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1. 发明申请

WO2015200649A3 ELECTRON ENERGY LOSS SPECTROMETER 审中-公开
标题翻译：电子能量损失光谱仪
公开(公告)号：WO2015200649A3
公开(公告)日：2016-02-18
申请号：PCT/US2015037712
申请日：2015-06-25
申请人： GATAN INC
发明人： GUBBENS ALEXANDER JOZEF , TREVOR COLIN , TWESTEN RAY DUDLEY , BARFELS MELANIE
IPC分类号： H01J37/05 , H01J37/244 , H01J37/28
CPC分类号： H01J37/05 , H01J37/12 , H01J37/147 , H01J37/244 , H01J37/28 , H01J2237/053 , H01J2237/055 , H01J2237/057 , H01J2237/12 , H01J2237/24485 , H01J2237/2802
摘要： An electron energy loss spectrometer for electron microscopy is disclosed having an electrically isolated drift tube (214) extending through the bending magnet (213) and through subsequent optics (216, 217) that focus and magnify the spectrum. An electrostatic or magnetic lens (211, 212, 219, 220) is located either before or after or both before and after the drift tube and the lens or lenses are adjusted as a function of the bending magnet drift tube voltage to maintain a constant net focal length and to avoid defocusing. An energy selecting slit (218) is included in certain embodiments to cleanly cut off electrons dispersed outside the energy range incident on the detector, thereby eliminating artifacts caused by unwanted electrons scattering back into the spectrum.
摘要翻译：公开了一种用于电子显微镜的电子能量损失光谱仪，其具有延伸穿过弯曲磁体（213）的电隔离漂移管（214）以及聚焦和放大光谱的后续光学器件（216,217）。静电或磁性透镜（211,212,219,220）位于漂移管之前或之后或两者之间，并且透镜或透镜作为弯曲磁体漂移管电压的函数被调整以保持恒定的净焦距和避免散焦。在某些实施例中包括能量选择狭缝（218），以清洁地切断分散在入射到检测器上的能量范围之外的电子，从而消除由不想要的电子散射回到光谱中造成的假象。

2. 发明申请

WO2014018694A3 ION BEAM SAMPLE PREPARATION APPARATUS AND METHODS 审中-公开
标题翻译：离子束样品制备装置和方法
公开(公告)号：WO2014018694A3
公开(公告)日：2014-06-12
申请号：PCT/US2013051917
申请日：2013-07-25
申请人： GATAN INC
发明人： HUNT JOHN ANDREW , COYLE STEVEN THOMAS , HASSEL-SHEARER MICHAEL
IPC分类号： H01L21/66 , G01N1/32 , H01J37/305
CPC分类号： H04N7/18 , G01N1/32 , G01N2021/0162 , G01N2021/8416 , H01J37/3005 , H01J37/3053 , H01J37/3056 , H01J2237/184 , H01J2237/202 , H01J2237/31745 , H01L22/26
摘要： Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The methods operate on a sample disposed in a vacuum chamber and include steps of directing an intensity-controllable, tilt-angle controllable ion beam at a sample holder coupled to a rotation stage. The methods further include illuminating and capturing one or more images of the sample, extracting useful features from one or more images and thereafter adjusting the sample preparation steps. Further methods are disclosed for capturing sequences of images, programmatically rotating images, and displaying sequences of images with similar rotation angles. Further methods include extracting useful features from sequences of images that may change with respect to time as ion beam preparation continues
摘要翻译：公开了离子束样品制备装置和方法的实施方案。所述方法对设置在真空室中的样品进行操作，并且包括将强度可控的倾斜角度可控离子束引导到与旋转台连接的样品保持器的步骤。所述方法还包括照亮和捕获样品的一个或多个图像，从一个或多个图像提取有用特征，然后调整样品制备步骤。公开了用于捕获图像序列，以编程方式旋转图像以及显示具有相似旋转角度的图像序列的其它方法。其他方法包括从继续离子束制备时可能随时间变化的图像序列中提取有用特征

