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1. 发明授权

US06999614B1 Power assisted automatic supervised classifier creation tool for semiconductor defects 有权
标题翻译：用于半导体缺陷的功率自动监控分类器创建工具
公开(公告)号：US06999614B1
公开(公告)日：2006-02-14
申请号：US09724633
申请日：2000-11-28
申请人： David Bakker , Saibal Banerjee , Ian R. Smith
发明人： David Bakker , Saibal Banerjee , Ian R. Smith
IPC分类号： G06K9/62
CPC分类号： G06T7/0004 , G06T2207/10056 , G06T2207/20081 , G06T2207/20092 , G06T2207/30148
摘要： A method and system that optionally allows a user to view image defects organized by natural groupings based on features of the images. The natural groupings make it easier for the user to organize some or all of the images into classes in a training set of images. A feature vector is extracted from each image in the training set and stored, along with its user-specified class, for use by an automatic classifier software module. The automatic classifier uses the stored feature vectors and classes to automatically classify images not in the training set. If the automatically classified images do not match images manually classified by the user, the user modifies the training set until a better result is obtained from the automatic classifier. The system can provide feedback to an inspection system designed to aid in the setup and fine-tuning of the inspection system.
摘要翻译：一种方法和系统，其可选地允许用户基于图像的特征来查看由自然分组组织的图像缺陷。自然分组使用户更容易将一些或所有图像组织成训练图像组中的类。从训练集中的每个图像中提取特征向量，并与其用户指定的类一起存储供自动分类器软件模块使用。自动分类器使用存储的特征向量和类自动分类不在训练集中的图像。如果自动分类的图像与用户手动分类的图像不匹配，则用户修改训练集，直到从自动分类器获得更好的结果。该系统可以向设计用于辅助检查系统的设置和微调的检查系统提供反馈。

2. 发明授权

US06590703B2 Optical system for scanning microscope 失效
标题翻译：用于扫描显微镜的光学系统
公开(公告)号：US06590703B2
公开(公告)日：2003-07-08
申请号：US09906985
申请日：2001-07-16
申请人： Sang-Il Park , Ian R. Smith
发明人： Sang-Il Park , Ian R. Smith
IPC分类号： G02B2118
CPC分类号： G01Q20/02 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光学路径提供样品的光学轴向视图和光学斜视图，每个光学路径通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

3. 发明授权

US06265718B1 Scanning probe microscope with scan correction 有权
标题翻译：扫描探针显微镜扫描校正
公开(公告)号：US06265718B1
公开(公告)日：2001-07-24
申请号：US09561448
申请日：2000-04-28
申请人： Sang-Il Park , Ian R. Smith
发明人： Sang-Il Park , Ian R. Smith
IPC分类号： H01J3700
CPC分类号： G01Q70/02 , G01Q30/025 , G01Q30/04 , G02B21/002 , G02B21/26 , Y10S977/85 , Y10S977/851
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光学路径提供样品的光学轴向视图和光学斜视图，每个光学路径通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

4. 发明授权

US6130427A Scanning probe microscope with multimode head 失效
标题翻译：带多模头的扫描探针显微镜
公开(公告)号：US6130427A
公开(公告)日：2000-10-10
申请号：US828771
申请日：1997-04-01
申请人： Sang-Il Park , Frederick I. Linker , Ian R. Smith , Michael Kirk , John Alexander , Sung Park
发明人： Sang-Il Park , Frederick I. Linker , Ian R. Smith , Michael Kirk , John Alexander , Sung Park
IPC分类号： G01Q30/04 , G01N23/00 , G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q30/20 , G01Q60/10 , G01Q70/02 , G01Q70/10 , G01R31/302 , G02B21/00 , G02B21/18 , G02B21/26 , G21K7/00 , H01J37/26
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光学路径提供样品的光学轴向视图和光学斜视图，每个光学路径通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

