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1. 发明申请

WO2012142035A3 METHOD AND APPARATUS FOR REFURBISHING GAS DISTRIBUTION PLATE SURFACES 审中-公开
标题翻译：用于改造气体分布板表面的方法和装置
公开(公告)号：WO2012142035A3
公开(公告)日：2013-01-17
申请号：PCT/US2012032915
申请日：2012-04-10
申请人： APPLIED MATERIALS INC , BANDA SUMANTH , SUN JENNIFER , DUAN REN-GUAN , GRAVES THOMAS , BOYD WENDELL GLEN JR , DUDLEY RANDOLPH WILLIAM JR , DOAN KHOI , LU WILLIAM MING-YE
发明人： BANDA SUMANTH , SUN JENNIFER , DUAN REN-GUAN , GRAVES THOMAS , BOYD WENDELL GLEN JR , DUDLEY RANDOLPH WILLIAM JR , DOAN KHOI , LU WILLIAM MING-YE
IPC分类号： H01L21/205 , H01L21/02 , H01L21/3065
CPC分类号： B24B37/042 , B08B1/04 , B24B27/033 , B24B37/107 , B24B37/245 , B24B37/26 , C23C16/4407 , Y10T137/85938 , Y10T156/11
摘要： Embodiments described herein generally relate to methods and apparatus for refurbishing a gas distribution plate assembly utilized in a deposition chamber or etch chamber. In one embodiment, a method for refurbishing a gas distribution plate assembly is provided. The method includes urging a faceplate of a gas distribution plate assembly against a polishing pad of a polishing device, the faceplate having a plurality of gas distribution holes disposed therein, providing relative motion between the faceplate and the polishing pad, and polishing the faceplate against the polishing pad.
摘要翻译：本文描述的实施例一般涉及用于翻新在沉积室或蚀刻室中使用的气体分配板组件的方法和装置。在一个实施例中，提供了一种用于翻新气体分配板组件的方法。该方法包括将气体分配板组件的面板推压到抛光装置的抛光垫上，该面板具有设置在其中的多个气体分配孔，在面板和抛光垫之间提供相对运动，并且将面板抵靠抛光垫

2. 发明申请

WO2011100109A3 GAS DISTRIBUTION SHOWERHEAD WITH COATING MATERIAL FOR SEMICONDUCTOR PROCESSING 审中-公开
标题翻译：具有涂层材料的气体分布式淋浴器用于半导体加工
公开(公告)号：WO2011100109A3
公开(公告)日：2011-10-27
申请号：PCT/US2011022418
申请日：2011-01-25
申请人： APPLIED MATERIALS INC , SUN JENNIFER , THACH SENH , DUAN RENGUAN , GRAVES THOMAS
发明人： SUN JENNIFER , THACH SENH , DUAN RENGUAN , GRAVES THOMAS
IPC分类号： H01L21/316 , H01L21/205
CPC分类号： H01J37/3244 , C23C4/02 , C23C4/11 , C23C4/18
摘要： Described herein are exemplary methods and apparatuses for fabricating a gas distribution showerhead assembly in accordance with one embodiment. In one embodiment, a method includes providing a gas distribution plate having a first set of through-holes for delivering processing gases into a semiconductor processing chamber. The first set of through-holes is located on a backside of the plate (e.g., Aluminum substrate). The method includes spraying (e.g., plasma spraying) a coating material (e.g., Ytrria based material) onto a cleaned surface of the gas distribution plate. The method includes removing (e.g., surface grinding) a portion of the coating material from the surface to reduce a thickness of the coating material. The method includes forming (e.g., UV laser drilling, machining) a second set of through-holes in the coating material such that the through-holes are aligned with the first-set of through-holes.
摘要翻译：这里描述了根据一个实施例的用于制造气体分配喷头组件的示例性方法和装置。在一个实施例中，一种方法包括提供具有第一组通孔的气体分配板，用于将处理气体输送到半导体处理室中。第一组通孔位于板的背面（例如铝基板）上。该方法包括将涂料（例如，基于Ytrria的材料）喷雾（例如，等离子体喷涂）到气体分配板的清洁表面上。该方法包括从表面去除（例如，表面研磨）涂层材料的一部分以减少涂层材料的厚度。该方法包括在涂层材料中形成（例如UV激光钻孔，加工）第二组通孔，使得通孔与第一组通孔对齐。

