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1. 发明申请

WO2007089505A3 SURFACE MICROMACHINED DIFFERENTIAL MICROPHONE 审中-公开
标题翻译：表面微型差速麦克风
公开(公告)号：WO2007089505A3
公开(公告)日：2008-07-10
申请号：PCT/US2007001915
申请日：2007-01-25
申请人： UNIV NEW YORK STATE RES FOUND , MILES RONALD N
发明人： MILES RONALD N
IPC分类号： H04R25/00 , H01L29/84
CPC分类号： H04R19/005 , H04R1/38 , H04R19/04 , H04R31/00 , Y10T29/43 , Y10T29/49002 , Y10T29/49005 , Y10T29/4908
摘要： A differential microphone having a perimeter slit formed around the microphone diaphragm that replaces the backside hole previously required in conventional silicon, micromachined microphones. The differential microphone is formed using silicon fabrication techniques applied only to a single, front face of a silicon wafer. The backside holes of prior art microphones typically require that a secondary machining operation be performed on the rear surface of the silicon wafer during fabrication. This secondary operation adds complexity and cost to the micromachined microphones so fabricated. Comb fingers forming a portion of a capacitive arrangement may be fabricated as part of the differential microphone diaphragm.
摘要翻译：差分麦克风具有围绕麦克风隔膜形成的周边狭缝，其替代了传统硅，微机械麦克风以前需要的背面孔。差分麦克风使用仅在硅晶片的单个前面施加的硅制造技术来形成。现有技术的麦克风的背面孔通常要求在制造期间在硅晶片的后表面上进行二次加工操作。这种二次操作为如此制造的微加工麦克风增加了复杂性和成本。形成电容性布置的一部分的梳形手指可以被制造为差分麦克风隔膜的一部分。

2. 发明申请

WO2008048850A2 MINIATURE NON-DIRECTIONAL MICROPHONE 审中-公开
标题翻译：微型非定向麦克风
公开(公告)号：WO2008048850A2
公开(公告)日：2008-04-24
申请号：PCT/US2007081100
申请日：2007-10-11
申请人： UNIV NEW YORK STATE RES FOUND , MILES RONALD N
发明人： MILES RONALD N
IPC分类号： H04R11/04 , H04R9/08 , H04R17/02
CPC分类号： H04R23/006
摘要： A miniature microphone comprising a diaphragm compliantly suspended over an enclosed air volume having a vent port is provided, wherein an effective stiffness of the diaphragm with respect to displacement by acoustic vibrations is controlled principally by the enclosed air volume and the port. The microphone may be formed using silicon microfabrication techniques and has sensitivity to sound pressure substantially unrelated to the size of the diaphragm over a broad range of realistic sizes. The diaphragm is rotatively suspend for movement through an arc in response to acoustic vibrations, for example by beams or tabs, and has a surrounding perimeter slit separating the diaphragm from its support structure. The air volume behind the diaphragm provides a restoring spring force for the diaphragm. The microphone's sensitivity is related to the air volume, perimeter slit, and stiffness of the diaphragm and its mechanical supports, and not the area of the diaphragm.
摘要翻译：提供了一种微型麦克风，该微型麦克风包括柔性地悬挂在具有通风口的封闭空气容积上的隔膜，其中隔膜相对于声振动的位移的有效刚度主要由封闭的空气容积和端口来控制。麦克风可以使用硅微细加工技术形成，并且在广泛的实际尺寸范围内对与隔膜尺寸基本无关的声压具有灵敏度。隔膜响应于声振动例如通过梁或突片而旋转地悬挂以通过弧移动，并且具有将隔膜与其支撑结构分隔开的周围的周边狭缝。隔膜后面的空气量为隔膜提供了恢复弹簧力。麦克风的灵敏度与隔膜及其机械支架的风量，周边狭缝和刚度有关，而与隔膜的面积无关。

