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1. 发明授权

US5874734A Atomic force microscope for measuring properties of dielectric and insulating layers 失效
标题翻译：用于测量介电层和绝缘层性能的原子力显微镜
公开(公告)号：US5874734A
公开(公告)日：1999-02-23
申请号：US777655
申请日：1996-12-31
申请人： Virgil B. Elings , Dennis M. Adderton , Dror Sarid
发明人： Virgil B. Elings , Dennis M. Adderton , Dror Sarid
IPC分类号： G01Q60/40 , H01J37/28
CPC分类号： G01Q60/40 , B82Y35/00 , Y10S977/851 , Y10S977/852
摘要： An atomic force microscope that has an electrically-conductive probe and tip includes a feedback control circuit for generating a substantially constant, desired Fowler-Nordheim current between the probe tip and the surface of an electrically-conductive sample having a thin dielectric or insulating film thereon. The feedback circuit maintains the desired Fowler-Nordheim current flow between the probe tip and the sample by adjusting the bias voltage applied to the probe tip, and by tracking and using the changes in the applied bias voltage to provide a measure of the thickness, electrical conductivity or other electrical property of the film.
摘要翻译：具有导电探针和尖端的原子力显微镜包括反馈控制电路，用于在探针尖端和其上具有薄介电层或绝缘膜的导电样品的表面之间产生基本恒定的期望的Fowler-Nordheim电流。反馈电路通过调整施加到探针尖端的偏置电压，并通过跟踪和使用所施加的偏置电压的变化来提供厚度测量，电气测量，保持探针尖端和样品之间所需的Fowler-Nordheim电流。电导率或其他电性能。

2. 发明授权

US06172506B2 Capacitance atomic force microscopes and methods of operating such microscopes 失效
标题翻译：电容原子力显微镜和操作这种显微镜的方法
公开(公告)号：US06172506B2
公开(公告)日：2001-01-09
申请号：US08892746
申请日：1997-07-15
申请人： Dennis M. Adderton , Virgil B. Elings
发明人： Dennis M. Adderton , Virgil B. Elings
IPC分类号： G01R2912
CPC分类号： G01Q60/34 , G01Q60/40 , G01R31/312 , Y10S977/851 , Y10S977/866
摘要： A surface of the sample is scanned in intermittent contact mode with an the AFM. The probe tip is electrically conductive and is electrically connected to a capacitance sensing circuit. The oscillation of the AFM probe modulates capacitance between probe tip and sample surface. The modulated capacitance is demodulated to yield the capacitance properties of the sample.
摘要翻译：用AFM以间歇接触模式扫描样品的表面。探针尖端是导电的并且电连接到电容感测电路。 AFM探针的振荡调制探针尖端和样品表面之间的电容。调制的电容被解调以产生样品的电容性质。

