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    • 2. 发明授权
    • Oscillator and method of making for atomic force microscope and other applications
    • 振荡器和制造原子力显微镜等应用的方法
    • US07340944B2
    • 2008-03-11
    • US11506970
    • 2006-08-18
    • Arthur BeyderFrederick Sachs
    • Arthur BeyderFrederick Sachs
    • G01B5/28
    • G01Q10/045G01Q60/38Y10T29/49Y10T29/49007Y10T74/10
    • A device having an oscillator such as a sensor for use in an atomic force microscope. A pair of co-axial members interconnect support structure and the oscillator for torsionally suspending the oscillator. The co-axial members are portions of a layer of silicon nitride or other material that is connected to the oscillator and support structure, which are composed of silicon or other material.A process for making a device which includes an oscillator, which includes depositing on silicon or other first material a layer of silicon nitride or other second material, forming in the first material a support structure and the oscillator, including applying an etchant which is selective for the first material to etch all the way through the first material and leave the second material substantially unetched to thereby form the at least one flexible hinge of the second material.
    • 具有诸如用于原子力显微镜的传感器的振荡器的装置。 一对同轴构件互连支撑结构和振荡器,用于扭转振荡器的悬挂。 共轴构件是连接到由硅或其它材料构成的振荡器和支撑结构的氮化硅或其它材料层的部分。 一种制造包括振荡器的方法,该振荡器包括在硅或其它第一材料上沉积氮化硅或其它第二材料层,在第一材料中形成支撑结构和振荡器,包括施加选择性的蚀刻剂 所述第一材料一直蚀刻通过所述第一材料并且使所述第二材料基本上未被蚀刻,从而形成所述第二材料的所述至少一个柔性铰链。
    • 5. 发明申请
    • Mechanical oscillator system
    • 机械振荡器系统
    • US20060225526A1
    • 2006-10-12
    • US10520926
    • 2003-07-10
    • Gideon Levingston
    • Gideon Levingston
    • B06B3/02
    • G04B17/066F16F1/3665G04B17/063G04B17/227Y10T74/10
    • A mechanical oscillator system comprising a balance wheel and a spiral or helicoidal balance spring for use in horological mechanisms or other precision instruments. The balance spring is made of a non-magnetic composite, polymer, carbon or ceramic material, preferably a composite material of carbon fibres in a polymer, carbon or ceramic matrix, and the balance wheel is made from a non-magnetic ceramic. The values of the thermal expansion coefficients for the balance spring and balance wheel are similar, very small and stable over a wide temperature range. The expansion coefficients in the axial sense of the spring and of the balance wheel are of opposite sign and they compensate one another. The density of these materials is smaller than that of the currently used metals. Through this combination of materials it is possible to obtain significant advantages and a higher level of accuracy and stability compared with metal oscillator systems.
    • 一种机械振荡器系统,包括摆轮和用于钟表机构或其他精密仪器的螺旋或螺旋平衡弹簧。 平衡弹簧由非磁性复合材料,聚合物,碳或陶瓷材料制成,优选在聚合物,碳或陶瓷基体中的碳纤维的复合材料,并且所述摆轮由非磁性陶瓷制成。 平衡弹簧和摆轮的热膨胀系数值在很宽的温度范围内非常小,稳定。 弹簧和摆轮轴向的膨胀系数是相反的,它们相互补偿。 这些材料的密度小于目前使用的金属的密度。 通过这种材料的组合,与金属振荡器系统相比,可以获得显着的优点和更高的精度和稳定性。
    • 7. 发明授权
    • Supersonic vibration driven motor device
    • US4325264A
    • 1982-04-20
    • US133309
    • 1980-03-24
    • Toshiiku Sashida
    • Toshiiku Sashida
    • F16H31/00H01L41/09H02N2/16F16H27/02F16H29/02
    • H02N2/026F16H31/00H02N2/0065H02N2/103Y10T74/10Y10T74/1526Y10T74/1529Y10T74/1587Y10T74/1856
    • A supersonic vibration driven motor comprising a supersonic oscillator and a mass rotationally driven thereby. The oscillator is provided with a vibration disc secured thereto on an end face thereof opposite to the mass to be driven. The mass is integrally formed with a plurality of plate-shaped resilient vibratory pieces annularly arranged on the end face opposite to the oscillator and axially extending at a predetermined angle of inclination relative to the axis of the mass, the vibration disc and vibratory pieces being located so as to come in contact with each other at their end portions, whereby vibratory displacement of the supersonic oscillator is transformed into rotational movement of the mass by way of flexible deformation of the vibratory pieces. Alternatively, the resilient vibratory pieces may be formed integrally with the vibration disc. A plurality of supersonic oscillators may be annularly arranged and located so as to come in contact with the end face of the mass so that operational phases of the respective supersonic oscillators have a predetermined phase relationship ensuring even and smooth rotation. A plurality of supersonic oscillators integrally formed with vibratory pieces and arranged in linear alignment may be located so as to come in contact with a mass to be linearly driven, whereby vibratory displacement of the supersonic oscillators is transformed into linear movement of the mass by way of flexible deformation of the vibratory pieces.
    • 9. 发明申请
    • Mechanical resonators fabricated out of bulk-solidifying amorphous metal alloys
    • 机械谐振器由非晶态金属合金体固化制成
    • US20080118759A1
    • 2008-05-22
    • US11562058
    • 2006-11-21
    • David M. Korpi
    • David M. Korpi
    • G01H13/00
    • G10G7/02C22C45/10G10K11/02Y10T74/10Y10T428/31678
    • The use of bulk-solidifying amorphous metal alloys, frequently called “liquid metals”, are disclosed as a preferred material of construction for the manufacture of mechanical resonators, such as mechanical resonators utilized in the following: systems using tuning forks and variants of tuning forks, inertial microbalances, vibrating level detectors, vibrating viscosity and rheology measuring instruments, vibrating tube meters, such as Coriolis mass flow meters, vibrating structure gyroscopes, vortex flow meters, sonotrodes for various applications such as welding and medical applications, and piezoelectric activated mechanical resonators. A method of attaining high mechanical Q factors, sensitivity, elasticity, hardness, and high specific strength properties offered by the use of bulk-solidifying amorphous metal alloys in the manufacture of mechanical resonators is disclosed.
    • 公开了通常称为“液态金属”的大块固化非晶态金属合金的使用,作为用于制造机械谐振器的优选材料,例如在以下使用的机械谐振器:使用调谐叉和调谐叉变体的系统 ,惯性微量平衡,振动水平探测器,振动粘度和流变测量仪器,振动管仪,如科里奥利质量流量计,振动结构陀螺仪,涡街流量计,用于各种应用如焊接和医疗应用的超声波,以及压电激活机械谐振器 。 公开了一种在制造机械谐振器中获得高机械Q因子,灵敏度,弹性,硬度和高比强度特性的方法。