3. 发明申请

WO2022047092A1 APPARATUS AND METHOD FOR SEMICONDUCTOR PACKAGE FAILURE ANALYSIS 审中-公开
公开(公告)号：WO2022047092A1
公开(公告)日：2022-03-03
申请号：PCT/US2021/047844
申请日：2021-08-27
申请人： GATAN, INC.
发明人： COYLE, Steven T. , HOSMAN, Thijs C. , HUNT, John A. , HASSEL-SHEARER, Michael P.
IPC分类号： H01L21/268 , B23K26/00 , H01L21/26 , H01L21/263
摘要： A pulsed laser apparatus for milling a sample is described. The apparatus includes a pulsed laser, a scan head for scanning a beam from the pulsed laser across the sample and an F-theta lens for focusing the scanned beam onto the sample. The apparatus may also include a liquid bath for milling the sample under the liquid, such as water. Methods of pulsed laser milling are also described.

4. 发明申请

WO2016022419A2 METHOD FOR IMAGE OUTLIER REMOVAL FOR TRANSMISSION ELECTRON MICROSCOPE CAMERAS 审中-公开
标题翻译：用于传输电子显微镜摄像机的图像移出装置的方法
公开(公告)号：WO2016022419A2
公开(公告)日：2016-02-11
申请号：PCT/US2015043134
申请日：2015-07-31
申请人： GATAN INC
发明人： MOONEY PAUL
IPC分类号： C12N15/09 , G06T5/00 , A61K39/00 , A61P37/04 , A61P43/00 , C12N5/00 , C12N5/10
CPC分类号： A61K39/00 , A61K48/00 , C12N15/09 , G06T5/005 , G06T2207/10061 , H01J37/222 , H01J37/26 , H01J37/263 , H01J2237/223 , H01J2237/226 , H01J2237/2448 , H01J2237/24495 , H01J2237/2617 , H04N5/3675
摘要： Methods are disclosed for removal of outlier pixels from a transmission electron microscopy camera image. One exemplary method includes establishing a desired exposure of n electrons per pixel; exposing the camera to a series of sub-frame exposures to produce a series of sub-frame images; calculating an average image signal of all sub-frame exposures in said series; establishing a threshold selected to achieve a desired number of false positives; evaluating each of said sub-frame exposures for pixels further away from said average than said threshold; and replacing pixels in each of said sub-frame images that exceed said threshold with said average to form corrected sub-frame images.
摘要翻译：公开了用于从透射电子显微镜照相机图像去除异常像素的方法。一种示例性方法包括建立每像素n个电子的期望曝光; 将相机暴露于一系列子帧曝光以产生一系列子帧图像; 计算所述系列中所有子帧曝光的平均图像信号; 建立选定的阈值以实现期望数量的误报; 针对比所述阈值更远离所述平均值的像素评估所述子帧曝光的每一个; 以及用所述平均值替换每个所述子帧图像中超过所述阈值的像素以形成校正的子帧图像。

5. 发明申请

WO2015200649A2 ELECTRON ENERGY LOSS SPECTROMETER 审中-公开
标题翻译：电子能量损失光谱仪
公开(公告)号：WO2015200649A2
公开(公告)日：2015-12-30
申请号：PCT/US2015/037712
申请日：2015-06-25
申请人： GATAN, INC.
发明人： GUBBENS, Alexander, Jozef , TREVOR, Colin , TWESTEN, Ray, Dudley , BARFELS, Melanie
IPC分类号： H01J37/05 , H01J37/244 , H01J37/28
CPC分类号： H01J37/05 , H01J37/12 , H01J37/147 , H01J37/244 , H01J37/28 , H01J2237/053 , H01J2237/055 , H01J2237/057 , H01J2237/12 , H01J2237/24485 , H01J2237/2802
摘要： An electron energy loss spectrometer for electron microscopy is disclosed having an electrically isolated drift tube extending through the bending magnet and through subsequent optics that focus and magnify the spectrum. An electrostatic or magnetic lens is located either before or after or both before and after the drift tube and the lens or lenses are adjusted as a function of the bending magnet drift tube voltage to maintain a constant net focal length and to avoid defocusing. An energy selecting slit is included in certain embodiments to cleanly cut off electrons dispersed outside the energy range incident on the detector, thereby eliminating artifacts caused by unwanted electrons scattering back into the spectrum.
摘要翻译：公开了一种用于电子显微镜的电子能量损失光谱仪，其具有延伸穿过弯曲磁体的电隔离漂移管，以及聚焦和放大光谱的后续光学器件。静电或磁性透镜位于漂移管之前或之后或两者之间，并且透镜或透镜作为弯曲磁体漂移管电压的函数进行调节，以保持恒定的净焦距并避免散焦。在某些实施例中包括能量选择狭缝，以清洁地切断分散在入射到检测器上的能量范围之外的电子，从而消除由不想要的电子散射回到光谱中引起的假象。

