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    • 9. 发明授权
    • Method and apparatus for producing super clean air
    • 生产超洁净空气的方法和设备
    • US6151914A
    • 2000-11-28
    • US152688
    • 1998-09-14
    • Masashi MizunoMasuo TadaNorio YamazakiToshiaki Ohmori
    • Masashi MizunoMasuo TadaNorio YamazakiToshiaki Ohmori
    • B01D53/04B01D53/00B01D53/02F04B27/10F25J3/04F25J1/00
    • F25J3/044B01D53/002B01D53/02F25J3/04284F25J3/04527F25J3/04563F25J3/04612F25J3/04636F25J2205/60F25J2215/40F25J2215/42Y10S62/909
    • Super clean air suitable for use in a tunnel-type wafer transport system, etc., is produced efficiently with the specific energy consumption reduced and the yield improved by making good use of part of cooling energy and gas produced in a low temperature separation type nitrogen producing apparatus. Material air 1a collected from the atmosphere is pretreated in a room temperature adsorption tower 7, this pretreated air is adsorption treated at -60.degree. C. in a first low temperature adsorption tower 9, and the treated air 1c is further adsorption treated at -150.degree. C. in a second low temperature adsorption tower 10, thereby producing super clean air 1e containing not higher than 1 ppb of the chemical components other than nitrogen, oxygen and noble gases and having a dew point of not higher than -100.degree. C. The airs 1b and 1c are cooled in heat exchangers 12, 13 and 14 by utilizing cooling energy produced in the low temperature separation type nitrogen producing apparatus, that is, the low temperature gas 3f passed through an expansion turbine 38 from a rectifying tower 37.
    • 适用于隧道式晶片输送系统等的超洁净空气通过降低比能量消耗而有效地生产,并且通过充分利用部分冷却能量和在低温分离型氮气中产生的气体而提高产率 生产设备。 从大气中收集的原料空气1a在室温吸附塔7中进行预处理,该预处理空气在-60℃下在第一低温吸附塔9中进行吸附处理,经处理的空气1c进一步在-150处进行吸附处理 在第二低温吸附塔10中,由此产生除了氮气,氧气和惰性气体以外并且露点不高于-100℃的不超过1ppb的化学成分的超洁净空气1e。 空气1b和1c通过利用低温分离式氮气生成装置中产生的冷却能量,即从精馏塔37通过膨胀涡轮机38的低温气体3f而在热交换器12,13和14中冷却。
    • 10. 发明授权
    • Apparatus and method for purifying natural gas via cryogenic separation
    • 通过低温分离净化天然气的装置和方法
    • US6082133A
    • 2000-07-04
    • US245570
    • 1999-02-05
    • Michael A. BarclayThomas C. BrookJohn A. BarclayRaymond R. Tison
    • Michael A. BarclayThomas C. BrookJohn A. BarclayRaymond R. Tison
    • B01D53/00F25J1/02F25J3/06F25J1/00
    • F25J3/061B01D53/002F25J1/0022F25J1/004F25J1/0042F25J1/0052F25J1/0212F25J3/0635F25J3/067F25J2205/20F25J2210/66F25J2220/66F25J2230/30F25J2270/02F25J2270/12F25J2270/66F25J2280/30F25J2290/44Y02C10/12Y10S62/909
    • An apparatus for separating CO.sub.2 from a mixture of gases includes CO.sub.2 and a second gas, the apparatus includes an active heat exchanger and a regenerating heat exchanger. The active heat exchanger includes a heat exchange surface in contact with the mixture of gases. The mixture of gases is present in the active heat exchanger at a predetermined pressure which is chosen such that CO.sub.2 freezes on the heat exchange surface when the surface is cooled by a refrigerant having a temperature below that at which CO.sub.2 freezes at the predetermined pressure. The regenerating heat exchanger includes a heat exchange surface in contact with the refrigerant and also in contact with a layer of frozen CO.sub.2. The refrigerant enters the regenerating heat exchanger at a temperature above that at which the CO.sub.2 in the frozen layer of CO.sub.2 sublimates. The sublimation of the solid CO.sub.2 cools the refrigerant prior to the refrigerant being expanded through an expansion valve, which reduces the temperature of the refrigerant to a point below the freezing point of CO.sub.2 at the predetermined pressure. The refrigerant is re-compressed by a compressor after leaving the active heat exchanger. In the preferred embodiment of the present invention, the gaseous CO.sub.2 released by the regenerating heat exchanger is used to precool the incoming gas mixture. A second precooling heat exchanger precools the compressed refrigerant by providing thermal contact with the refrigerant leaving the active heat exchanger.
    • 用于从气体混合物中分离CO 2的装置包括CO 2和第二气体,该装置包括主动热交换器和再生热交换器。 活性热交换器包括与气体混合物接触的热交换表面。 气体的混合物以预定的压力存在于活性热交换器中,该预定压力被选择为使得当表面被低于在预定压力下CO 2冻结的制冷剂冷却时,CO 2在热交换表面上冻结。 再生热交换器包括与制冷剂接触并且与一层冷冻CO 2接触的热交换表面。 制冷剂在高于二氧化碳冷冻层中的二氧化碳升华的温度下进入再生热交换器。 固体二氧化碳的升华在制冷剂通过膨胀阀膨胀之前冷却制冷剂,从而将制冷剂的温度降低到低于预定压力下的CO 2凝固点。 在离开主动热交换器之后,制冷剂被压缩机重新压缩。 在本发明的优选实施例中,由再生热交换器释放的气态CO 2用于预冷进入的气体混合物。 第二预冷热交换器通过与离开活性热交换器的制冷剂的热接触来预先压缩压缩的制冷剂。