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    • 16. 发明申请
    • CHEMICAL MECHANICAL PLANARIZATION OF LOW DIELECTRIC CONSTANT MATERIALS
    • 低介电常数材料的化学机械平面化
    • WO2003098680A1
    • 2003-11-27
    • PCT/US2003/015224
    • 2003-05-13
    • HONEYWELL INTERNATIONAL INC.ZHANG, FanTOWERY, DanielLIU, Feng Quan
    • ZHANG, FanTOWERY, DanielLIU, Feng Quan
    • H01L21/461
    • C09K3/1472C09G1/02C09K3/1436C09K3/1463H01L21/31053H01L21/31058
    • The present invention relates to apparatus, procedures, and compositions for avoiding and reducing damage to low dielectric constant materials and other soft materials, such as Cu and Al, used in fabricating semiconductor devices. Damage reduction can be achieved by decreasing the role of mechanical abrasion in the CMP of these materials and increasing the role of chemical polishing, which can improve material removal rates. Increasing the role of chemical polishing can be accomplished by creating a polishing slurry, (5) which contains components that interact chemically with the surface (1) to be polished. This slurry (5) may or may not also contain soft abrasive particles, which replace the hard abrasive particles of conventional slurries. Use of soft abrasive particles can reduce the role of mechanical abrasion in the CMP process. Use of this slurry (5) in CMP can reduce surface scratches and device damage.
    • 本发明涉及用于避免和减少用于制造半导体器件的低介电常数材料和其它软材料(例如Cu和Al)的损伤的装置,程序和组合物。 通过减少这些材料的CMP中的机械磨损的作用并增加化学抛光的作用可以减少损伤,这可以提高材料去除率。 增加化学抛光的作用可以通过产生抛光浆料(5)来实现,该抛光浆料包含与要抛光的表面(1)化学反应的成分。 该浆料(5)可以含有也可以不含有软磨料颗粒,其代替常规浆料的硬磨料颗粒。 使用软磨粒可以减少CMP工艺中机械磨损的作用。 在CMP中使用这种浆料(5)可以减少表面划痕和器件损坏。
    • 20. 发明申请
    • METHOD AND APPARATUS FOR CONTEXT-BASED VIDEO QUALITY ASSESSMENT
    • 用于基于语境的视频质量评估的方法和装置
    • WO2014121571A1
    • 2014-08-14
    • PCT/CN2013/077082
    • 2013-06-09
    • THOMSON LICENSINGLIAO, NingCHEN, ZhiboZHANG, Fan
    • LIAO, NingCHEN, ZhiboZHANG, Fan
    • H04N17/00
    • H04N17/004G06K9/00536G06K9/00711G06K9/036G06T7/0002G06T2207/10016H04N19/103H04N19/114H04N19/154H04N19/48H04N19/89
    • Spatial distortion (i.e., when a frame is viewed independently of other frames in a video sequence) may be quite different from temporal distortion (i.e., when frames are viewed continuously). To estimate temporal distortion, a sliding window approach is used. Specifically, multiple sliding windows around a current frame are considered. Within each sliding window, a large distortion density is calculated and a sliding window with the highest large distortion density is selected. A distance between the current frame and the closest frame with large distortion in the selected window is calculated. Subsequently, the temporal distortion is estimated as a function of the highest large distortion ratio, the spatial distortion for the current frame, and the distance. In another embodiment, a median of spatial distortion values is calculated for each sliding window and the maximum of median spatial distortion values is used to estimate the temporal distortion.
    • 空间失真(即,当视频序列中独立于其他帧观看帧)可能与时间失真(即,连续观看帧时)完全不同。 为了估计时间失真,使用滑动窗口方法。 具体地说,考虑当前帧周围的多个滑动窗口。 在每个滑动窗口内,计算出较大的失真密度,并选择具有最大大失真密度的滑动窗口。 计算当前帧与所选窗口中具有大失真的最近帧之间的距离。 随后,将时间失真估计为最大的大失真比,当前帧的空间失真和距离的函数。 在另一个实施例中,为每个滑动窗口计算空间失真值的中值,并且使用中值空间失真值的最大值来估计时间失真。