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1. 发明授权

US06999614B1 Power assisted automatic supervised classifier creation tool for semiconductor defects 有权
标题翻译：用于半导体缺陷的功率自动监控分类器创建工具
公开(公告)号：US06999614B1
公开(公告)日：2006-02-14
申请号：US09724633
申请日：2000-11-28
申请人： David Bakker , Saibal Banerjee , Ian R. Smith
发明人： David Bakker , Saibal Banerjee , Ian R. Smith
IPC分类号： G06K9/62
CPC分类号： G06T7/0004 , G06T2207/10056 , G06T2207/20081 , G06T2207/20092 , G06T2207/30148
摘要： A method and system that optionally allows a user to view image defects organized by natural groupings based on features of the images. The natural groupings make it easier for the user to organize some or all of the images into classes in a training set of images. A feature vector is extracted from each image in the training set and stored, along with its user-specified class, for use by an automatic classifier software module. The automatic classifier uses the stored feature vectors and classes to automatically classify images not in the training set. If the automatically classified images do not match images manually classified by the user, the user modifies the training set until a better result is obtained from the automatic classifier. The system can provide feedback to an inspection system designed to aid in the setup and fine-tuning of the inspection system.
摘要翻译：一种方法和系统，其可选地允许用户基于图像的特征来查看由自然分组组织的图像缺陷。自然分组使用户更容易将一些或所有图像组织成训练图像组中的类。从训练集中的每个图像中提取特征向量，并与其用户指定的类一起存储供自动分类器软件模块使用。自动分类器使用存储的特征向量和类自动分类不在训练集中的图像。如果自动分类的图像与用户手动分类的图像不匹配，则用户修改训练集，直到从自动分类器获得更好的结果。该系统可以向设计用于辅助检查系统的设置和微调的检查系统提供反馈。

2. 发明授权

US06590703B2 Optical system for scanning microscope 失效
标题翻译：用于扫描显微镜的光学系统
公开(公告)号：US06590703B2
公开(公告)日：2003-07-08
申请号：US09906985
申请日：2001-07-16
申请人： Sang-Il Park , Ian R. Smith
发明人： Sang-Il Park , Ian R. Smith
IPC分类号： G02B2118
CPC分类号： G01Q20/02 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光学路径提供样品的光学轴向视图和光学斜视图，每个光学路径通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

3. 发明授权

US06265718B1 Scanning probe microscope with scan correction 有权
标题翻译：扫描探针显微镜扫描校正
公开(公告)号：US06265718B1
公开(公告)日：2001-07-24
申请号：US09561448
申请日：2000-04-28
申请人： Sang-Il Park , Ian R. Smith
发明人： Sang-Il Park , Ian R. Smith
IPC分类号： H01J3700
CPC分类号： G01Q70/02 , G01Q30/025 , G01Q30/04 , G02B21/002 , G02B21/26 , Y10S977/85 , Y10S977/851
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光学路径提供样品的光学轴向视图和光学斜视图，每个光学路径通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

4. 发明授权

US6130427A Scanning probe microscope with multimode head 失效
标题翻译：带多模头的扫描探针显微镜
公开(公告)号：US6130427A
公开(公告)日：2000-10-10
申请号：US828771
申请日：1997-04-01
申请人： Sang-Il Park , Frederick I. Linker , Ian R. Smith , Michael Kirk , John Alexander , Sung Park
发明人： Sang-Il Park , Frederick I. Linker , Ian R. Smith , Michael Kirk , John Alexander , Sung Park
IPC分类号： G01Q30/04 , G01N23/00 , G01Q10/00 , G01Q20/02 , G01Q20/04 , G01Q30/02 , G01Q30/20 , G01Q60/10 , G01Q70/02 , G01Q70/10 , G01R31/302 , G02B21/00 , G02B21/18 , G02B21/26 , G21K7/00 , H01J37/26
CPC分类号： G01Q20/02 , B82Y35/00 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光学路径提供样品的光学轴向视图和光学斜视图，每个光学路径通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

5. 发明授权

US6057547A Scanning probe microscope with scan correction 有权
标题翻译：扫描探针显微镜扫描校正
公开(公告)号：US6057547A
公开(公告)日：2000-05-02
申请号：US208733
申请日：1998-12-09
申请人： Sang-Il Park , Ian R. Smith
发明人： Sang-Il Park , Ian R. Smith
IPC分类号： G01B21/30 , G01Q30/02 , G01Q30/04 , G01Q60/00 , G01Q70/02 , G02B21/00 , G02B21/26 , G21K5/10 , H01J37/00 , H01J37/20 , H01J37/22
CPC分类号： G01Q70/02 , B82Y35/00 , G01Q30/025 , G01Q30/04 , G02B21/002 , G02B21/26 , Y10S977/85 , Y10S977/851
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光学路径提供样品的光学轴向视图和光学斜视图，每个光学路径通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

