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    • 1. 发明授权
    • Low cost 1/8th, 1/16th micro-stepping motor drive system
    • 低成本1/8,1/16微步进电机驱动系统
    • US06414460B1
    • 2002-07-02
    • US09752174
    • 2000-12-29
    • Yanqing LiLuu T. PhamMark E. Sasso
    • Yanqing LiLuu T. PhamMark E. Sasso
    • G05B1940
    • G05B19/40G05B2219/41326
    • The invention is a low-cost stepper motor drive system comprising a microstepping motor and a logic circuit. The logic circuit includes two integrated circuits for controlling one or more phases of the microstepping motor. Each one of the integrated circuits is a motor driver capable of producing up to sixteen microsteps per full step. Further, each one of the integrated circuits takes a set of analog/digital bits and a phase bit as input. Additionally, within the logic circuit, there is included a microcontroller for controlling the microstepping motor. The microcontroller comprises six control bits, which direct the controller in outputting a set of step sequences to the integrated circuits. The microcontroller can run in one of two program modes: a stand-alone mode which utilizes two profile bits to select one of a set of four slew velocities and which will accelerate the microstepping motor then slew at a preprogrammed velocity as selected by the two profile bits; and, a pulse controlled mode, wherein the motor velocity of the microstepping motor is directly related to an input pulse signal wherein each time the microcontroller receives the input pulse signal the microcontroller will output a step to the integrated circuits. The logic circuit further includes a driver circuit for driving current through each one of the motor phases, and two snubber circuits operatively located between the outputs of each one of the motor phases of each integrated circuit for stabilizing the voltage level of the logic circuit.
    • 本发明是一种低成本步进电动机驱动系统,其包括微步进电动机和逻辑电路。 逻辑电路包括用于控制微步进电机的一个或多个相的两个集成电路。 每个集成电路都是一个电机驱动器,能够在每个步骤中产生高达十六个微步。 此外,每个集成电路采用一组模拟/数字位和相位作为输入。 此外,在逻辑电路中,包括用于控制微步进电动机的微控制器。 微控制器包括六个控制位,其引导控制器向集成电路输出一组步进序列。 微控制器可以以两种程序模式之一运行:独立模式,其使用两个配置位来选择一组四个压摆速度,并且这将加速微步进电动机,然后以预编程的速度旋转,由两个配置文件选择 位 以及脉冲控制模式,其中微步进电动机的电动机速度与输入脉冲信号直接相关,其中每当微控制器接收到输入脉冲信号时,微控制器将向集成电路输出一步。 逻辑电路还包括用于驱动通过电动机相中的每一个的电流的驱动器电路和可操作地位于每个集成电路的每个电动机相的输出之间的两个缓冲电路,用于稳定逻辑电路的电压电平。
    • 2. 发明授权
    • Drive unit for initialization
    • 驱动单元进行初始化
    • US06741058B2
    • 2004-05-25
    • US10270718
    • 2002-10-16
    • Yoshihisa YamadaHidemasa UmeharaYoshiyuki Muramatsu
    • Yoshihisa YamadaHidemasa UmeharaYoshiyuki Muramatsu
    • G05B1940
    • H02P8/24
    • A drive unit for calibrating an indicator/meter of a vehicle is provided in which a pointer in an indicator for a vehicle can point immediately after an ignition switch is turned ON, and the frequency of seeing motion of the pointer in an initializing operation by a car driver is reduced. A sensing mechanism (8a-3) is provided to sense an open/close operation of a door. Correspondingly to the sensing of the sensing mechanism (8a-3), a drive-start mechanism (8a-4) starts rotation of a stepping motor using a drive mechanism (8a-1) for initialization. The drive mechanism (8a-1) during initialization rotates the stepping motor to move a driven member toward a stopper.
    • 提供了一种用于校准车辆的指示器/计量器的驱动单元,其中车辆的指示器中的指针可以在点火开关接通之后立即指向,并且指示器在初始化操作中的运动频率由 汽车司机减少。 提供感测机构(8a-3)以感测门的打开/关闭操作。 对应于感测机构(8a-3)的感测,驱动启动机构(8a-4)使用用于初始化的驱动机构(8a-1)开始步进电机的旋转。 初始化期间的驱动机构(8a-1)使步进电机转动,使从动构件向止动件移动。
    • 4. 发明授权
    • High precision three-dimensional alignment system for lithography, fabrication and inspection
    • 用于光刻,制造和检验的高精度三维对准系统
    • US06181097B2
    • 2001-01-30
    • US09249281
    • 1999-02-11
    • Sam Fong Yau LiHou Tee Ng
    • Sam Fong Yau LiHou Tee Ng
    • G05B1940
    • G05B19/402B82Y10/00G05B2219/37404G05B2219/45028G05B2219/50379G11B9/14Y10S977/851Y10S977/856
    • The present invention provides a high precision three-dimensional alignment system using SPM techniques and method of using the same. The system comprises a fine distance control unit for the effective three-dimensional micromovement in the nanometer range of a planar object, and proximity detection unit to monitor the alignment process. In the preferred embodiment, the fine distance control unit comprises a set of at least three strategically positioned fine distance control elements which are capable of controlled expansion and contraction in the nanometer range. The most preferred embodiment of the fine distance control element comprises a piezoelectric tube, which crystal size may be varied by varying an applied voltage. This system may be applied to microlithography, in which case the planar object is a scribing tool having a planar base with multiple tips fabricated on one surface.
