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    • 5. 发明申请
    • Low Drift Scanning Probe Microscope
    • 低漂移扫描探针显微镜
    • US20150074859A1
    • 2015-03-12
    • US14520021
    • 2014-10-21
    • Bruker Nano, Inc.
    • Anthonius G. RuiterHenry Mittel
    • G01Q30/10
    • G01Q30/10B82Y35/00G01Q70/04
    • A scanning probe microscope, such as an atomic force microscope, and method including z-stage and a bridge structure. A scanner containing a probe is mounted to the z-stage, which is movable in the z-axis to raise and lower the probe. The method reduces thermal drift of the z-stage and the bridge using a combination of heating elements thermally coupled to the z-stage and the bridge, ambient temperature sensors, and a controller to actively control the heating elements to maintain the bridge and the z-stage at an elevated temperature. Ideally, the temperatures in the system are selected so as to reduce drift between the probe and the sample during AFM scanning, wherein the drift is preferably maintained at less than about 1 nm for an ambient temperature change of about 1° C.
    • 扫描探针显微镜,例如原子力显微镜,以及包括z级和桥结构的方法。 包含探头的扫描器安装在z阶段,z阶可在z轴上移动以升高和降低探针。 该方法通过热耦合到z级和桥接器,环境温度传感器和控制器的加热元件的组合来减少z级和桥的热漂移,以主动地控制加热元件以维持桥和z 在高温下。 理想地,选择系统中的温度,以便减少在AFM扫描期间探针和样品之间的漂移,其中漂移优​​选保持在小于约1nm,环境温度变化约为1℃。
    • 7. 发明申请
    • Scanning probe microscopy and method of measurement by the same
    • 扫描探针显微镜和测量方法相同
    • US20050189490A1
    • 2005-09-01
    • US11054504
    • 2005-02-09
    • Kazunori AndoAmiko Nihei
    • Kazunori AndoAmiko Nihei
    • G01Q30/08G01Q30/10G01Q30/20G01Q60/24G21K7/00
    • G01Q30/18G01Q30/20
    • The present invention provides a scanning probe microscopy which can measure and keep the shape of a sample surface and the physical properties of the sample at high resolution even when an evaporable component is evaporated from a substance to be heated when the sample is heated, and can measure variations in physical properties at every heated temperature without causing thermal history on the sample. The scanning probe microscopy includes a cantilever having a probe at the distal end thereof; a heating unit for heating the sample; a sample moving unit for moving the sample; and a shielding unit for shielding between the cantilever and the sample, and when heating the sample, the shielding unit is interposed between the cantilever and the sample, and when measuring the sample, the shielding unit is not interposed between the cantilever and the sample.
    • 本发明提供一种扫描探针显微镜,其可以在样品被加热时从被加热物质蒸发出可蒸发成分时,以高分辨率测量和保持样品表面的形状和样品的物理性能,并且可以 在每个加热温度下测量物理性能的变化,而不会对样品造成热历史。 扫描探针显微镜包括在其远端具有探针的悬臂; 用于加热样品的加热单元; 用于移动样品的样品移动单元; 以及用于屏蔽悬臂与样品之间的屏蔽单元,当加热样品时,屏蔽单元介于悬臂与样品之间,测量样品时,屏蔽单元不会夹在悬臂与样品之间。