6. 发明申请

WO2013101379A1 APPARATUS FOR COLLECTION OF CATHODOLUMINESCENCE SIGNALS 审中-公开
标题翻译：用于收集阴离子荧光信号的装置
公开(公告)号：WO2013101379A1
公开(公告)日：2013-07-04
申请号：PCT/US2012/066770
申请日：2012-11-28
申请人： GATAN, INC.
发明人： GALLOWAY, Simon , STOWE, David, J. , VINCE, Richard , BEECHING, Levi , BLACKWELL, John
IPC分类号： H01J37/22 , H01J37/26
CPC分类号： H01J37/228 , H01J37/26 , H01J2237/20 , H01J2237/2445 , H01J2237/24495 , H01J2237/2808
摘要： A side entry TEM holder incorporates a miniature tilted off axis ellip- tical mirror (110) to collect cathodoluminescence from the specimen (130) and couple it efficiently into a tilted fiber optic (120) integrated into the holder. The design is compatible with the cryogenic operation of the holder. TEM specimens are partially transparent to the electron beam, and so light can be emitted above and below the specimen. The same principle of off-axis mirror and tilted fiber can be utilized to collect light from above and below the specimen yet fit into the very confined space required by insertion through the goniometer and for operation between narrow gap pole pieces. With a dual system, the emission of light from above the specimen can be compared to that from below thereby enhancing the versatility of the analytical tech- nique.
摘要翻译：侧入TEM持有器包括微型倾斜离轴椭圆镜（110）以从样品（130）收集阴极发光并将其有效地耦合到集成到保持器中的倾斜光纤（120）中。该设计与支架的低温操作兼容。 TEM样品对电子束部分透明，因此可以在样品上方和下方发射光。离轴反射镜和倾斜光纤的相同原理可以用于从样品上方和下方收集光线，但是它们被安装到通过测角器插入所需的非常狭窄的空间中，并在狭窄的间隙极片之间进行操作。使用双重系统，可以将来自样品上方的光的发射与下面的光进行比较，从而提高分析技术的通用性。

