI, Jahja, I , SANDERS, Steven , CARLISLE, Clinton, B
发明人： SPURLOCK, Brett, A , TRISNADI, Jahja, I , SANDERS, Steven , CARLISLE, Clinton, B
IPC分类号： G09G5/08
摘要： One embodiment relates to a laser positioning device for sensing relative movement between a data input device and a surface (120) by determining displacement of image features in a succession of images of the surface. The device forms a single integrated package, which includes a planar substrate (102) and a transparent encapsulant that also embodies a collimating lens (108). Both a coherent light source (104) and a sensor array (106) and associated circuitry are configured on the planar substrate. Another embodiment relates to a method of sensing relative movement between a data input device and a surface. Coherent light is emitted from a laser and collimated so as to form a collimated illumination beam with a predetermined diameter, D, and a substantially uniform phase front. A speckle pattern is generated by impingement of the collimated illumination beam on the surface and detected by a sensor array. Other embodiments are also disclosed.

7. 发明申请

WO2006065701A2 INTERLEAVED MEMS-BASED PROBES FOR TESTING INTEGRATED CIRCUITS 审中-公开
标题翻译：用于测试集成电路的交错微机电探测器
公开(公告)号：WO2006065701A2
公开(公告)日：2006-06-22
申请号：PCT/US2005/044797
申请日：2005-12-09
申请人： SILICON LIGHT MACHINES CORPORATION , LEUNG, Omar, S.
发明人： LEUNG, Omar, S.
IPC分类号： G01R31/02
CPC分类号： G01R3/00 , B81B3/0067 , B81B2203/0118 , G01R1/06711 , G01R1/06761 , G01R1/07342
摘要： In one embodiment, a probe card includes a substrate and a plurality of probes (30). Each of the probes (30) may have a supported portion (31) and an unsupported portion (32) that meet at a base. The unsupported portion (32) may have a non-uniform (e.g. triangular) cross-section along a length that begins at the base. The probes may be interleaved and fabricated using MEMS fabrication techniques.
摘要翻译：在一个实施例中，探针卡包括衬底和多个探针（30）。每个探针（30）可以具有在基部处相遇的被支撑部分（31）和未被支撑部分（32）。无支撑部分（32）可以具有沿底部开始的长度的不均匀（例如三角形）横截面。探针可以交错使用MEMS制造技术制造。

8. 发明申请

WO2005114696A2 OPTICAL POSITIONING DEVICE RESISTANT TO SPECKLE FADING 审中-公开
标题翻译：光学定位装置抵抗光斑渐变
公开(公告)号：WO2005114696A2
公开(公告)日：2005-12-01
申请号：PCT/US2005/017461
申请日：2005-05-18
申请人： SILICON LIGHT MACHINES CORPORATION , LEHOTY, David, A. , ROXLO, Charles B , TRISNADI, Jahja I , CARLISLE, Clinton B
发明人： LEHOTY, David, A. , ROXLO, Charles B , TRISNADI, Jahja I , CARLISLE, Clinton B
IPC分类号： H01J40/14
CPC分类号： G06F3/0317
摘要： One embodiment disclosed pertains to an optical positioning apparatus configured to be resistant to speckle fading. The apparatus includes at least a coherent light source (306) and a detector (302). The coherent light source (306) is configured to illuminate a surface with laser light. The detector (302) is configured to obtain a succession of data frames of the illuminated surface, and the detector (302) comprises N rows (for example, 1502 and 1504) each including a plurality of photosensitive elements. Another embodiment disclosed pertains to an optical positioning apparatus configured to be resistant to speckle fading using calculating and filtering circuitry. The calculating circuitry is configured to calculate velocity data from the intensity data. The filtering circuitry is configured to reduce effects from speckle fading in the velocity data. Other embodiments are also described.
摘要翻译：所公开的一个实施例涉及一种被配置为抵抗斑点褪色的光学定位装置。该装置至少包括相干光源（306）和检测器（302）。相干光源（306）被配置为用激光照射表面。检测器（302）被配置为获得照射表面的一系列数据帧，并且检测器（302）包括N行（例如，1502和1504），每行包括多个感光元件。所公开的另一实施例涉及一种光学定位装置，其被配置为使用计算和滤波电路来抵抗散斑衰落。计算电路被配置为从强度数据计算速度数据。滤波电路被配置为减少速度数据中斑点衰落的影响。还描述了其它实施例。