    • 本发明提供使用SPM技术的高精度三维对准系统及其使用方法。 该系统包括用于平面物体的纳米范围内的有效三维微运动的精细距离控制单元和用于监视对准过程的接近检测单元。 在优选实施例中,精细距离控制单元包括能够在纳米范围内控制膨胀和收缩的至少三个策略性定位的精细距离控制元件的集合。 精细距离控制元件的最优选实施例包括压电管,晶体尺寸可以通过改变施加电压而改变。 该系统可以应用于微光刻,在这种情况下,平面物体是具有在一个表面上制造的具有多个尖端的平面基底的划线工具。
    • 5. 发明授权
    • Stepper motor automated self-test routine
    • 步进电机自动自检程序
    • US06829565B2
    • 2004-12-07
    • US10369043
    • 2003-02-14
    • Robert P. SiegelKevin E. Price
    • Robert P. SiegelKevin E. Price
    • G05B1940
    • G05B19/406G05B2219/37209G05B2219/41326G05B2219/42303G05B2219/45187
    • A printing apparatus includes a stepper motor automated self-test routine that gives an approximation of the state of the degradation of the stepper motor and/or its driven load. The test includes artificially increasing the starting frequency above normal and/or reducing the operation current below normal by a known and controllable amount to the stepper motor and tracking the level at which the motor is just able to start operating. By examining the magnitude and/or change in these levels, the remaining life and reliability of the motor can be predicted. Alternatively, the self-test routine could be used in conjunction with paper path sensors to determine the start time for a stepper motor. The start times are stored for trend analysis.
    • 一种印刷设备包括步进电机自动自检程序,其给出步进电机的劣化状态和/或其驱动负载的近似值。 该测试包括人为地增加起始频率高于正常值和/或将操作电流降低到正常值以下已知和可控量的步进电机,并跟踪电机刚刚开始运行的水平。 通过检查这些级别的大小和/或变化,可以预测电机的剩余寿命和可靠性。 或者,自检程序可以与纸张路径传感器一起使用,以确定步进电机的开始时间。 存储开始时间用于趋势分析。
    • 7. 发明授权
    • System and method for controlling a step motor in a scanner
    • 用于控制扫描仪中步进电机的系统和方法
    • US06388415B1
    • 2002-05-14
    • US09684307
    • 2000-10-06
    • Hal Huang
    • Hal Huang
    • G05B1940
    • G05B19/40G05B2219/42198
    • A method for controlling a step motor of a scanner by using three sets of parameters is provided. The three sets of parameters include a pulse count number PCN, a count base CB, and a motor constant speed interval MCSI. The method includes the follow steps. First, generate a synchronous trigger signal in correspondence with each exposure trigger signal CVTR generated by an image sensing module of the scanner and clear a base accumulator BA. Then, add the count base CB to the base accumulator in correspondence with each reference pulse. Finally, generate an asynchronous trigger signal and clear the base accumulator when the base accumulator is greater than or equal to the pulse count number PCN. Since the speed of the step motor only relates to the pulse count number PCN and the count base CB, the step motor can be controlled by only setting these parameters.
    • 提供了一种通过使用三组参数来控制扫描仪的步进电机的方法。 三组参数包括脉冲计数PCN,计数基CB和马达恒速间隔MCSI。 该方法包括以下步骤。 首先,产生与由扫描仪的图像感测模块产生的每个曝光触发信号CVTR相对应的同步触发信号,并清除基本累加器BA。 然后,将每个参考脉冲对应的计数基CB加到基本累加器。 最后,当基本累加器大于或等于脉冲计数PCN时,产生异步触发信号并清除基本累加器。 由于步进电机的速度仅与脉冲数PCN和计数基CB相关,所以步进电机只能通过设置这些参数进行控制。
    • 8. 发明授权
    • Lens controlling apparatus
    • 镜头控制装置
    • US06285154B1
    • 2001-09-04
    • US08677253
    • 1996-07-09
    • Hitoshi YasudaMasahide Hirasawa
    • Hitoshi YasudaMasahide Hirasawa
    • G05B1940
    • G05B19/40G05B2219/41101G05B2219/41326G05B2219/45178
    • A lens controlling apparatus includes a lens-driving stepping motor, a driving current forming circuit for forming a driving current waveform to be supplied to the stepping motor, an inputting circuit for inputting a stop instruction to stop the lens-driving stepping motor, a stopping circuit for performing the operation of stopping the stepping motor in accordance with the stop instruction, a phase detecting circuit for detecting the phase of the driving current waveform to be supplied to the stepping motor, and an inhibiting circuit for inhibiting the stop instruction from being executed except when the phase of the driving current waveform detected by the phase detecting circuit is a predetermined phase.
