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1. 发明申请

WO2012135036A3 METHODS AND SYSTEMS FOR LASER PROCESSING A WORKPIECE USING A PLURALITY OF TAILORED LASER PULSE SHAPES 审中-公开
标题翻译：激光加工工艺的方法和系统使用多种激光激光脉冲形状
公开(公告)号：WO2012135036A3
公开(公告)日：2013-03-14
申请号：PCT/US2012030368
申请日：2012-03-23
申请人： ELECTRO SCIENT IND INC , HOOPER ANDREW , BARSIC DAVID , BRULAND KELLY J , FINN DARAGH S , SHEEHAN LYNN , PENG XIAOYUAN , OSAKO YASU , DUMESTRE JIM , JORDENS WILLIAM J
发明人： HOOPER ANDREW , BARSIC DAVID , BRULAND KELLY J , FINN DARAGH S , SHEEHAN LYNN , PENG XIAOYUAN , OSAKO YASU , DUMESTRE JIM , JORDENS WILLIAM J
IPC分类号： H01L21/78 , H01L21/301
CPC分类号： H01S3/102 , B23K26/0622 , B23K26/064 , B23K26/389 , B23K26/40 , B23K26/705 , B23K2203/172 , B23K2203/50 , H01L21/6836 , H01L24/27 , H01L24/29 , H01L24/83 , H01L2221/68327 , H01L2224/27436 , H01L2224/2919 , H01L2224/83191 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/01055 , H01L2924/01056 , H01L2924/0106 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01082 , H01L2924/0665 , H01L2924/12043 , H01L2924/13091 , H01L2924/14 , H01S3/0057 , H01S3/1305 , H01L2924/00 , H01L2924/3512
摘要： Tailored laser pulse shapes are used for processing workpieces. Laser dicing of semiconductor device wafers on die-attach film (DAF), for example, may use different tailored laser pulse shapes for scribing device layers down to a semiconductor substrate, dicing the semiconductor substrate, cutting the underlying DAF, and/or post processing of the upper die edges to increase die break strength. Different mono-shape laser pulse trains may be used for respective recipe steps or passes of a laser beam over a scribe line. In another embodiment, scribing a semiconductor device wafer includes only a single pass of a laser beam along a scribe line using a mixed-shape laser pulse train that includes at least two laser pulses that are different than one another. In addition, or in other embodiments, one or more tailored pulse shapes may be selected and provided to the workpiece on-the-fly. The selection may be based on sensor feedback.
摘要翻译：定制的激光脉冲形状用于加工工件。例如，半导体器件晶片在芯片附着膜（DAF）上的激光切割可以使用不同的定制的激光脉冲形状，用于将器件层划分到半导体衬底，切割半导体衬底，切割下面的DAF和/或后处理的上模边缘以增加冲模强度。不同的单形激光脉冲序列可以用于激光束在划线上的相应配方步骤或通过。在另一个实施例中，划线半导体器件晶片仅使用包括彼此不同的至少两个激光脉冲的混合形激光脉冲串沿着划线的激光束的单次通过。另外，或者在其他实施例中，可以选择一个或多个定制的脉冲形状并将其提供给工件。选择可以基于传感器反馈。

2. 发明申请

WO2010083091A2 PULSE TEMPORAL PROGRAMMABLE ULTRAFAST BURST MODE LASER FOR MICROMACHINING 审中-公开
标题翻译：脉冲时间可编程超声波激光模式激光
公开(公告)号：WO2010083091A2
公开(公告)日：2010-07-22
申请号：PCT/US2010020364
申请日：2010-01-07
申请人： ELECTRO SCIENT IND INC , PENG XIAOYUAN , HOOPER ANDREW
发明人： PENG XIAOYUAN , HOOPER ANDREW
IPC分类号： H01S3/10 , B23K26/36 , H01L21/82
CPC分类号： H01S3/2316 , B23K26/0624 , H01S3/06758 , H01S3/2383 , H01S5/0085 , H01S5/12 , H01S2301/08
摘要： A laser processing system provides a burst of ultrafast laser pulses having a selectively shaped burst envelope. A burst pulse laser includes a high repetition rate ultrafast laser to deliver a pulse train with each pulse in the train having an independently controlled amplitude. The respective amplitudes of each ultrafast pulse in a group define a "burst envelope." In addition to independently controlling the amplitude of each ultrafast pulse within the burst envelope, the system may also provide selective control of spacing between each ultrafast pulse and/or the overall temporal width of the burst envelope. Thus, the system provides selective shaping of the burst envelope for particular laser processing applications.
摘要翻译：激光处理系统提供具有选择性形状的突发包络的超快激光脉冲的脉冲串。突发脉冲激光器包括高重复率超快速激光器，以传递脉冲串，列车中的每个脉冲具有独立控制的振幅。组中每个超快脉冲的相应幅度定义为“脉冲包络”。除了独立地控制突发包络内的每个超快速脉冲的振幅之外，系统还可以提供对每个超快脉冲之间的间隔和/或突发包络的总时间宽度的选择性控制。因此，该系统为特定的激光处理应用提供了脉冲包络的选择性整形。

