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1. 发明申请

WO2012151431A3 WAFER CONTAINER WITH PARTICLE SHIELD 审中-公开
标题翻译：带有颗粒屏蔽的容器
公开(公告)号：WO2012151431A3
公开(公告)日：2013-03-14
申请号：PCT/US2012036373
申请日：2012-05-03
申请人： ENTERGRIS INC , FORBES MARTIN L , BURNS JOHN , FULLER MATTHEW A
发明人： FORBES MARTIN L , BURNS JOHN , FULLER MATTHEW A
IPC分类号： H01L21/673 , B65D85/38 , B65D85/86
CPC分类号： H01L21/67389 , H01L21/67386 , H01L21/67393 , H01L21/67396
摘要： One or more particulate shields above the top wafer in wafer containers such as FOUPS may be provided to prevent accumulation of particulates on wafers. The particulate shields or barriers may be formed of materials that are compatible to maintaining less than 5% RH, particularly materials that will not absorb meaningful amounts of water, and that will not bring absorbed moisture into the container. In embodiments, particular materials found to be suitable include cyclic olefin polymers, cyclic olefin copolymers, liquid crystal polymers. In particular embodiments, a FOUP may be provided with an additional slot above the industry standard 25 slots to receive a dedicated barrier. In embodiments, the barrier may be a solid thin shape that corresponds to the wafer shape. In embodiments, the barrier may have inherent charge properties opposite to the particulates found in the containers to thereby attract the particulates to the barrier. In embodiments the barrier may have apertures, such as slots, or other openings, to facilitate charge development for enhancing the attraction of particulates to the barrier. In embodiments the barrier may be retrofitted to existing wafer containers, such as FOUPS. In embodiments, the shield may be conforming to the interior structure of a specific FOUP configuration.
摘要翻译：可以提供晶片容器中的顶部晶片上方的一个或多个颗粒屏蔽物，例如FOUPS，以防止颗粒在晶片上的积聚。颗粒状屏蔽物或屏障可以由兼容保持小于5％RH的材料形成，特别是不吸收有意义量的水的材料，并且不会将吸收的水分带入容器。在实施方案中，发现合适的特定材料包括环烯烃聚合物，环烯烃共聚物，液晶聚合物。在特定实施例中，FOUP可以在工业标准25个时隙上方设置有一个附加槽，以接收专用屏障。在实施例中，屏障可以是对应于晶片形状的实心薄形状。在实施方案中，阻挡层可以具有与容器中发现的微粒相反的固有电荷特性，从而将颗粒吸引到屏障。在实施例中，阻挡层可以具有孔，例如狭槽或其它开口，以便于电荷开发以增强微粒对屏障的吸引。在实施例中，屏障可以被改装到现有的晶片容器，例如FOUPS。在实施例中，屏蔽可以符合特定FOUP配置的内部结构。

2. 发明申请

WO2012135863A3 SUBSTRATE SHIPPER WITH LOCKING DEVICE 审中-公开
标题翻译：具有锁定装置的基板搬运器
公开(公告)号：WO2012135863A3
公开(公告)日：2012-12-27
申请号：PCT/US2012031906
申请日：2012-04-02
申请人： ENTEGRIS INC , SMITH MARK V , BURNS JOHN
发明人： SMITH MARK V , BURNS JOHN
IPC分类号： H01L21/673 , H01L21/02
CPC分类号： H01L21/67373 , H01L21/67386
摘要： The invention is directed to a two piece shipping package such as a substrate shipping container that is used to ship solar cells or other substrate wafers and locking device for use therewith. One or more latching members having permanent and multi-use tab features are used to join the components of a readily constructed container. The container is generally made up of two identical container portions, each container portion having a horizontally-disposed base member and two vertically disposed side members constructed of impact-absorbing double walls. The locking device provides an integrated locking snap connector that holds two container portions together at opposing corners, the containers of which are generally shaped for being readily coupled with one another in reversed and inverted orientations.
摘要翻译：本发明涉及一种两件式运输包装，例如用于运输太阳能电池或其他衬底晶片的衬底运输容器以及与之一起使用的锁定装置。一个或多个具有永久性和多用途突出特征的闩锁构件用于连接容易构造的容器的构件。该容器通常由两个相同的容器部分组成，每个容器部分具有水平设置的基部构件和两个垂直设置的由冲击吸收双壁构成的侧部构件。该锁定装置提供集成锁定卡扣连接器，该锁定卡扣连接器在相对的角落处将两个容器部分保持在一起，其容器通常成形为用于容易地以相反和倒置的方向彼此联接。

