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1. 发明授权

US06660342B1 Pulsed electromagnetic energy method for forming a film 失效
标题翻译：用于形成薄膜的脉冲电磁能法
公开(公告)号：US06660342B1
公开(公告)日：2003-12-09
申请号：US09636222
申请日：2000-08-10
申请人： Akiharu Miyanaga , Tohru Inoue , Shunpei Yamazaki
发明人： Akiharu Miyanaga , Tohru Inoue , Shunpei Yamazaki
IPC分类号： C23C1626
CPC分类号： C23C16/26 , C23C16/515 , C23C16/517 , H01J37/32192 , H01J37/32266 , H01J37/32678 , Y10S427/103 , Y10S427/104
摘要： A method of forming a film by a plasma CVD process in which a high density plasma is generated in the presence of a magnetic field wherein the electric power for generating the plasma has a pulsed waveform. The electric power typically is supplied by microwave, and the pulsed wave may be a complex wave having a two-step peak, or may be a complex wave obtained by complexing a pulsed wave with a stationary continuous wave.
摘要翻译：通过等离子体CVD工艺形成膜的方法，其中在存在用于产生等离子体的电力具有脉冲波形的磁场的情况下产生高密度等离子体。电力通常由微波提供，并且脉冲波可以是具有两步峰值的复波，或者可以是通过使脉冲波与静止连续波相互合成而获得的复波。

2. 发明授权

US06638608B1 Protection overcoat for recording media 失效
标题翻译：保护大衣记录媒体
公开(公告)号：US06638608B1
公开(公告)日：2003-10-28
申请号：US09987570
申请日：2001-11-15
申请人： Jing Gui , Michael Stirniman , Xiaoding Ma
发明人： Jing Gui , Michael Stirniman , Xiaoding Ma
IPC分类号： G11B572
CPC分类号： G11B5/72 , Y10S427/103 , Y10T428/24942 , Y10T428/265 , Y10T428/30
摘要： A magnetic recording medium comprising a magnetic layer and a protective carbon-containing overcoat comprising a first carbon density, preferably of a low-density carbon, and a second carbon density different from the first carbon density, preferably of a high-density carbon, and a method of making and using the magnetic recording medium are disclosed.
摘要翻译：一种包含磁性层和保护性含碳外涂层的磁记录介质，其包含优选低密度碳的第一碳密度和不同于第一碳密度的第二碳密度，优选为高密度碳，以及公开了制造和使用磁记录介质的方法。

3. 发明授权

US06346747B1 Method for fabricating a thermally stable diamond-like carbon film as an intralevel or interlevel dielectric in a semiconductor device and device made 失效
标题翻译：在半导体器件和器件中制造作为层间或层间电介质的热稳定的类金刚石碳膜的方法
公开(公告)号：US06346747B1
公开(公告)日：2002-02-12
申请号：US09329004
申请日：1999-06-09
申请人： Alfred Grill , Christopher Vincent Jahnes , Vishnubhai Vitthalbhai Patel
发明人： Alfred Grill , Christopher Vincent Jahnes , Vishnubhai Vitthalbhai Patel
IPC分类号： H01L2348
CPC分类号： C23C16/5096 , C23C16/26 , C23C16/56 , H01L21/3146 , Y10S427/103 , Y10S427/104
摘要： A method for fabricating a thermally stable carbon-based low dielectric constant film such as a hydrogenated amorphous carbon film or a diamond-like carbon film in a parallel plate chemical vapor deposition process utilizing plasma enhanced chemical vapor deposition process is disclosed. Electronic devices containing insulating layers of thermally stable carbon-based low dielectric constant materials that are prepared by the method are further disclosed. In order to render the carbon-based low dielectric constant film thermally stable, i.e., at a temperature of at least 400° C., the films are heat treated at a temperature of not less than 350° C. for at least 0.5 hour. To enable the fabrication of thermally stable carbon-based low dielectric constant film, specific precursor materials such as cyclic hydrocarbons should be used, for instance, cyclohexane or benzene. The geometry of the chemical vapor deposition chamber is important in making the present invention thermally stable low dielectric constant films in order to achieve a specific bias voltage on the substrate onto which the electronic structure is formed.
摘要翻译：公开了一种利用等离子体增强化学气相沉积工艺在平行板化学气相沉积工艺中制造热稳定性碳基低介电常数膜的方法，例如氢化无定形碳膜或类金刚石碳膜。还公开了通过该方法制备的含有热稳定性碳基低介电常数材料绝缘层的电子器件。为了使碳基低介电常数膜热稳定，即在至少400℃的温度下，将膜在不低于350℃的温度下热处理至少0.5小时。为了制造热稳定性的碳系低介电常数膜，可以使用环状烃等环状烃等特定的前体材料。化学气相沉积室的几何形状对于使本发明热稳定的低介电常数膜是重要的，以便在其上形成电子结构的基板上实现特定的偏置电压。

