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1. 发明申请

US20040189290A1 In-situ metalization monitoring using eddy current measurements during the process for removing the film 有权
标题翻译：在去除薄膜的过程中使用涡流测量进行原位金属化监测
公开(公告)号：US20040189290A1
公开(公告)日：2004-09-30
申请号：US10623953
申请日：2003-07-21
申请人： KLA-Tencor Corporation
发明人： Kurt R. Lehman , Shing M. Lee , Walter Halmer Johnson III , John Fielden
IPC分类号： G01B007/06 , G01N027/72
CPC分类号： G01N27/72
摘要： A method for measuring conductance of a sample using an eddy current probe with a sensing coil. The method includes N repetitions of measuring first and second voltage pairs including in-phase and quadrature components of an induced AC voltage in the sensing coil, calibrating the first signal based on the measured second signal at a different separation from the sample and reference material, determining a conductance function relating conductance with location along the selected curve, processing the calibrated first voltage pairs to generate a lift-off curve, determining an intersection voltage pair representing intersection of the lift-off curve with a selected curve, and determining the conductance of the sample from the intersection voltage pair and the conductance function.
摘要翻译：使用具有感测线圈的涡流探头测量样品的电导率的方法。该方法包括测量包括感测线圈中的感应AC电压的同相和正交分量的第一和第二电压对的N次重复，基于在与样本和参考材料不同的分离处测量的第二信号来校准第一信号，确定与所选择的曲线相关的电导与位置的电导函数，处理校准的第一电压对以产生剥离曲线，确定表示取出曲线与选定曲线的交点的交叉电压对，以及确定来自交点电压对的样本和电导函数。

2. 发明申请

US20040140797A1 Method and apparatus for measuring object thickness 有权
标题翻译：测量物体厚度的方法和装置
公开(公告)号：US20040140797A1
公开(公告)日：2004-07-22
申请号：US10685210
申请日：2003-10-14
申请人： Applied Materials, Inc.
发明人： Lawrence C. Lei , Siqing Lu , Yu Chang , Cecilia Martner , Quyen Pham , Yu Ping Gu , Joel Huston , Paul Smith , Gabriel Lorimer Miller
IPC分类号： G01B007/06 , G01N027/72
CPC分类号： G01B7/105
摘要： A method and apparatus are provided for measuring the thickness of a test object. The apparatus includes an eddy current sensor having first and second sensor heads. The sensor heads are positioned to have a predetermined gap therebetween for passage by at least a portion of the test object through the gap. The sensor heads make measurements at given sampling locations on the test object as the test object is moved through the gap. The apparatus also includes a position sensing mechanism to determine positions of the sampling locations on the test object. The apparatus also includes an evaluation circuit in communication with the eddy current sensor and to the position sensing mechanism for determining the thickness of the test object at the sampling locations.
摘要翻译：提供了一种用于测量被测物体的厚度的方法和装置。该装置包括具有第一和第二传感器头的涡流传感器。传感器头被定位成在其间具有预定的间隙，以通过该测试对象的至少一部分通过间隙。当测试对象移动穿过间隙时，传感器头在测试对象上的给定采样位置进行测量。该装置还包括位置检测机构，用于确定测试对象上的采样位置的位置。该装置还包括与涡流传感器和位置感测机构通信的评估电路，用于确定采样位置处的测试对象的厚度。

3. 发明申请

US20040130322A1 Monitoring wall thickness 有权
标题翻译：监测壁厚
公开(公告)号：US20040130322A1
公开(公告)日：2004-07-08
申请号：US10739551
申请日：2003-12-18
发明人： Paulus Carolus Nicolaas Crouzen
IPC分类号： G01B007/06 , G01N027/82
CPC分类号： G01B7/10
摘要： A method for monitoring wall thickness of an object having an electrically conductive wall, using a pulsed eddy current probe comprising a transmitter means and a receiver means, which method comprises selecting an inspection location on the wall; at a plurality of inspection times nullm (mnull2, . . . ,M), arranging the probe in a predetermined position relative to the inspection location, inducing transient eddy currents in the object by activating the transmitter means, recording signals Vm with the receiver means; determining, for each inspection time nullm, a temperature Tm indicative of the temperature of the object at the inspection location; and determining, from each of the signals Vm, a wall thickness dm pertaining to inspection time nullm, wherein the temperature Tm is taken into account.
摘要翻译：一种用于监测具有导电壁的物体的壁厚的方法，使用包括发射机装置和接收装置的脉冲涡流探针，该方法包括选择墙上的检查位置; 在多个检查次数（m = 2，...，M）中，将探头设置在相对于检查位置的预定位置，通过激活发射器装置来引起物体中的瞬态涡流，记录信号Vm与接收方式对于每个检查时间，确定表示检查位置处的物体的温度的温度Tm; 并且从每个信号Vm确定与检查时间总数相关的壁厚度dm，其中考虑温度Tm。