9. 发明申请

WO2005114097A2 SPECKLE SIZING AND SENSOR DIMENSIONS IN OPTICAL POSITIONING DEVICE 审中-公开
标题翻译：光学定位装置中的尺寸和传感器尺寸
公开(公告)号：WO2005114097A2
公开(公告)日：2005-12-01
申请号：PCT/US2005/017982
申请日：2005-05-19
申请人： SILICON LIGHT MACHINES CORPORATION , CARLISLE, Clinton, B. , TRISNADI, Jahja, I. , ROXLO, Charles, B. , LEHOTY, David, A.
发明人： CARLISLE, Clinton, B. , TRISNADI, Jahja, I. , ROXLO, Charles, B. , LEHOTY, David, A.
IPC分类号： G01B11/02
CPC分类号： G01D5/34715 , G01B11/002 , G01P3/36 , G01P3/806 , G06F3/0317
摘要： One embodiment relates to an optical displacement sensor for sensing transverse displacement of a data input device relative to a surface by determining displacement of optical features in a succession of frames. The sensor includes at least a coherent light source (306), illumination optics (308) to illuminate a portion of the surface (304), imaging optics (310), and a first array (302) of photosensitive elements having a periodic distance. The illuminator and the detector are configured to produce on the first array (302) of photosensitive elements an intensity pattern of light reflected from the illuminated portion of the surface. The intensity pattern comprises a plurality of speckles having an average speckle diameter which is between one half and two times the periodic distance of the array (302).
摘要翻译：一个实施例涉及用于通过确定一连串框架中的光学特征的位移来感测数据输入装置相对于表面的横向位移的光学位移传感器。所述传感器至少包括相干光源（306），照明所述表面（304）的一部分，成像光学器件（310）和具有周期距离的光敏元件的第一阵列（302）的照明光学器件（308）。照明器和检测器被配置为在感光元件的第一阵列（302）上产生从表面的照射部分反射的光的强度图案。强度图案包括具有平均斑点直径在阵列（302）的周期距离的一半和两倍之间的多个斑点。

10. 发明申请

WO2004088720A2 LOOSELY-PACKED TWO-DIMENSIONAL MODULATOR ARRANGEMENT 审中-公开
标题翻译：松散包装的二维调制器布置
公开(公告)号：WO2004088720A2
公开(公告)日：2004-10-14
申请号：PCT/US2004/009292
申请日：2004-03-25
申请人： SILICON LIGHT MACHINES CORPORATION , ROXLO, Charles B. , AMM, David T
发明人： ROXLO, Charles B. , AMM, David T
IPC分类号： H01L
CPC分类号： G03F7/70283 , G02B26/0808 , G02B27/46 , G03F7/70275 , G03F7/70291
摘要： In one embodiment, an imaging apparatus includes a light modulator array (105A) having modulators (300) arranged in a loosely-packed configuration. For example, the modulators (300) may be arranged in columns at a first pitch, and the columns may be spaced at a second pitch. The optically active areas of the modulators (300) may form a repeating pattern including a hexagonal pattern, a rectangular pattern, or a diamond pattern. In one embodiment, the modulators (300) are diffractive light modulators.
摘要翻译：在一个实施例中，成像设备包括具有以松散组装配置布置的调制器（300）的光调制器阵列（105A）。例如，调制器（300）可以以第一节距排列，并且列可以以第二节距间隔。调制器（300）的光学有效区域可以形成包括六边形图案，矩形图案或菱形图案的重复图案。在一个实施例中，调制器（300）是衍射光调制器。

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