3. 发明申请

WO2012088172A3 FRONT OPENING LARGE SUBSTRATE CONTAINER 审中-公开
标题翻译：前开式大型底板容器
公开(公告)号：WO2012088172A3
公开(公告)日：2012-10-26
申请号：PCT/US2011066282
申请日：2011-12-20
申请人： ENTEGRIS INC , FORBES MARTIN L , FULLER MATTHEW A , BURNS JOHN
发明人： FORBES MARTIN L , FULLER MATTHEW A , BURNS JOHN
IPC分类号： H01L21/673 , B65D85/38 , B65D85/48 , B65D85/86 , G02F1/13
CPC分类号： H01L21/67373 , H01L21/67386
摘要： A flat panel substrate container provides a microenvironment for safely storing and allowing horizontal removal through a front door. In an embodiment of the invention, a robust shelf system has a plurality of stacked shelves that have a cantilevered state with the door open and a non-cantilevered state with the door closed. The container may be generally rectilinear in shape and conforming to the shape of the substrate panels. The container has an open front with a closed top wall, closed bottom wall, closed left side wall, closed right side wall, and closed back side wall. A plurality of shelves are secured to the back side wall and extend forwardly in a cantilevered fashion. In an embodiment of the invention, the shelves may be generally elongate slender shelf members formed of aluminum extrusions or assemblies that are arranged in two columns with a pair of such members provided for each substrate and defining a slot. Also inwardly extending edge supports are provided at the left side wall and right side wall for edge support of the substrates. In an embodiment of the invention, the elongate shelf members each have one of a pair of male and female portion that join as the door is closed to effectively "uncantilever" the elongate shelf members as the door closes the open front. All of the shelf members and the substrates thereon may be fixed into position at the end opposite the cantilevered connection to the container portion. The container may have a feature for overhead transport, such as lifting brackets, static dissipation features, and latching features.
摘要翻译：平板基板容器提供用于安全存储并允许通过前门的水平移除的微环境。在本发明的一个实施例中，坚固的搁架系统具有多个堆叠的架子，其具有门打开的悬臂状态和门关闭的非悬臂状态。容器的形状通常可以是直线形，并且与基板的形状一致。容器具有敞开的前部，其具有封闭的顶壁，封闭的底壁，封闭的左侧壁，封闭的右侧壁和封闭的后侧壁。多个搁架被固定到后侧壁并以悬臂方式向前延伸。在本发明的一个实施例中，搁架可以是大致细长的由铝挤压件或组件形成的细长的搁架部件，铝挤压件或组件布置成两列，其中一对这样的部件设置用于每个基板并且限定槽。在左侧壁和右侧壁上设置向内延伸的边缘支撑件，用于基板的边缘支撑。在本发明的一个实施例中，细长的搁架部件各自具有一对公部分和阴部分中的一个，当门关闭时，当门关闭开放的前部时，细长的搁架部件有效地“不吸引”箱体。所有搁板构件和其上的基板可以在与容器部分的悬臂连接相对的端部处固定到位。容器可以具有用于架空输送的特征，例如提升支架，静电耗散特征和锁定特征。

4. 发明申请

WO2012058678A3 SUBSTRATE SHIPPER 审中-公开
公开(公告)号：WO2012058678A3
公开(公告)日：2012-05-03
申请号：PCT/US2011/058622
申请日：2011-10-31
申请人： ENTEGRIS, INC. , GALLAGHER, Gary , BURNS, John , SMITH, Mark, V. , ROSENFELD, Paul , OLSON, Eric, S. , RASCHKE, Russ, V.
发明人： GALLAGHER, Gary , BURNS, John , SMITH, Mark, V. , ROSENFELD, Paul , OLSON, Eric, S. , RASCHKE, Russ, V.
IPC分类号： B65D85/86 , B65D81/113 , B65D77/04 , H01L21/673
摘要： A substrate shipping container suitable for shipping solar cells, substrate wafers, or other suitable media. In some embodiments, the readily constructed container is made up of two identical container portions, each container portion having a horizontally-disposed base member and two adjacent vertically-disposed side members constructed of impact- absorbing double walls. The two container portions are shaped to be coupled using integrally formed tabs and slots located about the perimeter of the container portions. The horizontally-disposed base member of each container portion is equipped with a matrix of integrally formed pads. These pads serve as cushions to provide shock absorption in the vertical (i.e. "z") direction to substrates that are stacked between these members. Embodiments may further be comprised of molded pulp or bulrush fibers.

