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71. 发明申请

WO2012158279A3 RECONFIGURABLE SPECTROSCOPIC ELLIPSOMETER 审中-公开
标题翻译：可重构光谱仪
公开(公告)号：WO2012158279A3
公开(公告)日：2013-01-17
申请号：PCT/US2012032792
申请日：2012-04-09
申请人： KLA TENCOR CORP , KRISHNAN SHANKAR , WANG HAIMING
发明人： KRISHNAN SHANKAR , WANG HAIMING
IPC分类号： G01N21/21 , G01J4/00
CPC分类号： G01B11/0641 , G01B2210/56 , G01N21/211 , G01N21/956
摘要： A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.
摘要翻译：具有在样品的入射光束侧的第一旋转元件和样品的反射光束侧上的第二旋转元件和具有积分时间的检测器的Mueller椭偏仪具有用于选择性和分别地调节（1 ）第一旋转元件的第一角频率和（2）第二旋转元件的第二角频率。

72. 发明申请

WO2013006637A1 MULTI-ANALYZER ANGLE SPECTROSCOPIC ELLIPSOMETRY 审中-公开
标题翻译：多分析仪角度分光光度计
公开(公告)号：WO2013006637A1
公开(公告)日：2013-01-10
申请号：PCT/US2012/045436
申请日：2012-07-03
申请人： KLA-TENCOR CORPORATION , KWAK, Hindong , DIXON, Ward , POSLAVSKY, Leonid , KAACK, Torsten
发明人： KWAK, Hindong , DIXON, Ward , POSLAVSKY, Leonid , KAACK, Torsten
IPC分类号： G01N21/21 , G01J4/00
CPC分类号： G01J4/00 , G01N21/211 , G01N2021/213
摘要： Ellipsometry systems and ellipsometry data collection methods with improved stabilities are disclosed. In accordance with the present disclosure, multiple predetermined, discrete analyzer angles are utilized to collect ellipsometry data for a single measurement, and data regression is performed based on the ellipsometry data collected at these predetermined, discrete analyzer angles. Utilizing multiple discrete analyzer angles for a single measurement improves the stability of the ellipsometry system.
摘要翻译：公开了具有改进的稳定性的椭偏仪系统和椭偏仪数据采集方法。根据本公开，使用多个预定的离散分析器角度来收集用于单个测量的椭圆测量数据，并且基于在这些预定的离散分析器角度收集的椭偏仪数据执行数据回归。使用多个离散分析仪角度进行单次测量可提高椭偏仪系统的稳定性。

73. 发明申请

WO2012002720A2 편광 다이버시티 광 간섭계 및 이를 이용한 현미경 审中-公开
标题翻译：偏振分集光学干涉仪和使用它的显微镜
公开(公告)号：WO2012002720A2
公开(公告)日：2012-01-05
申请号：PCT/KR2011/004739
申请日：2011-06-29
申请人： 서강대학교 산학협력단 , 조규만 , 박영규
发明人： 조규만 , 박영규
IPC分类号： G01J4/00 , G02B21/18 , G01N21/21
CPC分类号： G02B21/18 , G01B9/02028 , G01B2290/70 , G02B21/14 , G02B27/283
摘要： 본 발명은 광 간섭 계 및 이를 이용한 현미경에 관한 것으로, 광원; 상기 광원에서 발생된 광을 분리시키는 빔 분리기; 상기 광을 편광 방향이 서로 수직한 광으로 분리하는 편광분리기; 및 상기 분리된 광을 검출하는 복수개의 광 검출기를 포함하는 광 간섭계에 있어서, 상기 광 검출기 중 적어도 어느 하나는 시료에 반사 또는 투과되어 나온 광이 편광 다이버시티(polarization diversity)가 있는 경우, 상기 편광 변화를 검출할 수 있는 편광 변화 검출기인 것을 특징으로 한다. 이와 같은 본 발명을 제공하면, 시료에 따른 편광변화를 검출할 수 있게 됨으로써, 관련 연구를 위한 각종의 분석장비 또는 다양한 장비에 적용할 수 있을 뿐만 아니라, 시료의 광학적 특성을 보다 정밀하게 측정할 수 있게 된다.
摘要翻译：光学干涉系统和使用其的显微镜技术领域本发明涉及一种光学干涉系统和一种使用该光学干涉系统的显微镜，分束器，用于分离从光源产生的光; 偏振光分离器，用于将光分离为具有彼此垂直的偏振方向的光; 以及用于检测分离光的多个光电检测器，其中当反射或透过样本的光具有偏振分集时，至少一个光电检测器具有偏振分集，其中偏振变化检测器是能够检测变化的偏振变化检测器。根据本发明，可以根据样本检测偏振的变化，由此可以将其应用于各种分析设备或用于相关研究的各种设备，并且更精确地测量样本的光学性质