7. 发明申请

WO1998006125A1 AUTOMATED ADJUSTMENT OF AN ENERGY FILTERING TRANSMISSIION ELECTRON MICROSCOPE 审中-公开
标题翻译：能量过滤电子显微镜的自动调整
公开(公告)号：WO1998006125A1
公开(公告)日：1998-02-12
申请号：PCT/US1997011896
申请日：1997-07-10
申请人： GATAN, INC.
发明人： GATAN, INC. , KUNDMANN, Michael, Karl , GUBBENS, Alexander, Jozef , FRIEDMAN, Stuart, Lawrence , KRIVANEK, Ondrej, L.
IPC分类号： H01J37/26
CPC分类号： H01J37/05 , H01J37/252 , H01J37/26 , H01J37/265 , H01J2237/24485 , H01J2237/24585 , H01J2237/2826
摘要： An energy filtering system of an EFTEM is automatically adjusted using a computer. The computer inserts an energy-selecting slit into the beam path and begins monitoring the position of the electron beam through a combination of the current sensors integral to the slit and the readout of an electron camera. The beam is centered within the slit by adjusting an energy dispersing element while monitoring beam sensors. After initial alignment, the slit is retracted and a reference aperture is inserted at the entrance to the energy filter. The electron camera captures an image of the reference aperture and the computer analyzes the deviations of the aperture image from its known physical dimensions in order to evaluate the electron optical distortions and aberrations of the filter. The computer uses the determined optical parameters to adjust the distortion and aberration correcting optical elements of the filter, whose effects are known due to previous calibration. After correcting the imaging aberrations, the reference aperture is withdrawn, the slit reinserted, and an isochromatic surface of the filter at the plane of the slit is measured by scanning the beam across a slit edge while integrating the transmitted beam intensity on the electron camera. The isochromatic surface thus collected by the electron camera is analyzed by the computer to extract additional aberration coefficients of the filter system. These measured aberration coefficients are used to make calibrated corrections to the filter optics.
摘要翻译：使用计算机自动调整EFTEM的能量过滤系统。计算机将能量选择狭缝插入光束路径中，并开始通过整合到狭缝的电流传感器和电子照相机的读出的组合监视电子束的位置。通过在监测光束传感器的同时调节能量分散元件，光束在狭缝内居中。在初始对准之后，狭缝缩回并且在能量过滤器的入口处插入参考孔。电子摄像机拍摄参考光圈的图像，并且计算机分析孔径图像与其已知物理尺寸的偏差，以便评估滤光器的电子光学失真和像差。计算机使用确定的光学参数来调整滤波器的失真和像差校正光学元件，其由于先前的校准而已知其影响。在校正成像像差之后，取出参考孔径，重新插入缝隙，并且通过扫描横跨狭缝边缘的光束来测量滤光器在狭缝平面处的等色表面，同时将透射光束强度整合在电子照相机上。由电子照相机收集的等色表面由计算机分析以提取滤光系统的附加像差系数。这些测量的像差系数用于对滤光器光学元件进行校准校正。

8. 发明申请

WO2014018694A2 ION BEAM SAMPLE PREPARATION APPARATUS AND METHODS 审中-公开
标题翻译：离子束样品制备装置和方法
公开(公告)号：WO2014018694A2
公开(公告)日：2014-01-30
申请号：PCT/US2013/051917
申请日：2013-07-25
申请人： GATAN, INC.
发明人： HUNT, John Andrew , COYLE, Steven Thomas , HASSEL-SHEARER, Michael
IPC分类号： H01L21/66 , G01N1/32 , H01J37/305
CPC分类号： H04N7/18 , G01N1/32 , G01N23/2251 , G01N2021/0162 , G01N2021/8416 , G02B21/00 , H01J37/3005 , H01J37/305 , H01J37/3053 , H01J37/3056 , H01J2237/184 , H01J2237/202 , H01J2237/31745 , H01L22/26
摘要： Disclosed are embodiments of an ion beam sample preparation apparatus and methods. The methods operate on a sample disposed in a vacuum chamber and include steps of directing an intensity-controllable, tilt-angle controllable ion beam at a sample holder coupled to a rotation stage. The methods further include illuminating and capturing one or more images of the sample, extracting useful features from one or more images and thereafter adjusting the sample preparation steps. Further methods are disclosed for capturing sequences of images, programmatically rotating images, and displaying sequences of images with similar rotation angles. Further methods include extracting useful features from sequences of images that may change with respect to time as ion beam preparation continues
摘要翻译：公开了离子束样品制备装置和方法的实施例。该方法对设置在真空室中的样品进行操作，并且包括在耦合到旋转台的样品架处引导强度可控的，倾斜角度可控的离子束的步骤。该方法进一步包括照射和捕获样品的一个或多个图像，从一个或多个图像中提取有用的特征，然后调整样品制备步骤。公开了用于捕获图像序列，以编程方式旋转图像以及显示具有相似旋转角度的图像序列的其他方法。其他方法包括从离子束准备继续的时候可能随时间变化的图像序列中提取有用的特征