4. 发明授权

US6090456A Process for large area deposition of diamond-like carbon films 失效
标题翻译：金刚石碳膜的大面积沉积工艺
公开(公告)号：US6090456A
公开(公告)日：2000-07-18
申请号：US850580
申请日：1997-05-03
申请人： Richard L.C. Wu , William C. Lanter , Peter Bletzinger
发明人： Richard L.C. Wu , William C. Lanter , Peter Bletzinger
IPC分类号： C23C14/06 , C23C14/22 , H01J37/317 , H05H1/24 , C23C16/26
CPC分类号： C23C14/221 , C23C14/0605 , H01J37/3178 , Y10S427/103 , Y10S427/104
摘要： A new method for ion beam deposition of diamond-like carbon coatings onto a variety of substrates is described. A high power, radio frequency excited-inductively coupled ion gun directs a beam of carbon and hydrogen ions at a substrate inside an ultra vacuum deposition chamber. A four axis scanner is used for coating large and nonplaner substrates. A quadrupole mass spectrometer is mounted inside the deposition chamber for real time monitoring of ion composition. The disclosed method is particularly effective for coating zinc sulfide and zinc selenide infrared windows.
摘要翻译：描述了将金刚石样碳涂层离子束沉积到各种基底上的新方法。高功率，射频激发电感耦合离子枪将超过真空沉积室内的一个碳和氢离子束引导到衬底上。四轴扫描仪用于涂覆大型和非平面基板。四极质谱仪安装在沉积室内，用于实时监测离子组成。所公开的方法对于涂覆硫化锌和硒化锌红外窗口是特别有效的。

5. 发明授权

US5985451A Elastic product 失效
标题翻译：弹性产品
公开(公告)号：US5985451A
公开(公告)日：1999-11-16
申请号：US819556
申请日：1997-03-17
申请人： Masanobu Senda , Yasuhiko Ogisu
发明人： Masanobu Senda , Yasuhiko Ogisu
IPC分类号： F16J15/10 , B60T11/236 , C09K3/10 , C23C16/26 , F16J3/02 , F16J15/32 , B32B9/00
CPC分类号： B60T11/236 , C23C16/26 , Y10S427/103 , Y10T428/12028 , Y10T428/12049 , Y10T428/12056 , Y10T428/30 , Y10T428/31504 , Y10T428/31678
摘要： A master brake cylinder comprises a reservoir and a cylinder for generating fluid pressure. Provided in the cylinder is a sliding piston, and mounted to front and rear ends of piston are piston cups for sealing a gap between the piston and the cylinder. The piston cups comprise a substrate made of rubber and a coating layer made of diamond-like carbon and provided on an outer peripheral surface (sliding surface) of the substrate. A surface of the coating layer constitutes a sliding surface, and so a frictional resistance thereof relative to an inner peripheral surface of the cylinder, on which the coating layer slides, is made relatively low. The coating layer can easily follow deformation of the substrate and securely adheres to the substrate.
摘要翻译：主制动缸包括容器和用于产生流体压力的气缸。在气缸中设置有滑动活塞，并且安装到活塞的前端和后端是用于密封活塞和气缸之间的间隙的活塞杯。活塞杯包括由橡胶制成的基材和由类金刚石碳制成的涂层，并且设置在基材的外周表面（滑动表面）上。涂层的表面构成滑动面，因此其相对于涂覆层滑动的圆筒的内周面的摩擦阻力相对较低。涂层可以容易地跟随基材的变形并牢固地粘附到基材上。