74. 发明申请

WO2011011511A1 ANGLE-RESOLVED ANTISYMMETRIC SCATTEROMETRY 审中-公开
标题翻译：角解决的反对称散射测量
公开(公告)号：WO2011011511A1
公开(公告)日：2011-01-27
申请号：PCT/US2010/042738
申请日：2010-07-21
申请人： KLA-TENCOR CORPORATION , KANDEL, Daniel , LEVINSKI, Vladimir , SAPIENS, Noam
发明人： KANDEL, Daniel , LEVINSKI, Vladimir , SAPIENS, Noam
IPC分类号： G01J4/00
CPC分类号： G01N21/95607 , G01B11/14 , G01B11/24 , G01B2210/56 , G03F7/70633
摘要： A method for determining an overlay offset may include, but is not limited to: obtaining a first anti-symmetric differential signal (ΔS 1 ) associated with a first scatterometry cell; obtaining a second anti-symmetric differential signal (ΔS 2 ) associated with a second scatterometry cell and computing an overlay offset from the first anti-symmetric differential (ΔS 1 ) signal associated with the first scatterometry cell and the second anti-symmetric differential signal (ΔS 2 ) associated with the second scatterometry cell.
摘要翻译：用于确定覆盖偏移的方法可以包括但不限于：获得与第一散射测量单元相关联的第一反对称差分信号（ΔS1）; 获得与第二散射测量单元相关联的第二反对称差分信号（θS2），并计算与第一散射测量单元和第二反对称差分信号相关联的第一反对称差分（ΔS1）信号的叠加偏移（ βS2）与第二散射测量单元相关联。

75. 发明申请

WO2009019690A3 METHOD AND SYSTEM FOR OPTICAL MEASUREMENTS 审中-公开
标题翻译：光学测量方法与系统
公开(公告)号：WO2009019690A3
公开(公告)日：2010-03-04
申请号：PCT/IL2008001073
申请日：2008-08-05
申请人： NOVA MEASURING INSTR LTD , BRILL BOAZ , GOLBER RAFAEL , MUZIKOVSKY VLADIMIR
发明人： BRILL BOAZ , GOLBER RAFAEL , MUZIKOVSKY VLADIMIR
IPC分类号： G01J4/00
CPC分类号： G01N21/956 , G01J3/02 , G01J3/0208 , G01J3/0218 , G01J3/0237 , G01J3/0291 , G01J3/447 , G01J3/453 , G01J2003/1213
摘要： An optical measurement Method and System for spectroscopy are disclosed for evaluating the parameters of a sample. The device generally includes a broadband source for generating a light beam. Reflected light beam are simultaneously analyzed as a function of the position within the beam to provide information at multiple wavelengths and/or angular distribution. A Furier filter, comprising dispersion element and a two-dimensional photodetector array are used so that the beam may be simultaneously or consicuently analyzed at multiple angles of returned from the sample (diffracted) light at multiple wavelengths.
摘要翻译：公开了用于评估样品参数的光学测量方法和系统。该装置通常包括用于产生光束的宽带源。作为光束内的位置的函数同时分析反射光束，以提供多个波长和/或角度分布的信息。使用包括色散元件和二维光电检测器阵列的富尔滤光器，使得可以以从多个波长的样品（衍射）光返回的多个角度同时或仔细地分析光束。

