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    • 7. 发明申请
    • Metal-Coated Polyimide Resin Substrate with Excellent Thermal Aging Resistance Properties
    • 金属涂层聚酰亚胺树脂基材具有优异的耐热老化性能
    • US20110318602A1
    • 2011-12-29
    • US13148708
    • 2010-02-17
    • Taku Yoshida
    • Taku Yoshida
    • B32B27/06B32B33/00
    • H05K3/388C23C18/1651C23C18/2006C23C18/204C23C18/24C25D5/56H05K1/0346H05K3/181H05K3/381H05K2201/0154H05K2201/0344H05K2201/2063Y10T428/12535Y10T428/31721
    • [Object] To provide a metal-coated polyimide resin substrate that does not deteriorate the initial adhesion between the metal-coated polyimide resin film and the metal layer and has high adhesion after aging at 150° C. for 168 hours.[Solution] A metal-coated polyimide resin substrate in which a barrier layer is formed by a wet process after performing surface modification to one surface or both surfaces of a polyimide resin film by a wet process or a dry process or a combination thereof, a seed layer is thereafter formed by a wet process or a dry process, and a conductive film is formed on a surface layer thereof by a wet process; wherein, at the peeling surface on the conductive film layer side after the metal-coated polyimide resin substrate is subject to a 90-degree peel test, the thickness of a mixed layer of polyimide residue and barrier metal layer residue according to in-depth profiling with a time-of-flight secondary ion mass spectrometer (TOF-SIMS) is 2.60 nm or less based on Si sputter rate conversion, and peel strength retention after an aging test at 150° C. for 168 hours (peel strength after aging at 150° C. for 168 hours/initial peel strength) is 50% or higher.
    • 本发明提供一种金属包覆的聚酰亚胺树脂基板,其不会使金属包覆的聚酰亚胺树脂膜与金属层之间的初始粘合性劣化,并且在150℃下老化168小时后具有高粘附性。 [方案]一种金属涂覆的聚酰亚胺树脂基板,其中通过湿法或干法或其组合对聚酰亚胺树脂膜的一个表面或两个表面进行表面改性之后通过湿法形成阻挡层, 然后通过湿法或干法形成种子层,并通过湿法在其表面层上形成导电膜; 其中,在金属涂覆的聚酰亚胺树脂基板进行90度剥离试验之后的导电膜层侧的剥离面上,根据深度图案,聚酰亚胺残留物和阻隔金属层残留物的混合层的厚度 使用飞行时间次级离子质谱仪(TOF-SIMS),基于Si溅射速率转换为2.60nm以下,150℃下老化试验后的剥离强度保持168小时(老化后的剥离强度 150℃,168小时/初始剥离强度)为50%以上。