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1. 发明申请

WO1995016061A1 PROCESS FOR GROWING AN EPITAXIAL FILM ON AN OXIDE SURFACE AND PRODUCT 审中-公开
标题翻译：在氧化物表面和产品上生长外延膜的方法
公开(公告)号：WO1995016061A1
公开(公告)日：1995-06-15
申请号：PCT/US1994014098
申请日：1994-12-08
申请人： MARTIN MARIETTA ENERGY SYSTEMS, INC.
发明人： MARTIN MARIETTA ENERGY SYSTEMS, INC. , MCKEE, Rodney, A. , WALKER, Frederick, J.
IPC分类号： C30B25/02
CPC分类号： G02B6/131 , C30B23/02 , C30B29/16 , C30B29/22 , C30B29/32 , Y10S438/967
摘要： A process and structure wherein a film comprised of a perovskite or a spinel is built epitaxially upon a surface (22), such as an alkaline earth oxide surface, involves the epitaxial build up of alternating constituent metal oxide planes of the perovskite or spinel (20, 26, 28). The first layer of metal oxide built upon the surface (22) includes a metal element which provides a small cation in the crystalline structure of the perovskite or spinel, and the second layer of metal oxide built upon the surface (22) includes a metal element which provides a large cation in the crystalline structure of the perovskite or spinel. The layering sequence involved in the film build up reduces problems which would otherwise result from the interfacial electrostatics at the first atomic layers, and these oxides can be stabilized as commensurate thin films at a unit cell thickness or grown with high crystal quality to thicknesses of 0.5-0.7 theta m for optical device applications.
摘要翻译：一种工艺和结构，其中由钙钛矿或尖晶石构成的膜外延地在诸如碱土金属氧化物表面的表面（22）上构建，包括钙钛矿或尖晶石的交替构成金属氧化物平面的外延生长（20 ，26,28）。构建在表面（22）上的第一层金属氧化物包括在钙钛矿或尖晶石的晶体结构中提供小阳离子的金属元素，并且构建在表面（22）上的第二金属氧化物层包括金属元素其在钙钛矿或尖晶石的晶体结构中提供了大的阳离子。涉及薄膜堆积的层叠顺序减少了否则由第一原子层的界面静电导致的问题，并且这些氧化物可被稳定为单位单元厚度的相当薄膜或以高结晶质量生长至厚度为0.5 -0.7θm用于光学器件应用。

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