5. 发明申请

WO2011109535A3 SOLAR CELL PROCESS CARRIER 审中-公开
标题翻译：太阳能电池过程载体
公开(公告)号：WO2011109535A3
公开(公告)日：2012-01-12
申请号：PCT/US2011026890
申请日：2011-03-02
申请人： ENTERGRIS INC , BURNS JOHN , KING JEFFERY J
发明人： BURNS JOHN , KING JEFFERY J
IPC分类号： H01L21/673 , B65D85/38 , B65D85/86 , H01L31/042
CPC分类号： H01L21/67309 , H01L21/67057 , H01L21/67313
摘要： A solar cell process carrier for immersion of solar cells into process fluids, the carrier comprising a pair of endwalls with a plurality of rails extending therebetween, the plurality of rails defining a solar cell receiving region, each rail having a base portion and a plurality of teeth arranged sequentially and axially along and extending from said base portion, each tooth having a cell contact area thereon and each rail further having a means for enhancing fluid flow at each of said cell contact areas.
摘要翻译：一种用于将太阳能电池浸入工艺流体的太阳能电池处理载体，所述载体包括一对端壁，其具有在其间延伸的多个轨道，所述多个轨道限定太阳能电池接收区域，每个轨道具有基部和多个每个齿在其上具有细胞接触区域，并且每个轨道还具有用于增强每个所述细胞接触区域处的流体流动的装置。

6. 发明申请

WO2011081838A1 TRACHEAL TUBE AND TUBE EXTENSION 审中-公开
标题翻译：管道和管道延伸
公开(公告)号：WO2011081838A1
公开(公告)日：2011-07-07
申请号：PCT/US2010/059810
申请日：2010-12-10
申请人： NELLCOR PURITAN BENNETT LLC , BURNS, John P.
发明人： BURNS, John P.
IPC分类号： A61M16/04 , A61M39/10 , A61M16/08
CPC分类号： A61M16/0875 , A61M16/04 , A61M16/0463 , A61M16/0816 , A61M39/1011 , A61M2039/1027 , A61M2205/02
摘要： The present disclosure describes systems that may extend the proximal length of a tracheal tube. A tracheal tube extension system may be provided that includes secure attachment features ( 38, 42 ) used to securely couple a tracheal tube ( 12 ) to a tracheal tube extension ( 26 ). The tracheal tube extension may be attached to the proximal end of the tracheal tube and includes an upper end connector ( 32 ). The upper end connector may be used to couple the tracheal tube extension to a variety of medical devices such as a ventilator ( 28 ), a manual respirator, a nebulizer, a vaporizer, suctioning equipment, and so forth. The use of the tracheal tube extension enables an increase in working space in the area in front of the tracheal tube, thus allowing for the convenient and rapid access to the various connectors that may be coupled to the patient.
摘要翻译：本公开描述了可以延长气管管的近端长度的系统。可以提供气管扩张系统，其包括用于将气管管（12）牢固地联接到气管管延伸部（26）的固定附接特征（38,42）。气管管延伸部可以附接到气管管的近端并且包括上端连接器（32）。上端连接器可用于将气管插管连接到各种医疗设备，例如呼吸机（28），手动呼吸器，喷雾器，蒸发器，抽吸设备等。使用气管插管可以增加在气管管前面的区域中的工作空间，从而允许方便和快速地进入可联接到患者的各种连接器。

