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    • 5. 发明申请
    • METHOD OF FORMING GROUP IV SEMICONDUCTOR JUNCTIONS USING LASER PROCESSING
    • 使用激光加工形成IV族半导体结的方法
    • WO2008137738A3
    • 2009-01-08
    • PCT/US2008062495
    • 2008-05-02
    • INNOVALIGHT INCLEMMI FRANCESCOMEISEL ANDREASANTONIADIS HOMER
    • LEMMI FRANCESCOMEISEL ANDREASANTONIADIS HOMER
    • H01L31/0368H01L21/20H01L21/208H01L31/0392H01L31/068H01L31/18
    • H01L31/182H01L21/0237H01L21/02524H01L21/02532H01L21/02601H01L21/02628H01L21/02675H01L31/03682H01L31/03921H01L31/068H01L31/077Y02E10/546Y02E10/547Y02P70/521
    • A method forming a Group IV semiconductor junction on a substrate is disclosed. The method includes depositing a first set Group IV semiconductor nanoparticles on the substrate. The method also includes applying a first laser at a first laser wavelength, a first fluence, a first pulse duration, a first number of repetitions, and a first repetition rate to the first set Group IV semiconductor nanoparticles to form a first densified film with a first thickness, wherein the first laser wavelength and the first fluence are selected to limit a first depth profile of the first laser to the first thickness. The method further includes depositing a second set Group IV semiconductor nanoparticles on the first densified film. The method also includes applying a second laser at a second laser wavelength, a second fluence, a second pulse duration, a second number of repetitions, and a second repetition rate to the second set Group IV semiconductor nanoparticles to form a second densified film with a second thickness, wherein the second laser wavelength and the second fluence are selected to limit a second depth profile of the second laser to the second thickness.
    • 公开了一种在衬底上形成IV族半导体结的方法。 该方法包括在衬底上沉积第一组IV族半导体纳米颗粒。 该方法还包括将第一激光波长的第一激光,第一注量,第一脉冲持续时间,第一次重复和第一重复率施加到第一组IV族半导体纳米颗粒,以形成第一致密化膜,其具有 第一厚度,其中选择第一激光波长和第一注量以将第一激光器的第一深度分布限制到第一厚度。 该方法还包括在第一致密化膜上沉积第二组IV族半导体纳米颗粒。 该方法还包括将第二激光器以第二激光波长,第二注量,第二脉冲持续时间,第二数量的重复和第二重复率施加到第二组IV族半导体纳米颗粒以形成第二致密化膜,其具有 第二厚度,其中选择第二激光波长和第二注量以将第二激光器的第二深度分布限制到第二厚度。
    • 8. 发明申请
    • A METHOD FOR CALCULATING AN OFFSET VALUE FOR ALIGNED DEPOSITION OF A SECOND PATTERN ONTO A FIRST PATTERN
    • 用于计算第一图案的第二图案对齐沉积的偏移值的方法
    • WO2012103188A3
    • 2013-03-07
    • PCT/US2012022512
    • 2012-01-25
    • DU PONTINNOVALIGHT INCMEISEL ANDREAS
    • MEISEL ANDREAS
    • H01L31/0224
    • H01L31/1804B82Y10/00B82Y40/00G03F7/0002H01L31/022425H01L31/022441Y02E10/547Y02P70/521
    • A method for calculating an offset value for aligned deposition of a second pattern onto a first pattern, comprising steps of: (a) loading a substrate with the first pattern on a surface of the substrate into a pattern recognition device at an original position inside the pattern recognition device; (b) determining a coordinate of a prescribed point of the first pattern by the pattern recognition device; (c) superimposing the second pattern onto the first pattern on the surface of the substrate; (d) bringing back the substrate with the first pattern and the second pattern into the original position inside the pattern recognition device; (e) determining a coordinate of a prescribed point of the second pattern by the pattern recognition device; wherein the prescribed point of the first pattern corresponds to the prescribed point of the second pattern; and (f) calculating the offset value between the first pattern and the second pattern.
    • 一种用于计算用于将第二图案对准沉积到第一图案上的偏移值的方法,包括以下步骤:(a)将基板的表面上的第一图案的基板加载到图案识别装置内部的原始位置 图案识别装置; (b)通过图案识别装置确定第一图案的规定点的坐标; (c)将第二图案叠加在基板的表面上的第一图案上; (d)将具有第一图案和第二图案的基板返回到图案识别装置内部的原始位置; (e)通过图案识别装置确定第二图案的规定点的坐标; 其中所述第一图案的规定点对应于所述第二图案的规定点; 和(f)计算第一图案和第二图案之间的偏移值。