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1. 发明申请

WO2013074369A1 METHOD AND APPARATUS FOR SELECTIVE NITRIDATION PROCESS 审中-公开
标题翻译：选择性硝化过程的方法和装置
公开(公告)号：WO2013074369A1
公开(公告)日：2013-05-23
申请号：PCT/US2012/064206
申请日：2012-11-08
申请人： APPLIED MATERIALS, INC. , ROGERS, Matthew S. , OLSEN, Christopher S.
发明人： ROGERS, Matthew S. , OLSEN, Christopher S.
IPC分类号： H01L21/318 , H01L27/115 , H01L21/8247
CPC分类号： H01L21/0217 , H01J37/32357 , H01L21/02247 , H01L21/02252 , H01L21/02301 , H01L21/3211 , H01L21/67017 , H01L21/67115 , H01L21/6719 , H01L21/67207 , H01L27/11521
摘要： Embodiments described herein generally relate to methods for manufacturing flash memory devices. In one embodiment, a method for removing native oxides from a substrate is provided. The method includes transferring a substrate having an oxide layer disposed thereon into a first processing chamber, exposing the substrate to a plasma generated from a cleaning gas mixture, wherein the cleaning gas mixture comprises a hydrogen-containing gas and a fluorine-containing gas, heating the substrate to a temperature sufficient to remove the oxide layer from the substrate, transferring the substrate from the first processing chamber to a second processing chamber without breaking vacuum, and flowing a plasma containing substantially nitrogen-containing radicals into the second processing chamber to expose the substrate to nitrogen containing radicals.
摘要翻译：本文描述的实施例通常涉及用于制造闪存设备的方法。在一个实施方案中，提供了从底物中除去天然氧化物的方法。该方法包括将其上设置有氧化物层的衬底转移到第一处理室中，将衬底暴露于由清洁气体混合物产生的等离子体，其中清洗气体混合物包含含氢气体和含氟气体，加热所述衬底具有足以从所述衬底移除所述氧化物层的温度，将所述衬底从所述第一处理室转移到第二处理室而不破坏真空，以及使含有基本上含氮自由基的等离子体流入所述第二处理室以暴露所述第二处理室底物含氮基团。

2. 发明申请

WO2013043605A1 SURFACE STABILIZATION PROCESS TO REDUCE DOPANT DIFFUSION 审中-公开
标题翻译：表面稳定过程减少痰液扩散
公开(公告)号：WO2013043605A1
公开(公告)日：2013-03-28
申请号：PCT/US2012/055924
申请日：2012-09-18
申请人： APPLIED MATERIALS, INC. , ROGERS, Matthew S. , HILKENE, Martin A.
发明人： ROGERS, Matthew S. , HILKENE, Martin A.
IPC分类号： H01L21/22 , H01L21/324 , H01L21/8247 , H01L27/115
CPC分类号： H01L21/28273 , H01J37/32357 , H01L21/3211 , H01L21/32155 , H01L21/324 , H01L27/11521
摘要： A method for incorporating radicals of a plasma into a substrate or a material on a semiconductor substrate using a remote plasma source. In one embodiment, a method for processing doped materials on a substrate surface is provided and includes forming a doped layer on a substrate and optionally cleaning the doped layer, such as by a wet clean process. The method also includes generating an ionized nitrogen plasma in a remote plasma source, wherein the ionized nitrogen plasma has an ion concentration within a range from about 0.001% to about 0.1%, de-ionizing the ionized nitrogen plasma while forming non-ionized nitrogen plasma. The method further includes flowing the non-ionized nitrogen plasma into a processing region within a processing chamber, forming a nitrided capping layer from an upper portion of the doped layer by exposing the doped layer within the processing region to the non-ionized nitrogen plasma during a stabilization process.
摘要翻译：一种使用远程等离子体源将等离子体的自由基引入衬底或半导体衬底上的材料的方法。在一个实施例中，提供了用于在衬底表面上处理掺杂材料的方法，并且包括在衬底上形成掺杂层并且可选地例如通过湿式清洁工艺清洁掺杂层。该方法还包括在远程等离子体源中产生电离氮等离子体，其中离子化的氮等离子体的离子浓度在约0.001％至约0.1％的范围内，使离子化的氮等离子体离子化，同时形成非离子化的氮等离子体。该方法还包括将非电离氮等离子体流入处理室内的处理区域，通过将处理区域内的掺杂层暴露于非电离氮等离子体，从而从掺杂层的上部形成氮化覆盖层一个稳定的过程。

