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    • 3. 发明授权
    • Method and apparatus for dynamic observation of specimen
    • 试样动态观察方法及装置
    • US5698798A
    • 1997-12-16
    • US411316
    • 1995-03-28
    • Makiko KohnoShigeyuki HosokiTsuyoshi HasegawaYusuke YajimaToshio Katsuyama
    • Makiko KohnoShigeyuki HosokiTsuyoshi HasegawaYusuke YajimaToshio Katsuyama
    • G01D21/00G01N23/00G01N25/00G01N33/00G01Q80/00
    • G01Q60/12B82Y35/00Y10S977/852
    • In a measuring method and a measuring apparatus which are suited for observing a dynamic physical phenomenon particularly in a microdevice, a signal for generating a physical phenomenon in a specimen is inputted to the specimen, and a signal which is caused by this dynamic physical phenomenon is detected by a probe which is close to or in contact with the specimen surface in correspondence with a signal input to the specimen on the basis of the specific time. The measuring apparatus has a scanning probe microscope with a probe (tip) which is close to or in contact with the specimen surface, a pulse voltage application control unit for applying respective pulse voltages to the specimen and probe, and a signal measuring unit for measuring a signal from the specimen detected by the probe. The measuring apparatus causes a dynamic physical phenomenon in the specimen by applying the pulse voltage to the specimen, applies a bias voltage between the probe and specimen by applying the pulse voltage to the probe, and detects the signal caused by the dynamic physical phenomenon in the specimen. Pulse voltage application to the probe is executed by the pulse voltage application control unit in correspondence with pulse voltage application to the specimen on the basis of the specific time. A dynamic physical phenomenon in a microarea of a specimen which is caused by the particle property or wave property of electrons can thus be observed.
    • 在适于观察动态物理现象的测量方法和测量装置中,特别是在微型装置中,用于产生样本中的物理现象的信号被输入到样本,并且由该动态物理现象引起的信号是 通过与基于特定时间输入到样本的信号相对应的与探针接近或接触的探针来检测。 测量装置具有扫描探针显微镜,其具有与试样表面接近或接触的探针(尖端),用于向样本和探针施加相应脉冲电压的脉冲电压施加控制单元,以及用于测量 由探针检测到的样本的信号。 测量装置通过向样本施加脉冲电压来引起样品中的动态物理现象,通过向探针施加脉冲电压在探针和样品之间施加偏置电压,并且检测由于动态物理现象引起的信号 标本。 脉冲电压施加到探针由脉冲电压施加控制单元根据具体时间对标本施加脉冲电压进行。 因此可以观察到由电子的粒子特性或波特性引起的样品的微区域中的动态物理现象。