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    • 3. 发明授权
    • Physical vapor deposition of diamond-like carbon films
    • 金刚石碳膜的物理气相沉积
    • US5605759A
    • 1997-02-25
    • US321548
    • 1994-10-12
    • Robert PrinceElisa Bourdon
    • Robert PrinceElisa Bourdon
    • C23C14/06C23C14/28C23C14/54B05D3/06
    • C23C14/0605C23C14/28C23C14/54Y10S427/105Y10T428/30
    • A process for forming diamond like films of carbon on substrates at room temperature using physical vapour deposition. A source of carbon is physically ablated in the vicintity of a substrate to deposit on the substrate all forms of carbon. A physical discrimination process is applied continuously to remove graphite grains while leaving the aliphatic diamond form intact. The source of carbon is typically a high purity carbon rod. The substrate is typically metal or glass placed within about 60 centimeters where laser pulse energy of 50 millijoules peak power is used. Physical ablation is carried out by ion beam, arc or laser ablation. The resulting carbon plume impinges on the substrate and is thermally quenched. Physical discrimination between carbon forms is by using a laser having a wavelength which is absorbed by graphitic forms but which passes through the aliphatic forms without absorption thereby allowing thermal quenching of the diamond like aliphatic forms. Laser power is adjusted such that the optical removal rate of graphitic forms exceeds the arrival rate. Two laser beams are utilized either by two lasers or by one by suitable optical imaging. Multiple physical configurations exist to use either one or two lasers.
    • 使用物理气相沉积在室温下在基底上形成金刚石状碳膜的方法。 在一个底物的附近物理上烧蚀一个碳源,以沉积在基材上的所有形式的碳。 连续施加物理辨别过程以除去石墨颗粒,同时保持完整的脂族金刚石形式。 碳源通常是高纯碳棒。 基板通常是放置在约60厘米内的金属或玻璃,其中使用50毫焦耳峰值功率的激光脉冲能量。 物理消融通过离子束,电弧或激光烧蚀进行。 所得的碳羽毛撞击在基底上并进行热淬火。 碳形式之间的物理区别是使用具有被石墨形式吸收的波长的激光,但是通过脂族形式而不吸收,从而允许金刚石类似脂族形式的热淬灭。 调整激光功率,使得石墨形式的光学去除率超过到达速率。 两个激光束通过两个激光器或由适当的光学成像利用。 存在多个物理配置以使用一个或两个激光器。