3. 发明申请

WO2009120584A3 LASER WITH HIGHLY EFFICIENT GAIN MEDIUM 审中-公开
标题翻译：激光具有高效的增益介质
公开(公告)号：WO2009120584A3
公开(公告)日：2009-11-26
申请号：PCT/US2009037717
申请日：2009-03-19
申请人： ELECTRO SCIENT IND INC , PENG XIAOYUAN , REN WENSHENG
发明人： PENG XIAOYUAN , REN WENSHENG
IPC分类号： H01S3/091 , H01S3/09
CPC分类号： H01S3/094 , H01S3/0606 , H01S3/10092 , H01S3/1603 , H01S3/1671
摘要： High-power, diode-pumped solid state (DPSS) pulsed lasers are preferred for applications such as micromachining, via drilling of integrated circuits, and ultraviolet (UV) conversion. Nd:YVO4 (vanadate) lasers are good candidates for high power applications because they feature a high energy absorption coefficient over a wide bandwidth of pumping wavelengths. However, vanadate has poor thermo-mechanical properties, in that the material is stiff and fractures easily when thermally stressed. By optimizing laser parameters and selecting pumping wavelengths and doping a concentration of the gain medium (240) to control the absorption coefficient less than 2 cm-1 such as the pumping wavelength (241) between about 910 nm and about 920 nm, a doped vanadate laser (237, 240) may be enhanced to produce as much as 100 W of output power (236) without fracturing the crystal material, while delivering a 40% reduction in thermal lensing.
摘要翻译：大功率，二极管泵浦固态（DPSS）脉冲激光器适用于微加工，通过钻孔集成电路和紫外线（UV）转换等应用。 Nd：YVO4（钒酸盐）激光器是高功率应用的理想选择，因为它们在宽带宽的泵浦波长下具有高能量吸收系数。然而，钒酸盐具有差的热机械性能，因为当热应力时材料是刚性的并且容易断裂。通过优化激光参数并选择泵浦波长并掺杂增益介质（240）的浓度以控制小于2cm -1的吸收系数，例如在约910nm和约920nm之间的泵浦波长（241），掺杂的钒酸盐激光器（237,240）可以被增强以产生高达100W的输出功率（236），而不破坏晶体材料，同时减少热透镜的40％。

4. 发明申请

WO2010054147A2 GENERATING LASER PULSES OF PRESCRIBED PULSE SHAPES PROGRAMMED THROUGH COMBINATION OF SEPARATE ELECTRICAL AND OPTICAL MODULATORS 审中-公开
标题翻译：通过单独的电气和光学调制器的组合生成规定的脉冲形状的激光脉冲
公开(公告)号：WO2010054147A2
公开(公告)日：2010-05-14
申请号：PCT/US2009063489
申请日：2009-11-06
申请人： ELECTRO SCIENT IND INC , PENG XIAOYUAN , BARSIC DAVID , JORDENS WILLIAM J , WANG QI
发明人： PENG XIAOYUAN , BARSIC DAVID , JORDENS WILLIAM J , WANG QI
IPC分类号： H01S3/10 , H01S3/101
CPC分类号： H01S3/06754 , H01S3/2316 , H01S3/2383 , H01S5/005 , H01S5/0092 , H01S5/0428 , H01S5/12
摘要： A programmable laser pulse (126) combines electrical modulation of the pulse frequency and optical modulation of the pulse shape to form laser pulses of prescribed pulse shapes. A prescribed pulse shape features high peak power and low average power. The laser system (90) disclosed also allows for power-scaling (102) and nonlinear conversions (104) to other (shorter or longer) wavelengths. The system provides an economical, reliable alternative to using a laser source with high repetition rates to achieve shaped pulses at a variety of wavelengths. The combinatorial scheme disclosed is inherently more efficient than existing subtractive methods.
摘要翻译：可编程激光脉冲（126）组合脉冲频率的电调制和脉冲形状的光调制以形成规定脉冲形状的激光脉冲。规定的脉冲形状具有高峰值功率和低平均功率。所公开的激光系统（90）还允许对其它（更短或更长）波长进行功率调节（102）和非线性转换（104）。该系统提供了一种经济可靠的替代方案，即使用具有高重复率的激光源来实现各种波长的成形脉冲。所公开的组合方案固有地比现有的减法方法更有效。