6. 发明授权

US5981057A Diamond 失效
标题翻译：钻石
公开(公告)号：US5981057A
公开(公告)日：1999-11-09
申请号：US899602
申请日：1997-07-24
申请人： John Lloyd Collins
发明人： John Lloyd Collins
IPC分类号： B23B27/14 , B23P15/28 , C23C16/26 , C23C16/27 , C23C16/511 , C30B29/04 , C23C16/00
CPC分类号： C23C16/274 , C23C16/278 , Y10S427/103 , Y10T407/27 , Y10T428/263 , Y10T428/30
摘要： A CVD diamond layer for use as an insert in an abrasive tool characterized by the following features:(i) the layer contains boron dopant atoms in a concentration of at least 0.05 atomic percent;(ii) an average tensile rupture strength of at least 600 MPa with the nucleation phase in tension, and at least 300 MPa with the growth face in tension, both such tensile rupture strengths being measured by a three point bend test on a sample 18 mm long, 2 mm wide and a thickness of 1.4 mm or smaller.
摘要翻译：用作研磨工具中的插入物的CVD金刚石层，其特征在于具有以下特征：（i）该层含有浓度为至少0.05原子百分比的硼掺杂剂原子; （ii）拉伸成核期的平均拉伸断裂强度至少为600MPa，并且生长面处于拉伸状态时至少为300MPa，这样的拉伸断裂强度通过对样品18mm的三点弯曲试验来测量长，2mm宽，厚度为1.4mm以下。

7. 发明授权

US5643423A Method for producing an abrasion resistant coated substrate product 失效
标题翻译：耐磨耗涂层基材制品的制造方法
公开(公告)号：US5643423A
公开(公告)日：1997-07-01
申请号：US161896
申请日：1993-12-03
申请人： Fred M. Kimock , Bradley J. Knapp , Steven James Finke
发明人： Fred M. Kimock , Bradley J. Knapp , Steven James Finke
IPC分类号： B32B18/00 , B32B17/06 , C03C17/06 , C03C17/34 , C03C17/36 , C23C14/02 , C23C14/06 , C23C14/08 , C23C14/10 , C23C14/18 , C23C16/00 , C23C16/02 , C23C16/26 , C23C16/27 , G02B1/10 , C23C14/00
CPC分类号： C23C14/06 , B32B17/06 , C03C17/06 , C03C17/3417 , C03C17/3435 , C03C17/3441 , C03C17/3452 , C03C17/347 , C03C17/3476 , C03C17/36 , C03C17/3613 , C03C17/3618 , C03C17/3621 , C03C17/3626 , C03C17/3628 , C03C17/3634 , C03C17/3642 , C23C14/02 , C23C14/021 , C23C14/024 , C23C14/025 , C23C14/0605 , C23C14/0629 , C23C14/0635 , C23C14/0641 , C23C14/0647 , C23C14/0676 , C23C14/08 , C23C14/081 , C23C14/082 , C23C14/083 , C23C14/086 , C23C14/10 , C23C14/18 , C23C16/0227 , C23C16/0272 , C23C16/0281 , C23C16/26 , G02B1/105 , C03C2217/734 , C03C2217/78 , Y10S427/103 , Y10S428/913 , Y10T428/24975 , Y10T428/265 , Y10T428/30
摘要： The coated substrate product finds particular application in eyeglass and sunglass lenses, architectural glass, analytical instrument windows, automotive windshields and laser bar code scanners for use in retail stores and supermarkets. The product has greatly improved wear resistance for severe abrasive environments and comprises a substantially optically transparent substrate, a chemically vapor deposited first interlayer bonded to the substrate and a chemically vapor deposited outer layer of substantially optically transparent diamond-like carbon bonded to the interlayer and away from the substrate.
摘要翻译：涂覆的基材产品特别适用于眼镜和太阳镜，建筑玻璃，分析仪器窗，汽车挡风玻璃和激光条码扫描仪，用于零售商店和超市。该产品极大地改善了对于严酷磨料环境的耐磨性，并且包括基本上光学透明的基底，结合到基底的化学气相沉积的第一中间层和结合到中间层和离开的基本上光学透明的类金刚石碳的化学气相沉积外层从底物。

8. 发明授权

US5638251A Capacitive thin films using diamond-like nanocomposite materials 失效
标题翻译：使用类金刚石纳米复合材料的电容薄膜
公开(公告)号：US5638251A
公开(公告)日：1997-06-10
申请号：US538475
申请日：1995-10-03
申请人： Arvind Goel , Donald J. Bray , Steven C. Martin , Keith A. Blakely
发明人： Arvind Goel , Donald J. Bray , Steven C. Martin , Keith A. Blakely
IPC分类号： H01G4/33 , H01B5/16 , H01G4/08 , H01G4/30 , H01G4/06
CPC分类号： H01G4/08 , Y10S427/103 , Y10T29/435
摘要： A method of making capacitors comprising, providing as the dielectric and/or conductive layers, a material made from a diamond-like nanocomposite solid-state material having interpenetrating atomic scale networks of carbon in a diamond-like carbon network stabilized by hydrogen, a glass-like silicon network stabilized by oxygen, and optionally at least one additional network of dopant elements or dopant compounds having elements from Groups 1-7b and 8 of the periodic table.
摘要翻译：一种制造电容器的方法，包括：提供由金刚石纳米复合材料固体材料制成的材料作为电介质层和/或导电层，所述材料具有通过氢稳定的类金刚石碳网络中的碳互穿原子尺度网络，玻璃由硅稳定的硅网络，以及可选地至少一种具有元素周期表1-7b和8族元素的掺杂元素或掺杂剂化合物的附加网络。

