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1. 发明申请

WO2007084653A2 OPTICAL SENSING IN A DIRECTIONAL MEMS MICROPHONE 审中-公开
标题翻译：方向MEMS麦克风的光学感应
公开(公告)号：WO2007084653A2
公开(公告)日：2007-07-26
申请号：PCT/US2007001406
申请日：2007-01-18
申请人： UNIV NEW YORK STATE RES FOUND , GEORGIA TECH RES INST , MILES RONALD N , DEGERTEKIN F LEVENT
发明人： MILES RONALD N , DEGERTEKIN F LEVENT
IPC分类号： H04R9/08
CPC分类号： H04R23/008 , H04R23/006
摘要： A microphone having an optical component for converting the sound-induced motion of the diaphragm into an electronic signal using a diffraction grating. The microphone with inter-digitated fingers is fabricated on a silicon substrate using a combination of surface and bulk micromachining techniques. A 1mm x 2mm microphone diaphragm, made of polysilicon, has stiffeners and hinge supports to ensure that it responds like a rigid body on flexible hinges. The diaphragm is designed to respond to pressure gradients, giving it a first order directional response to incident sound. This mechanical structure is integrated with a compact optoelectronic readout system that displays results based on optical interferometry.
摘要翻译：一种麦克风，其具有用于使用衍射光栅将振动膜的声音引起的运动转换成电子信号的光学部件。具有数字化指状物的麦克风使用表面和体微加工技术的组合在硅衬底上制造。由多晶硅制成的1mm x 2mm麦克风隔膜具有加强件和铰链支撑，以确保其在柔性铰链上像刚体一样响应。隔膜设计用于响应压力梯度，给予其对入射声音的一阶方向响应。该机械结构与紧凑的光电读出系统集成，其显示基于光学干涉测量的结果。

2. 发明申请

WO2005065072A3 ELECTROSPRAY SYSTEMS AND METHODS 审中-公开
标题翻译：电喷雾系统和方法
公开(公告)号：WO2005065072A3
公开(公告)日：2006-04-27
申请号：PCT/US2004028482
申请日：2004-09-01
申请人： GEORGIA TECH RES INST , FEDOROV ANDREI G , DEGERTEKIN F LEVENT
发明人： FEDOROV ANDREI G , DEGERTEKIN F LEVENT
IPC分类号： B01D59/44 , B01L3/02 , H01J49/00 , H01J49/04 , H01J49/10 , H01L21/302 , H01L21/461
CPC分类号： B05B17/0638 , B01L3/0268 , B01L2400/0439 , B05B5/025 , F23D11/32 , H01J49/0018 , H01J49/165
摘要： Electrospray systems, electrospray structures, removable electrospray structures, methods of operating electrospray systems, and methods of fabricating electrospray systems, are disclosed.
摘要翻译：公开了电喷雾系统，电喷雾结构，可移除电喷雾结构，操作电喷雾系统的方法以及制造电喷雾系统的方法。

3. 发明申请

WO2007084653A3 OPTICAL SENSING IN A DIRECTIONAL MEMS MICROPHONE 审中-公开
公开(公告)号：WO2007084653A3
公开(公告)日：2007-07-26
申请号：PCT/US2007/001406
申请日：2007-01-18
申请人： THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK , GEORGIA TECH RESEARCH CORP. , MILES, Ronald, N. , DEGERTEKIN, F., Levent
发明人： MILES, Ronald, N. , DEGERTEKIN, F., Levent
IPC分类号： H04B1/00 , H04B10/00
摘要： A microphone having an optical component for converting the sound-induced motion of the diaphragm into an electronic signal using a diffraction grating. The microphone with inter-digitated fingers is fabricated on a silicon substrate using a combination of surface and bulk micromachining techniques. A 1mm x 2mm microphone diaphragm, made of polysilicon, has stiffeners and hinge supports to ensure that it responds like a rigid body on flexible hinges. The diaphragm is designed to respond to pressure gradients, giving it a first order directional response to incident sound. This mechanical structure is integrated with a compact optoelectronic readout system that displays results based on optical interferometry.