3. 发明授权

US07017398B2 Active probe for an atomic force microscope and method for use thereof 有权
标题翻译：原子力显微镜的有源探针及其使用方法
公开(公告)号：US07017398B2
公开(公告)日：2006-03-28
申请号：US10966619
申请日：2004-10-15
申请人： Dennis M. Adderton , Stephen C. Minne
发明人： Dennis M. Adderton , Stephen C. Minne
IPC分类号： G01N13/16 , G01B5/28
CPC分类号： G01Q60/34 , G01Q10/045 , G01Q10/065 , Y10S977/849 , Y10S977/851 , Y10S977/863 , Y10S977/869 , Y10S977/875 , Y10S977/881
摘要： An AFM that combines an AFM Z position actuator and a self-actuated Z position cantilever (both operable in cyclical mode and contact mode), with appropriate nested feedback control circuitry to achieve high-speed imaging and accurate Z position measurements. A preferred embodiment of an AFM for analyzing a surface of a sample in either ambient air or fluid includes a self-actuated cantilever having a Z-positioning element integrated therewith and an oscillator that oscillates the self-actuated cantilever at a frequency generally equal to a resonant frequency of the self-actuated cantilever and at an oscillation amplitude generally equal to a setpoint value. The AFM includes a first feedback circuit nested within a second feedback circuit, wherein the first feedback circuit generates a cantilever control signal in response to vertical displacement of the self-actuated cantilever during a scanning operation, and the second feedback circuit is responsive to the cantilever control signal to generate a position control signal. A Z position actuator is also included within the second feedback circuit and is responsive to the position control signal to position the sample. In operation, preferably, the cantilever control signal alone is indicative of the topography of the sample surface. In a further embodiment, the first feedback circuit includes an active damping circuit for modifying the quality factor (“Q”) of the cantilever resonance to optimize the bandwidth of the cantilever response.
摘要翻译： AFM将AFM Z位置执行器和自动Z位置悬臂（可循环模式和接触模式）两者兼容，并配有适当的嵌套反馈控制电路，实现高速成像和精确的Z位置测量。用于在环境空气或流体中分析样品表面的AFM的优选实施例包括具有与其集成的Z定位元件的自动致动悬臂和振荡器，该振荡器以大致等于自激式悬臂的谐振频率和大致等于设定值的振荡幅度。 AFM包括嵌套在第二反馈电路内的第一反馈电路，其中第一反馈电路在扫描操作期间响应于自致动悬臂的垂直位移而产生悬臂控制信号，并且第二反馈电路响应于悬臂控制信号以产生位置控制信号。 Z位置致动器还包括在第二反馈电路内，并且响应于位置控制信号来定位样品。在操作中，优选地，悬臂控制信号单独指示样品表面的形貌。在另一实施例中，第一反馈电路包括用于修改悬臂谐振的质量因子（“Q”）的主动阻尼电路，以优化悬臂响应的带宽。

4. 发明授权

US06279389B1 AFM with referenced or differential height measurement 失效
公开(公告)号：US06279389B1
公开(公告)日：2001-08-28
申请号：US09698919
申请日：2000-10-27
申请人： Dennis M. Adderton , Stephen C. Minne
发明人： Dennis M. Adderton , Stephen C. Minne
IPC分类号： G01B528
CPC分类号： G01Q60/38 , G01Q70/04 , Y10S977/849 , Y10S977/852 , Y10S977/86 , Y10S977/868 , Y10S977/874 , Y10S977/955
摘要： Thermal drift and acoustic vibrations in the AFM are reduced using a probe-based detection device that references the topography measurement of the AFM to the sample surface in the proximity of the measurement probe. A differential measurement is made between the reference probe and the measurement probe for high sensitivity roughness quantification and defect detection. Multi-probe arrays may be used for large area defect detection with immunity from thermal and acoustic noise sources.

5. 发明授权

US06941823B1 Apparatus and method to compensate for stress in a microcantilever 失效
标题翻译：用于补偿微悬臂梁中应力的装置和方法
公开(公告)号：US06941823B1
公开(公告)日：2005-09-13
申请号：US10045438
申请日：2001-11-07
申请人： Jonathan W. Lai , Hector B. Cavazos , Stephen C. Minne , Dennis M. Adderton
发明人： Jonathan W. Lai , Hector B. Cavazos , Stephen C. Minne , Dennis M. Adderton
IPC分类号： G01L1/04
CPC分类号： G01Q60/38 , G01Q70/04
摘要： A method to compensate for stress deflection in a compound microprobe that includes a substrate, a microcantilever extending outwardly from the substrate, and a film formed on the microcantilever. The method preferably comprises the steps of determining an amount of stress-induced deflection of the microcantilever, and then mounting the microprobe so as to compensate for the stress-induced deflection. The mounting step preferably includes selecting a compensation piece based upon the amount of stress-induced deflection, where the compensation piece is a wedge generally aligning the microcantilever with a deflection detection apparatus. In general, the step of selecting the compensation piece includes correcting an angle between a longitudinal axis of the microcantilever and the substrate so as to insure that light reflected from the microcantilever during operation contacts a detector of a deflection detection apparatus. The preferred embodiment is also directed to a microprobe assembly having a microcantilever and a substrate coupled to a support that includes a compensation piece disposed intermediate the support and the substrate. Again, the compensation piece is configured to compensate for an amount of static deflection of the microcantilever.
摘要翻译：一种用于补偿复合微探针中的应力偏转的方法，其包括基底，从基底向外延伸的微悬臂梁以及形成在微悬臂梁上的膜。该方法优选地包括以下步骤：确定微悬臂梁的应力引起的偏转量，然后安装微探针以便补偿应力引起的偏转。安装步骤优选地包括基于应力引起的偏转量来选择补偿件，其中补偿件是通常将微型悬臂与偏转检测装置对准的楔形件。通常，选择补偿件的步骤包括校正微悬臂梁的纵向轴线和基板之间的角度，以确保在操作期间从微型悬臂梁反射的光接触偏转检测装置的检测器。优选实施例还涉及一种微探针组件，该微探针组件具有微型悬臂梁和联接到支撑件的基板，该支撑件包括设置在支撑件和基板之间的补偿件。再次，补偿件被配置为补偿微悬臂梁的静态挠曲量。