9. 发明授权

US5604037A Diamond/carbon/carbon composite useful as an integral dielectric heat sink 失效
标题翻译：金刚石/碳/碳复合材料可用作整体电介质散热片
公开(公告)号：US5604037A
公开(公告)日：1997-02-18
申请号：US332903
申请日：1994-11-01
申请人： Jyh-Ming Ting , Max L. Lake
发明人： Jyh-Ming Ting , Max L. Lake
IPC分类号： C04B35/80 , C04B35/83 , C04B37/00 , C04B41/50 , C04B41/85 , C04B41/87 , C23C16/27 , H01L23/373 , C23C16/26
CPC分类号： C04B41/009 , C04B35/83 , C04B41/5002 , C04B41/85 , C23C16/27 , H01L23/3732 , H01L2924/0002 , Y10S427/10 , Y10S427/103 , Y10T428/2918 , Y10T428/292 , Y10T428/30 , Y10T428/31678
摘要： A diamond/carbon/carbon composite is provided comprising a carbon/carbon composite having a polycrystalline diamond film deposited thereon. The carbon/carbon composite comprises a preform of interwoven carbon fibers comprising vapor grown carbon fibers. The preferred method of producing the composite involves chemical vapor infiltration of the pyrolytic carbon into the interstices of the preform, followed by microwave plasma enhanced chemical vapor deposition of the diamond film on the carbon/carbon composite. The resulting diamond/carbon/carbon composite is useful as an integral dielectric heat sink for electronic systems in spacecraft, aircraft and supercomputers due to its thermal management properties. Such a heat sink can be made by depositing metallic circuits on the diamond layer of the diamond/carbon/carbon composite.
摘要翻译：提供了包含沉积在其上的多晶金刚石膜的碳/碳复合物的金刚石/碳/碳复合材料。碳/碳复合材料包括包含气相生长碳纤维的交织碳纤维的预成型体。生产复合材料的优选方法包括将热解碳化学气相渗透到预成型体的空隙中，随后微波等离子体增强化学气相沉积在碳/碳复合材料上。由于其热管理性质，所得的金刚石/碳/碳复合材料可用作航天器，飞机和超级计算机中的电子系统的整体电介质散热器。这样的散热器可以通过在金刚石/碳/碳复合材料的金刚石层上沉积金属电路而制成。

10. 发明授权

US5512330A Parylene precursors for diamond-like carbon coatings 失效
标题翻译：类金刚石碳涂层的聚对二甲苯前体
公开(公告)号：US5512330A
公开(公告)日：1996-04-30
申请号：US317896
申请日：1994-10-04
申请人： Geoffrey Dearnaley
发明人： Geoffrey Dearnaley
IPC分类号： B05D7/24 , C23C16/26 , C23C16/56 , C23C14/12 , B05D3/06
CPC分类号： B05D1/60 , C23C16/26 , C23C16/56 , Y10S427/103
摘要： The present invention provides a new class of precursors for forming an improved diamond-like carbon coating on a workpiece. The precursors of the present invention are paraxylylenes, preferably dimers of paraxylylene, which are solid at room temperature and which will vaporize, pyrolize to substantially monomeric form, condense onto a workpiece, and spontaneously polymerize to form a "parylene" film which is free of precursor droplets and absorbed water. Upon bombardment with an ion beam, the parylene film is converted into a uniform, pinhole-free DLC coating.
摘要翻译：本发明提供了用于在工件上形成改进的类金刚石碳涂层的新类型的前体。本发明的前体是对二甲苯，优选对二甲苯的二聚体，其在室温下是固体，并且将蒸发，热解至基本上单体形式，冷凝到工件上，并自发聚合以形成不含前体液滴和吸收的水。当用离子束轰击时，将聚对二甲苯膜转变成均匀的无针孔DLC涂层。

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