4. 发明申请

WO2005087391A2 ASYMMETRIC MEMBRANE CMUT DEVICES AND FABRICATION METHODS 审中-公开
标题翻译：不对称膜切割装置和制造方法
公开(公告)号：WO2005087391A2
公开(公告)日：2005-09-22
申请号：PCT/US2005/008259
申请日：2005-03-11
申请人： GEORGIA TECH RESEARCH CORPORATION , DEGERTEKIN, F., Levent , MCLEAN, Jeffrey, John , KNIGHT, Joshua, Glenn
发明人： DEGERTEKIN, F., Levent , MCLEAN, Jeffrey, John , KNIGHT, Joshua, Glenn
IPC分类号： B06B1/00
CPC分类号： B06B1/0292 , G01N29/2406
摘要： Asymmetric membrane capacitive micromachined ultrasonic transducer ("cMUT") devices and fabrication methods are provided. In a preferred embodiment, a cMUT device according to the present invention generally comprises a membrane having asymmetric properties. The membrane can have a varied width across its length so that its ends have different widths. The asymmetric membrane can have varied flex characteristics due to its varied width dimensions. In another preferred embodiment, a cMUT device according to the present invention generally comprises an electrode element having asymmetric properties. The electrode element can have a varied width across its length so that its ends have different widths. The asymmetric electrode element can have different reception and transmission characteristics due to its varied width dimensions. In another preferred embodiment, a mass load positioned along the membrane can alter the mass distribution of the membrane. Other embodiments are also claimed and described.
摘要翻译：提供了非对称膜电容微加工超声波换能器（“cMUT”）器件和制造方法。在优选实施方案中，根据本发明的cMUT装置通常包含具有不对称性质的膜。膜可以在其长度上具有变化的宽度，使得其端部具有不同的宽度。由于其不同的宽度尺寸，不对称膜可以具有不同的柔性特性。在另一优选实施例中，根据本发明的cMUT装置通常包括具有不对称性质的电极元件。电极元件可以在其长度上具有变化的宽度，使得其端部具有不同的宽度。由于其不同的宽度尺寸，不对称电极元件可以具有不同的接收和传输特性。在另一个优选实施例中，沿着膜定位的质量载荷可以改变膜的质量分布。还要求保护和描述其它实施例。

5. 发明申请

WO2008147458A1 DROPLET IMPINGEMENT CHEMICAL REACTORS AND METHODS OF PROCESSING FUEL 审中-公开
标题翻译： DROPLET IMPINGEMENT化学反应器和加工燃料的方法
公开(公告)号：WO2008147458A1
公开(公告)日：2008-12-04
申请号：PCT/US2007/085690
申请日：2007-11-28
申请人： GEORGIA TECH RESEARCH CORPORATION , FEDOROV, Andrei, G. , VARADY, Mark , DEGERTEKIN, F., Levent
发明人： FEDOROV, Andrei, G. , VARADY, Mark , DEGERTEKIN, F., Levent
IPC分类号： C01B3/26
CPC分类号： C01B3/22 , C01B3/26 , C01B3/323 , C01B3/38 , C01B3/382 , C01B3/48 , C01B2203/0233 , C01B2203/0261 , C01B2203/0277 , C01B2203/0283 , C01B2203/044 , C01B2203/1041 , C01B2203/1064 , C01B2203/107 , C01B2203/1076 , C01B2203/1082 , C01B2203/1223 , C01B2203/1229 , C01B2203/1247 , C01B2203/142 , C01B2203/143 , C01B2203/82
摘要： Fuel processors, methods of using fuel processors, and the like, are disclosed.
摘要翻译：燃料处理器，使用燃料处理器的方法等。