4. 发明申请

US20030201769A1 Method for monitoring a metal layer during chemical mechanical polishing 有权
标题翻译：在化学机械抛光期间监测金属层的方法
公开(公告)号：US20030201769A1
公开(公告)日：2003-10-30
申请号：US10446367
申请日：2003-05-27
申请人： Applied Materials, Inc.
发明人： Hiroji Hanawa , Nils Johansson , Boguslaw Swedek , Manoocher Birang
IPC分类号： G01B007/06 , G01N027/72
CPC分类号： B24B37/013 , B24B37/205 , B24B49/02 , B24B49/105 , B24B49/12 , G01B7/105
摘要： A sensor for monitoring a conductive film in a substrate during chemical mechanical polishing generates an alternating magnetic field that impinges a substrate and induces eddy currents. The sensor can have a core, a first coil wound around a first portion of the core and a second coil wound around a second portion of the core. The sensor can be positioned on a side of the polishing surface opposite the substrate. The sensor can detect a phase difference between a drive signal and a measured signal.
摘要翻译：用于在化学机械抛光期间监测衬底中的导电膜的传感器产生撞击衬底并引起涡流的交变磁场。传感器可以具有芯，围绕芯的第一部分缠绕的第一线圈和缠绕在芯的第二部分上的第二线圈。传感器可以位于与衬底相对的抛光表面的一侧。传感器可以检测到驱动信号和测量信号之间的相位差。

5. 发明申请

US20030169035A1 Determining a surface profile of an object 有权
标题翻译：确定对象的曲面轮廓
公开(公告)号：US20030169035A1
公开(公告)日：2003-09-11
申请号：US10375804
申请日：2003-02-26
发明人： Paulus Carolus Nicolaas Crouzen
IPC分类号： G01N027/82 , G01B007/06
CPC分类号： G01N27/9086 , G01B7/28 , G01B7/281 , G01N27/902
摘要： The invention relates to a method of determining a surface profile of an electrically conductive object, using a probe having a transmitter/receiver arrangement for inducing transient eddy currents in the object, for providing a signal indicative of a magnetic field property, the method having the following steps: (a) selecting a calibration point on the surface, and a number of calibration positions of the transmitter/receiver arrangement; (b) determining a set of calibration values by determining, for each of the calibration positions, a characteristic value of the signal generated in the receiver in response to transient eddy currents induced in the object by the transmitter, wherein the characteristic value relates to the amplitude of the signal; (c) determining a calibration function which relates the calibration values to the relative location of calibration position and calibration point; (d) selecting a set of inspection points on the surface of the object, and a set of corresponding inspection positions of the transmitter/receiver arrangement; (e) determining a set of inspection values by determining, for each of the inspection positions, a characteristic value of the signal generated in the receiver in response to transient eddy currents induced in the object by the transmitter; and (f) determining the surface profile by interpreting the set of inspection values, using the calibration function, wherein the relative location of inspection points and corresponding inspection positions is derived.
摘要翻译：本发明涉及一种使用具有用于在物体中感应瞬态涡流的发射器/接收器装置的探针来确定导电物体的表面轮廓的方法，用于提供表示磁场特性的信号，该方法具有以下步骤：（a）选择表面上的校准点以及发射器/接收器装置的多个校准位置; （b）通过针对每个校准位置确定响应于由发射器在物体中感应的瞬态涡流而在接收机中产生的信号的特征值来确定一组校准值，其中该特征值与信号幅度; （c）确定将校准值与校准位置和校准点的相对位置相关联的校准功能; （d）在物体的表面上选择一组检查点，以及发射器/接收器装置的一组对应的检查位置; （e）通过针对每个所述检查位置确定在所述接收器中响应于由所述发射器在所述物体中感应的瞬态涡流而产生的信号的特征值来确定一组检查值; 以及（f）使用所述校准功能来解释所述检查值集合来确定所述表面轮廓，其中导出了所述检查点和对应的检查位置的相对位置。

