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    • 81. 发明申请
    • METHOD OF MAKING A MAGNETIC HEAD
    • 制造磁头的方法
    • WO02103687A3
    • 2003-04-10
    • PCT/GB0202660
    • 2002-05-29
    • IBMIBM UK
    • HSIAO RICHARDSANTINI HUGO ALBERTO EMILIO
    • G11B5/012G11B5/17G11B5/31
    • G11B5/3163G11B5/012G11B5/17G11B5/3116G11B5/313Y10T29/49046
    • The magnetic head of the present invention includes a narrow, high aspect ratio P2 pole tip and a high aspect ratio, fine pitch induction coil. Electroplating trenches (120, 128, 134) for the P2 pole tip (140) and the induction coil (170) are fabricated in a single RIE process step, and the P2 pole tip and the induction coil are thereafter separately plated up into their respective trenches to complete the fabrication of these structures. Briefly, following the fabrication of a P1 pole and the deposition of an insulation layer thereon, a patterned P2 pole tip seed layer (96). An etching mask pattern (112) includes both a P2 pole tip trench opening and an induction coil trench opening. Thereafter, in a single RIE etching step, the P2 pole tip trench is etched through the dielectric material down to the seed layer, and the induction coil trench is etched through the dielectric material down to the insulation layer. The P2 pole tip is then electroplated up into its trench. Thereafter, the induction coil is electroplated (170) up into the induction coil trench. A chemical mechanical polishing (CMP) step is next conducted to remove the excess induction coil material (168) and the RIE etching mask. Thereafter, a patterned insulation layer is deposited upon the induction coil, which is followed by the fabrication of a P2 pole yoke (192) thereupon.
    • 本发明的磁头包括窄的高纵横比的P2极尖和高纵横比的细间距感应线圈。 在单个RIE工艺步骤中制造用于P2极尖端(140)和感应线圈(170)的电镀沟槽(120,128,134),然后将P2极尖端和感应线圈单独地电镀到它们各自的 沟槽来完成这些结构的制造。 简而言之,在P1极的制造和其上的绝缘层的沉积之后,形成图案化的P2极端种子层(96)。 蚀刻掩模图案(112)包括P2极尖沟槽开口和感应线圈沟槽开口。 此后,在单个RIE蚀刻步骤中,通过电介质材料将P2极尖沟槽蚀刻到种子层,并且感应线圈沟槽通过电介质材料被蚀刻到绝缘层。 然后将P2极尖端电镀到其沟槽中。 此后,将感应线圈电镀(170)到感应线圈沟槽中。 接下来进行化学机械抛光(CMP)步骤以去除多余的感应线圈材料(168)和RIE蚀刻掩模。 此后,在感应线圈上沉积图案化的绝缘层,然后在其上制造P2极轭(192)。
    • 89. 发明申请
    • DEVICE FOR SCANNING AN ELECTROMAGNETICALLY SUSPENDED INFORMATION CARRIER
    • 用于扫描电磁暂停信息载体的装置
    • WO0249012A2
    • 2002-06-20
    • PCT/EP0113814
    • 2001-11-26
    • KONINKL PHILIPS ELECTRONICS NV
    • VAN ROSMALEN GERARD EKAHLMAN JOSEPHUS A H MOPHEY WILLEM G
    • G11B5/012G11B5/02G11B5/82G11B7/00G11B7/0037G11B7/24G11B17/028G11B17/34G11B19/20G11B23/00G11B5/00
    • G11B5/012G11B5/82G11B7/00G11B7/0037G11B7/24G11B17/028G11B17/34G11B19/2009G11B23/0035
    • The invention relates to a device for reading and/or writing a disc-shaped information carrier (17), which comprises a support element (25) of a magnetizable material along its circumference. The device comprises an electromagnetic unit (27) for co-operation with the support element and a scanning unit (23) for reading and/or writing the information carrier. By co-operation between the electromagnetic unit and the support element, the information carrier can be rotated about an axis of rotation (73) and positioned with respect to the scanning unit (23) in five degrees of freedom, i.e. in all degrees of freedom except the rotational degree of freedom around the axis of rotation. According to the invention, the electromagnetic unit (27) comprises a single pair of rows (29, 31) of electromagnets (33, 35), which rows are arranged, along an X-axis perpendicular to the axis of rotation (73), on both sides of the information carrier. The electromagnetic unit (27) further comprises a first pair of electromagnets (37, 39) and a second pair of electromagnets (41, 43) which are diametrically arranged with respect to each other, viewed in a middle position of the information carrier (17) along the X-axis and viewed along a Y-axis perpendicular to the X-axis and the axis of rotation, the magnets of the first and the second pair being arranged on both sides of the information carrier, and the magnetic poles (69, 71) of the electromagnets of each pair being arranged at equal distances from the X-axis and, in each position of the information carrier along the X-axis, on one side of a magnetic point of application (M) of the support element. Thus, the electromagnetic unit has a comparatively simple construction and comprises a limited number of electromagnets, so that also the control unit, which is necessary to control the electromagnetic forces of the electromagnets, is simplified.
    • 本发明涉及一种用于读取和/或写入盘形信息载体(17)的装置,该装置包括沿其圆周的可磁化材料的支撑元件(25)。 该装置包括用于与支撑元件协作的电磁单元(27)和用于读取和/或写入信息载体的扫描单元(23)。 通过电磁单元和支撑元件之间的协作,信息载体可围绕旋转轴线(73)旋转并相对于扫描单元(23)以五个自由度即所有自由度 除了围绕旋转轴线的旋转自由度。 根据本发明,电磁单元(27)包括沿着与旋转轴线(73)垂直的X轴布置的一排电磁体​​(33,35)的一对排(29,31) 在信息载体的两边。 电磁单元(27)还包括第一对电磁体(37,39)和第二对电磁体(41,43),其在信息载体(17)的中间位置相对于彼此直径布置 ),并且沿着与X轴和旋转轴线垂直的Y轴观察,第一和第二对的磁体被布置在信息载体的两侧,并且磁极(69 每一对的电磁体71,110被布置在与X轴相等的距离处,并且在信息载体的沿着X轴的每个位置中,在支撑元件的施加磁点(M)的一侧 。 因此,电磁单元具有相对简单的结构,并且包括有限数量的电磁体,从而也简化了控制电磁体的电磁力所必需的控制单元。