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    • 5. 发明申请
    • NONCONTACT SUPPORT PLATFORM WITH EDGE LIFTING
    • 非接触式支持平台与边缘提升
    • WO2017221229A1
    • 2017-12-28
    • PCT/IL2017/050274
    • 2017-03-06
    • CORE FLOW LTD.
    • LAUTMAN, Ronen
    • B65G51/03B65G49/06H01L21/677
    • A noncontact support platform includes pressure ports distributed on a surface of a table, each connected to a pressure source. Vacuum ports are distributed on the surface of the table, each connected to a vacuum source. Outward flow through the pressure ports and inward flow through the vacuum ports form a fluid cushion to support a workpiece at a nonzero distance from the table. A plurality of channels each connect at least two of the vacuum ports to enable flow of fluid between the connected vacuum ports. When one of the connected vacuum ports is covered by an edge of the workpiece and the other is not, a suction force that is exerted by the connected vacuum ports on the edge is weaker than the suction force that is exerted on a part of the workpiece where both of the connected vacuum ports are covered.
    • 非接触支撑平台包括分布在桌子表面上的压力端口,每个压力端口连接到压力源。 真空口分布在工作台的表面上,每个真空口连接到真空源。 通过压力端口的向外流动和通过真空端口的向内流动形成流体缓冲垫以支撑离工作台非零距离的工件。 多个通道各自连接至少两个真空端口以使流体能够在连接的真空端口之间流动。 当其中一个连接的真空口被工件的边缘覆盖而另一个不是时,连接的真空口施加在边缘上的吸力比施加在工件的一部分上的吸力弱 两个连接的真空端口都被覆盖。