6. 发明申请

US20030066200A1 NON-CONTACT SHEET SENSING SYSTEM AND RELATED METHOD 有权
标题翻译：非接触片传感系统及相关方法
公开(公告)号：US20030066200A1
公开(公告)日：2003-04-10
申请号：US09974358
申请日：2001-10-10
发明人： Ake Arvid Hellstrom
IPC分类号： G01B007/06
CPC分类号： G01B21/30 , B65H2511/13 , G01B21/08 , G01B2210/42 , G01B2210/44 , G01N21/89 , G01N33/346 , Y10S33/01 , Y10S33/02 , B65H2220/11
摘要： A non-contact system for sensing a property of a passing web of material includes first and second sensors positioned on opposite sides of the web. The opposing sensors are repelled from the web and each other by gas bearings formed between the sensors and the web and attracted to each other by one or more polarized magnets embedded in the sensors. The resultant net force properly spaces the sensors from the web to ensure reliable and accurate sensing. The repelling force enables the sensors to react substantially instantaneously to changes in the pass line of the web. An automatic actuator/retractor can be provided to withdraw the sensors extend the sensors to or retract the sensors from adjacent the feed path.
摘要翻译：用于感测通过的材料纤维网的性质的非接触系统包括位于幅材的相对侧上的第一和第二传感器。相对的传感器通过在传感器和网之间形成的气体轴承彼此排斥，并通过一个或多个嵌入在传感器中的极化磁体相互吸引。所得的净力将传感器从腹板适当地放置，以确保可靠和准确的感测。排斥力使得传感器能够基本上瞬时地响应幅材的通过线的变化。可以提供自动执行器/牵开器来撤回传感器将传感器从相邻的进给路径延伸或缩回传感器。

7. 发明申请

US20010022212A1 Gage thickness measurement by use of inductive sensors 失效
标题翻译：使用电感式传感器测量厚度
公开(公告)号：US20010022212A1
公开(公告)日：2001-09-20
申请号：US09780919
申请日：2001-02-09
发明人： Kelvin L. Kapteyn , James Michler
IPC分类号： C04B033/32 , B26D003/00 , G01B007/06
CPC分类号： B26D3/08 , G01B7/10 , Y10T83/04 , Y10T156/1052
摘要： A measuring gage for determining the thickness of a non-metallic material utilizes an inductive sensor positioned on one side of the material to be measured and a metallic object placed on the opposite side. The output of the sensor is used to determine the distance between the sensor and the metallic object, and hence the thickness of the material. The movement of the sensor and the metallic object can be computer controlled to map the thickness of the material along a predetermined path and produce a cross-sectional thickness profile. The output of the sensor can be used in conjunction with a computer controller responsible for adjusting the size of a score line to prepare an airbag deployment section in a vehicle trim panel.
摘要翻译：用于确定非金属材料厚度的测量计使用位于被测量材料的一侧的感应传感器和放置在相对侧上的金属物体。传感器的输出用于确定传感器和金属物体之间的距离，从而确定材料的厚度。传感器和金属物体的运动可以被计算机控制，以沿着预定路径映射材料的厚度并产生横截面厚度分布。传感器的输出可以与计算机控制器结合使用，计算机控制器负责调整刻痕线的尺寸，以准备车辆装饰板中的气囊展开部分。

8. 发明申请

US20040119468A1 METHOD AND APPARATUS FOR METROLOGICAL PROCESS CONTROL IMPLEMENTING COMPLIMENTARY SENSORS 失效
标题翻译：方法和装置实施综合传感器的方法过程控制
公开(公告)号：US20040119468A1
公开(公告)日：2004-06-24
申请号：US10328884
申请日：2002-12-23
申请人： LAM RESEARCH CORP.
发明人： Yehiel Gotkis , Rodney Kistler , Aleksander Owczarz , David Hemker , Nicolas J. Bright
IPC分类号： G01B007/06 , G01R033/12
CPC分类号： H01L22/26
摘要： A method for detecting a thickness of a layer of a wafer is provided. The method includes defining a particular radius of a wafer carrier configured to engage the wafer to be processed. The method also includes providing a plurality of sensors configured to create a set of complementary sensors. Further included in the method is distributing the plurality of sensors along the particular radius within the wafer carrier such that each sensor of the plurality of sensors is out of phase with an adjacent sensor by a same angle. The method also includes measuring signals generated by the plurality of sensors. Further included is averaging the signals generated by the plurality of sensors so as to generate a combination signal. The averaging is configured to remove noise from the combination signal such that the combination signal is capable of being correlated to identify the thickness of the layer.
摘要翻译：提供了一种用于检测晶片层的厚度的方法。该方法包括限定配置成接合要处理的晶片的晶片载体的特定半径。该方法还包括提供配置成创建一组互补传感器的多个传感器。该方法还包括沿着晶片载体内的特定半径分布多个传感器，使得多个传感器中的每个传感器与相邻的传感器相位相同角度。该方法还包括测量由多个传感器产生的信号。还包括对由多个传感器产生的信号进行平均以产生组合信号。平均化被配置为从组合信号去除噪声，使得组合信号能够被相关联以识别层的厚度。