6. 发明授权

US06189374B1 Active probe for an atomic force microscope and method of use thereof 有权
标题翻译：原子力显微镜的有源探针及其使用方法
公开(公告)号：US06189374B1
公开(公告)日：2001-02-20
申请号：US09280160
申请日：1999-03-29
申请人： Dennis M. Adderton , Stephen C. Minne
发明人： Dennis M. Adderton , Stephen C. Minne
IPC分类号： G01B528
CPC分类号： G01Q60/34 , G01Q10/045 , G01Q10/065 , Y10S977/849 , Y10S977/851 , Y10S977/863 , Y10S977/869 , Y10S977/875 , Y10S977/881
摘要： An AFM that combines an AFM Z position actuator and a self-actuated Z position cantilever (both operable in cyclical mode and contact mode), with appropriate nested feedback control circuitry to achieve high-speed imaging and accurate Z position measurements. A preferred embodiment of an AFM for analyzing a surface of a sample includes a self-actuated cantilever having a Z-positioning element integrated therewith and an oscillator that oscillates the self-actuated cantilever at a frequency generally equal to a resonant frequency of the self-actuated cantilever and at an oscillation amplitude generally equal to a setpoint value. The AFM includes a first feedback circuit nested within a second feedback circuit, wherein the first feedback circuit generates a cantilever control signal in response to vertical displacement of the self-actuated cantilever during a scanning operation, and the second feedback circuit is responsive to the cantilever control signal to generate a position control signal. A Z position actuator is also included within the second feedback circuit and is responsive to the position control signal to position the sample. In operation, preferably, the cantilever control signal alone is indicative of the topography of the sample surface. In a further embodiment, the first feedback circuit includes an active damping circuit for modifying the quality factor (“Q”) of the cantilever resonance to optimize the bandwidth of the cantilever response.
摘要翻译： AFM将AFM Z位置执行器和自动Z位置悬臂（可循环模式和接触模式）两者兼容，并配有适当的嵌套反馈控制电路，实现高速成像和精确的Z位置测量。用于分析样品表面的AFM的优选实施例包括具有与其集成的Z定位元件的自动致动悬臂，以及振荡器，该振荡器以大体上等于自身的共振频率的频率振荡自动致动悬臂，并且在大致等于设定值的振荡幅度下。 AFM包括嵌套在第二反馈电路内的第一反馈电路，其中第一反馈电路在扫描操作期间响应于自致动悬臂的垂直位移而产生悬臂控制信号，并且第二反馈电路响应于悬臂控制信号以产生位置控制信号。 Z位置致动器还包括在第二反馈电路内，并且响应于位置控制信号来定位样品。在操作中，优选地，悬臂控制信号单独指示样品表面的形貌。在另一实施例中，第一反馈电路包括用于修改悬臂谐振的质量因子（“Q”）的主动阻尼电路，以优化悬臂响应的带宽。