5. 发明申请

WO2009137182A3 COMBINING MULTIPLE LASER BEAMS TO FORM HIGH REPETITION RATE, HIGH AVERAGE POWER POLARIZED LASER BEAM 审中-公开
标题翻译：组合多个激光束形成高重复率，高平均功率极化激光束
公开(公告)号：WO2009137182A3
公开(公告)日：2010-02-04
申请号：PCT/US2009038559
申请日：2009-03-27
申请人： ELECTRO SCIENT IND INC , PENG XIAOYUAN , JORDANS WILLIAM J
发明人： PENG XIAOYUAN , JORDANS WILLIAM J
IPC分类号： H01S3/0941 , H01S3/02
CPC分类号： H01S3/2383 , H01S3/005 , H01S3/0085 , H01S3/0092 , H01S3/0941 , H01S3/10046 , H01S3/10061 , H01S3/115 , H01S3/117 , H01S5/0085 , H01S5/0092 , H01S5/4012 , H01S5/4025
摘要： Two pulsed lasers (14) or sets of lasers propagate beams of pulses (20) having orthogonally related polarization states. A beam combiner (24) combines the orthogonal beams to form a combined beam propagating along a common beam path (16) to intersect an optical modulator (30) that selectively changes the polarization state of selected pulses of either beam to provide a composite beam (18) including similarly polarized pulses from the orthogonal beams. The composite polarized beam has a composite average power and a composite repetition rate that are greater than those provided by either laser. The optical modulator can also selectively control the polarization states of pulses from either laser to pass through or be blocked by a downstream polarizer (32). Additional modulators may facilitate pulse shaping of the pulses. The system is scalable by addition of sets of single lasers or pairs of lasers with beam combiners and modulators.
摘要翻译：两个脉冲激光器（14）或一组激光器传播具有正交相关极化状态的脉冲（20）。光束组合器（24）组合正交光束以形成沿着公共光束路径（16）传播的组合光束以与选择性地改变任一光束的所选脉冲的偏振态的光调制器（30）相交，以提供复合光束 18）包括来自正交光束的类似偏振脉冲。复合偏振光束具有大于由任一激光器提供的复合平均光焦度和复合重复率。光学调制器还可以选择性地控制来自任一激光器的脉冲的偏振态通过或被下游偏振器（32）阻挡。附加的调制器可以促进脉冲的脉冲整形。该系统通过添加单个激光器组或激光器组合与光束组合器和调制器可扩展。

6. 发明申请

WO2011123254A2 WEDGE-FACETED NONLINEAR CRYSTAL FOR HARMONIC GENERATION 审中-公开
标题翻译：用于和谐生成的WEDGE-FACETED非线性晶体
公开(公告)号：WO2011123254A2
公开(公告)日：2011-10-06
申请号：PCT/US2011028880
申请日：2011-03-17
申请人： ELECTRO SCIENT IND INC , PENG XIAOYUAN , WANG HAIWEN
发明人： PENG XIAOYUAN , WANG HAIWEN
IPC分类号： H01S3/102 , H01S3/108
CPC分类号： G02F1/3534 , G02F1/3544 , H01S3/0092
摘要： Lasers and laser systems generate different wavelengths by nonlinear sum or difference frequency conversion. A wedge-faceted nonlinear crystal (30') compensates for the spatial walk-off phenomenon associated with critical phase matching of a nonlinear crystal in the production of harmonic laser output at peak power.
摘要翻译：激光器和激光系统通过非线性或差分频率转换产生不同的波长。楔形非线性晶体（30'）补偿与峰值功率下的谐波激光输出的产生中的非线性晶体的临界相位匹配相关的空间偏移现象。

7. 发明申请

WO2009120918A3 LASER MICROMACHINING USING PROGRAMMABLE PULSE SHAPES 审中-公开
标题翻译：使用可编程脉冲形状的激光微型计算机
公开(公告)号：WO2009120918A3
公开(公告)日：2009-12-23
申请号：PCT/US2009038489
申请日：2009-03-27
申请人： ELECTRO SCIENT IND INC , PENG XIAOYUAN , BAIRD BRIAN W , JORDENS WILLIAM J , HEMENWAY DAVID MARTIN
发明人： PENG XIAOYUAN , BAIRD BRIAN W , JORDENS WILLIAM J , HEMENWAY DAVID MARTIN
IPC分类号： H01S3/10 , H01S3/00
CPC分类号： H01S3/0057 , B23K26/0622 , G02F1/0327
摘要： Laser pulse shaping techniques produce tailored laser pulse spectral output (64, 66). The laser pulses can be programmed to have desired pulse widths and pulse shapes (such as sub-nanosecond to 10 ns 20 ns pulse widths with 1 ns to several nanoseconds leading edge rise times). Preferred embodiments are implemented with one or more electro-optical modulators (250, 254) receiving drive signals that selectively change the amount of incident pulsed laser emission (106, 112, 114) to form a tailored pulse output. Triggering the drive signal from the pulsed laser emission suppresses jitter associated with other stages of the link processing system and substantially removes jitter associated with pulsed laser emission build up time.
摘要翻译：激光脉冲整形技术产生定制的激光脉冲光谱输出（64,66）。激光脉冲可以被编程为具有期望的脉冲宽度和脉冲形状（例如亚纳秒到10ns的20ns脉冲宽度，1ns至几纳秒前沿上升时间）。优选实施例是用一个或多个电光调制器（250,254）来实现的，所述电光调制器（250,254）接收选择性地改变入射脉冲激光发射量（106,112,114）的驱动信号，以形成定制的脉冲输出。从脉冲激光发射触发驱动信号抑制与链路处理系统的其他级相关联的抖动，并且基本上消除与脉冲激光发射建立时间相关联的抖动。

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