76. 发明申请

WO2009127250A1 METHOD AND DEVICE FOR VIBRATIONAL CIRCULAR DICHROISM SPECTROSCOPY 审中-公开
标题翻译：振动圆二次光谱的方法和装置
公开(公告)号：WO2009127250A1
公开(公告)日：2009-10-22
申请号：PCT/EP2008/054585
申请日：2008-04-16
申请人： ABB RESEARCH LTD , BRÄNDLE, Hubert , BOHNERT, Klaus
发明人： BRÄNDLE, Hubert , BOHNERT, Klaus
IPC分类号： G01J4/00
CPC分类号： G01J4/00 , G01N21/21 , G01N21/23 , G01N21/359 , G01N2021/216
摘要： A circular polarisation spectrometer is disclosed comprising a source (1) of essentially monochromatic electromagnetic radiation preferably in the infrared range, an element (21, 37-45) for the generation of altematingly left and right circularly polarised radiation therefrom, and at least one detector (7) for detecting radiation transmitted by a sample to be analysed spectroscopically in terms of differential absorption of left and right circularly polarised radiation. The spectrometer is versatile and allows compensation of almost any otherwise detrimental offset effects if the element (21, 37- 45) for the generation of altematingly left and right circularly polarised radiation is an electro-optical device in which by means of the application of voltage and a correspondingly generated electric field the birefringence can be adapted as a function of time.
摘要翻译：公开了一种圆偏振光谱仪，其包括优选地在红外范围内的基本上单色电磁辐射的源（1），用于从其产生替代左和右圆偏振辐射的元件（21,37-45），以及至少一个检测器（7），用于根据左右圆偏振辐射的差分吸收来检测由光谱学分析的样品透射的辐射。如果用于产生替代左右圆偏振辐射的元件（21,37-45）是其中通过施加电压的电光装置，则光谱仪是通用的并且允许补偿几乎任何其他有害的偏移效应并且相应产生的电场可以将双折射作为时间的函数进行调整。

77. 发明申请

WO2009059313A1 APPARATUS AND METHODS FOR CONCENTRATION DETERMINATION USING POLORIZED LIGHT 审中-公开
标题翻译：使用聚光的浓度测定的装置和方法
公开(公告)号：WO2009059313A1
公开(公告)日：2009-05-07
申请号：PCT/US2008/082275
申请日：2008-11-03
申请人： DEKA PRODUCTS LIMITED PARTNERSHIP , HELMORE, Simon, C. , SACHS, Jason , SCARPACI, Jacob, W.
发明人： HELMORE, Simon, C. , SACHS, Jason , SCARPACI, Jacob, W.
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , A61M1/14 , G01J4/04 , G01N21/90 , G01N2201/0612 , G01N2201/0683
摘要： Methods and apparatus for concentration determination using polarized light. The apparatus includes a first polarized light source having a first light source polarization axis and a second polarized light source having a second light source polarization axis generally perpendicular to the first light source polarization axis. Also, a first polarized light receiver having a first polarized light receiver polarization axis and configured to measure an intensity of light transmitted from the first light receiver polarizer and a second polarized light receiver having a second polarized light receiver polarization axis substantially perpendicular to the first light receiver polarization axis and configured to measure an intensity of light transmitted from the second light receiver polarizer, wherein the first and second light receiver polarization axes are generally +/- 45 degrees relative to the first and second light source polarization axes.
摘要翻译：使用偏振光进行浓度测定的方法和装置。该装置包括具有第一光源偏振轴的第一偏振光源和具有大致垂直于第一光源偏振轴的第二光源偏振轴的第二偏振光源。此外，具有第一偏振光接收偏振轴并被配置为测量从第一光接收偏振器透射的光的强度的第一偏振光接收器和具有基本上垂直于第一光的第二偏振光接收偏振轴的第二偏振光接收器接收器偏振轴并且被配置为测量从第二光接收偏振器透射的光的强度，其中第一和第二光接收偏振轴相对于第一和第二光源偏振轴通常为+/- 45度。

