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2. 发明授权

US06130512A Rf capacitively-coupled electrodeless light source 失效
标题翻译： Rf电容耦合无电极光源
公开(公告)号：US06130512A
公开(公告)日：2000-10-10
申请号：US382936
申请日：1999-08-25
申请人： Dennis M. Manos , Jessie Diggs , Joseph D. Ametepe , Jock A. Fugitt
发明人： Dennis M. Manos , Jessie Diggs , Joseph D. Ametepe , Jock A. Fugitt
IPC分类号： H01J65/04 , H05B41/24 , H05B41/16
CPC分类号： H05B41/24 , H01J65/046
摘要： An rf capacitively-coupled electrodeless light source is provided. The light source comprises a hollow, elongated chamber and at least one center conductor disposed within the hollow, elongated chamber. A portion of each center conductor extends beyond the hollow, elongated chamber. At least one gas capable of forming an electronically excited molecular state is contained within each center conductor. An electrical coupler is positioned concentric to the hollow, elongated chamber and the electrical coupler surrounds the portion of each center conductor that extends beyond the hollow, elongated chamber. A rf-power supply is positioned in an operable relationship to the electrical coupler and an impedance matching network is positioned in an operable relationship to the rf power supply and the electrical coupler.
摘要翻译：提供了一种rf电容耦合无电极光源。光源包括中空细长室和设置在中空细长室内的至少一个中心导体。每个中心导体的一部分延伸超过中空细长的室。至少一种能形成电子激发的分子状态的气体被包含在每个中心导体内。电耦合器与中空细长室同心地定位，并且电耦合器围绕延伸超过中空细长室的每个中心导体的部分。射频电源被定位在与电耦合器可操作的关系中，并且阻抗匹配网络被定位成与射频电源和电耦合器可操作的关系。

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