7. 发明授权

US07920165B2 Video training system 有权
标题翻译：视频培训系统
公开(公告)号：US07920165B2
公开(公告)日：2011-04-05
申请号：US11235882
申请日：2005-09-26
申请人： Dennis M. Adderton
发明人： Dennis M. Adderton
IPC分类号： G02B27/14 , H04N7/18
CPC分类号： H04N7/181 , A63B24/0003 , A63B2071/0661 , A63B2071/0666 , A63B2220/806 , A63B2225/12 , G09B19/0015 , G09B19/0038
摘要： A self-viewing environment and an apparatus enabling unrestricted movement of a subject within the self-viewing environment are disclosed. A subject wears a head mounted display that receives a video signal by wireless transmission. The subject is positioned within the field of view of a video camera that sources a video image for transmission to the subject. Video mirror-imaging and signal-processing are employed to adapt the perceived self-viewing environment for the benefit of the subject.
摘要翻译：公开了一种自我观看环境和能够在自我观看环境内对受试者进行无限制运动的装置。受试者佩戴头戴显示器，通过无线传输接收视频信号。被摄体位于摄像机的视场内，该视频摄像机来源于视频图像以传输到被摄体。采用视频镜像和信号处理来调整所感知的自我观看环境以获得受试者的利益。

8. 发明授权

US06637276B2 Tire sensor and method 有权
公开(公告)号：US06637276B2
公开(公告)日：2003-10-28
申请号：US09844193
申请日：2001-04-27
申请人： Dennis M. Adderton , Stephen C. Minne
发明人： Dennis M. Adderton , Stephen C. Minne
IPC分类号： G01L510
CPC分类号： G01L5/161
摘要： A tire sensor assembly that is embedded in an elastomeric tire at a particular radial depth inwardly from a contact patch of the tire includes a flexible generally pyramid-shaped body and a pair of first strain sensors disposed on first opposed faces of the pyramid-shaped body, the first strain sensors detecting a force in a first direction. In addition, the assembly includes a pair of second strain sensors disposed on second opposed faces of the pyramid-shaped body, the second strain sensors detecting a force in a second direction. Moreover, each face of the first and second opposed faces is non-planar. Preferably, the first and second opposed faces of the pyramid-shaped body are curved and generally symmetrical about an axis extending longitudinally through the apex of the body so as to allow adjustment of the sensitivity of the sensor assembly generally independent of the radial depth. In one example, the first and second opposed faces are concave such that the sensor assembly is more sensitive to a tensile strain and less sensitive to a shear strain.

9. 发明授权

US07204131B2 Dynamic activation for an atomic force microscope and method of use thereof 有权
标题翻译：原子力显微镜的动态激活及其使用方法
公开(公告)号：US07204131B2
公开(公告)日：2007-04-17
申请号：US11415602
申请日：2006-05-02
申请人： Dennis M. Adderton , Stephen C. Minne
发明人： Dennis M. Adderton , Stephen C. Minne
IPC分类号： G01B5/28 , G01N13/16
CPC分类号： G01Q10/065 , G01Q60/34 , Y10S977/85 , Y10S977/86 , Y10S977/863 , Y10S977/881
摘要： A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or another conventional technique. The detected deflection of the cantilever is subsequently demodulated to give a signal proportional to the amplitude of oscillation of the cantilever, which is thereafter used to drive the cantilever.
摘要翻译：扫描探针显微镜方法和装置，其使用主动驱动技术来修改成像动力学，以优化幅度检测的带宽。偏转优选地通过包括激光器和光电检测器的光学检测系统来测量，其通过光束反弹技术或其他常规技术来测量悬臂偏转。随后解调所检测到的悬臂的偏转，以产生与悬臂的振荡幅度成比例的信号，此后用于驱动悬臂。

10. 发明授权

US07036357B2 Dynamic activation for an atomic force microscope and method of use thereof 有权
公开(公告)号：US07036357B2
公开(公告)日：2006-05-02
申请号：US10752235
申请日：2004-01-06
申请人： Dennis M. Adderton , Stephen C. Minne
发明人： Dennis M. Adderton , Stephen C. Minne
IPC分类号： G01B5/28 , G01N13/16
CPC分类号： G01Q10/065 , G01Q60/34 , Y10S977/85 , Y10S977/86 , Y10S977/863 , Y10S977/881
摘要： A scanning probe microscope method and apparatus that modifies imaging dynamics using an active drive technique to optimize the bandwidth of amplitude detection. The deflection is preferably measured by an optical detection system including a laser and a photodetector, which measures cantilever deflection by an optical beam bounce technique or another conventional technique. The detected deflection of the cantilever is subsequently demodulated to give a signal proportional to the amplitude of oscillation of the cantilever, which is thereafter used to drive the cantilever.

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