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    • 82. 发明申请
    • PROCESS FOR GROWING AN EPITAXIAL FILM ON AN OXIDE SURFACE AND PRODUCT
    • 在氧化物表面和产品上生长外延膜的方法
    • WO1995016061A1
    • 1995-06-15
    • PCT/US1994014098
    • 1994-12-08
    • MARTIN MARIETTA ENERGY SYSTEMS, INC.
    • MARTIN MARIETTA ENERGY SYSTEMS, INC.MCKEE, Rodney, A.WALKER, Frederick, J.
    • C30B25/02
    • G02B6/131C30B23/02C30B29/16C30B29/22C30B29/32Y10S438/967
    • A process and structure wherein a film comprised of a perovskite or a spinel is built epitaxially upon a surface (22), such as an alkaline earth oxide surface, involves the epitaxial build up of alternating constituent metal oxide planes of the perovskite or spinel (20, 26, 28). The first layer of metal oxide built upon the surface (22) includes a metal element which provides a small cation in the crystalline structure of the perovskite or spinel, and the second layer of metal oxide built upon the surface (22) includes a metal element which provides a large cation in the crystalline structure of the perovskite or spinel. The layering sequence involved in the film build up reduces problems which would otherwise result from the interfacial electrostatics at the first atomic layers, and these oxides can be stabilized as commensurate thin films at a unit cell thickness or grown with high crystal quality to thicknesses of 0.5-0.7 theta m for optical device applications.
    • 一种工艺和结构,其中由钙钛矿或尖晶石构成的膜外延地在诸如碱土金属氧化物表面的表面(22)上构建,包括钙钛矿或尖晶石的交替构成金属氧化物平面的外延生长(20 ,26,28)。 构建在表面(22)上的第一层金属氧化物包括在钙钛矿或尖晶石的晶体结构中提供小阳离子的金属元素,并且构建在表面(22)上的第二金属氧化物层包括金属元素 其在钙钛矿或尖晶石的晶体结构中提供了大的阳离子。 涉及薄膜堆积的层叠顺序减少了否则由第一原子层的界面静电导致的问题,并且这些氧化物可被稳定为单位单元厚度的相当薄膜或以高结晶质量生长至厚度为0.5 -0.7θm用于光学器件应用。
    • 83. 发明申请
    • METHOD OF DEPOSITING MONOMOLECULAR LAYERS
    • 沉积单分子层的方法
    • WO1995013409A1
    • 1995-05-18
    • PCT/FR1994001321
    • 1994-11-10
    • LEWINER, JacquesUFINNOVALAGUES, Michel
    • LEWINER, JacquesUFINNOVA
    • C30B23/02
    • C30B23/02C30B29/22
    • Method of vacuum depositing a monomolecular layer on a surface, the monomolecular layer comprising at least one element selected from groups IIa, IIIa, IVa, VIIIa, Ib, IIb, IIIb, Vb of the periodic table. The method consists in heating said surface to a predetermined temperature (T) of less than 600 DEG C and vacuum evaporating at least the above-mentioned element for the purpose of depositing it on the receptor surface, the total atomic flow of the element(s) onto the receptor surface being from 10 to 10 atoms/cm .s. According to the invention, the formation of the monomolecular layer is monitored in real time, and evaporation of the element is stopped when the complete formation of the monomolecular layer is detected.
    • 在表面上真空沉积单分子层的方法,该单分子层包含选自元素周期表IIa,IIIa,IVa,VIIIa,Ib,IIb,IIIb,Vb族中的至少一种元素。 该方法包括将所述表面加热到小于600℃的预定温度(T),并且真空蒸发至少上述元素以便将其沉积在受体表面上,元素的总原子流 )在受体表面上为10 12至10 15个/ cm 2。 根据本发明,实时监测单分子层的形成,当检测到单分子层的完全形成时,元件的蒸发停止。