5. 发明授权

US6057547A Scanning probe microscope with scan correction 有权
标题翻译：扫描探针显微镜扫描校正
公开(公告)号：US6057547A
公开(公告)日：2000-05-02
申请号：US208733
申请日：1998-12-09
申请人： Sang-Il Park , Ian R. Smith
发明人： Sang-Il Park , Ian R. Smith
IPC分类号： G01B21/30 , G01Q30/02 , G01Q30/04 , G01Q60/00 , G01Q70/02 , G02B21/00 , G02B21/26 , G21K5/10 , H01J37/00 , H01J37/20 , H01J37/22
CPC分类号： G01Q70/02 , B82Y35/00 , G01Q30/025 , G01Q30/04 , G02B21/002 , G02B21/26 , Y10S977/85 , Y10S977/851
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光学路径提供样品的光学轴向视图和光学斜视图，每个光学路径通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

6. 发明授权

US5444244A Piezoresistive cantilever with integral tip for scanning probe microscope 失效
标题翻译：用于扫描探针显微镜的压阻悬臂
公开(公告)号：US5444244A
公开(公告)日：1995-08-22
申请号：US073201
申请日：1993-06-03
申请人： Michael D. Kirk , Ian R. Smith , Marco Tortonese , Sean S. Cahill , Timothy G. Slater
发明人： Michael D. Kirk , Ian R. Smith , Marco Tortonese , Sean S. Cahill , Timothy G. Slater
IPC分类号： G01Q30/02 , G01Q20/04 , G01Q60/38 , H01J37/00
CPC分类号： G01Q20/04 , B82Y35/00 , G01Q60/38 , Y10S977/873
摘要： A cantilever for a scanning probe microscope is disclosed. The cantilever includes a piezoresistor for detecting the deflection of the cantilever, and a tip which is formed integrally with the cantilever. A process of fabricating such a cantilever is also disclosed, the process yielding a tip which has a high aspect ratio and a small radius of curvature at its apex. A combined atomic force/lateral force microscope including two or more piezoresistors responsive to both the bending and torsion of the cantilever is also disclosed.
摘要翻译：公开了一种用于扫描探针显微镜的悬臂。悬臂包括用于检测悬臂的偏转的压电电阻器和与悬臂一体形成的尖端。还公开了制造这种悬臂的方法，该方法产生在其顶点具有高纵横比和小曲率半径的尖端。还公开了包括响应于悬臂的弯曲和扭转的两个或更多个压敏电阻的组合的原子力/横向力显微镜。

7. 发明授权

US4748335A Method and aparatus for determining surface profiles 失效
标题翻译：用于确定表面轮廓的方法和装置
公开(公告)号：US4748335A
公开(公告)日：1988-05-31
申请号：US752160
申请日：1985-07-03
申请人： James T. Lindow , Simon D. Bennett , Ian R. Smith
发明人： James T. Lindow , Simon D. Bennett , Ian R. Smith
IPC分类号： H01L21/66 , G01B11/02 , G01B11/24 , G01N21/88 , G01N21/95 , G01N21/956 , G02B21/00 , H01L21/027 , H01L21/30
CPC分类号： G01N21/956 , G01B11/02 , G01B11/24 , G02B21/0052 , G02B21/006 , G01N21/9501 , G01N2201/103
摘要： A system for determining surface profiles of specimens such as semiconductor wafers includes a drive for mounting the wafer for oscillatory movement along a line and an optical imaging system overlying the wafer for focusing a beam on a small sport on the wafer and including a photodetector for detecting the reflected sport from the wafer. The spot is scanned along the line on the wafer while the focal depth of the imaging system is progressively changed while the photodetector and connected digital circuitry generate a plurality of spaced output signals for each scan along the line so that data comprised of a series of spaced signals are provided at a plurality of focus levels extending through the surface profile of the wafer. Computer means are provided for analyzing the data and providing a graphical output of the surface profile.
摘要翻译：用于确定诸如半导体晶片的样品的表面轮廓的系统包括用于沿着线安装用于振荡运动的晶片的驱动器和覆盖晶片的光学成像系统，用于将光束聚焦在晶片上的小型运动上，并且包括用于检测的光电检测器从晶圆反射的运动。沿着晶片上的线扫描点，同时成像系统的焦深逐渐改变，同时光电检测器和连接的数字电路为沿着该线的每次扫描产生多个间隔的输出信号，使得由一系列间隔开的数据组成信号被提供在延伸穿过晶片的表面轮廓的多个聚焦水平。提供计算机装置用于分析数据并提供表面轮廓的图形输出。