3. 发明申请

WO2007098196A3 SEARCH, TRANSFER, AND BOOKING TOOL FOR MULTIPLE REWARD PROGRAMS 审中-公开
标题翻译：搜索，转让和预订多个奖励计划的工具
公开(公告)号：WO2007098196A3
公开(公告)日：2007-11-15
申请号：PCT/US2007004507
申请日：2007-02-16
申请人： AMERICAN EXPRESS TRAVEL RELATE , GREENE NANCY E , KATZ HARVEY , KNONER DAVID , MUNKACSY CHRIS J , NOTTINGHAM MARNIEE L , ROGERS MATTHEW S
发明人： GREENE NANCY E , KATZ HARVEY , KNONER DAVID , MUNKACSY CHRIS J , NOTTINGHAM MARNIEE L , ROGERS MATTHEW S
IPC分类号： G06Q30/00 , G07G1/14
CPC分类号： G06Q30/02 , G06Q10/02 , G06Q30/0226 , G06Q30/0236 , G06Q50/12 , G06Q50/14
摘要： Many customers are members of multiple frequent customer programs. When a customer wishes to book reward travel, searching each frequent customer program of which the customer is a member is difficult and time-consuming. A rewards program provider, such as a transactional account company, can provide members the opportunity to link frequent customer programs to the rewards program. When a customer searches for reward travel, the customer enters the request through the rewards program provider. The rewards program provider then sends a request to each frequent customer program which includes the customer identification. The frequent customer programs each return a search result tailored to the specific customer, taking into consideration the customer's status and point balance in the frequent customer program. The rewards program provider then allows the customer to book a selected reservation using points corresponding to a specific frequent customer program and/or points corresponding to the provider's rewards program.
摘要翻译：许多客户都是多个频繁客户计划的成员。当顾客希望预订奖励旅行时，搜索顾客是其会员的每个频繁顾客计划是困难和耗时的。奖励计划提供商（如交易账户公司）可以为会员提供将频繁的客户计划与奖励计划相关联的机会。当客户搜索奖励旅行时，客户通过奖励计划提供者输入请求。奖励计划提供者然后将请求发送到包括客户标识的每个频繁客户计划。频繁的客户计划每个都会返回一个针对特定客户的搜索结果，同时考虑到客户的频繁客户计划中的状态和积分余额。奖励计划提供者然后允许顾客使用对应于特定频繁顾客计划的点和/或对应于提供者奖励计划的点来预订选定的预订。

4. 发明申请

WO2017201411A1 ASYMMETRIC CHEMICAL STRENGTHENING 审中-公开
标题翻译：非对称化学强化
公开(公告)号：WO2017201411A1
公开(公告)日：2017-11-23
申请号：PCT/US2017/033551
申请日：2017-05-19
申请人： LUZZATO, Victor , PREST, Christopher D. , MEMERING, Dale N. , ROGERS, Matthew S.
发明人： LUZZATO, Victor , PREST, Christopher D. , MEMERING, Dale N. , ROGERS, Matthew S.
IPC分类号： C03C17/22 , C03C17/23 , C03C21/00 , C03C23/00
摘要： Asymmetrically strengthened glass articles, methods for producing the same, and use of the articles in portable electronic device is disclosed. Using a budgeted amount of compressive stress and tensile stress, asymmetric chemical strengthening is optimized for the utility of a glass article. In some aspects, the strengthened glass article can be designed for reduced damage, or damage propagation, when dropped.
摘要翻译：公开了非对称强化的玻璃制品，其制造方法以及便携式电子设备中的制品的用途。使用预算量的压缩应力和拉伸应力，不对称化学强化被优化以用于玻璃制品。在一些方面，强化的玻璃制品可以设计成在跌落时减少损坏或损坏传播。