6. 发明授权

US5444244A Piezoresistive cantilever with integral tip for scanning probe microscope 失效
标题翻译：用于扫描探针显微镜的压阻悬臂
公开(公告)号：US5444244A
公开(公告)日：1995-08-22
申请号：US073201
申请日：1993-06-03
申请人： Michael D. Kirk , Ian R. Smith , Marco Tortonese , Sean S. Cahill , Timothy G. Slater
发明人： Michael D. Kirk , Ian R. Smith , Marco Tortonese , Sean S. Cahill , Timothy G. Slater
IPC分类号： G01Q30/02 , G01Q20/04 , G01Q60/38 , H01J37/00
CPC分类号： G01Q20/04 , B82Y35/00 , G01Q60/38 , Y10S977/873
摘要： A cantilever for a scanning probe microscope is disclosed. The cantilever includes a piezoresistor for detecting the deflection of the cantilever, and a tip which is formed integrally with the cantilever. A process of fabricating such a cantilever is also disclosed, the process yielding a tip which has a high aspect ratio and a small radius of curvature at its apex. A combined atomic force/lateral force microscope including two or more piezoresistors responsive to both the bending and torsion of the cantilever is also disclosed.
摘要翻译：公开了一种用于扫描探针显微镜的悬臂。悬臂包括用于检测悬臂的偏转的压电电阻器和与悬臂一体形成的尖端。还公开了制造这种悬臂的方法，该方法产生在其顶点具有高纵横比和小曲率半径的尖端。还公开了包括响应于悬臂的弯曲和扭转的两个或更多个压敏电阻的组合的原子力/横向力显微镜。

7. 发明授权

US4748335A Method and aparatus for determining surface profiles 失效
标题翻译：用于确定表面轮廓的方法和装置
公开(公告)号：US4748335A
公开(公告)日：1988-05-31
申请号：US752160
申请日：1985-07-03
申请人： James T. Lindow , Simon D. Bennett , Ian R. Smith
发明人： James T. Lindow , Simon D. Bennett , Ian R. Smith
IPC分类号： H01L21/66 , G01B11/02 , G01B11/24 , G01N21/88 , G01N21/95 , G01N21/956 , G02B21/00 , H01L21/027 , H01L21/30
CPC分类号： G01N21/956 , G01B11/02 , G01B11/24 , G02B21/0052 , G02B21/006 , G01N21/9501 , G01N2201/103
摘要： A system for determining surface profiles of specimens such as semiconductor wafers includes a drive for mounting the wafer for oscillatory movement along a line and an optical imaging system overlying the wafer for focusing a beam on a small sport on the wafer and including a photodetector for detecting the reflected sport from the wafer. The spot is scanned along the line on the wafer while the focal depth of the imaging system is progressively changed while the photodetector and connected digital circuitry generate a plurality of spaced output signals for each scan along the line so that data comprised of a series of spaced signals are provided at a plurality of focus levels extending through the surface profile of the wafer. Computer means are provided for analyzing the data and providing a graphical output of the surface profile.
摘要翻译：用于确定诸如半导体晶片的样品的表面轮廓的系统包括用于沿着线安装用于振荡运动的晶片的驱动器和覆盖晶片的光学成像系统，用于将光束聚焦在晶片上的小型运动上，并且包括用于检测的光电检测器从晶圆反射的运动。沿着晶片上的线扫描点，同时成像系统的焦深逐渐改变，同时光电检测器和连接的数字电路为沿着该线的每次扫描产生多个间隔的输出信号，使得由一系列间隔开的数据组成信号被提供在延伸穿过晶片的表面轮廓的多个聚焦水平。提供计算机装置用于分析数据并提供表面轮廓的图形输出。

8. 发明授权

US4847823A Method and apparatus for reading or measuring magneto-optical storage media using pinhole aperture 失效
标题翻译：使用针孔进行读取或测量磁光存储介质的方法和装置
公开(公告)号：US4847823A
公开(公告)日：1989-07-11
申请号：US63668
申请日：1987-06-19
申请人： James T. Lindow , Simon D. Bennett , Ian R. Smith
发明人： James T. Lindow , Simon D. Bennett , Ian R. Smith
IPC分类号： G11B11/105
CPC分类号： G11B11/10515 , G11B11/10543
摘要： A scanning confocal optical imaging system is utilized to read or measure data magnetically recorded on a magneto-optic disk. The system includes a laser for producing a linearly polarized beam and a beam splitter for directing the transmitted beam to the disk and for deflecting a portion of the reflected return beam from the disk to a photodetector. A pinhole plate is placed between the beam splitter and the disk for restricting the size of the transmitted and reflected beams, and a polarizer is positioned between the beam splitter and the photodetector to receive the deflected return beam and provide an output that discriminates between the differing directions of rotation of the polarization plane of the transmitted beam by the magnetized area on the disk so that the direction of magnetization of the magnetized area can be read by the photodetector.
摘要翻译：扫描共焦光学成像系统用于读取或测量磁记录在磁光盘上的数据。该系统包括用于产生线性偏振光束的激光器和用于将透射光束引导到光盘并将反射回波束的一部分从光盘偏转到光电检测器的分束器。针孔板放置在分束器和盘之间，用于限制透射和反射光束的尺寸，并且偏振器位于分束器和光电检测器之间，以接收偏转的返回光束并提供输出，其区分不同的通过磁盘上的磁化区域的透射光束的偏振面的旋转方向，从而可以由光电检测器读取磁化区域的磁化方向。

