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    • 124. 发明申请
    • PIEZOELECTRIC TRANSDUCER FOR GENERATING ULTRASOUND
    • 用于超声波发生的压电传感器
    • WO02066267A3
    • 2002-12-27
    • PCT/EP0200702
    • 2002-01-24
    • SONOSYS ULTRASCHALLSYSTEME JOHBRUNNER JOHANNSTRAKA JOACHIM
    • BRUNNER JOHANNSTRAKA JOACHIM
    • B06B1/06H01L41/047H04R17/00B08B3/12B06B3/00H01L41/08
    • B06B1/0644H01L41/047H04R17/00
    • The invention relates to a piezoelectric transducer for generating ultrasound, particularly for use in ultrasonic cleaning. The piezoelectric transducer comprises a vibrating plate for transferring vibrations to a fluid and comprising at least one piezo element for generating ultrasound. Said piezo element comprises a one-piece body, which is made of a piezoelectric material and which has a first surface and a second surface, which are essentially parallel to one another and provided, at least in sections, with an electrically conductive coating. The piezo element rests with its second surface against the vibration plate and is attached thereto. According to the invention, the electrically conductive coating of the first surface comprises at least two electrodes, which are electrically insulated from one another and which are provided for applying an operating voltage, and the electrically conductive coating of the second surface is electrically insulated from the first and second electrode and is arranged, at least in sections, opposite the first and second electrode. The invention also relates to the use of said piezoelectric transducer, for example, in ultrasonic cleaning systems.
    • 2.1。 本发明涉及一种压电换能器,用于生成超声,特别是用于超声波清洗,与振动的传递的振动板为超声波发生流体和至少一个压电元件具有第一表面的压电材料的一个整体本体和第二表面,其 布置成基本上彼此平行并至少部分地设置有导电涂层,其中所述压电元件在于在振动板其第二表面与被连接于此。 2.2。 根据本发明的具有所述第一表面用于施加一工作电压和所述第二表面的导电涂层的至少两个电隔离的电极电性从所述第一和所述第二电极和至少部分地相对绝缘到与第一和第二电极的导电涂层。 2.3。 使用例如 用于超声波清洗系统。
    • 126. 发明申请
    • MATRIX ACTUATOR
    • 矩阵执行器
    • WO02052657A1
    • 2002-07-04
    • PCT/JP2001/010968
    • 2001-12-14
    • G02B6/35G02B26/08H01L27/20H01L41/08H01L41/338H01L41/339H02N2/00
    • G02B6/3578G02B6/3502G02B6/3546G02B26/0858H01L27/20H01L41/338H01L41/339
    • A piezoelectric/electrostrictive actuator (1) in which piezoelectric/electrostrictive elements (31) each composed of a piezoelectric/electrostrictive body (4) and at least one pair of electrodes (18, 19) are provided on a thick ceramic substrate (2), and which is driven by displacement of the piezoelectric/electrostrictive body (4). The piezoelectric/electrostrictive elements (31) are joined to the ceramic substrate (2) integrally and arrayed independently of one another and two-dimensionally. The piezoelectric/electrostrictive actuator provides a large displacement with low voltage, has a high response speed, produces a strong force, is excellent mountability, and can be integrated at a high degree.
    • 一种压电/电致伸缩致动器(1),其中每个由压电/电致伸缩体(4)和至少一对电极(18,19)组成的压电/电致伸缩元件(31)设置在厚陶瓷基板(2)上, ,并且其由压电/电致伸缩体(4)的位移驱动。 压电/电致伸缩元件(31)一体地连接到陶瓷基板(2)并且彼此独立地并且二维地排列。 压电/电致伸缩致动器提供具有低电压的大位移,具有高响应速度,产生强力,安装性优异,并且可以高度集成。
    • 127. 发明申请
    • MULTIPLE PIEZOELECTRIC TRANSDUCER ARRAY
    • 多压电传感器阵列
    • WO01086695A3
    • 2002-03-21
    • PCT/US2001/014943
    • 2001-05-09
    • H04R17/00H01L41/08
    • H04R17/00Y10S310/80
    • A multiple transducer array structure comprises a single piezoelectric film (110) material having a plurality of alternately shaped concave and convex regions and responsive to an energy signal incident thereon, the alternating concave and convex regions each having a given radius, each of the regions integrally formed with another of the regions, each of the concave and convex regions vibrating in response to the energy signal with opposite phase to cause the transducer to operate at a given resonant frequency determined by the average radius of the regions. A method of forming the corrugated transducer is also disclosed.