5. 发明申请

WO2011008456A3 METHODS OF FORMING OXIDE LAYERS ON SUBSTRATES 审中-公开
公开(公告)号：WO2011008456A3
公开(公告)日：2011-01-20
申请号：PCT/US2010/039753
申请日：2010-06-24
申请人： APPLIED MATERIALS, INC. , YOKOTA, Yoshitaka , OLSEN, Christopher, S. , TJANDRA, Agus, Sofian , CHO, Yonah , ROGERS, Matthew S.
发明人： YOKOTA, Yoshitaka , OLSEN, Christopher, S. , TJANDRA, Agus, Sofian , CHO, Yonah , ROGERS, Matthew S.
IPC分类号： H01L21/316 , H01L21/31 , H01L21/205
摘要： Methods for processing substrates are provided herein. In some embodiments, a method for processing a substrate includes providing a substrate having an oxide layer disposed thereon, the oxide layer including one or more defects; and exposing the oxide layer to a plasma formed from a process gas comprising an oxygen-containing gas to repair the one or more defects. In some embodiments, the oxide layer may be formed on the substrate. In some embodiments, forming the oxide layer further comprises depositing the oxide layer atop the substrate. In some embodiments, forming the oxide layer further comprises thermally oxidizing the surface of the substrate to form the oxide layer. In some embodiments, a processing temperature is maintained at about 700 degrees Celsius or below during the thermal oxidation of the surface.

6. 发明申请

WO2013022530A1 METHOD AND APPARATUS FOR SELECTIVE NITRIDATION PROCESS 审中-公开
标题翻译：选择性硝化过程的方法和装置
公开(公告)号：WO2013022530A1
公开(公告)日：2013-02-14
申请号：PCT/US2012/045046
申请日：2012-06-29
申请人： APPLIED MATERIALS, INC. , ROGERS, Matthew S. , CURTIS, Roger , HAWRYLCHAK, Lara , LAI, Ken Kaung , HWANG, Bernard L. , TOBIN, Jeffrey , OLSEN, Christopher S. , BEVAN, Malcolm J.
发明人： ROGERS, Matthew S. , CURTIS, Roger , HAWRYLCHAK, Lara , LAI, Ken Kaung , HWANG, Bernard L. , TOBIN, Jeffrey , OLSEN, Christopher S. , BEVAN, Malcolm J.
IPC分类号： H01L21/318 , H01L21/3065 , H01L21/8247 , H01L27/115
CPC分类号： H01L21/28273 , H01J37/32357 , H01J37/32422 , H01L21/02247 , H01L21/02252 , H01L21/3211 , H01L27/11524
摘要： Embodiments of the invention provide an improved apparatus and methods for nitridation of stacks of materials. In one embodiment, a remote plasma system includes a remote plasma chamber defining a first region for generating a plasma comprising ions and radicals, a process chamber defining a second region for processing a semiconductor device, the process chamber comprising an inlet port formed in a sidewall of the process chamber, the inlet port being in fluid communication with the second region, and a delivery member disposed between the remote plasma chamber and the process chamber and having a passageway in fluid communication with the first region and the inlet port, wherein the delivery member is configured such that a longitudinal axis of the passageway intersects at an angle of about 20 degrees to about 80 degrees with respect to a longitudinal axis of the inlet port.
摘要翻译：本发明的实施例提供了一种用于氮化堆叠材料的改进的装置和方法。在一个实施例中，远程等离子体系统包括限定用于产生包括离子和自由基的等离子体的第一区域的远程等离子体室，限定用于处理半导体器件的第二区域的处理室，所述处理室包括形成在侧壁处理室的入口端口与第二区域流体连通，以及设置在远程等离子体室和处理室之间并具有与第一区域和入口流体连通的通道的输送构件，其中输送构件被构造成使得通道的纵向轴线相对于入口的纵向轴线以大约20度至大约80度的角度相交。