9. 发明授权

US4681883A Histamine H.sub.2 -antagonist oxazole and thiazole derivatives and compositions therefor 失效
标题翻译：组胺H2拮抗剂恶唑和噻唑衍生物及其组合物
公开(公告)号：US4681883A
公开(公告)日：1987-07-21
申请号：US788261
申请日：1985-10-17
申请人： Thomas H. Brown , Robert C. Mitchell , Ian R. Smith , Rodney C. Young
发明人： Thomas H. Brown , Robert C. Mitchell , Ian R. Smith , Rodney C. Young
IPC分类号： A61K31/415 , A61K31/4184 , A61K31/425 , A61K31/426 , A61K31/428 , A61K31/44 , A61K31/4402 , A61K31/4406 , A61K31/4409 , A61K31/4412 , A61K31/4418 , A61K31/445 , A61K31/454 , A61K31/47 , A61K31/472 , A61P1/04 , A61P43/00 , C07D20060101 , C07D213/74 , C07D213/89 , C07D215/38 , C07D215/42 , C07D217/22 , C07D231/12 , C07D231/20 , C07D233/54 , C07D233/64 , C07D233/88 , C07D235/12 , C07D235/30 , C07D239/42 , C07D239/86 , C07D239/94 , C07D263/58 , C07D277/20 , C07D277/42 , C07D277/82 , C07D295/08 , A61K31/42 , C07D413/12 , C07D417/12
CPC分类号： C07D213/74 , C07D215/38 , C07D215/42 , C07D217/22 , C07D231/12 , C07D233/64 , C07D235/12 , C07D235/30 , C07D239/42 , C07D239/94 , C07D263/58 , C07D277/42 , C07D277/82
摘要： This invention relates to aminoalkylphenoxyalkyl substituted heterocycles. These compounds antagonize the action of histamine on histamine H.sub.2 -receptors in the brain. A compound of the invention is 2-[3-[3-(piperidinomethyl)phenoxy]propylamino]benzthiazole.
摘要翻译：本发明涉及氨基烷基苯氧基烷基取代的杂环。这些化合物拮抗组胺对脑中组胺H2受体的作用。本发明的化合物是2- [3- [3-（哌啶基甲基）苯氧基]丙基氨基]苯并噻唑。

10. 发明授权

US4634880A Confocal optical imaging system with improved signal-to-noise ratio 失效
标题翻译：共焦光学成像系统具有改善的信噪比
公开(公告)号：US4634880A
公开(公告)日：1987-01-06
申请号：US830964
申请日：1986-02-19
申请人： James T. Lindow , Simon D. Bennett , Ian R. Smith
发明人： James T. Lindow , Simon D. Bennett , Ian R. Smith
IPC分类号： G02B27/28 , G01M11/00 , G01N21/21 , G01N21/88 , G01N21/956 , G02B21/00 , G02B27/10
CPC分类号： G02B27/144 , G01N21/21 , G02B21/0032 , G02B21/0068
摘要： A confocal optical imaging system includes a laser for producing a linearly polarized beam which is transmitted through the optical elements of the system, focused on a small spot on the target, and reflected back through the optical elements to a photodetector where the reflectance from the spot is determined. The optical elements include a pinhole plate for restricting the size of the transmitted and reflected beams which plate, along with other of the optical elements, can produce unwanted reflections adding optical noise to the reflected beam from the target. A retardation plate between the pinhole plate and the target alters the polarization of the transmitted beam relative to the reflected beam so that a polarizer will discriminate between the true reflected beam signal and the unwanted reflections to thereby improve the signal-to-noise ratio at the photodetector.
摘要翻译：共焦光学成像系统包括用于产生线偏振光束的激光器，该激光束透射通过系统的光学元件，聚焦在目标上的小点上，并通过光学元件反射回到光电检测器，其中来自光斑的反射率决心，决意，决定。光学元件包括用于限制透射和反射光束的尺寸的针孔板，其与其他光学元件一起可以产生对来自靶的反射光束增加光学噪声的不需要的反射。针孔板和目标之间的延迟板相对于反射光束改变透射光束的偏振，使得偏振器将区分真实反射光束信号和不需要的反射，从而提高了在光电探测器

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