8. 发明授权

US5496999A Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US5496999A
公开(公告)日：1996-03-05
申请号：US320490
申请日：1994-10-11
申请人： Frederick I. Linker , Michael D. Kirk , John D. Alexander , Sang-il Park , Sung-il Park , Ian R. Smith , Peter R. Swift
发明人： Frederick I. Linker , Michael D. Kirk , John D. Alexander , Sang-il Park , Sung-il Park , Ian R. Smith , Peter R. Swift
IPC分类号： G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q20/00 , G01Q30/02 , G01Q30/06 , G01Q60/10 , G01Q60/24 , G01Q70/02 , G02B21/00 , H01J37/26
CPC分类号： G01Q10/04 , B82Y35/00 , G01Q10/06 , G01Q20/02 , G01Q30/025 , G01Q70/02 , G02B21/002 , Y10S977/851 , Y10S977/86 , Y10S977/873
摘要： A scanning probe microscope having numerous advantages is disclosed. Respective scanning force and scanning tunneling probes are removably mounted in the head using kinematic mounting techniques so that they may be substituted for one another without the need to adjust the cantilever deflection sensor. A linear position-sensitive photodetector in the deflection sensor eliminates further the need for adjustments. A motorized, non-stacked x,y coarse movement stage is kinematically positioned with respect to the base and features a minimized mechanical loop to reduce thermal and vibrational effects on the position of the sample. A z coarse movement stage positions the head kinematically with respect to the base and includes a motorized drive means which allows the height, tilt and pitch of the probe to be adjusted. The scanner includes x,y and z sample position detectors which provide an accurate measurement of the position of the sample with respect to the probe. The z position detector provides an output which is exclusive of sample tilt and which may be used as an output of the scanning probe microscope. The outputs of the x,y and z position detectors may also be connected in feedback loops with the controller to improve the performance of the scanning probe microscope.
摘要翻译：公开了具有许多优点的扫描探针显微镜。使用运动学安装技术将各扫描力和扫描隧道探针可拆卸地安装在头部中，使得它们可以彼此替代，而不需要调整悬臂偏转传感器。偏转传感器中的线性位置敏感光电检测器进一步消除了对调整的需要。机动的，非堆叠的x，y粗移动台相对于基座运动地定位，并具有最小化的机械回路，以减少对样品位置的热和振动影响。 z粗移动台将头相对于基座运动地定位，并且包括允许调节探头的高度，倾斜和俯仰的电动驱动装置。扫描器包括x，y和z采样位置检测器，其提供样品相对于探针的位置的精确测量。 z位置检测器提供的输出不包括样品倾斜，可用作扫描探针显微镜的输出。 x，y和z位置检测器的输出也可以与控制器连接在反馈回路中，以提高扫描探针显微镜的性能。