3. 发明申请

WO2007089505A2 SURFACE MICROMACHINED DIFFERENTIAL MICROPHONE 审中-公开
标题翻译：表面微型差速麦克风
公开(公告)号：WO2007089505A2
公开(公告)日：2007-08-09
申请号：PCT/US2007/001915
申请日：2007-01-25
申请人： THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK , MILES, Ronald, N.
发明人： MILES, Ronald, N.
IPC分类号： H01L21/00
CPC分类号： H04R19/005 , H04R1/38 , H04R19/04 , H04R31/00 , Y10T29/43 , Y10T29/49002 , Y10T29/49005 , Y10T29/4908
摘要： A differential microphone having a perimeter slit formed around the microphone diaphragm that replaces the backside hole previously required in conventional silicon, micromachined microphones. The differential microphone is formed using silicon fabrication techniques applied only to a single, front face of a silicon wafer. The backside holes of prior art microphones typically require that a secondary machining operation be performed on the rear surface of the silicon wafer during fabrication. This secondary operation adds complexity and cost to the micromachined microphones so fabricated. Comb fingers forming a portion of a capacitive arrangement may be fabricated as part of the differential microphone diaphragm.
摘要翻译：差分麦克风具有围绕麦克风隔膜形成的周边狭缝，其替代了传统的硅微型麦克风以前需要的背面孔。差分麦克风使用仅用于硅晶片的单个正面的硅制造技术来形成。现有技术的麦克风的背面孔通常要求在制造期间在硅晶片的后表面上进行二次加工操作。这种二次操作为如此制造的微加工麦克风增加了复杂性和成本。形成电容布置的一部分的梳形手指可以被制造为差分麦克风隔膜的一部分。

4. 发明申请

WO2007084653A3 OPTICAL SENSING IN A DIRECTIONAL MEMS MICROPHONE 审中-公开
公开(公告)号：WO2007084653A3
公开(公告)日：2007-07-26
申请号：PCT/US2007/001406
申请日：2007-01-18
申请人： THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK , GEORGIA TECH RESEARCH CORP. , MILES, Ronald, N. , DEGERTEKIN, F., Levent
发明人： MILES, Ronald, N. , DEGERTEKIN, F., Levent
IPC分类号： H04B1/00 , H04B10/00
摘要： A microphone having an optical component for converting the sound-induced motion of the diaphragm into an electronic signal using a diffraction grating. The microphone with inter-digitated fingers is fabricated on a silicon substrate using a combination of surface and bulk micromachining techniques. A 1mm x 2mm microphone diaphragm, made of polysilicon, has stiffeners and hinge supports to ensure that it responds like a rigid body on flexible hinges. The diaphragm is designed to respond to pressure gradients, giving it a first order directional response to incident sound. This mechanical structure is integrated with a compact optoelectronic readout system that displays results based on optical interferometry.

5. 发明申请

WO2007019194A2 COMB SENSE MICROPHONE 审中-公开
标题翻译： COMB SENSE麦克风
公开(公告)号：WO2007019194A2
公开(公告)日：2007-02-15
申请号：PCT/US2006/030152
申请日：2006-08-02
申请人： THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK , MILES, Ronald, N.
发明人： MILES, Ronald, N.
IPC分类号： H04R25/00
CPC分类号： H04R19/04
摘要： A microphone, having a diaphragm resiliently supported and responsive to acoustic vibrations to move in response thereto, having a set of finger electrodes extending from a periphery thereof. The peripheral finger electrodes interdigitated with another set of finger electrodes, to form an interdigital capacitive sensor. Because the finger electrodes are arrayed in the plane of the diaphragm, and the force due to the bias voltage is parallel to the diaphragm surface, the classic problem in typical capacitive microphones of attraction of the diaphragm to the back plate is effectively overcome. The multiple fingers allow the creation of a microphone having a high output voltage relative to conventional microphones. This yields a very low noise microphone. The diaphragm may be readily formed using well known silicon microfabrication techniques so as to reduce manufacturing costs.
摘要翻译：麦克风具有弹性地支撑并响应于声音振动以响应于此移动的隔膜的麦克风，具有从其周边延伸的一组指状电极。外周指状电极与另一组手指电极相互交叉，以形成叉指电容式传感器。因为手指电极排列在隔膜的平面中，并且由于偏置电压引起的力平行于隔膜表面，所以有效克服了隔膜吸引到背板的典型电容式麦克风的典型问题。多个手指允许创建相对于传统麦克风具有高输出电压的麦克风。这产生非常低噪音的麦克风。可以使用公知的硅微细加工技术容易地形成隔膜，以降低制造成本。

