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    • 71. 发明申请
    • HUMIDITY SENSOR OF CAPACITANCE TYPE AND METHOD OF FABRICATING SAME
    • 电容式湿度传感器及其制造方法
    • WO2010056049A3
    • 2010-08-26
    • PCT/KR2009006654
    • 2009-11-12
    • KOREA ELECTRONICS TECHNOLOGYHONG SUNG MINKIM KUN NYUNJO YOUNG CHANGKIM WON HYO
    • HONG SUNG MINKIM KUN NYUNJO YOUNG CHANGKIM WON HYO
    • G01N27/22G01N27/00G01N27/26
    • G01N27/223
    • The present invention relates to a humidity sensor of capacitance type, and more specifically to a humidity sensor of capacitance type and a method of manufacturing same that enable not only the fabrication of a compact humidity sensor by forming a sensor part on top of an ROIC substrate, but also the enhancement of the reliability of the sensor by forming a humidity sensing layer with a polymeric material of a large surface area between a lower electrode layer and an upper electrode layer. The humidity sensor of capacitance type of the present invention comprises: an ROIC substrate that includes an electrode pad; a metallic layer that is formed on top of said ROIC substrate and patterned to expose a part of said electrode pad; an insulation layer that is formed on top of said metallic layer and patterned to expose a part of said electrode pad; a lower electrode layer that is formed on top of said insulation layer; a humidity sensing layer that is etched and formed on top of said lower electrode layer to expand the surface area; an upper electrode layer that is formed on top of said moisture sensing layer; and a connection layer that is formed on top of said exposed electrode pad to bring each of said lower electrode layer and upper electrode layer into contact with said electrode pad.
    • 电容式湿度传感器技术领域本发明涉及一种电容式湿度传感器,更具体地说,涉及一种电容型湿度传感器及其制造方法,不仅能够通过在ROIC基板的顶部形成传感器部件来制造小型湿度传感器 而且还通过在下电极层和上电极层之间形成具有大表面积的聚合材料的湿度感测层来提高传感器的可靠性。 本发明的电容式湿度传感器包括:ROIC衬底,其包括电极焊盘; 金属层,其形成在所述RO​​IC基板的顶部上并被图案化以暴露所述电极焊盘的一部分; 绝缘层,其形成在所述金属层的顶部并被图案化以暴露所述电极焊盘的一部分; 形成在所述绝缘层的顶部的下电极层; 湿度感测层,其被蚀刻并形成在所述下电极层的顶部上以使表面积膨胀; 上部电极层,其形成在所述湿度感测层的顶部; 以及形成在所述暴露的电极焊盘的顶部上以使所述下电极层和上电极层中的每一个与所述电极焊盘接触的连接层。
    • 72. 发明申请
    • HUMIDITY SENSOR OF CAPACITANCE TYPE AND METHOD OF FABRICATING SAME
    • 电容式湿度传感器及其制造方法
    • WO2010056049A2
    • 2010-05-20
    • PCT/KR2009006654
    • 2009-11-12
    • KOREA ELECTRONICS TECHNOLOGYHONG SUNG MINKIM KUN NYUNJO YOUNG CHANGKIM WON HYO
    • HONG SUNG MINKIM KUN NYUNJO YOUNG CHANGKIM WON HYO
    • G01N27/22G01N27/00G01N27/26
    • G01N27/223
    • The present invention relates to a humidity sensor of capacitance type, and more specifically to a humidity sensor of capacitance type and a method of manufacturing same that enable not only the fabrication of a compact humidity sensor by forming a sensor part on top of an ROIC substrate, but also the enhancement of the reliability of the sensor by forming a humidity sensing layer with a polymeric material of a large surface area between a lower electrode layer and an upper electrode layer. The humidity sensor of capacitance type of the present invention comprises: an ROIC substrate that includes an electrode pad; a metallic layer that is formed on top of said ROIC substrate and patterned to expose a part of said electrode pad; an insulation layer that is formed on top of said metallic layer and patterned to expose a part of said electrode pad; a lower electrode layer that is formed on top of said insulation layer; a humidity sensing layer that is etched and formed on top of said lower electrode layer to expand the surface area; an upper electrode layer that is formed on top of said moisture sensing layer; and a connection layer that is formed on top of said exposed electrode pad to bring each of said lower electrode layer and upper electrode layer into contact with said electrode pad.