7. 发明申请

WO2011008456A2 METHODS OF FORMING OXIDE LAYERS ON SUBSTRATES 审中-公开
标题翻译：在衬底上形成氧化层的方法
公开(公告)号：WO2011008456A2
公开(公告)日：2011-01-20
申请号：PCT/US2010039753
申请日：2010-06-24
申请人： APPLIED MATERIALS INC , YOKOTA YOSHITAKA , OLSEN CHRISTOPHER S , TJANDRA AGUS SOFIAN , CHO YONAH , ROGERS MATTHEW S
发明人： YOKOTA YOSHITAKA , OLSEN CHRISTOPHER S , TJANDRA AGUS SOFIAN , CHO YONAH , ROGERS MATTHEW S
IPC分类号： H01L21/316 , H01L21/205 , H01L21/31
CPC分类号： H01L21/3105
摘要： Methods for processing substrates are provided herein. In some embodiments, a method for processing a substrate includes providing a substrate having an oxide layer disposed thereon, the oxide layer including one or more defects; and exposing the oxide layer to a plasma formed from a process gas comprising an oxygen-containing gas to repair the one or more defects. In some embodiments, the oxide layer may be formed on the substrate. In some embodiments, forming the oxide layer further comprises depositing the oxide layer atop the substrate. In some embodiments, forming the oxide layer further comprises thermally oxidizing the surface of the substrate to form the oxide layer. In some embodiments, a processing temperature is maintained at about 700 degrees Celsius or below during the thermal oxidation of the surface.
摘要翻译：本文提供了用于处理基材的方法。在一些实施例中，一种用于处理衬底的方法包括提供其上设置有氧化物层的衬底，所述氧化物层包括一个或多个缺陷; 以及将氧化物层暴露于由包含含氧气体的处理气体形成的等离子体以修复一个或多个缺陷。在一些实施例中，氧化物层可以形成在衬底上。在一些实施例中，形成氧化物层还包括在衬底上沉积氧化物层。在一些实施例中，形成氧化物层还包括热氧化衬底的表面以形成氧化物层。在一些实施例中，在表面的热氧化期间处理温度保持在约700摄氏度或更低。

8. 发明申请

WO2007098196A2 SEARCH, TRANSFER, AND BOOKING TOOL FOR MULTIPLE REWARD PROGRAMS 审中-公开
标题翻译：搜索，转移和预订多种奖励计划的工具
公开(公告)号：WO2007098196A2
公开(公告)日：2007-08-30
申请号：PCT/US2007/004507
申请日：2007-02-16
申请人： AMERICAN EXPRESS TRAVEL RELATED SERVICES COMPANY, INC. , GREENE, Nancy, E. , KATZ, Harvey , KNONER, David , MUNKACSY, Chris, J. , NOTTINGHAM, Marniee, L. , ROGERS, Matthew, S.
发明人： GREENE, Nancy, E. , KATZ, Harvey , KNONER, David , MUNKACSY, Chris, J. , NOTTINGHAM, Marniee, L. , ROGERS, Matthew, S.
IPC分类号： G06Q30/00
CPC分类号： G06Q30/02 , G06Q10/02 , G06Q30/0226 , G06Q30/0236 , G06Q50/12 , G06Q50/14
摘要： Many customers are members of multiple frequent customer programs. When a customer wishes to book reward travel, searching each frequent customer program of which the customer is a member is difficult and time-consuming. A rewards program provider, such as a transactional account company, can provide members the opportunity to link frequent customer programs to the rewards program. When a customer searches for reward travel, the customer enters the request through the rewards program provider. The rewards program provider then sends a request to each frequent customer program which includes the customer identification. The frequent customer programs each return a search result tailored to the specific customer, taking into consideration the customer's status and point balance in the frequent customer program. The rewards program provider then allows the customer to book a selected reservation using points corresponding to a specific frequent customer program and/or points corresponding to the provider's rewards program.
摘要翻译：许多客户是多个频繁的客户程序的成员。当客户希望预订奖励旅行时，搜索客户所在的每个频繁的客户程序是困难和耗时的。奖励计划提供者，如交易账户公司，可以为会员提供将频繁的客户计划链接到奖励计划的机会。当客户搜索奖励旅行时，客户通过奖励计划提供商输入请求。然后，奖励计划提供商向每个频繁的客户程序发送一个请求，其中包括客户识别。频繁的客户计划每个都会返回针对特定客户的搜索结果，同时考虑到客户的频繁客户计划中的客户状态和点平衡。奖励计划提供商然后允许客户使用与特定频繁客户程序相对应的点和/或对应于提供商的奖励计划的点来预订所选择的预约。

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