6. 发明申请

WO2008048850A3 MINIATURE NON-DIRECTIONAL MICROPHONE 审中-公开
公开(公告)号：WO2008048850A3
公开(公告)日：2008-04-24
申请号：PCT/US2007/081100
申请日：2007-10-11
申请人： THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK , MILES, Ronald N.
发明人： MILES, Ronald N.
IPC分类号： H04R9/08
摘要： A miniature microphone comprising a diaphragm compliantly suspended over an enclosed air volume having a vent port is provided, wherein an effective stiffness of the diaphragm with respect to displacement by acoustic vibrations is controlled principally by the enclosed air volume and the port. The microphone may be formed using silicon microfabrication techniques and has sensitivity to sound pressure substantially unrelated to the size of the diaphragm over a broad range of realistic sizes. The diaphragm is rotatively suspend for movement through an arc in response to acoustic vibrations, for example by beams or tabs, and has a surrounding perimeter slit separating the diaphragm from its support structure. The air volume behind the diaphragm provides a restoring spring force for the diaphragm. The microphone's sensitivity is related to the air volume, perimeter slit, and stiffness of the diaphragm and its mechanical supports, and not the area of the diaphragm.

7. 发明申请

WO2007084653A2 OPTICAL SENSING IN A DIRECTIONAL MEMS MICROPHONE 审中-公开
标题翻译：方向MEMS麦克风的光学感应
公开(公告)号：WO2007084653A2
公开(公告)日：2007-07-26
申请号：PCT/US2007001406
申请日：2007-01-18
申请人： UNIV NEW YORK STATE RES FOUND , GEORGIA TECH RES INST , MILES RONALD N , DEGERTEKIN F LEVENT
发明人： MILES RONALD N , DEGERTEKIN F LEVENT
IPC分类号： H04R9/08
CPC分类号： H04R23/008 , H04R23/006
摘要： A microphone having an optical component for converting the sound-induced motion of the diaphragm into an electronic signal using a diffraction grating. The microphone with inter-digitated fingers is fabricated on a silicon substrate using a combination of surface and bulk micromachining techniques. A 1mm x 2mm microphone diaphragm, made of polysilicon, has stiffeners and hinge supports to ensure that it responds like a rigid body on flexible hinges. The diaphragm is designed to respond to pressure gradients, giving it a first order directional response to incident sound. This mechanical structure is integrated with a compact optoelectronic readout system that displays results based on optical interferometry.
摘要翻译：一种麦克风，其具有用于使用衍射光栅将振动膜的声音引起的运动转换成电子信号的光学部件。具有数字化指状物的麦克风使用表面和体微加工技术的组合在硅衬底上制造。由多晶硅制成的1mm x 2mm麦克风隔膜具有加强件和铰链支撑，以确保其在柔性铰链上像刚体一样响应。隔膜设计用于响应压力梯度，给予其对入射声音的一阶方向响应。该机械结构与紧凑的光电读出系统集成，其显示基于光学干涉测量的结果。

8. 发明申请

WO2007019194A3 COMB SENSE MICROPHONE 审中-公开
标题翻译： COMB SENSE麦克风
公开(公告)号：WO2007019194A3
公开(公告)日：2007-06-14
申请号：PCT/US2006030152
申请日：2006-08-02
申请人： UNIV NEW YORK STATE RES FOUND , MILES RONALD N
发明人： MILES RONALD N
IPC分类号： H04R25/00
CPC分类号： H04R19/04
摘要： A microphone (1020) having a diaphragm (1002) resiliently supported and responsive to acoustic vibrations to move in response thereto, having a set of finger electrodes (1008) extending from a periphery thereof. The peripheral finger electrodes interdigitated with another set of finger electrodes (1008), to form an interdigital capacitive sensor. Because the finger electrodes are arrayed in the plane of the diaphragm, and the force due to the bias voltage is parallel to the diaphragm surface, the classic problem in typical capacitive microphones of attraction, of the diaphragm to the back plate is effectively overcome. The multiple fingers allow the creation of a microphone having a high output voltage relative to conventional microphones.
摘要翻译：麦克风（1020）具有弹性支撑的振动膜（1002）并且响应于声振动响应于其而移动，具有从其周边延伸的一组指状电极（1008）。外周指状电极与另一组手指电极（1008）相互交错，以形成叉指电容式传感器。由于手指电极排列在隔膜的平面中，并且由于偏置电压引起的力平行于隔膜表面，所以有效地克服了隔膜到背板的典型的吸引电容式麦克风的经典问题。多个手指允许创建相对于传统麦克风具有高输出电压的麦克风。

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