9. 发明申请

US20040051522A1 Techniques for electrically characterizing tunnel junction film stacks with little or no processing 有权
标题翻译：用于电化学表征隧道结膜堆叠的技术，具有很少或没有加工
公开(公告)号：US20040051522A1
公开(公告)日：2004-03-18
申请号：US10244766
申请日：2002-09-16
申请人： International Business Machines Corporation
发明人： Daniel Christopher Worledge , Philip Louis Trouilloud , David William Abraham , Joerg Dietrich Schmid
IPC分类号： G01B007/06 , G01R033/12
CPC分类号： G01R33/093 , B82Y25/00 , G01R31/2648 , G01R33/098 , Y10S977/852 , Y10S977/854
摘要： Probes are electrically connected to a surface of a tunnel junction film stack comprising a free layer, a tunnel barrier, and a pinned layer. Resistances are determined for a variety of probe spacings and for a number of magnetizations of one of the layers of the stack. The probe spacings are a distance from a length scale, which is related to the Resistance-Area (RA) product of the tunnel junction film stack. Spacings from as small as possible to about 40 times the length scale are used. Beneficially, the smallest spacing between probes used during a resistance measurement is under 100 microns. A measured in-plane MagnetoResistance (MR) curve is determined from the nullhighnull and nulllownull resistances that occur at the two magnetizations of this layer. The RA product, resistances per square of the free and pinned layers, and perpendicular MR are determined through curve fitting.
摘要翻译：探针电连接到包括自由层，隧道势垒和钉扎层的隧道结膜堆叠的表面。针对各种探针间距和堆叠层之一的多次磁化确定了电阻。探头间距是距离隧道结膜叠层的电阻 - 面积（RA）乘积的长度尺度的距离。使用从尽可能小到约40倍长度尺度的间距。有利地，在电阻测量期间使用的探针之间的最小间距小于100微米。从该层的两次磁化发生的“高”和“低”电阻确定测量的面内磁阻（MR）曲线。通过曲线拟合来确定RA乘积，每平方的自由和被钉扎层的电阻和垂直MR。

10. 发明申请

US20040050189A1 Measurement configuration including a vehicle and method for performing measurements with the measurement configuration at various locations 有权
标题翻译：包括车辆的测量配置和用于在各个位置用测量配置进行测量的方法
公开(公告)号：US20040050189A1
公开(公告)日：2004-03-18
申请号：US10638599
申请日：2003-08-11
发明人： Michael Abraham , Eckhard Marx
IPC分类号： G01B005/02 , G01B005/06 , G01B007/02 , G01B007/06
CPC分类号： H01L21/67253 , H01L21/67772
摘要： A measurement device, i.e. a metrology tool, and a vehicle are combined to provide a mobile metrology in a fabrication facility. Peripheral equipment such as a device transfer unit, for, e.g., FOUPs in semiconductor manufacturing, an electronic control system with, e.g., a PC, monitor, and keyboard and optionally a vacuum pump is also provided in module frames of the vehicle. The measurement configuration particularly reduces bottleneck situations in equipment qualifying of processing tools during fast ramp-up phases of, e.g., semiconductor manufacturing facilities, thereby saving costs. The construction is based on PGVs or AGVs and allows a fast operation directly at the location of a processing tool. With the possible exception of power supply or operator control, the measurement configuration can operate fully autonomously.
摘要翻译：测量装置，即计量工具和车辆被组合以在制造设施中提供移动计量。诸如设备传送单元的外围设备，例如用于半导体制造中的FOUP，具有例如PC，监视器和键盘的电子控制系统以及可选的真空泵也被提供在车辆的模块框架中。测量配置特别降低了例如半导体制造设备的快速上升阶段期间加工工具的设备合格性中的瓶颈情况，从而节省成本。该结构基于PGV或AGV，并允许在加工工具的位置直接快速操作。除了电源或操作员控制之外，测量配置可以完全自主运行。

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