7. 发明申请

WO2011072260A3 POROUS BARRIER FOR EVENLY DISTRIBUTED PURGE GAS IN A MICROENVIRONMENT 审中-公开
公开(公告)号：WO2011072260A3
公开(公告)日：2011-06-16
申请号：PCT/US2010/059956
申请日：2010-12-10
申请人： ENTEGRIS, INC. , BURNS, John , SMITH, Mark , FULLER, Matthew
发明人： BURNS, John , SMITH, Mark , FULLER, Matthew
IPC分类号： H01L21/673 , H01L21/68 , B65D85/86 , B65D85/38
摘要： An improved system and method for purging a microenvironment to desired levels of relative humidity, oxygen, or particulates through the implementation of a purge gas delivery apparatus and method that provides even distribution of the purging gas within the microenvironment. A substrate container has a tower therein with a fluid flow passageway extending the length of the tower. Apertures with porous media between the aperture and fluid flow passageway regulate the volume and pressure of air discharging at each aperture. Alternatively, the tower may be formed of a porous tubular polymeric material. A sleeve may direct the discharge purge gas in the interior.

8. 发明申请

WO2009114798A4 WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS 审中-公开
公开(公告)号：WO2009114798A4
公开(公告)日：2009-09-17
申请号：PCT/US2009/037143
申请日：2009-03-13
申请人： ENTEGRIS, INC. , WATSON, James, A. , BURNS, John , FORBES, Martin, L. , FULLER, Matthew, A. , SMITH, Mark, V.
发明人： WATSON, James, A. , BURNS, John , FORBES, Martin, L. , FULLER, Matthew, A. , SMITH, Mark, V.
IPC分类号： H01L21/673 , B65D85/38 , B65D85/86 , B65D81/18
摘要： A wafer container utilizes a rigid polymer tubular tower with slots and a "getter" therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion.

9. 发明申请

WO2007147120A3 RETICLE POD WITH VISUALLY DIFFERENTIABLE ORIENTATION INDICATOR 审中-公开
标题翻译：具有视觉差异定位指示器的物品
公开(公告)号：WO2007147120A3
公开(公告)日：2008-12-24
申请号：PCT/US2007071352
申请日：2007-06-15
申请人： ENTEGRIS INC , BURNS JOHN , FORBES MARTIN L
发明人： BURNS JOHN , FORBES MARTIN L
IPC分类号： B65D85/00
CPC分类号： H01L21/67353 , H01L21/67294 , H01L21/67359 , H01L21/67383
摘要： A carrier for transferring work pieces in a semiconductor or reticle fabrication facility including a base having one or more supports adapted to operably support a work piece, a cover adapted to mate with the base to form an interior, and an indicator presented with the carrier and selectively changeable between a first indication and a second indication for visually differentiating an orientation of the work piece within the interior without opening the carrier. The work piece can comprise a reticle and the one or more supports can support the reticle in at least a first orientation and a second orientation.
摘要翻译：用于在半导体或掩模版制造设备中传送工件的载体，其包括具有适于可操作地支撑工件的一个或多个支撑件的基座，适于与基座配合以形成内部的盖子以及呈现在载体上的指示器，可选地在第一指示和第二指示之间变化，用于在不打开载体的情况下可视地区分工件在内部的取向。工件可以包括掩模版，并且一个或多个支撑件能够以至少第一取向和第二取向支撑掩模版。

10. 发明申请

WO2008008270A9 WAFER CASSETTE 审中-公开
公开(公告)号：WO2008008270A9
公开(公告)日：2008-08-14
申请号：PCT/US2007015523
申请日：2007-07-06
申请人： ENTEGRIS INC , FULLER MATTHEW A , BURNS JOHN
发明人： FULLER MATTHEW A , BURNS JOHN
IPC分类号： A47G19/08
CPC分类号： H01L21/67383
摘要： A front opening wafer container including an enclosure portion and a door. A wafer support system is provided including a pair of spaced apart cantilever wafer shelves, each wafer shelf including a pair of opposing inclined ramp portions. The ramp portions are cooperatively positioned and configured so that when the wafer is received on the shelves, the wafer is supported on the ramps at a lower peripheral corner of the wafer, all other portions of the wafer being free from contact with the wafer support system. Each wafer shelf may have a generally concave upper surface and the incline of the ramps is continuous with the concave upper surfaces of the wafer shelves.

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