9. 发明申请

WO2012155044A1 COOLED MANIPULATOR TIP FOR REMOVAL OF FROZEN MATERIAL 审中-公开
标题翻译：用于冷冻冷冻的操作人员拔除冷冻材料
公开(公告)号：WO2012155044A1
公开(公告)日：2012-11-15
申请号：PCT/US2012/037510
申请日：2012-05-11
申请人： GATAN, INC. , SEARLE, Andrew Nicholas , GALLOWAY, Simon Andrew
发明人： SEARLE, Andrew Nicholas , GALLOWAY, Simon Andrew
IPC分类号： G01N1/42 , G02B21/32 , H01J37/20
CPC分类号： G01N1/42 , G02B21/32 , H01J37/20 , H01J2237/208 , H01J2237/31749
摘要： The disclosed apparatus enables attachment to a sample to be excised from a frozen bulk sample, the transfer of the excised sample from the bulk sample to a separate cooled support structure by means of a manipulator tip that can be cooled and maintained at a temperature below that of vitreous ice and which provides both an active cooling path and cryogenic shielding to maintain the temperature of the excised sample below that of vitreous ice. The cryogenic shielding also helps minimize contamination of the cooled sample by condensation of volatile material. A method is disclosed for extracting a portion of a frozen sample, comprising attaching a thermally-isolated cooled manipulator tip to the sample with vapor deposition and removing a portion of the sample affixed to the tip without changing phase of the portion of the sample being removed, with a focused ion beam.
摘要翻译：所公开的装置使得能够将附着到从冷冻大块样品中切除的样品，通过可以冷却并保持在低于该温度的温度的机械手尖端将切出的样品从大量样品转移到单独的冷却的支撑结构的玻璃冰，并且其提供主动冷却路径和低温屏蔽，以将切除的样品的温度维持在玻璃冰的温度以下。低温屏蔽还有助于通过挥发性物质的冷凝来最小化冷却样品的污染。公开了一种用于提取冷冻样品的一部分的方法，包括通过气相沉积将热隔离的冷却的操纵器尖端附着到样品上，并且去除固定在尖端的一部分样品，而不改变被去除的样品部分的相位，聚焦离子束。

10. 发明申请

WO2005013309A2 MULTI-MODE CHARGED PARTICLE BEAM DEVICE 审中-公开
标题翻译：多模充电颗粒光束装置
公开(公告)号：WO2005013309A2
公开(公告)日：2005-02-10
申请号：PCT/US2004/024268
申请日：2004-07-28
申请人： GATAN, INC. , CHAO, Henry, Shih-Ming , TREVOR, Colin, Geoffrey , MOONEY, Paul, Edward , KRAUS, Bernd
发明人： CHAO, Henry, Shih-Ming , TREVOR, Colin, Geoffrey , MOONEY, Paul, Edward , KRAUS, Bernd
IPC分类号： H01J37/00
CPC分类号： H01J37/261 , H01J37/222 , H01J49/44 , H01J2237/2443 , H01J2237/24435 , H01J2237/24455 , H01J2237/2446 , H01J2237/24465 , H01J2237/2447 , H01J2237/24485 , H01J2237/2522
摘要： A charged particle device is provided comprising a charged particle source configured to direct charged particles in the direction of a specimen under examination and an imaging device configured to convert charged particles to an image representing the specimen. The imaging device comprises a detector defining a pixel array. The detector is configured to generate electric charges for individual pixels of the pixel array such that the electric charges collectively define the image. The imaging device is configured such that a portion of the pixel array can be transitioned between a partially masked state and a substantially unmasked state.
摘要翻译：提供一种带电粒子装置，其包括被配置为沿被检查样本的方向引导带电粒子的带电粒子源和被配置为将带电粒子转换成代表该样本的图像的成像装置。成像装置包括限定像素阵列的检测器。检测器被配置为为像素阵列的各个像素产生电荷，使得电荷共同定义图像。成像装置被配置为使得像素阵列的一部分可以在部分屏蔽状态和基本上未屏蔽状态之间转变。

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