9. 发明授权

US5376790A Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US5376790A
公开(公告)日：1994-12-27
申请号：US850669
申请日：1992-03-13
申请人： Frederick I. Linker , Michael D. Kirk , John D. Alexander , Sang-il Park , Sung-il Park , Ian R. Smith
发明人： Frederick I. Linker , Michael D. Kirk , John D. Alexander , Sang-il Park , Sung-il Park , Ian R. Smith
IPC分类号： G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q20/00 , G01Q30/02 , G01Q30/06 , G01Q60/10 , G01Q60/24 , G01Q70/02 , G02B21/00 , H01J37/00
CPC分类号： G01Q10/04 , B82Y35/00 , G01Q10/06 , G01Q20/02 , G01Q30/025 , G01Q70/02 , G02B21/002 , Y10S977/851 , Y10S977/86 , Y10S977/873
摘要： A scanning probe microscope having numerous advantages is disclosed. Respective scanning force and scanning tunneling probes are removably mounted in the head using kinematic mounting techniques so that they may be substituted for one another without the need to adjust the cantilever deflection sensor. A linear position-sensitive photodetector in the deflection sensor eliminates further the need for adjustments. A motorized, non-stacked x,y coarse movement stage is kinematically positioned with respect to the base and features a minimized mechanical loop to reduce thermal and vibrational effects on the position of the sample. A z coarse movement stage positions the head kinematically with respect to the base and includes a motorized drive means which allows the height, tilt and pitch of the probe to be adjusted. The scanner includes x,y and z sample position detectors which provide an accurate measurement of the position of the sample with respect to the probe. The z position detector provides an output which is exclusive of sample tilt and which may be used as an output of the scanning probe microscope. The outputs of the x,y and z position detectors may also be connected in feedback loops with the controller to improve the performance of the scanning probe microscope.
摘要翻译：公开了具有许多优点的扫描探针显微镜。使用运动学安装技术将各扫描力和扫描隧道探针可拆卸地安装在头部中，使得它们可以彼此替代，而不需要调整悬臂偏转传感器。偏转传感器中的线性位置敏感光电检测器进一步消除了对调整的需要。机动的，非堆叠的x，y粗移动台相对于基座运动地定位，并具有最小化的机械回路，以减少对样品位置的热和振动影响。 z粗移动台将头相对于基座运动地定位，并且包括允许调节探头的高度，倾斜和俯仰的电动驱动装置。扫描器包括x，y和z采样位置检测器，其提供样品相对于探针的位置的精确测量。 z位置检测器提供的输出不包括样品倾斜，可用作扫描探针显微镜的输出。 x，y和z位置检测器的输出也可以与控制器连接在反馈回路中，以提高扫描探针显微镜的性能。

10. 发明授权

US5184021A Method and apparatus for measuring the dimensions of patterned features on a lithographic photomask 失效
标题翻译：用于测量光刻光掩模上的图案特征的尺寸的方法和装置
公开(公告)号：US5184021A
公开(公告)日：1993-02-02
申请号：US719519
申请日：1991-06-24
申请人： Ian R. Smith
发明人： Ian R. Smith
IPC分类号： G01B9/04 , G01B11/02 , G01C3/06 , G03F7/20
CPC分类号： G03F7/70625 , G01B11/02 , G03F7/70633
摘要： A system for inspecting and measuring the dimensions of patterned features on lithographic photomasks includes a confocal scanning microscope beneath which is mounted the photomask to be inspected. The photomask is moved to permit the imaging beam from the microscope to record reflectivity information at closely spaced points along a scan line at the metal-substrate interface within the photomask, and the unpatterned side of the mask is positioned facing the microscope so that the imaging beam passes through the transparent substrate material of the mask to the desired measurement plane. An objective lens specially corrected for imaging through transparent materials is used in the optical system, and compensating glass plates may be selectively placed between the objective lens and the photomask when the substrate of the mask is thinner than the thickness of transparent material for which the objective lens was corrected.
摘要翻译：用于检查和测量光刻光掩模上的图案特征的尺寸的系统包括共焦扫描显微镜，其下安装有待检查的光掩模。移动光掩模以允许来自显微镜的成像光束沿着光掩模内的金属 - 衬底界面处的扫描线的紧密间隔的点记录反射率信息，并且掩模的未图案化侧面朝向显微镜定位，使得成像光束通过掩模的透明基板材料到期望的测量平面。在光学系统中使用专门用于通过透明材料进行成像的物镜校正的物镜，并且当掩模的基底比目标的透明材料的厚度薄时，可以将补偿玻璃板选择性地放置在物镜和光掩模之间镜头被纠正。

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