6. 发明申请

WO2005087391A3 ASYMMETRIC MEMBRANE CMUT DEVICES AND FABRICATION METHODS 审中-公开
标题翻译：不对称膜切割装置和制造方法
公开(公告)号：WO2005087391A3
公开(公告)日：2006-04-27
申请号：PCT/US2005008259
申请日：2005-03-11
申请人： GEORGIA TECH RES INST , DEGERTEKIN F LEVENT , MCLEAN JEFFREY JOHN , KNIGHT JOSHUA GLENN
发明人： DEGERTEKIN F LEVENT , MCLEAN JEFFREY JOHN , KNIGHT JOSHUA GLENN
IPC分类号： B06B1/02
CPC分类号： B06B1/0292 , G01N29/2406
摘要： Asymmetric membrane capacitive micromachined ultrasonic transducer ("cMUT") devices and fabrication methods are provided. In a preferred embodiment, a cMUT device according to the present invention generally comprises a membrane having asymmetric properties. The membrane can have a varied width across its length so that its ends have different widths. The asymmetric membrane can have varied flex characteristics due to its varied width dimensions. In another preferred embodiment, a cMUT device according to the present invention generally comprises an electrode element having asymmetric properties. The electrode element can have a varied width across its length so that its ends have different widths. The asymmetric electrode element can have different reception and transmission characteristics due to its varied width dimensions. In another preferred embodiment, a mass load positioned along the membrane can alter the mass distribution of the membrane. Other embodiments are also claimed and described.
摘要翻译：提供了非对称膜电容微加工超声波换能器（“cMUT”）器件及其制造方法。在优选的实施方案中，根据本发明的cMUT装置通常包含具有不对称性质的膜。膜可以在其长度上具有变化的宽度，使得其端部具有不同的宽度。由于其不同的宽度尺寸，不对称膜可以具有变化的弯曲特性。在另一个优选实施例中，根据本发明的cMUT装置通常包括具有不对称性质的电极元件。电极元件可以在其长度上具有变化的宽度，使得其端部具有不同的宽度。由于其不同的宽度尺寸，不对称电极元件可以具有不同的接收和传输特性。在另一个优选的实施方案中，沿着膜定位的质量载荷可以改变膜的质量分布。还要求保护和描述其它实施例。

7. 发明申请

WO2005046443A3 COMBINATION CATHETER DEVICES, METHODS, AND SYSTEMS 审中-公开
标题翻译：组合导管装置，方法和系统
公开(公告)号：WO2005046443A3
公开(公告)日：2012-12-13
申请号：PCT/US2004037089
申请日：2004-11-08
申请人： GEORGIA TECH RES INST , CARDIOVASCULAR RES FOUNDATION , DEGERTEKIN F LEVENT , CARLIER STEPHANE GUY
发明人： DEGERTEKIN F LEVENT , CARLIER STEPHANE GUY
IPC分类号： G01H5/00 , A61B20060101 , A61B5/0215 , A61B8/12 , H01L21/00 , H01L27/14 , H01L29/82
CPC分类号： A61B8/12 , A61B5/0215 , A61B8/445
摘要： A combination catheter method, system, and device are provided having a capacitive-micromachined ultrasound transducer ('cMUT') and a sensor fabricated on the same substrate. A substrate is provided, and various layers of materials are deposited onto the substrate and patterned to form a cMUT and one or more sensors. Other embodiments are also claimed and described.
摘要翻译：提供组合导管方法，系统和装置，其具有电容式微加工超声波换能器（'cMUT'）和制造在同一衬底上的传感器。提供衬底，并且将各种材料层沉积到衬底上并图案化以形成cMUT和一个或多个传感器。还要求保护和描述其它实施例。

