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    • 2. 发明申请
    • METAL WIRE ETCHANT LIQUID AND METHOD FOR MANUFACTURING A LIQUID CRYSTAL DISPLAY USING THE ETCHANT
    • 金属线槽液体及其制造方法,用于制造采用ETCHANT的液晶显示器
    • WO2012177017A3
    • 2013-02-28
    • PCT/KR2012004717
    • 2012-06-15
    • DONGJIN SEMICHEM CO LTDKU BYUNG SOOLEE MYUNG HANCHO SAM YOUNGLEE KI BEOM
    • KU BYUNG SOOLEE MYUNG HANCHO SAM YOUNGLEE KI BEOM
    • C23F1/18C09K13/00H01L21/306H01L21/308
    • H01L21/32134C09K13/10C23F1/18H01L27/124
    • Disclosed are a metal film etchant liquid composition including a copper used for a semiconductor device, and an etching method using same. The metal film etchant liquid composition of the present invention comprises: a fluoboric acid; or the fluoboric acid and at least one kind of fluorine compound. In the method for etching the metal film including the copper using the etchant liquid composition according to the present invention, a lower glass substrate is not damaged during the etching, and the copper-containing multilayer metal film may be etched all at once so as to improve the product yield of the semiconductor device. Further, in the etchant liquid composition and the etching method using the same according to the present invention, open defects, caused by a stepped portion and erosion, may be prevented as sulfate is not used. Since etching is possible without using an organic acid, precipitation with metal salts may be prevented, and fine patterns may be obtained.
    • 公开了包括用于半导体器件的铜的金属膜蚀刻剂液体组合物和使用它的蚀刻方法。 本发明的金属膜蚀刻剂液体组合物包含:氟硼酸; 或氟硼酸和至少一种氟化合物。 在使用根据本发明的蚀刻剂液体组合物蚀刻包含铜的金属膜的方法中,在蚀刻期间,下部玻璃基板不被损坏,并且可以同时蚀刻含铜多层金属膜,以便 提高半导体器件的产品产量。 此外,在根据本发明的蚀刻剂液体组合物和使用该蚀刻方法的蚀刻方法中,由于不使用硫酸盐,可以防止由阶梯部分引起的开放缺陷和侵蚀。 由于可以在不使用有机酸的情况下进行蚀刻,因此可以防止用金属盐沉淀,并且可以获得精细图案。