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    • 5. 发明申请
    • A SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THEREOF
    • 一种半导体器件及其制造方法
    • WO2008056295A1
    • 2008-05-15
    • PCT/IB2007/054385
    • 2007-10-29
    • NXP B.V.HUMBERT, AurelieHOOFMAN, Romano
    • HUMBERT, AurelieHOOFMAN, Romano
    • H01L21/768H01L23/522H01L23/532
    • H01L21/7682H01L21/76825H01L21/76831H01L23/5222H01L23/53295H01L2924/0002H01L2924/09701H01L2924/00
    • The invention relates to a semiconductor device comprising: a substrate (1), the substrate (1) comprising a body (5), the body (5) having a surface, the substrate (1) being provided with an insulating layer (10) on the surface of the body (l); - a conductor (25) with insulating sidewall spacers (22) located in the insulating layer (10), the conductor (25) having a current-flow direction during operation, the conductor (25) having a first width, the insulating sidewall spacers (22) each having a second width being smaller than the first width of the conductor (25), the first width and the second width being measured in a direction perpendicular to the current-flow direction of the conductor (25) and parallel to said surface, the conductor (25) having a first top surface extending parallel to said surface, the insulating sidewall spacers (22) having a second top surface, and airgaps (30) located in the insulating layer (10) adjacent to the insulating sidewall spacers (22), characterized in that the first top surface coincides with the second top surface, and in that the airgaps (30) extend from the surface of the body (5) to said first and second top surface. The invention further relates to a method of manufacturing such a semiconductor device. The semiconductor device according to the invention enables a lower resistance of the conductor while still providing a tolerance for unlanded vias.
    • 本发明涉及一种半导体器件,包括:衬底(1),所述衬底(1)包括主体(5),所述主体(5)具有表面,所述衬底(1)设置有绝缘层(10) 在身体表面(l); - 导体(25),其具有位于所述绝缘层(10)中的绝缘侧壁间隔物(22),所述导体(25)在操作期间具有电流流动方向,所述导体(25)具有第一宽度,所述绝缘侧壁间隔件 (22),每个具有小于所述导体(25)的第一宽度的第二宽度,所述第一宽度和所述第二宽度在垂直于所述导体(25)的电流流动方向的方向上测量并平行于所述导体 所述导体(25)具有平行于所述表面延伸的第一顶表面,所述绝缘侧壁间隔件(22)具有第二顶表面,以及位于所述绝缘层(10)中邻近所述绝缘侧壁间隔件 (22),其特征在于,所述第一顶表面与所述第二顶表面重合,并且所述气隙(30)从所述主体(5)的表面延伸到所述第一和第二顶表面。 本发明还涉及一种制造这种半导体器件的方法。 根据本发明的半导体器件使得导体的电阻较低,同时仍然提供对未经过过孔的容差。
    • 10. 发明申请
    • INTRUSION PROTECTION USING STRESS CHANGES
    • 使用压力变化的侵入保护
    • WO2009150558A1
    • 2009-12-17
    • PCT/IB2009/052184
    • 2009-05-26
    • NXP B.V.HOOFMAN, RomanoPIJNENBURG, Remco Henricus WilhelmusPONOMAREV, Youri Victorovitch
    • HOOFMAN, RomanoPIJNENBURG, Remco Henricus WilhelmusPONOMAREV, Youri Victorovitch
    • G06F21/00H01L23/58G06K19/073
    • H01L23/576G06F21/87H01L2924/0002H01L2924/00
    • The invention relates to a integrated circuit comprising an electronic circuit integrated on a substrate (5), and further comprising protections means for protection of the electronic circuit (25). The protection means comprise: i) a first strained encapsulation layer (10) being provided on a first side of the substrate (5), wherein the first strained encapsulation layer (10) has a strain (Sl) in a direction parallel to the substrate (5), and ii) disabling means (20) arranged for at least partially disabling the electronic circuit (25) under control of a strain change in the substrate (5). The invention further relates to a method of manufacturing such integrated circuit, and to a system comprising such integrated circuit. Such system is selected from a group comprising: a bank-card, a smart-card, a contact-less card and an RFID. All embodiments of the integrated circuit in accordance with the invention provide essentially an alternative tamper protection to the data stored or present in the electronic circuit therein. A first main group of embodiments concerns an integrated circuit wherein tamper protection is obtained by detecting a strain change during tampering and subsequently disabling the electronic circuit. A second main group of embodiments concerns an integrated circuit wherein tamper protection is obtained by designing a stack of strained encapsulation layers, such that tampering causes releasing of strain and thereby mechanical disintegrate (break, delaminate, etc) of the integrated circuit, and thus disabling the electronic circuit.
    • 本发明涉及一种集成电路,其包括集成在基板(5)上的电子电路,并且还包括用于保护电子电路(25)的保护装置。 保护装置包括:i)第一应变封装层(10),设置在基板(5)的第一侧上,其中第一应变封装层(10)在平行于基板的方向上具有应变(S1) (5),以及ii)布置成在所述衬底(5)中的应变变化的控制下至少部分地禁用所述电子电路(25)的禁用装置(20)。 本发明还涉及一种制造这种集成电路的方法,以及包括这种集成电路的系统。 这样的系统从包括银行卡,智能卡,无接触卡和RFID的组中选择。 根据本发明的集成电路的所有实施例基本上为存储或存在于其中的电子电路中的数据提供了替代的篡改保护。 第一主要实施例涉及集成电路,其中通过在篡改期间检测应变变化并随后禁用电子电路来获得篡改保护。 第二主要实施例涉及一种集成电路,其中通过设计应变封装层的堆叠来获得防篡改,使得篡改导致应变释放,从而导致集成电路的机械分解(破坏,分层等),从而导致无效 电子电路。