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    • 5. 发明授权
    • Photosensitive composition and method of forming a pattern using the same
    • 光敏组合物和使用其形成图案的方法
    • US06306553B1
    • 2001-10-23
    • US08473963
    • 1995-06-07
    • Naoko KiharaFumihiko YuasaTohru UshirogouchiTsukasa TadaOsamu SasakiTakuya NaitoSatoshi Saito
    • Naoko KiharaFumihiko YuasaTohru UshirogouchiTsukasa TadaOsamu SasakiTakuya NaitoSatoshi Saito
    • G03C176
    • G03F7/0045Y10S430/115Y10S430/116Y10S430/118
    • A photosensitive composition comprising: an acid-decomposable compound having at least one substituent which is decomposed by an acid, forming a product which reacts with alkali solution and forms —COO− or —SO3−; and a compound which generates an acid when exposed to a chemical radiation. If necessary, the composition further comprises an alkali-soluble polymer. The acid-decomposable compound is one which is represented by the following formula (1), and the alkali-soluble polymer has a softening point of 150° C. or more and an average molecular weight of 3000 to 8000. When used as photoresist, the composition can form a fine resist pattern. where R1 and R2 are either the same or different, each of which represents at least one selected from the group consisting of hydrogen, halogen atom, cyano group, nitro group, silyl group, and monovalent organic group; X represents >C═O or —SO2—; Y represents a divalent organic group; R1 and R2 can be bonded together, forming a ring; and at least one of R1, R2, and Y has a substituent which is decomposed by an acid.
    • 一种光敏组合物,其包含:具有至少一个被酸分解的取代基的酸可分解化合物,形成与碱溶液反应形成-COO-或-SO 3 - 的产物; 以及当暴露于化学辐射时产生酸的化合物。 如果需要,组合物还包含碱溶性聚合物。 酸分解性化合物是由下式(1)表示的化合物,碱溶性聚合物的软化点为150℃以上,平均分子量为3000〜8000。当用作光致抗蚀剂时, 该组合物可以形成精细的抗蚀剂图案,其中R1和R2相同或不同,它们各自表示选自氢,卤素原子,氰基,硝基,甲硅烷基和一价有机基团中的至少一种 组; X表示> C = O或-SO 2 - ; Y表示二价有机基团; R1和R2可以结合在一起,形成环; R 1,R 2和Y中的至少一个具有被酸分解的取代基。
    • 6. 发明授权
    • Photosensitive resin composition
    • 感光树脂组合物
    • US06280905B1
    • 2001-08-28
    • US09556528
    • 2000-04-21
    • Katsuo KoshimuraTsukasa ToyoshimaTakashi NishiokaTadaaki Tanaka
    • Katsuo KoshimuraTsukasa ToyoshimaTakashi NishiokaTadaaki Tanaka
    • G03F7032
    • G03F7/033Y10S430/108Y10S430/116Y10S430/123Y10S430/124Y10S430/125
    • A photosensitive resin composition which comprises (1) a particulate copolymer comprising 10-99.8% by mole of the unit of (i) an aliphatic conjugated diene monomer, 0.1-30% by mole of the unit of (ii) a monomer having one polymerizable unsaturated group and an amino group, 0.1-20% by mole of the unit of (iii) a monomer having at least two polymerizable unsaturated groups and 0-40% by mole of the unit of (iv) a copolymerizable other monomer having one polymerizable unsaturated group, (2) a photopolymerizable unsaturated monomer and (3) a photopolymerization initiator typically represented by 9-fluorenone or 2-i-propylthioxanthone. A photosensitive resin composition is provided which can be developed by using water, has a low hardness and high resilience, and is excellent in balance of properties.
    • 一种感光性树脂组合物,其包含(1)包含(i)脂肪族共轭二烯单体的单元的10-99.8摩尔%的粒状共聚物,(ii)具有一个可聚合的单体的单元的0.1-30摩尔% 不饱和基团和氨基,0.1-20摩尔%的单元(iii)具有至少两个可聚合不饱和基团的单体和0-40摩尔%的单元(iv)可共聚的其它单体,其具有一个可聚合的 不饱和基团,(2)可光聚合的不饱和单体和(3)通常用9-芴酮或2-异丙基噻吨酮代表的光聚合引发剂。提供一种可通过使用水显影,具有低硬度和高的光敏树脂组合物 弹性,并且性能优越。
    • 8. 发明授权
    • Borate photoinitiators from monoboranes
    • 来自单硼烷的硼酸酯光引发剂
    • US6045974A
    • 2000-04-04
    • US247147
    • 1999-02-09
    • Allan Francis CunninghamMartin KunzHisatoshi Kura
    • Allan Francis CunninghamMartin KunzHisatoshi Kura
    • C07F5/02C08F2/46C08F2/48C08F2/50C08F4/42C08F4/52C09D5/46G03C1/725G03F7/029
    • G03F7/029C07F5/027C08F2/50Y10S430/115Y10S430/116Y10S430/121Y10S430/123
    • The invention relates to photopolymerizable compositions comprising as photoinitiator a borate of the formula I or I' ##STR1## R.sub.1, R.sub.2 and R.sub.3 are, for example and independently of one another, phenyl or another aromatic hydrocarbon, with or without any heteroatoms, which radicals are unsubstituted or are substituted, or the radicals R.sub.1 and R.sub.2 form bridges to produce structures of the formula II, IIa or IIb ##STR2## with the provisos that not more than two of the radicals R.sub.1, R.sub.2 and R.sub.3 are identical and either at least two of the radicals R.sub.1, R.sub.2 and R.sub.3 are aromatic hydrocarbon radicals or phenyl radicals which are substituted in both ortho-positions or at least one radical R.sub.1, R.sub.2 or R.sub.3 is a sterically bulky aryl radical and the remaining radicals of R.sub.1, R.sub.2 and R.sub.3 are aromatic hydrocarbon radicals or are phenyl radicals which are substituted in at least one ortho-position; R.sub.4 is, for example, phenyl or C.sub.1 -C.sub.20 alkyl and G is a radical which is able to form positive ions.
    • 本发明涉及可光聚合组合物,其包含作为光引发剂的式I或I'R1的硼酸酯,R 2和R 3彼此例如彼此独立地为具有或不具有任何杂原子的苯基或另一芳族烃基,该基团为未取代的或 或者基团R 1和R 2形成桥以产生式II,IIa或IIb的结构,条件是不超过两个基团R 1,R 2和R 3相同,并且基团R 1, R2和R3是在两个邻位或至少一个基团R 1,R 2或R 3中被取代的芳族烃基或苯基,其中R 1,R 2和R 3的剩余基团是芳族烃基,或者是 在至少一个邻位取代的苯基; R4是例如苯基或C1-C20烷基,G是能够形成正离子的基团。