3. 发明申请

WO2011100109A2 GAS DISTRIBUTION SHOWERHEAD WITH COATING MATERIAL FOR SEMICONDUCTOR PROCESSING 审中-公开
标题翻译：用于半导体加工的带涂层材料的气体分配喷头
公开(公告)号：WO2011100109A2
公开(公告)日：2011-08-18
申请号：PCT/US2011/022418
申请日：2011-01-25
申请人： APPLIED MATERIALS, INC. , SUN, Jennifer , THACH, Senh , DUAN, Renguan , GRAVES, Thomas
发明人： SUN, Jennifer , THACH, Senh , DUAN, Renguan , GRAVES, Thomas
IPC分类号： H01L21/316 , H01L21/205
CPC分类号： H01J37/3244 , C23C4/02 , C23C4/11 , C23C4/18
摘要： Described herein are exemplary methods and apparatuses for fabricating a gas distribution showerhead assembly in accordance with one embodiment. In one embodiment, a method includes providing a gas distribution plate having a first set of through-holes for delivering processing gases into a semiconductor processing chamber. The first set of through-holes is located on a backside of the plate (e.g., Aluminum substrate). The method includes spraying (e.g., plasma spraying) a coating material (e.g., Ytrria based material) onto a cleaned surface of the gas distribution plate. The method includes removing (e.g., surface grinding) a portion of the coating material from the surface to reduce a thickness of the coating material. The method includes forming (e.g., UV laser drilling, machining) a second set of through-holes in the coating material such that the through-holes are aligned with the first-set of through-holes.
摘要翻译：这里描述了根据一个实施例的用于制造气体分配喷头组件的示例性方法和设备。在一个实施例中，一种方法包括提供具有用于将处理气体输送到半导体处理室中的第一组通孔的气体分配板。第一组通孔位于板的背面（例如，铝基板）上。该方法包括将涂层材料（例如，基于Ytrria的材料）喷射（例如等离子喷涂）到气体分配板的清洁表面上。该方法包括从表面去除（例如，表面研磨）一部分涂层材料以减小涂层材料的厚度。该方法包括在涂层材料中形成（例如UV激光钻孔，加工）第二组通孔，使得通孔与第一组通孔对准。

4. 发明申请

WO2012142035A2 METHOD AND APPARATUS FOR REFURBISHING GAS DISTRIBUTION PLATE SURFACES 审中-公开
标题翻译：用于改造气体分布板表面的方法和装置
公开(公告)号：WO2012142035A2
公开(公告)日：2012-10-18
申请号：PCT/US2012/032915
申请日：2012-04-10
申请人： APPLIED MATERIALS, INC. , BANDA, Sumanth , SUN, Jennifer , DUAN, Ren-Guan , GRAVES, Thomas , BOYD, Wendell Glen, Jr. , DUDLEY, Randolph William, Jr. , DOAN, Khoi , LU, William Ming-Ye
发明人： BANDA, Sumanth , SUN, Jennifer , DUAN, Ren-Guan , GRAVES, Thomas , BOYD, Wendell Glen, Jr. , DUDLEY, Randolph William, Jr. , DOAN, Khoi , LU, William Ming-Ye
IPC分类号： H01L21/205 , H01L21/3065 , H01L21/02
CPC分类号： B24B37/042 , B08B1/04 , B24B27/033 , B24B37/107 , B24B37/245 , B24B37/26 , C23C16/4407 , Y10T137/85938 , Y10T156/11
摘要： Embodiments described herein generally relate to methods and apparatus for refurbishing a gas distribution plate assembly utilized in a deposition chamber or etch chamber. In one embodiment, a method for refurbishing a gas distribution plate assembly is provided. The method includes urging a faceplate of a gas distribution plate assembly against a polishing pad of a polishing device, the faceplate having a plurality of gas distribution holes disposed therein, providing relative motion between the faceplate and the polishing pad, and polishing the faceplate against the polishing pad.
摘要翻译：本文描述的实施例一般涉及用于翻新在沉积室或蚀刻室中使用的气体分配板组件的方法和装置。在一个实施例中，提供了一种用于翻新气体分配板组件的方法。该方法包括将气体分配板组件的面板推压到抛光装置的抛光垫上，该面板具有设置在其中的多个气体分配孔，在面板和抛光垫之间提供相对运动，并且将面板抵靠抛光垫

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