    • 电容型湿度传感器及其制造方法技术领域本发明涉及一种电容型湿度传感器,更具体地涉及一种电容型湿度传感器及其制造方法,其不仅能够通过在ROIC基底上形成传感器部件来制造小型湿度传感器 而且还通过在下电极层和上电极层之间用大表面积的聚合物材料形成湿敏层来提高传感器的可靠性。 本发明的电容型湿度传感器包括:ROIC基板,其包括电极焊盘; 金属层,形成在所述RO​​IC衬底的顶部上并被图案化以暴露所述电极焊盘的一部分; 绝缘层,形成在所述金属层的顶部并且被图案化以暴露所述电极焊盘的一部分; 形成在所述绝缘层的顶部上的下电极层; 湿敏层,在所述下电极层的顶部上被蚀刻并形成以扩大表面积; 形成在所述湿度感测层上的上电极层; 以及连接层,形成在所述暴露的电极焊盘的顶部上,以使每个所述下电极层和上电极层与所述电极焊盘接触。
    • 76. 发明申请
    • IMPROVED CALIBRATION AND METERING METHODS FOR WOOD KILN MOISTURE MEASUREMENT
    • 改进木材水分测量的校准和计量方法
    • WO2008082681A1
    • 2008-07-10
    • PCT/US2007/067694
    • 2007-04-27
    • SIGNATURE CONTROL SYSTEMS, INC.MAGILL, Richard
    • MAGILL, Richard
    • G01R27/08
    • G01N33/46G01N27/223
    • A moisture metering calibration method and system for, e.g., determining the moisture lumber within a lumber drying kiln is disclosed. Calibration of moisture indicative electrical signals obtained from, e.g., moisture sensing capacitive plates spaced apart within a stack of drying lumber is performed, wherein long lengths (e.g., up to 1000 linear feet or more) of coaxial cable can be used for transmitting the signals, and effectively removing signal anomalies induced in such cabling so that accurate lumber moisture measurements result. Such extended cable lengths provides flexibility with respect to placement of electronic moisture metering equipment. This flexibility allows such equipment to be placed in an environmentally-controlled enclosure, rather than on the weather exposed exterior of a kiln whose lumber is being monitored.
    • 公开了一种湿度计量校准方法和系统,用于例如确定木材干燥窑内的湿度木材。 执行湿度指示电信号的校准,例如,在干燥木材堆叠内隔开的水分感测电容板获得的,其中同轴电缆的长度(例如,高达1000线性英尺或更多))可用于传输信号 并且有效地消除了在这种布线中引起的信号异常,从而导致精确的木材湿度测量。 这种延长的电缆长度提供了关于电子湿度计量设备的放置的灵活性。 这种灵活性允许将这种设备放置在环境受控的外壳中,而不是在正在监控其木材的窑的暴露于外部的外部。
    • 79. 发明申请
    • WINDSHIELD MOISTURE DETECTOR
    • WINDSHIELD水分检测仪
    • WO2006042248A1
    • 2006-04-20
    • PCT/US2005/036486
    • 2005-10-11
    • PPG INDUSTRIES OHIO, INC.
    • KORAM, Kwaku, K.HAWK, Allen, R.CHUN, Shelby
    • B60S1/08
    • B60S1/0822B32B17/10036B32B17/10174B32B17/10376B32B17/10761B60S1/0829B60S1/0877B60S1/50G01F23/261G01N27/223
    • A moisture detector can include a first elongated conductor (100) disposed on a substrate (104). The first conductor (100) can define a zigzag path between the opposite ends thereof. A second conductor (102) can also be disposed on the substrate (104) at least partially surrounding the first conductor (100). The second conductor (102) can define between opposite ends thereof a zigzag path having a portion thereof that is positioned in substantially spaced parallel relation with the zigzag path of the first conductor (100) along the sides thereof. A power conductor (106) disposed on the substrate (104) can be electrically connected to the first conductor (100) intermediate the ends thereof via a gap (103) defined between the ends of the second conductor (102). Ground conductors (108) disposed on the substrate (104) can be electrically connected to the ends of the second conductor (102). A temperature sensor (122) can be utilized to correct the response of the moisture detector for temperature.
    • 水分检测器可以包括设置在基板(104)上的第一细长导体(100)。 第一导体(100)可以在其相对端之间限定锯齿形路径。 第二导体(102)也可以至少部分地围绕第一导体(100)设置在衬底(104)上。 第二导体(102)可以在其相对端之间限定锯齿形路径,该锯齿形路径具有其一部分,其位于与第一导体(100)的边的基本间隔开的平行关系。 设置在基板(104)上的电力导体(106)可以经由限定在第二导体(102)的端部之间的间隙(103)而在其端部之间电连接到第一导体(100)。 设置在基板(104)上的接地导体(108)可以电连接到第二导体(102)的端部。 可以使用温度传感器(122)来校正水分检测器对温度的响应。