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    • 1. 发明申请
    • COMPOSITE SUBSTRATES FOR DIRECT HEATING AND INCREASED TEMPERATURE UNIFORMITY
    • 用于直接加热和增加温度均匀性的复合基材
    • WO2012021321A3
    • 2012-06-28
    • PCT/US2011046116
    • 2011-08-01
    • APPLIED MATERIALS INCSU JIEOLGADO DONALD J KKUTNEY MICHAEL C
    • SU JIEOLGADO DONALD J KKUTNEY MICHAEL C
    • H01L21/205H01L21/683
    • F27B17/0025C23C16/4586C23C16/46C30B23/063C30B25/105H01L21/67115H01L21/68764H01L21/68771H01L21/68785
    • Embodiments of the present invention generally relate to apparatus and methods for uniformly heating substrates. The apparatus include a transferable puck having at least one electrode and a dielectric coating. The transferable puck can be biased with a biasing assembly relative to a substrate, and transferred independently of the biasing assembly during a fabrication process while maintaining the bias relative to the substrate. The puck absorbs radiant heat from a heat source and uniformly conducts the heat to a substrate coupled to the puck. The puck has high emissivity and high thermal conductivity for absorbing and transferring the radiant heat to the substrate. The high thermal conductivity allows for a uniform temperature profile across the substrate, thereby increasing deposition uniformity. The method includes disposing a light-absorbing material on an optically transparent substrate, and radiating the light-absorbing material with a radiant heat source to heat the optically transparent substrate.
    • 本发明的实施例一般涉及用于均匀加热衬底的装置和方法。 该装置包括具有至少一个电极和介电涂层的可转移圆盘。 可转移的圆盘可以相对于基板偏压组件偏置,并且在制造过程中独立于偏置组件传递,同时保持相对于基板的偏压。 圆盘吸收来自热源的辐射热,并将热量均匀地传导到耦合到冰球的基底。 圆盘具有高辐射率和高导热性,用于吸收并将辐射热传递到基底。 高导热性允许跨基板的均匀温度分布,从而增加沉积均匀性。 该方法包括将光吸收材料设置在光学透明基板上,并且用辐射热源辐射光吸收材料以加热光学透明基板。
    • 10. 发明申请
    • COMPOSITE SUBSTRATES FOR DIRECT HEATING AND INCREASED TEMPERATURE UNIFORMITY
    • 用于直接加热和增加温度均匀性的复合材料
    • WO2012021321A2
    • 2012-02-16
    • PCT/US2011/046116
    • 2011-08-01
    • APPLIED MATERIALS, INC.SU, JieOLGADO, Donald J.K.KUTNEY, Michael C.
    • SU, JieOLGADO, Donald J.K.KUTNEY, Michael C.
    • H01L21/205H01L21/683
    • F27B17/0025C23C16/4586C23C16/46C30B23/063C30B25/105H01L21/67115H01L21/68764H01L21/68771H01L21/68785
    • Embodiments of the present invention generally relate to apparatus and methods for uniformly heating substrates. The apparatus include a transferable puck having at least one electrode and a dielectric coating. The transferable puck can be biased with a biasing assembly relative to a substrate, and transferred independently of the biasing assembly during a fabrication process while maintaining the bias relative to the substrate. The puck absorbs radiant heat from a heat source and uniformly conducts the heat to a substrate coupled to the puck. The puck has high emissivity and high thermal conductivity for absorbing and transferring the radiant heat to the substrate. The high thermal conductivity allows for a uniform temperature profile across the substrate, thereby increasing deposition uniformity. The method includes disposing a light-absorbing material on an optically transparent substrate, and radiating the light-absorbing material with a radiant heat source to heat the optically transparent substrate.
    • 本发明的实施例总体涉及用于均匀地加热衬底的装置和方法。 该设备包括具有至少一个电极和电介质涂层的可转移圆盘。 可转移圆盘可以用偏置组件相对于衬底偏置,并且在制造过程期间独立于偏置组件而转移,同时相对于衬底保持偏置。 冰球吸收来自热源的辐射热并将热量均匀地传导至与冰球连接的基板。 该圆盘具有高发射率和高导热性,用于吸收辐射热量并将辐射热量传递给基板。 高导热率允许横跨衬底的均匀温度分布,由此增加沉积均匀性。 该方法包括将光吸收材料设置在光学透明衬底上,并用辐射热源辐射光吸收材料以加热光学透明衬底。