    • 透镜控制装置包括透镜驱动步进电机,用于形成要提供给步进电机的驱动电流波形的驱动电流形成电路,输入停止指示以停止透镜驱动步进电机的输入电路,停止 电路,用于根据停止指令执行停止步进电机的操作;相位检测电路,用于检测要提供给步进电机的驱动电流波形的相位;以及禁止电路,用于禁止执行停止指令 除了当由相位检测电路检测到的驱动电流波形的相位是预定相位时。
    • 9. 发明授权
    • Step motor driving device
    • 步进马达驱动装置
    • US06271641B1
    • 2001-08-07
    • US09476317
    • 1999-12-30
    • Masahiro YasoharaMasakazu Senoh
    • Masahiro YasoharaMasakazu Senoh
    • G05B1940
    • H02P8/34
    • A step-motor-driving device includes (a) a step-motor having driving-windings in plurality of phases, (b) an exciter for supplying power to excite driving-windings, (c) a position detector for detecting a position of a mover of the motor and outputs a position-detecting-signal, and (d) an excitation-timing-controller for receiving a driving-instruction-signal and a position-detecting-signal, and outputs an exciting signal to the exciter responsive to an input of one of the driving-instruction-signal and the position-detecting-signal. The excitation-timing-controller outputs the exciting signal responding an input of the driving-instruction-signal when an excitation-switch of the driving-winding responsive to the driving-instruction-signal directs torque in a direction effective for the motor to rotate in a desirable direction, and the controller outputs the exciting signal responding an input of the position-detecting-signal when the excitation-switch of the driving-winding responsive to the driving-instruction-signal directs torque in an unfavorable direction for the motor to rotate in the desirable direction. This structure allows the step-motor-driving device to be free from jumping “out of sync”.
    • 步进电机驱动装置包括:(a)具有多相驱动绕组的步进电动机,(b)用于提供动力以激励驱动绕组的励磁机,(c)位置检测器, 并且输出位置检测信号,以及(d)用于接收驱动指令信号和位置检测信号的激励定时控制器,并且响应于一个激励器向激励器输出激励信号 驱动指令信号和位置检测信号之一的输入。 励磁时序控制器响应驱动指令信号的输入而输出响应于驱动指令信号的输入的激励信号,其中响应于驱动指令信号的驱动绕组的激励开关在有效使电动机转动的方向上引导转矩 当驱动指令信号的驱动绕组的激励开关以不利的方向转动以使电机转动时,控制器输出响应于位置检测信号的输入的激励信号 在理想的方向。 该结构允许步进电动机驱动装置不跳出“不同步”。
    • 10. 发明授权
    • Abnormality detector for a motor drive system
    • 电机驱动系统的异常检测器
    • US06781341B2
    • 2004-08-24
    • US10288283
    • 2002-11-06
    • Masaki NakamichiKohji Hashimoto
    • Masaki NakamichiKohji Hashimoto
    • G05B1940
    • F02D41/221F02D31/005F02D41/0065F02D41/20F02D41/2432F02D2041/2027F02D2041/2058F02D2041/2089Y02T10/40
    • An abnormality detector for motor drive system easily detects, using a CPU, abnormality such as short circuit or disconnection in magnetic field coils of a motor, wiring, an open/close element, etc., which are controlled by a microprocessor (CPU). The open/close elements conducting an open/close operation sequentially in response to pulse outputs P1, P2 generated by the CPU, drive the magnetic field coils. Surge voltages generated upon interrupting the mentioned open/close elements are OR connected through a diode, and input to a temporary storage circuit. Then the CPU reads out, stores and resets the surge voltages using pulse edges of the pulse output P1 or P2. When any generation of the surge voltage is not stored in the temporary storage circuit, the CPU operates an abnormality alarm display.
    • 电动机驱动系统的异常检测器利用CPU容易地检测由微处理器(CPU)控制的电动机,线路,开闭元件等的磁场线圈中的短路或断线等异常。 开/关元件响应于由CPU产生的脉冲输出P1,P2依次进行打开/关闭操作,驱动磁场线圈。 在中断所述开/关元件时产生的浪涌电压通过二极管OR连接,并输入到临时存储电路。 然后,CPU使用脉冲输出P1或P2的脉冲边沿读出,存储和复位浪涌电压。 当临时存储电路中没有存储浪涌电压的任何一代时,CPU进行异常报警显示。