78. 发明申请

WO2008130383A9 MOLECULAR AND PHOTONIC NANOSTRUCTURES, OPTICAL BIOMATERIALS, PHOTOSENSITIZERS, MOLECULAR CONTRAST AGENTS, AND METAMATERIALS 审中-公开
标题翻译：分子和光子纳米结构，光生物材料，光敏剂，分子对比剂和元件
公开(公告)号：WO2008130383A9
公开(公告)日：2009-04-09
申请号：PCT/US2007023018
申请日：2007-10-31
申请人： UNIV AKRON , GIAKOS GEORGE
发明人： GIAKOS GEORGE
IPC分类号： G01J4/00
CPC分类号： A61B5/0084 , A61B5/7203
摘要： The present invention generally relates to new photophysical characteristics associated with certain macromolecules, heterogeneous phases with a pronounced index of refraction contrast, and biological complex macromolecules. Given this, in one embodiment the present invention relates to new processes, methods and applications, for enhancing signals and images. In another embodiment, the present invention relates to the design and development of scalable imaging systems and techniques, optical instrumentation and lenses, systems engineering, photonics and optoelectronics, low-power microelectronics, micro-nanotechnology, and sensing/biosensing applications for various applications (e.g., life science applications).
摘要翻译：本发明一般涉及与某些大分子，具有明显的折射率对比的非均相以及生物复合物大分子相关的新的光物理特性。鉴于此，在一个实施例中，本发明涉及用于增强信号和图像的新处理，方法和应用。在另一个实施例中，本发明涉及用于各种应用的可伸缩成像系统和技术，光学仪器和透镜，系统工程，光子学和光电子学，低功率微电子学，微纳米技术和传感/生物传感应用的设计和开发如生命科学应用）。

79. 发明申请

WO2009039274A2 METHOD FOR MAPPING OF DISPERSION AND OTHER OPTICAL PROPERTIES OF OPTICAL WAVEGUIDES 审中-公开
标题翻译：用于映射光学波长的其他光学性质的方法
公开(公告)号：WO2009039274A2
公开(公告)日：2009-03-26
申请号：PCT/US2008076852
申请日：2008-09-18
申请人： UNIV CALIFORNIA , RADIC STOJAN
发明人： RADIC STOJAN
IPC分类号： G01N21/00 , G01J4/00
CPC分类号： G01M11/319 , G01M11/338 , G01M11/39
摘要： A method is provided for measurement of dispersion or other optical and mechanical properties within a waveguide by inducing four-photon mixing at different locations within the waveguide by timing a pump signal to counter-collide with and abruptly amplify or attenuate one or both of a probe pulse and a signal pulse at each location. The measurement of the components of the resulting mixing signal created by each collision is used to calculate dispersion defined by the location at which the collision occurred. By combining the measurements from all of the locations, a spatial map of dispersion or other optical or mechanical properties within the waveguide can be generated.
摘要翻译：提供了一种用于通过在泵浦信号中的不同位置处引导四光子混合来定时测量波导内的色散或其他光学和机械性质的方法来定位泵浦信号以与探针的一个或两个相冲突并突然放大或衰减脉冲和信号脉冲。由每次碰撞产生的混合信号的分量的测量用于计算由发生碰撞的位置定义的色散。通过组合来自所有位置的测量，可以产生波导内的色散或其它光学或机械性质的空间图。

80. 发明申请

WO2007121406A3 POLARIZATION BASED INTERFEROMETRIC DETECTOR 审中-公开
标题翻译：基于偏振的干涉检测器
公开(公告)号：WO2007121406A3
公开(公告)日：2008-12-24
申请号：PCT/US2007066723
申请日：2007-04-16
申请人： BIOPTIX LLC , HALL JOHN , PETROPAVLOVSKIKH VIATCHESLAV , NILSEN OYVIND
发明人： HALL JOHN , PETROPAVLOVSKIKH VIATCHESLAV , NILSEN OYVIND
IPC分类号： G01J4/00
CPC分类号： G01N21/45 , G01N21/21 , G01N21/253 , G01N21/41 , G01N21/552 , G01N21/553 , G01N2021/212
摘要： A sensor and method for determining the optical properties of a sample material is disclosed. The sensor comprises a light source that generates a linearly polarized light beam having a predetermined polarization orientation with respect to the plane of incidence. The linearly polarized light beam is reflected off the sample and is split into second and third light beams where the second and third light beam consist of the combined projections of mutually orthogonal components of the first light beam. A signal processor measures the intensity difference between the second and third light beams to calculate the phase difference induced by the sample material.
摘要翻译：公开了一种用于确定样品材料的光学性质的传感器和方法。该传感器包括产生相对于入射平面具有预定极化取向的线偏振光束的光源。线偏振光束被从样品反射并被分裂成第二和第三光束，其中第二和第三光束由第一光束的相互正交分量的组合投影组成。信号处理器测量第二和第三光束之间的强度差，以计算由样品材料引起的相位差。

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