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    • 17. 发明申请
    • METHOD OF MAKING LAYERED SUPERLATTICE MATERIAL WITH IMPROVED MICROSTRUCTURE
    • 使用改进的微结构制备层状超导材料的方法
    • WO02073669A3
    • 2003-03-20
    • PCT/US0145392
    • 2001-10-30
    • SYMETRIX CORPSEIKO EPSON CORPKARASAWA JUNICHIJOSHI VIKRAM
    • KARASAWA JUNICHIJOSHI VIKRAM
    • H01L27/105H01L21/02H01L21/311H01L21/314H01L21/316H01L21/8246
    • H01L28/56H01L21/31122H01L21/31691
    • In the manufacture of an integrated circuit, a first electrode (48) is formed on a substrate (28). In a first embodiment, a strontium bismuth tantalate layer (50) and a second electrode (52) are formed on top of the first electrode (48). Prior to the final crystallization anneal, the first electrode (48), the strontium bismuth tantalate layer (50) and the second electrode (52) are patterned. The final crystallization anneal is then performed on the substrate (28). In a second embodiment, a second layer (132) of strontium bismuth tantalate is deposited on top of the strontium bismuth tantalate layer (50) prior to the forming of the second electrode (52) on top of the first and second layers (50), (132). In a third embodiment, a carefully controlled UV baking process is performed on the strontium bismuth tantalate layer (50). In a fourth embodiment, an additional rapid thermal annealing process is performed on a substrate subsequent to the patterning process and prior to the final crystallization annealing process.
    • 在集成电路的制造中,在基板(28)上形成第一电极(48)。 在第一实施例中,在第一电极(48)的顶部上形成钽酸铋铋层(50)和第二电极(52)。 在最终结晶退火之前,对第一电极(48),钽酸锶锶层(50)和第二电极(52)进行图案化。 然后在衬底(28)上进行最终的结晶退火。 在第二实施例中,在第一和第二层(50)的顶部形成第二电极(52)之前,将钽酸铋锶的第二层(132)沉积在钽酸锶钽酸盐层(50)的顶部上, ,(132)。 在第三实施例中,对钽酸锶钽酸钡层(50)进行仔细控制的UV烘烤工艺。 在第四实施例中,在图案化工艺之后并且在最终结晶退火工艺之前,对衬底进行附加的快速热退火工艺。