    • 多重换能器阵列结构包括单个压电膜(110)材料,其具有多个交替成形的凹凸区域并响应入射到其上的能量信号,所述交替的凹凸区域各自具有给定的半径,每个区域整体 形成有另一个区域,每个凹凸区域响应于具有相反相位的能量信号振动,以使换能器以由该区域的平均半径确定的给定谐振频率工作。 还公开了一种形成波纹换能器的方法。
    • 129. 发明申请
    • IMPROVEMENTS IN OR RELATING TO FILTERS
    • 改进或相关过滤器
    • WO02005425A1
    • 2002-01-17
    • PCT/GB2001/003135
    • 2001-07-11
    • H01L41/09H01L41/08H01L41/18H01L41/22H03H3/02H03H9/10H03H9/17H03H9/56H03H9/58
    • H03H9/564H03H9/105
    • A method is provided by which filters consisting of a plurality of think film bulk acoustic resonators (FBAR) fabricated on a semiconductor wafer such as silicon or some other type of wafer can be hermetically packaged in a way that presents a component which can be easily handled by conventional pick-and-place machines. This package consists of a sandwich of the wafer (1) bearing the thin film piezoelectric resonator (2) and at least one silicon wafer (8, 14). The bond between these wafers (1, 8, 14) is accomplished by some means such as anodic bonding, using a low melting point glass or a metal bonding layer. Contacts to the resonating components are accomplished by etching holes (12) through one of the bonded wafers (8) using a process such as deep reactive ion etching. Contact electrodes are deposited into the holes (12) and onto the surface of the wafer bearing the holes (12). The resulting chip components are separated prior to use by sawing or some other method. As an alternative etching, contact electrodes can be deposited onto the edges of the chips after separation (Figure 9).
    • 提供了一种方法,通过这样一种方法可以以制造在半导体晶片(诸如硅或其他类型的晶片)上的多个思维膜体声波谐振器(FBAR)组成的滤波器以提供易于处理的部件的方式气密地封装 通过常规的拾放机器。 该封装由承载薄膜压电谐振器(2)的晶片(1)和至少一个硅晶片(8,14)组成。 这些晶片(1,8,14)之间的结合是通过一些方法实现的,例如使用低熔点玻璃或金属粘结层的阳极结合。 通过使用诸如深反应离子蚀刻的工艺,通过蚀刻孔(12)到接合的晶片(8)之一来实现与谐振元件的接触。 接触电极沉积到孔(12)中并且沉积到承载孔(12)的晶片的表面上。 所得到的芯片组件在使用之前通过锯切或其他一些方法被分离。 作为替代蚀刻,可以在分离之后将接触电极沉积在芯片的边缘上(图9)。
    • 130. 发明申请
    • RESONANCE SHIFTING
    • 谐振
    • WO01063679A1
    • 2001-08-30
    • PCT/IL2000/000116
    • 2000-02-24
    • H01L41/08H01L41/09H02N2/12
    • H01L41/253H01L41/0913
    • A piezoelectric vibrator comprising: a thin rectangular piezoelectric plate formed of a material having a Young's modulus having two short edge surfaces and two long edge surfaces and two large planar face surfaces which plate has transverse resonant vibration modes parallel to its short edges and longitudinal resonant vibration modes parallel to its long edges and is formed with at least one cavity; and at least one electrode on each of the planar surfaces that is electrifiable to excite at least one vibration mode of the plate, wherein the at least one cavity is not filled with a material having a Young's modulus substantially equal to the Young's modulus of the material from which the plate is formed, such that the presence of the at least one cavity shifts a resonant frequency of at least one vibration mode of the plate with respect to the resonant frequency that characterizes the at least one vibration mode in the absence of the at least one cavity.
    • 一种压电振动器,包括:由具有两个短边缘表面和两个长边缘表面的杨氏模量的材料形成的薄矩形压电板,以及两个大的平面表面,其具有平行于其短边缘的横向共振振动模式和纵向谐振振动 与其长边平行的模具,并形成有至少一个空腔; 以及每个所述平坦表面上的至少一个电极,所述至少一个电极可充电以激发所述板的至少一个振动模式,其中所述至少一个腔未填充具有基本上等于所述材料的杨氏模量的杨氏模量的材料 由此形成板,使得至少一个空腔的存在使得板的至少一个振动模式的谐振频率相对于在没有at的情况下表征至少一个振动模式的谐振频率 至少一个腔。