8. 发明申请

WO2005084267A3 HARMONIC CMUT DEVICES AND FABRICATION METHODS 审中-公开
标题翻译：谐波CMUT器件和制造方法
公开(公告)号：WO2005084267A3
公开(公告)日：2007-11-15
申请号：PCT/US2005006408
申请日：2005-02-28
申请人： GEORGIA TECH RES INST , DEGERTEKIN F LEVENT
发明人： DEGERTEKIN F LEVENT
IPC分类号： H02N1/00 , B06B1/02 , H02N2/00 , H03H9/24
CPC分类号： B06B1/0292
摘要： Harmonic capacitive micromachined ultrasonic transducer ("cMUT") devices and fabrication methods are provided In a preferred embodiment, a harmonic cMUT device (100) generally comprises a membrane (115) having a non-uniform mass distribution A mass load (155, 160) positioned along the membrane (115) can be utilized to alter the mass distribution of the membrane (115) The mass load (155, 160) can be a part of the membrane (115) and formed of the same material or a different material as the membrane (115) The mass load (155, 160) can be positioned to correspond with a vibration mode of the membrane (115), and also to adjust or shift a vibration mode of the membrane (115) The mass load (155, 160) can also be positioned at predetermined locations along the membrane (1 15) to control the harmonic vibrations of the membrane (115) A cMUT (100) can also comprise a cavity (150) defined b the membrane (115), a first electrode (130a-c) proximate the membrane (1 15), and a seocnd electrode (110) proximate a substrate (105) Other embodiments are also claimed and described.
摘要翻译：谐波电容微加工超声换能器（“cMUT”）装置和制造方法在优选实施例中，谐波cMUT装置（100）通常包括具有不均匀质量分布A质量负载（155,160）的膜（115）可以利用沿膜（115）定位的膜（115）的质量分布。质量负载（155,160）可以是膜（115）的一部分，并且由相同的材料或不同的材料形成，膜（115）可以将质量负载（155,160）定位成对应于膜（115）的振动模式，并且还可以调节或移动膜（115）的振动模式。质量负载（155，也可以沿着膜（115）定位在预定位置以控制膜（115）的谐波振动。cMUT（100）还可以包括限定在膜（115）上的空腔（150），第一接近膜（115）的电极（130a-c）和第一电极（110）p 近似基板（105）还要求保护和描述其它实施例。

9. 发明申请

WO2005084284A3 MULTIPLE ELEMENT ELECTRODE CMUT DEVICES AND FABRICATION METHODS 审中-公开
标题翻译：多元素电极设备和制造方法
公开(公告)号：WO2005084284A3
公开(公告)日：2007-01-25
申请号：PCT/US2005006474
申请日：2005-02-28
申请人： GEORGIA TECH RES INST , DEGERTEKIN F LEVENT
发明人： DEGERTEKIN F LEVENT
IPC分类号： H02N1/08 , B06B1/02 , H01L41/04 , H02N2/00
CPC分类号： B06B1/0292 , G01N29/2406
摘要： Multiple electrode element capacitive micromachined ultrasonic transducer ("cMUT") devices and fabrication methods are provided. A cMUT device generally comprises a top electrode disposed within a membrane, a bottom electrode disposed on a substrate, and a cavity between the membrane and the bottom electrode. In a preferred embodiment of the present invention, at least one of the first electrode and the second electrode comprises a plurality of electrode elements. The electrode elements can be positioned and energized to shape the membrane and efficiently transmit and receive ultrasonic energy, such as ultrasonic waves. Other embodiments are also claimed and described.
摘要翻译：提供了多电极元件电容微加工超声波换能器（“cMUT”）器件及其制造方法。 cMUT器件通常包括设置在膜内的顶部电极，设置在衬底上的底部电极以及膜和底部电极之间的空腔。在本发明的优选实施例中，第一电极和第二电极中的至少一个包括多个电极元件。电极元件可以被定位和通电以使膜成形，并且有效地传输和接收诸如超声波的超声波能量。还要求保护和描述其它实施例。

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